MC–Series: Gas Mass Flow Controllers

  • Full-scale flow rates between 0.5 SCCM and 5000 SLPM for all gases (10,000 SLPM for H2)
  • Monitor four variables: mass flow, volumetric flow, pressure, and temperature
  • Control one of three variables: mass flow, volumetric flow, or pressure
  • 98+ gas calibrations preloaded and user-selectable
  • Local, analog, or digital control, including industrial protocols

Beloved by metrology departments, cherished by researchers, and depended on by systems engineers – the MC-Series does more, and does it faster.

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Performance (most ranges)

  • Steady state control range: 0.01% – 100% of full scale
  • NIST-traceable calibration
    • Standard accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
    • High accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
  • Repeatability: ±(0.1% of reading + 0.02% of full scale)
  • Typical control response time: as fast as 30 ms
  • Warm-up time: <1 s

Specification sheets (by full-scale flow rate):

0.5 – 5 SCCM 10 SCCM – 20 SLPM 50 – 5000 SLPM 10,000 SLPM for H2

Operating conditions

  • Compatible gases: 98+ pure and mixed non-corrosive gases
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA (11 barA)

All MC-Series Specifications (by full-scale ranges)

Customization Options

Do you have unique requirements? That’s our specialty.  

Build and performance options

  • Communication protocol: Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc), RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS, PROFINET
  • Display: Backlit monochrome or TFT color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, or VCO fittings
  • Elastomers: Viton, FFKM, EPDM, Silicone
  • Calibration: Standard, high-accuracy; custom calibration points
  • Ingress Protection: IP40, IP66, IP67
  • Hazardous Environment Rating: CSA Class 1 Div 2, ATEX Class 1 Zone 2

Included with all MC-Series

  • Setpoint ramping and limits: Control your process as fast or slow as desired with ramp rates. Protect your process from inadvertent setpoint changes with setpoint limits.
  • Valve close and valve open override: Quickly stop all flow or vent your system as needed with alarms.
  • Totalizers and batch control: Track total flow every 1 ms or dispense precise volumes with our integrated totalizers.

Valve options

Optimal performance for your unique process

Your controller may be built with one of the following valve options to maximize performance under expected process conditions.

  • MC: small proportional control valve for flow ranges of 20 SLPM and below
  • MC with PCA designation: high-performance proportional control valve used for some applications with higher pressures
  • MCP: small proportional control valve with the largest orifice (not available for corrosive configurations)
  • MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
  • MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

  • MCT: easily switch flow control between two different flow paths
Photo of Alicat MCT-Series stream switching gas mass flow controller

MCT: easily switch flow control between two different flow paths

Custom PID valve tuning offered for maximum performance in your process conditions.



Included with purchase

Sold separately

  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes


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5-day lead time options

Select MC-Series products ship within 5 business days with our exclusive FastTrack production schedule. MC-Series eligible for FastTrack include:

  • Range: 2 SCCM full scale through 100 SLPM full scale
  • Valves: Standard options only. Please check with an Applications Engineer to determine if you need a specialized valve.
  • Calibration: Standard or high accuracy
  • Display options: Backlit monochrome or color; no display
  • Communication protocols: Analog, RS–232, RS–485, Modbus RTU
  • Electrical connectors: MD8, locking industrial, DB9M, DB15
  • Fittings: NPT


Explore More at Alicat

  • MCQ-Series | High operating pressures (320 PSIA)
  • MCW-Series | Low pressure drops (0.07 PSID)
  • MCS-Series | Corrosive gases (128+ gases, including 32 corrosives)
  • CODA Coriolis | Fluids of unknown or changing composition; Pressures up to 4000 PSIA

Not sure which mass flow controller is the best for you?

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