Mass Flow Controllers & Meters

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MCQ–Series: High Pressure Gas Mass Flow Controllers

MCQ-Series High Pressure Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for operating pressures up to 320 PSIA.
  • Versatile & accurate. Real-time control of flows up to 320 PSIA with NIST-traceable accuracy to ±0.6% of reading or ±0.1% of full scale for 98+ gases, including custom-defined mixtures.
  • Fast control, multivariate data. Millisecond-response times immediately upon powering up, to control either mass flow, volumetric flow, or pressure and display instantaneous flow, pressure, and temperature readings, in your choice of engineering units.
  • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

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Accessories included with purchase

Device specs and customization options

Quick Specs
MCQ-Series performance (most products)
  • Available ranges: max 0–3000 SLPM, min 0–10 SCCM
  • Steady state control range: 0.5% – 100% of full scale
  • Standard accuracy calibration, NIST–traceable: ±0.6% of reading or ±0.1% of full scale
  • Repeatability: ±0.1% of full scale
  • Typical control response time: as low as 100 ms
  • Warm-up time: <1 s
MCQ-Series operating conditions
  • Compatible gases: 98 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 320 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 400 PSIA
  • Reference conditions: user-selectable; defaults: 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Device Ranges & Full Specs

Alicat offers high pressure controllers with custom flow ranges from 10 SCCM full scale to 3000 SLPM full scale, each with a control range of 0.5% to 100% of full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

Devices are custom ranged from 10 SCCM full scale to 3,000 SLPM full scale with controllable ranges of 0.5% to 100% of full scale.

Device Customization & Accessories

Device customization | Build and performance options

  • Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: monochrome or color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
  • Elastomers: Viton, FFKM, EPDM, Silicone
  • Calibration: Custom
  • Performance: Flow totalizer; integrated potentiometer control

Valve sizing and PID tuning | Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MCQ: small proportional control valve for flow ranges of 20 SLPM and below
  • MCQ with PCA designation: high-performance proportional control valve used for higher supply pressures
  • MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
  • MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Accessories | Sold separately

  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

Not exactly what you’re looking for?

  • Explore other gas mass flow controller options, including low pressure drop and anti-corrosive devices.
  • Check out our other flow or pressure control and measurement solutions.
  • Our expert team of applications engineers is available to provide additional information, discuss your application, or answer answer any questions you may have.

Contact an applications engineer

Questions about this product?