Thin Film Deposition

Optimize thin film deposition for high throughput and quality

Creating consistent coatings depends on rapid, accurate gas delivery within vacuum coating systems. This is essential for thin film processes ranging from synthetic diamond manufacturing to photovoltaic coating applications.

Product guides

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Mass flow controllers for sub‑atmospheric flow systems

Alicat^® has a range of custom solutions specifically designed to upgrade existing vacuum setups.

No warm-up time. Deposition cycles can begin immediately after turning on flow devices.
Millisecond response time. Flow and pressure controllers immediately respond to process condition changes, maximizing uniformity and minimizing waste.
Multi-gas compatibility. A single device can flow any of the gases needed in the deposition process, with high accuracy.

Applications and use cases

Thin film deposition techniques

Explore two widely used deposition categories, chemical vapor deposition (CVD) and physical vapor deposition (PVD), and highlight their techniques and applications.

Learn more about how Alicat’s MCE or MCV Series mass flow controllers enable the production of coatings across a variety of deposition setups $

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Increasing vacuum deposition speed and stability with upstream pressure control

Thin film vacuum coating with pressure controllers

Placing pressure control devices upstream of the chamber in vacuum coating applications saves time and cost, and increases accuracy in vacuum deposition tools.

Learn why Alicat applications engineers will always recommend upstream pressure control for thin film deposition applications $

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Transition from manual and mechanical controls to electronic precision and automation

Explore the two most common methods of physical vapor deposition used to apply PVD coatings, thermal evaporation and sputtering deposition.

Learn more about upgrading your deposition setup to produce high quality, repeatable PVD coatings $

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Thin film deposition for you

Alicat Scientific’s co-operative development approach and robust manufacturing capabilities assure you of high-quality OEM outcomes. We have decades of custom solution engineering.

Bespoke manifolds and specialized interface plates; a near-exhaustive list of communication options make our instruments compatible with most installed automation processes
Ongoing support from our cross functional team of engineers for every step from prototyping to manufacturing
Post-sale resources, repairs, and accessories to help you maintain and refine your product

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