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Mass Flow Controllers & Meters

model

MCQ–Series: High-Pressure Gas Mass Flow Controllers

Responsive gas flow control for high-pressure applications.

 

Order Directly from Alicat

 

The MCQ-Series flow controller delivers the fast control response of our standard controller to applications that require higher line pressures (160-320 psia). This high-pressure mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.

  • Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
  • Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
  • Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.

Performance

  • Available ranges: max 0-3000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
  • Steady state control range: 0.5% – 100% of full scale.
  • Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)
  • Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)
  • Repeatability: +/- 0.1% of full scale on most products
  • Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
  • No warm-up time required

Operating Conditions

  • Compatible gases: 98 pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
  • Operating temperature: -10°C to +60°C
  • Max internal pressure (static): 320 psia
  • Proof pressure: 400 psia
  • STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

Model Variations

  • Standard configuration, up to 160 psia (MC)
  • Low pressure drop, max 60 psia (MCW)
  • Anti-corrosive, max 160 psia (MCS)

Valve Options 

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MCQ – small proportional control valve for flow ranges of 20 slpm and below
  • MCQ with PCA designation – high-performance proportional control valve used for higher supply pressures
  • MCH – hammerhead configuration, which pairs two small valves working side-by-side as one valve
  • MCR – nearly frictionless large Rolamite proportional valve for flow rates of 50 slpm and above

Build Options

  • Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
  • Displays (monochrome or color, integrated or panel-mount)
  • Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
  • Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Alicat’s MCQ-Series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.

MCQ-10SCCM-D
MCQ-20SCCM-D
MCQ-50SCCM-D
MCQ-100SCCM-D
MCQ-200SCCM-D
MCQ-500SCCM-D
MCQ-1SLPM-D
MCQ-2SLPM-D
MCQ-5SLPM-D
MCQ-10SLPM-D
MCQ-20SLPM-D

Alicat’s MCHQ-Series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.

MCHQ-10SLPM-D
MCHQ-20SLPM-D
MCHQ-50SLPM-D
MCHQ-100SLPM-D
MCHQ-250SLPM-D

Alicat’s MCRQ-Series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.

MCRQ-50SLPM-D
MCRQ-100SLPM-D
MCRQ-250SLPM-D
MCRQ-500SLPM-D
MCRQ-1000SLPM-D
MCRQ-2000SLPM-D-PAR
MCRQ-3000SLPM-D-PAR

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