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MC Series Controllers

Mass Flow Controllers with Laminar Differential Pressure (DP) Technology

Mass flow controller products from Alicat

Our most versatile gas flow controllers for most industrial processes and research applications.

  • Laminar DP (differential pressure) mass flow measurement technology
  • 98-130 pre-loaded gas calibrations — switch without losing accuracy
  • Measures mass flow, volumetric flow, temperature, and pressure
  • Ultra–fast control response time as low as 30 ms
  • As high as 0.01 – 100% measurement and control range (10,000:1 turndown)
  • Limited Lifetime Warranty
Full Scale Flow Ranges

0.5 SCCM – 12,000 SLPM

OPERATING PRESSURE RANGE

11.5 – 160 PSIA

Laminar DP mass flow controller products from Alicat
Alicat Mass Flow Controller MC-Series

MC Series Controller

Alicat’s flagship controller

fast proportional control
  • 0.5 SCCM full scale – 12,000 SLPM full scale options
  • 11.5 – 160 PSIA operating
  • Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
  • 0.01% – 100% control range (10,000:1 turndown)
  • As fast as 30 ms control response
Alicat corrosion resistant Mass Flow Controller

MCS Series Controller

Corrosion resistant flow control

Reduced Wetted Materials

  • Up to 130 corrosive and non‑corrosive gas calibrations preloaded
  • 0.5 SCCM full scale – 12,000 SLPM full scale options
  • Accuracy as good as ± 0.4% of reading and ± 0.2% of full scale
  • 1 – 100% of full scale control range
  • As fast as 30 ms control response
Alicat Mass Flow Controller MCQ Series is corrosion resistant

MCQ Series Controller

Control gas flow at higher pressures

Highest pressure rating
  • 10 SCCM full scale – 12,000 SLPM full scale options
  • 11.5 – 320 PSIA operating
  • Accuracy as good as ± 0.6% of reading or ± 0.1% of full scale, whichever is greater
  • 0.5% – 100% of full scale control (200:1 turndown)
  • 100 ms control response
Laminar DP MFC made for bioreactors and fermenters.

BIOC Series Controller

Control gases into bioreactors + fermenters

ASME BPE compliant
  • Long‑term stability
  • Robust, compliant materials including USP Class VI or USPVI elastomers
  • Designed for scalability (10,000:1 operating range)
Bi-directional mass flow controller

MCD Series Controller

Control flow in two directions

BIDIRECTIONAL FLOW CONTROL
  • 0.5 SCCM full scale – 3,000 SLPM full scale options
  • 11.5 – 160 PSIA operating
  • Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
  • Reference specs for MC, corrosion-resistant MCS, low pressure drop MCW, or high pressure MCQ. Performance is the same, but dimensions will change with addition of valve.
MFC for switching between 2 gas sources

MCT Series Controller

Switch between two gas streams

TWO SOURCES, ONE DEVICE

  • 98 gases
  • 0.5 SCCM full scale – 3,000 SLPM full scale options
  • 11.5 – 160 PSIA operating
  • Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
  • Reference specs for MC, corrosion-resistant MCS, low pressure drop MCW, or high pressure MCQ. Performance is the same, but dimensions will change with addition of valve.

Available Variants

MCW / MCWD Series Controller

Low pressure drop laminar DP MFCs

SFF / MCV Series Controller

Control gas at vacuum pressures, SEMI footprint options

IS-Max Series Controller

Intrinsically safe MFC for explosive atmospheres

Build Options

Communication Protocols
RS-232 Serial (default)
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
IO-Link
Ingress Protection
Hazardous Environment Ratings
CSA Class 1 Div 2, ATEX Class 1 Zone 2; uses Legacy – 8v firmware (2020) manual
For explosive environments, see the IS-Max Series controllers.
Humid Gases
Relative humidity compensation
Measurement Technology
Laminar differential pressure (laminar DP) flow sensing with temperature and pressure correction.

FastTrack Flow & Pressure Devices

Alicat instruments built and shipped just 3 – 5 business days from your order.
CALIBRATION
Standard or High Accuracy
DISPLAY
Monochrome, Color, or None
PROTOCOL
Analog, RS-232, RS-485, Modbus RTU, PROFIBUS, EtherNet/IP, EtherCAT®, MODBUS TCP/IP, or PROFINET
CONNECTOR
MD8, Locking Industrial, DB9M, DB15
FITTINGS
NPT

FLOW METER RANGES

2 SCCM – 1,000 SLPM

FLOW CONTROLLER RANGES

2 SCCM – 1,000 SLPM
PRESSURE METER RANGES
1 – 100 PSI
SINGLE AND DUAL VALVE PRESSURE CONTROLLER RANGES
1 – 100 PSI

Do FastTrack instruments meet your requirements?

Ready for the final details?

Each product is made-to-order.  Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.

Downloads

Manuals

Brochures

Software & utilities

Top Level Part Numbers

Hidden Item So All Items Are Closed on Page Load
MC Controllers

MC-0.5SCCM
MC-1SCCM
MC-2SCCM
MC-5SCCM
MC-10SCCM
MC-20SCCM
MC-50SCCM
MC-80SCCM
MC-100SCCM
MC-200SCCM
MC-500SCCM

MC-1SLPM
MC-2SLPM
MC-5SLPM
MC-10SLPM
MC-20SLPM
MC-25SLPM
MC-30SLPM
MC-50SLPM
MC-100SLPM
MC-150SLPM
MC-200SLPM
MC-250SLPM

MC3-200SCCM
MC3-500SCCM

MC3-1SLPM
MC3-2SLPM
MC3-10SLPM

MCB-10SCCM

MCE-0.5SCCM
MCE-1SCCM
MCE-2SCCM
MCE-5SCCM
MCE-10SCCM
MCE-20SCCM
MCE-50SCCM
MCE-100SCCM
MCE-200SCCM
MCE-500SCCM

MCE-1SLPM
MCE-2SLPM
MCE-5SLPM
MCE-10SLPM
MCE-20SLPM
MCE-30SLPM

MCH-200SCCM
MCH-500SCCM

MCH-1SLPM
MCH-5SLPM
MCH-10SLPM
MCH-20SLPM
MCH-50SLPM
MCH-100SLPM
MCH-250SLPM
MCH-500SLPM

MCP-10SLPM
MCP-20SLPM
MCP-50SLPM
MCP-100SLPM
MCP-250SLPM
MCP-500SLPM

MCPH-50SLPM
MCPH-100SLPM
MCPH-250SLPM
MCPH-500SLPM
MCPH-1000SLPM

MCR-5SLPM
MCR-20SLPM
MCR-50SLPM
MCR-100SLPM
MCR-250SLPM
MCR-500SLPM
MCR-1000SLPM
MCR-1500SLPM
MCR-2000SLPM
MCR-3000SLPM
MCR-5000SLPM
MCR-10000SLPM

MCR3-250SLPM
MCR3-500SLPM

MCRB-100SLPM

MCRH-2000SLPM
MCRH-3000SLPM
MCRH-5000SLPM

MCRHM-5000SLPM

MCRM-50SLPM
MCRM-100SLPM
MCRM-250SLPM
MCRM-500SLPM
MCRM-1000SLPM
MCRM-2000SLPM
MCRM-3000SLPM
MCRM-10000SLPM

MCRN-100SLPM

MCRO-50LPM
MCRO-200LPM
MCRO-250LPM
MCRO-1000LPM

MCRO-250SLPM
MCRO-1000SLPM

MCS Controllers

MCS-500CCM

MCS-0.5SCCM
MCS-1SCCM
MCS-2SCCM
MCS-5SCCM
MCS-10SCCM
MCS-20SCCM
MCS-50SCCM
MCS-100SCCM
MCS-200SCCM
MCS-500SCCM

MCS-1SLPM
MCS-2SLPM
MCS-5SLPM
MCS-10SLPM
MCS-20SLPM
MCS-30SLPM
MCS-50SLPM
MCS-100SLPM
MCS-250SLPM

MC3S-200SCCM

MC3S-20SLPM

MCHS-10SLPM
MCHS-20SLPM
MCHS-50SLPM
MCHS-100SLPM
MCHS-250SLPM

MCPS-20SLPM
MCPS-50SLPM
MCPS-100SLPM

MCRHS-3000SLPM
MCRHS-5000SLPM

MCRS-10SLPM
MCRS-20SLPM
MCRS-25SLPM
MCRS-50SLPM
MCRS-100SLPM
MCRS-250SLPM
MCRS-500SLPM
MCRS-1000SLPM
MCRS-1500SLPM
MCRS-2000SLPM
MCRS-3000SLPM
MCRS-10000SLPM

MCQ Controllers

MCQ-0.5SCCM
MCQ-5SCCM
MCQ-10SCCM
MCQ-20SCCM
MCQ-50SCCM
MCQ-100SCCM
MCQ-200SCCM
MCQ-500SCCM

MCQ-1SLPM
MCQ-2SLPM
MCQ-5SLPM
MCQ-10SLPM
MCQ-20SLPM
MCQ-50SLPM
MCQ-100SLPM

MCHQ-500SCCM

MCHQ-5SLPM
MCHQ-10SLPM
MCHQ-20SLPM
MCHQ-50SLPM
MCHQ-250SLPM

MCQ3-500SCCM

MCQH-20SLPM
MCQH-50SLPM

MCQS-5SCCM
MCQS-100SCCM
MCQS-500SCCM

MCQS-1SLPM
MCQS-10SLPM
MCQS-50SLPM

MCRHQ-2000SLPM
MCRHQ-3000SLPM
MCRHQ-5000SLPM

MCRQ-10SLPM
MCRQ-20SLPM
MCRQ-50SLPM
MCRQ-100SLPM
MCRQ-250SLPM
MCRQ-500SLPM
MCRQ-1000SLPM
MCRQ-1500SLPM
MCRQ-2000SLPM
MCRQ-3000SLPM
MCRQ-5000SLPM
MCRQ-10000SLPM

MCRQS-100SLPM
MCRQS-250SLPM
MCRQS-1000SLPM

MCD Controllers

MCD-0.5SCCM
MCD-5SCCM
MCD-20SCCM
MCD-50SCCM
MCD-100SCCM
MCD-200SCCM
MCD-500SCCM

MCD-1SLPM
MCD-2SLPM
MCD-5SLPM
MCD-10SLPM
MCD-20SLPM

MCDPR-100SLPM

MCDQ-10SCCM
MCDQ-20SCCM
MCDQ-500SCCM

MCDQ-5SLPM
MCDQ-20SLPM

MCDS-5SLPM

MCHDQ-10SLPM

MCPD-20SLPM
MCPD-50SLPM
MCPD-100SLPM
MCPD-250SLPM

MCPPHD-50SLPM
MCPPHD-250SLPM

MCPRD-100SLPM

MCRD-50SLPM
MCRD-100SLPM
MCRD-250SLPM
MCRD-500SLPM
MCRD-2000SLPM
MCRD-3000SLPM

MCRDQ-50SLPM
MCRDQ-500SLPM
MCRDQ-1000SLPM
MCRDQ-2000SLPM

MCRDS-2000SLPM

MCT Controllers

MCT-10SCCM
MCT-50SCCM
MCT-100SCCM
MCT-200SCCM
MCT-500SCCM

MCT-1SLPM
MCT-2SLPM
MCT-3SLPM
MCT-5SLPM
MCT-10SLPM
MCT-15SLPM
MCT-20SLPM
MCT-100SLPM
MCT-500SLPM

MCPT-20SLPM
MCPT-50SLPM
MCPT-100SLPM

MCPT4H-250SLPM

MCRT-250SLPM

MCST-2SLPM
MCST-10SLPM

MCT4-500SCCM

MCT4-5SLPM
MCT4-20SLPM

MCTS-200SCCM
MCTS-500SCCM

MCTS-1SLPM
MCTS-2SLPM
MCTS-5SLPM
MCTS-10SLPM

Ask an engineer

Your flow rate, pressure, and choice of gas can all affect which Alicat instruments work for your application.

Our Applications Engineers can answer your questions and help you find the best option.

Service and Support

Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade, you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.

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+1 (888) 290-6060

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