Mass Flow Controllers & Meters

model

MCQ–High Pressure Gas Mass Flow Controllers

Responsive gas flow control for high-pressure applications

The MCQ flow controller delivers the fast control response of our standard controller to applications that require higher line pressures (160-320 psia). This high-pressure mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.

  • Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
  • Connected. Easy integration into your digital industrial network with Ethernet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
  • Durable. MCQ series flow controllers can temporarily flow liquids without getting destroyed. For environmental hardiness, we can build your MFC with IP66 ingress protection.

Performance

  • Available ranges: max 0-5000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
  • Turndown ratio: 50:1
  • Calibration accuracy, NIST-traceable: +/- 2% of the full-scale range
  • Repeatability: 0.2% of the full-scale range
  • Typical control response time constant: 50-100 ms
  • No warm-up time required

Operating Conditions

  • Compatible gases: 98 (MC) or 130 (MCS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
  • Operating temperature: -10°C to +60°C
  • Max internal pressure (static): 305 psig (320 psia)
  • Proof pressure: 400 psig (415 psia)
  • STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

Model Variations

  • Aggressive gases (MCQS, see below)

Also available:

  • Standard configuration, up to 160 psia (MC)
  • Low pressure drop, max 60 psia (MCW)

Valve Options 

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MCQ – small proportional control valve for flow ranges of 20 slpm and below
  • MCQ with PCA designation – high-performance proportional control valve used for higher pressures
  • MCH – hammerhead configuration, which pairs two small valves working side-by-side as one valve
  • MCR – nearly frictionless large Rolamite proportional valve for flow rates of 50 slpm and above

Corrosive Gases (MCQS series)

Instruments in the standard MCQ series are also available with an optional “S” configuration (MCQS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM. Some corrosive gases require 316L stainless steel throughout the flow path, and in this case we can upgrade both the valve (type PCA) and flow body to 316L for full-scale flow ranges of 20 slpm or less.

Build Options

  • Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
  • Displays (monochrome or color, integrated or panel-mount)
  • Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
  • Elastomers (Viton, FFKM, EPDM, Silicone)

Alicat’s MCQ series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.

MCQ-10SCCM-D
MCQ-20SCCM-D
MCQ-50SCCM-D
MCQ-100SCCM-D
MCQ-200SCCM-D
MCQ-500SCCM-D
MCQ-1SLPM-D
MCQ-2SLPM-D
MCQ-5SLPM-D
MCQ-10SLPM-D
MCQ-20SLPM-D

Alicat’s MCHQ series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.

MCHQ-10SLPM-D
MCHQ-20SLPM-D
MCHQ-50SLPM-D
MCHQ-100SLPM-D
MCHQ-250SLPM-D

Alicat’s MCRQ series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.

MCRQ-50SLPM-D
MCRQ-100SLPM-D
MCRQ-250SLPM-D
MCRQ-500SLPM-D
MCRQ-1000SLPM-D
MCRQ-1500SLPM-D
MCRQ-2000SLPM-D-PAR
MCRQ-3000SLPM-D-PAR
MCRHQ-5000SLPM-D-PAR

Alicat’s MCQS series uses small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.

MCQS-10SCCM-D
MCQS-20SCCM-D
MCQS-50SCCM-D
MCQS-100SCCM-D
MCQS-200SCCM-D
MCQS-500SCCM-D
MCQS-1SLPM-D
MCQS-2SLPM-D
MCQS-5SLPM-D
MCQS-10SLPM-D
MCQS-20SLPM-D

Alicat’s MCHQS series is suitable for use with corrosive gases and pairs two valves working side-by-side as one to provide greater control at higher pressures.

MCHQS-10SLPM-D
MCHQS-20SLPM-D
MCHQS-50SLPM-D
MCHQS-100SLPM-D
MCHQS-250SLPM-D

Alicat’s MCRQS series is suitable for use with corrosive gases and uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates.

MCRQS-50SLPM-D
MCRQS-100SLPM-D
MCRQS-250SLPM-D
MCRQS-500SLPM-D
MCRQS-1000SLPM-D
MCRQS-1500SLPM-D
MCRQS-2000SLPM-D-PAR
MCRQS-3000SLPM-D-PAR
MCRHQS-5000SLPM-D-PAR

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