- Flow Controllers & Meters
- MC–Series: Gas Mass Flow Controllers
MC–Series: Gas Mass Flow Controllers
- Full-scale flow rates between 0.5 SCCM and 5000 SLPM for all gases (10,000 SLPM for H2)
- Monitor four variables: mass flow, volumetric flow, pressure, and temperature
- Control one of three variables: mass flow, volumetric flow, or pressure
- 98+ gas calibrations preloaded and user-selectable
- Local, analog, or digital control, including industrial protocols
Beloved by metrology departments, cherished by researchers, and depended on by systems engineers – the MC-Series does more, and does it faster.
Performance (most ranges)
- Steady state control range: 0.01% – 100% of full scale
- NIST-traceable calibration
- Standard accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- High accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: ±(0.1% of reading + 0.02% of full scale)
- Typical control response time: as fast as 30 ms
- Warm-up time: <1 s
Specification sheets (by full-scale flow rate):
- Compatible gases: 98+ pure and mixed non-corrosive gases
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA (11 barA)
All MC-Series Specifications (by full-scale ranges)
Do you have unique requirements? That’s our specialty.
Build and performance options
- Communication protocol: Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc), RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS, PROFINET
- Display: Backlit monochrome or TFT color; integrated or panel–mount
- Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, or VCO fittings
- Elastomers: Viton, FFKM, EPDM, Silicone
- Calibration: Standard, high-accuracy; custom calibration points
- Ingress Protection: IP40, IP66, IP67
- Hazardous Environment Rating: CSA Class 1 Div 2, ATEX Class 1 Zone 2
Included with all MC-Series
- Setpoint ramping and limits: Control your process as fast or slow as desired with ramp rates. Protect your process from inadvertent setpoint changes with setpoint limits.
- Valve close and valve open override: Quickly stop all flow or vent your system as needed with alarms.
- Totalizers and batch control: Track total flow every 1 ms or dispense precise volumes with our integrated totalizers.
Included with purchase
- FlowVision software
- Process port fittings and filters
- Power supplies
- Communications cables and conversion cables
- BB3 and BB9 multi-drop breakout boxes
Need Devices Now?
Explore More at Alicat
- MCQ-Series | High operating pressures (320 PSIA)
- MCW-Series | Low pressure drops (0.07 PSID)
- MCS-Series | Corrosive gases (128+ gases, including 32 corrosives)
- CODA Coriolis | Fluids of unknown or changing composition; Pressures up to 4000 PSIA
Not sure which mass flow controller is the best for you?