Mass Flow Controllers & Meters

Overview

View our selection of mass flow meters and controllers.

CODA Coriolis Mass Flow Meters and Controllers

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Coriolis Mass Flow Meters and Controllers

Use CODA Coriolis mass flow meters and controllers for high accuracy measurement and control under extreme operating conditions. CODA instruments are compatible with a wide range of liquids and gases (including many corrosives), and are accurate for pressures up to 4000 PSIA and flow rates down to 40 g/h.

Check out the model pages for more product details and learn about our many custom build and performance options.

Photo of the Alicat CODA Coriolis device options

Need support?

Below are resources to make finding the right solution for your application easier. If you need additional support, please reach out to our applications engineers.

Model comparison: Alicat device guide

Not sure which device will work best for your application? This guide describes our product lines to assist you in choosing the model that best fits your use case.

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Tech comparison: Mass flow meters

Deciding between laminar differential pressure, Coriolis, and thermal flow meter technology? In this article, we discuss 10 important parameters to consider including gas type and flow rate, operating conditions, and device performance.

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How Coriolis technology work

Learn how Coriolis devices measure mass flow directly with no dependence on fluid properties.

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More about Coriolis technology

Check out these articles for additional insight into potential benefits and complications of using a Coriolis in your process.

Contact an applications engineer  View additional resources

Use CODA KM-Series Coriolis Mass Flow Meters for high accuracy measurement under extreme operating conditions. CODA meters are compatible with a wide range of liquids and gases (including many corrosives), and maintain high accuracy for pressures up to 4000 PSIA and flow rates down to 40 g/h.

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CODA Coriolis mass flow meter

KMO–Series of Coriolis Mass Flow Meters are tailored for a broad array of precision ultra-low flow and high-pressure applications including OEM and any applications requiring lower accuracy than the standard CODA series.

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CODA Coriolis mass flow meter

Use CODA KC–Series Coriolis Mass Flow Controllers for high accuracy control under extreme operating conditions. CODA controllers are compatible with a wide range of liquids and gases (including many corrosives), and maintain high accuracy control for pressures up to 4000 PSIA and flow rates down to 40 g/h.

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CODA Coriolis mass flow controller

KCO–Series of Coriolis Mass Flow Controllers are tailored for a broad array of precision ultra-low flow and high-pressure applications including OEM and any applications requiring lower accuracy than the standard CODA series.

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CODA Coriolis mass flow controller

Gas Mass Flow Controllers

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Mass Flow Controllers

Alicat mass flow controllers use either differential pressure or Coriolis technology to precisely control and measure flow rates of over 98 gases, which can be switched without using correction factors or losing accuracy. Custom build options for differential pressure mass flow controllers include anticorrosive materials, devices for flows at high pressure or in environments requiring low pressure drop, and for bidirectional flows. Instruments specifically tailored for bioreactor, vacuum, and OEM applications are available.

Use the tabs above to find more product details & configuration and performance options.

Photo of Alicat mass flow controllers

Need support?

Below are resources to make finding the right solution for your application easier. If you need additional support, please reach out to our applications engineers.

Model comparison: Alicat device guide

Not sure which device will work best for your application? This guide describes our product lines to assist you in choosing the model that best fits your use case.

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How laminar differential pressure technology works

Most Alicat mass flow controllers and meters are multivariate instruments that use laminar differential pressure flow measurement technology to obtain a mass flow rate. Want to learn more?

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How Coriolis technology works

Coriolis devices measure mass flow directly with no dependence on fluid properties. Interested in learning more about how Coriolis technology works?

View additional resources  Contact an applications engineer

MC-Series Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 98+ gases across a very wide flow range – 0.01% to 100% of full scale.

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An Alicat mass flow controller, 50 SCCM full scale, with a digital screen and standard valve, model MC-50SCCM-D, photographed by Alicat

Whisper™ MCW–Series Low Pressure Drop Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure when there is little available system pressure, with pressure drops as low as 0.07 PSID.

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Photo of MCW-Series low pressure drop mass flow controller

MCS-Series Anti-Corrosive Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 130+ gases, including 32+ corrosives.

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Alicat anticorrosive mass flow controller

MCQ-Series High Pressure Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for operating pressures up to 320 PSIA.

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An Alicat mass flow controller, 50 SCCM full scale, with a digital screen and standard valve, model MC-50SCCM-D, photographed by Alicat

CODA KC-Series Coriolis Mass Flow Meters provide high-accuracy gas and liquid flow measurements, even when fluid composition is changing or unknown.

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CODA Coriolis mass flow controller

KMO–Series of Coriolis Mass Flow Controllers are tailored for a broad array of precision ultra-low flow and high-pressure applications including OEM and any applications requiring lower accuracy than the standard CODA series.

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CODA Coriolis mass flow controller

BASIS™ BC–Series OEM Gas Mass Flow Controllers deliver fast and accurate gas flow control in a compact, economical package for high-quantity orders.

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Photo of Alicat Basis BC-Series OEM gas mass flow controller

Bio-Series Controllers are designed and constructed specifically for mass flow control in bioreactors and fermenters, upstream or downstream. They offer the highest reliability in the industry, with communication protocols to integrate with your existing system.

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Photo of Alicat bio-series mass flow controller

MCD-Series Bidirectional Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions while simultaneously measuring flow, pressure, and temperature.

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Whisper™ MCDW–Series Low Pressure Drop Bidirectional Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions when there is very little available system pressure, with pressure drops as low as 0.07 PSID.

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Alicat MCRDW high-flow bidirectional mass flow controller

 

MCDS-Series Anti-Corrosive Bidirectional Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions while simultaneously measuring flow, gas pressure, and gas temperature for 130+ gases, including 32+ corrosives.

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Photo of MCRDS-Series bidirectional anti-corrosive mass flow controller with TFT display

MCT-Series Stream Switching Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure, and are equipped with two valves to allow for easy switching of your gas source or splitting of one source into two separate processes.

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Alicat MCT stream-switching mass flow controller

Use MCE/MCV-Series Vacuum Gas Mass Flow Controllers to update your vacuum deposition fixtures. The MCE–Series includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs, and the MCV–Series is additionally equipped with a pneumatic shut-off valve for hard vacuum applications.

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Photo with Alicat MCE/MCV-Series vacuum gas mass flow controllers

Use MCES/MCVS-Series Anti-Corrosive Vacuum Gas Mass Flow Controllers to update vacuum deposition fixtures in processes using corrosive gases. The MCES–Series includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs, and the MCVS–Series is additionally equipped with a pneumatic shut-off valve for hard vacuum applications.

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Gas Mass Flow Meters

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Mass Flow Meters

Alicat offers a wide range of mass flow meters, including both differential-pressure based and Coriolis technologies. There are many custom build options for our differential-pressure mass flow meters, including anti-corrosive, high-pressure, and low pressure drop options – with portable versions also available for each. Devices specifically tailored for bio and OEM applications are also available.

Check out the model pages for more product details and learn about our many custom build and performance options.

Need support?

Below are resources to make finding the right solution for your application easier. If you need additional support, please reach out to our applications engineers.

Model comparison: Alicat device guide

Not sure which device will work best for your application? This guide describes our product lines to assist you in choosing the model that best fits your use case.

______

Tech comparison: Mass flow meters

Deciding between laminar differential pressure, Coriolis, and thermal flow meter technology? In this article, we discuss 10 important parameters to consider including gas type and flow rate, operating conditions, and device performance.

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Common types of gas flow meters

There are many types of gas flow meters, each utilizing unique measurement technology.

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How laminar differential pressure technology works

Most Alicat mass flow controllers and meters are multivariate instruments that use laminar differential pressure flow measurement technology to obtain a mass flow rate. Want to learn more?

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How Coriolis technology works

Coriolis devices measure mass flow directly with no dependence on fluid properties. Interested in learning more about how Coriolis technology works?

View additional resources  Contact an applications engineer

M–Series Gas Mass flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases across a very wide flow range – 0.01% to 100% of full scale.

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Alicat mass flow meter as part of the peregrine product line

Whisper™ MW–Series Low Pressure Drop Gas Mass Flow Meters measure mass flow and volumetric flow rates when there is little available system pressure, with pressure drops as low as 0.07 PSID.

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MS-Series Anti-Corrosive Gas Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature of 128+ gases, including 32 corrosives.

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Photo of Alicat MS-Series mass flow meter

MQ–Series High Pressure Gas Mass Flow Meters simultaneously measure mass flow and volumetric flow rates for operating pressures up to 320 PSIA.

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Photo of Alicat M-Series mass flow meter with TFT display

CODA KM-Series Coriolis Mass Flow Meters provide high-accuracy gas and liquid flow measurements, even when fluid composition is changing or unknown.

Visit the model page

CODA Coriolis mass flow meter

KMO–Series of Coriolis Mass Flow Meters are tailored for a broad array of precision ultra-low flow and high-pressure applications including OEM and any applications requiring lower accuracy than the standard CODA series.

Visit the model page

CODA Coriolis mass flow meter

Bio-Series Meters are designed and constructed specifically for mass flow measurement in bioreactors and fermenters, upstream or downstream. They offer the highest reliability in the industry, with communication protocols to integrate with your existing system.

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Photo of an Alicat bioprocessing-focused mass flow meter with an EtherCAT data connection and a 1-SLPM full-scale flow rate.

MB–Series Portable Gas Mass Flow Meters measure mass flow and volumetric flow rates anywhere you need for 98+ gases, making them ideal for on-the-go process calibration, verification, and validation.

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Photo of MB-Series portable gas flow meter

MBS-Series Portable Anti-Corrosive Gas Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature of 128+ gases, including 32 corrosives.

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Picture of MBS-Series portable anti-corrosive gas mass flow meter

Whisper™ MWB-Series Portable Low Pressure Drop Gas Mass Flow Meters measure mass flow and volumetric flow rates with pressure drops as low as 0.07 PSID, making them ideal for on-the-go calibration, verification, and validation with minimal system impact.

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Photo of MWB-Series low pressure drop gas mass flow meter

MBQ-Series High Pressure Portable Gas Mass Flow Meters measure mass flow and volumetric flow rates for operating pressures up to 320 PSIA, making them ideal for on-the-go calibration, verification, and validation of high pressure processes.

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Photo of MBQ-Series portable gas flow meter

When a single flow meter won’t cover all of your calibration needs, consider using an Alicat PCU-Series Gas Flow Portable Calibration Unit. Alicat’s PCU is a secondary calibration standard that combines up to 3 high-accuracy flow meters of varied ranges (max 500 SLPM) with totalizers into a rugged industrial carrying case for go-anywhere portability.

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Alicat PCU portable calibration unit

FP-25 Calibrator Kits for Air Quality Monitoring audit particulate matter samplers (PM10 and PM2.5) quickly and conduct quality assurance checks with ease. This comprehensive kit is compatible with all PM air monitors: TEOM, Partisol, Beta Attenuation Monitors (BAM), T640.

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Alicat FP-25 flow calibrating a Thermo Scientific Partisol 2000 FRM air sampler

Portable Gas Mass Flow Calibration Standards

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Portable Gas Mass Flow Calibration Standards

Alicat portable differential pressure based mass flow meters make system checks, calibrations, and audits fast and easy. All portable flow instruments offer laboratory-grade accuracy and multivariate readings that update 1000 times a second.

Check out the model pages for more product details and learn about our many custom build and performance options.

Need support?

Below are resources to make finding the right solution for your application easier. If you need additional support, please reach out to our applications engineers.

Alicat model guide

Not sure which device will work best for your application? This guide describes our product lines to assist you in choosing the model that best fits your use case.

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Device comparison: Portable flow meters

Know you need a portable device, but aren’t sure which one to choose? Check out this article.

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How laminar differential pressure technology works

Most Alicat mass flow controllers and meters are multivariate instruments that use laminar differential pressure flow measurement technology to obtain a mass flow rate. Want to learn more?

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Tech comparison: Clamp-on and Alicat portable meters

When looking for a portable meter, you will likely come across clamp-on technology. Alicat portables operate using an entirely different operating principle and have distinct features and use cases. When should either portable technology be used?

View additional resources  Contact an applications engineer

MB–Series Portable Gas Mass Flow Meters measure mass flow and volumetric flow rates anywhere you need for 98+ gases, making them ideal for on-the-go process calibration, verification, and validation.

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Photo of MBQ-Series portable gas flow meter

 

MBS-Series Portable Anti-Corrosive Gas Mass Flow Meters measure mass flow and volumetric flow rates for 130+ gases, including 32+ corrosives, making them ideal for on-the-go calibration, verification, and validation of processes flowing aggressive gases.

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Picture of MBS-Series portable anti-corrosive gas mass flow meter

Whisper™ MWB-Series Portable Low Pressure Drop Gas Mass Flow Meters measure mass flow and volumetric flow rates with pressure drops as low as 0.07 PSID, making them ideal for on-the-go calibration, verification, and validation with minimal system impact.

Visit the model page

Photo of MWB-Series low pressure drop gas mass flow meter

 

MBQ-Series High Pressure Portable Gas Mass Flow Meters measure mass flow and volumetric flow rates for operating pressures up to 320 PSIA, making them ideal for on-the-go calibration, verification, and validation of high pressure processes.

Visit the model page

Photo of MBQ-Series portable gas flow meter

 

When a single flow meter won’t cover all of your calibration needs, consider using an Alicat PCU-Series Gas Flow Portable Calibration Unit. Alicat’s PCU is a secondary calibration standard that combines up to 3 high-accuracy flow meters of varied ranges (max 500 SLPM) with totalizers into a rugged industrial carrying case for go-anywhere portability.

Visit the model page

Alicat PCU portable calibration unit

FP-25 Calibrator Kits for Air Quality Monitoring audit particulate matter samplers (PM10 and PM2.5) quickly and conduct quality assurance checks with ease. This comprehensive kit is compatible with all PM air monitors: TEOM, Partisol, Beta Attenuation Monitors (BAM), T640.

Visit the model page

Alicat FP-25 flow calibrating a Thermo Scientific Partisol 2000 FRM air sampler

Multidirectional Gas Mass Flow Controllers

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Multidirectional Mass Flow Controllers

Multidirectional mass flow controllers consolidate into one instrument what would otherwise require two or three separate devices. These instruments are able to control mass flow, volumetric flow, or gas pressure in both directions. There are many custom build options for bidirectional controllers, including anti-corrosive and low pressure drop options. Devices specifically tailored to stream switching applications are also available.

Check out the model pages for more product details and learn about our many custom build and performance options.

Need support?

Below are resources to make finding the right solution for your application easier. If you need additional support, please reach out to our applications engineers.

Model comparison: Alicat device guide

Not sure which device will work best for your application? This guide describes our product lines to assist you in choosing the model that best fits your use case.

______

How laminar differential pressure technology works

Most Alicat mass flow controllers and meters are multivariate instruments that use laminar differential pressure flow measurement technology to obtain a mass flow rate. Want to learn more?

View additional resources  Contact an applications engineer

MCD-Series Bidirectional Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions while simultaneously measuring flow, pressure, and temperature.

Visit the model page

Photo of MCD-Series bidirectional mass flow controller

Whisper™ MCDW–Series Low Pressure Drop Bidirectional Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions when there is very little available system pressure, with pressure drops as low as 0.07 PSID.

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Alicat MCRDW high-flow bidirectional mass flow controller

MCDS-Series Anti-Corrosive Bidirectional Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions while simultaneously measuring flow, gas pressure, and gas temperature for 130+ gases, including 32+ corrosives.

Visit the model page

Photo of MCRDS-Series bidirectional anti-corrosive mass flow controller with TFT display

MCT-Series Stream Switching Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure, and are equipped with two valves to allow for easy switching of your gas source or splitting of one source into two separate processes.

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Photo of Alicat MCT-Series stream switching gas mass flow controller

Liquid Flow Meters

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Liquid Flow Meters

Alicat liquid flow meters provide accurate measurement and across a wide range of applications. Our Coriolis mass flow instruments can accurately measure liquid flow rates up to 100 kg/h even when flowing aggressive liquids and mixtures of unknown composition. When flowing water or other common non-corrosive liquids, our laminar liquid flow instruments can provide real-time measurements of process pressure and temperature.

Check out the model pages for more product details and learn about our many custom build and performance options.

Need support?

Below are resources to make finding the right solution for your application easier. If you need additional support, please reach out to our applications engineers.

Model comparison: Alicat device guide

Not sure which device will work best for your application? This guide describes our product lines to assist you in choosing the model that best fits your use case.

______

How Coriolis technology works

Coriolis devices measure mass flow directly with no dependence on fluid properties. Interested in learning more about how Coriolis technology works?

View additional resources  Contact an applications engineer

CODA KM-Series Coriolis Mass Flow Meters provide high-accuracy liquid flow measurements even when fluid composition is changing or unknown.

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L-series Liquid Flow Meters simultaneously measure volumetric flow rate, liquid pressure, and liquid temperature in real time.

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Picture of L-Series liquid flow meter

LB-Series Portable Liquid Flow Meters measure liquid volumetric flow rates anywhere you need, making them ideal for on-the-go process calibration, verification, and validation.

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Alicat LB-series portable liquid flow meter

Liquid Flow Controllers

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Liquid Flow Controllers

Alicat liquid flow controllers provide accurate, stable control across a wide range of applications. Our Coriolis mass flow instruments can accurately control liquid flow rates up to 100 kg/h even when flowing aggressive liquids and mixtures of unknown composition. When flowing water or other common non-corrosive liquids, our laminar liquid flow instruments can provide real-time control of process pressure and temperature, with an optional batch processing feature to simplify process control.

Check out the model pages for more product details and learn about our many custom build and performance options.

Need support?

Below are resources to make finding the right solution for your application easier. If you need additional support, please reach out to our applications engineers.

Model comparison: Alicat device guide

Not sure which device will work best for your application? This guide describes our product lines to assist you in choosing the model that best fits your use case.

______

How Coriolis technology works

Coriolis devices measure mass flow directly with no dependence on fluid properties. Interested in learning more about how Coriolis technology works?

View additional resources  Contact an applications engineer

CODA KC-Series Coriolis Mass Flow Controllers provide high-accuracy liquid flow control even when fluid composition is changing or unknown.

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CODA Coriolis mass flow controller

LC-Series Liquid Flow Controllers rapidly reach setpoints and maintain stable control of liquid volumetric flow rate or pressure, and simultaneously measure live flow, pressure, and temperature readings.

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Picture of Alicat LC-Series liquid flow controller

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