Mass Flow Controllers & Meters

Mass Flow Controllers & Meters

Overview

Fast mass flow controllers and mass flow meters make process control and calibration processes more efficient. Alicat offers many ways to customize your gas flow meter or controller for use in low pressure drop, high pressure or corrosive applications. Standard features include real-time readings, fast valve response and multi-gas calibration. Most models can be customized for flow rates as high as 5000 slpm or as low as 2.5 sµlm/0.0025 sccm.

CODA Coriolis Mass Flow Meters and Controllers

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Alicat’s new series of Coriolis instruments offers direct mass flow measurements for exceptional accuracy in a broad array of precision ultra-low flow and high pressure applications. CODA mass flow meters and controllers are compact and pair fast response times with exceptional zero stability to create an industry leading precision instrument. Designed to be highly insensitive to external vibrations, our Coriolis units provide unwavering accuracy throughout the 0.2 g/h to 10 kg/h measurement range.

Versatile. Even when you don’t know the chemical composition of your fluid, CODA enables you to obtain accurate readings of mass flow rate for both liquids and gases. This makes CODA ideal for applications with changing or unknown fluid compositions.
Accurate. Measure flows with NIST-traceable accuracy for liquids and gases down to 0.05% of the full scale flow rate. Our Coriolis instruments are also highly insensitivity to external bumps and vibrations, ensuring accurate measurements despite environmental interference.
Robust. CODA covers more applications for you with resistance to corrosive fluids, an IP67 rating, and operating pressures up to 4000 PSIA. All-metal seals are additionally available with our CODA meters.

High precision liquid and gas measurements independent of fluid composition.

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Performance

Flow Rate: 0.2 – 10,000 g/h
Flow Accuracy (Liquid): ± 0.2% of reading or ± 0.05% of full scale, whichever is greater
Flow Accuracy (Gas): ± 0.5% of reading or ± 0.05% of full scale, whichever is greater
Repeatability: ± 0.05% or ± 0.025% of full scale, whichever is greater
Minimum Measurable Flow: 0.2% of full scale
Density Accuracy: ± 5 kg/m3
Zero Stability: ± 0.05% of full scale
Control Response Time: < 500 ms (T98)

Operating Conditions

Fluid Temperature: -30° to 105° C
Maximum Operating Pressure: up to 4000 PSIA
Nominal Pressure Drop: 15 PSI
Viscosity Range: 0 – 200 cP
Wetted Materials: FKM, 316L (Other wetted materials such as Hastelloy or all-metal seals available)

Please see the Spec Sheet for a complete list of specifications.

Catalysis

Catalyst research – precise measurement independent of fluid properties

Bio-pharm

Precision dosing for bio reactor systems – efficient addition of process additives

Fuel cell

Precision fluid measurement in fuel cell research

Food production

Accurate dosing of consumer product additives

Coating

CVD coating processes – fast control for repeatable results

High Pressure CODA Coriolis

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Specs Cut Sheet KM Manual KC Manual KM Quick Start KC Quick Start LabVIEW Downloads

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Mass Flow Controllers

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Gas mass flow controllers must be fast and accurate to establish stable flow. Our mass flow controllers reach their setpoints faster than any others, which enables them to suppress fluctuations in line pressure before they affect your process downstream. Customized valve options and factory PID tuning ensure that your MFC will perform well in your specific application.

Pressure based mass flow instrumentation for top performance.

0.6% of reading accuracy on most flow instruments
4 ms response time
No warm up
Four process variables
Built in display
Industrial protocols
Pressure compensation
Temperature compensation
Wide dynamic flow ranges

Standard configurations of MC Series are available to buy online.

Mass Flow Controller Series
MC Series Standard Gas Flow Controllers MCQ Series High Pressure Gas Flow Controllers MCW Series Low Pressure Drop Controllers BIO Series Bioreactor Gas Flow Controllers	MCE Series Drop-in Replacements for Thermal MFCs MCV Series Vacuum Controllers BASIS Series Compact Controllers for OEM applications

Gas sparging for pH control (MC)

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements.

Even Faster Leak Testing (MCW)

A “Whisper” mass flow controller that is set to control for pressure serves the functions of both a pressure controller and a mass flow meter in one device.

Gas Flow Control for Reactive Sputtering (MCV)

Precisely control the partial pressures of reactive gases in the vacuum chamber, and maintain tight shut-off under no-flow conditions with the pneumatic valve.

Flow Control for OEM Gas Analyzers (BASIS)

Small size, instant control readiness and dual communications make BASIS easy to build into end user products.

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Mass Flow Meters

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Alicat’s line of mass flow meters are high performance instruments offering both range and flexibility. With flow rates from 0.00005 sccm to 5000 slpm, over 100 gases selectable through the built in display and 4 ms response times you’ll never have to worry about getting the right gas flow measurement.

With one compact gas flow meter you can measure mass flow, volumetric flow, pressure and temperature.

Our industry leading gas flow meters include:

0.6% of reading accuracy on most flow instruments
4 ms response time
No warm up
Four process variables
Built in display
Industrial protocols
Pressure compensation
Temperature compensation
Wide dynamic flow ranges

Standard configurations of M Series, MB Series and MW Series are available to buy online.

Mass Flow Meter Series
M Series Standard Gas Flow Meters MQ Series High Pressure Gas Flow Meters MW Series Low Pressure Drop Meters BIO Series Bioreactor Gas Flow Meters	MB Series Battery Powered Mass Flow Meters MBQ Series High Pressure Battery Powered Meters MWB Series Low Pressure Drop Battery Meters

Filter Characterization (M)

Characterize a filter’s flow versus pressure drop curve using a flow meter and pressure controller.

Monitoring and Recording Bioreactor Output (MW)

Quantify the mass output of bioreactors without inducing backpressure.

Faster Leak Testing (M)

Measure leak rates during leak testing with 5 ms speed of response.

In-House Flow Verification of a Gas Chromatograph (MB)

Check primary and by-pass flows to maintain optimal GC performance.

Calibration of an Air Sampling Canister (MWB)

Low pressure drop enables non-intrusive volumetric flow calibration.

ALICAT mass flow meter, available with a standard monochrome display

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Portable Gas Flow Standards

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Pressure based mass flow instrumentation for top performance. Portable flow meters make system checks, calibrations and audits fast and easy. All portable flow instruments offer laboratory-grade accuracy and multivariate readings that update 1000 times a second.

0.6% of reading accuracy on most flow instruments
4 ms response time
No warm up
Four process variables
Built in display
Industrial protocols
Pressure compensation
Temperature compensation
Wide dynamic flow ranges

Standard configurations of MB Series and FP-25 Calibrator Kit are available to buy online.

Portable Gas Flow Standards
MB Series Standard Gas Flow Standards MBQ Series High Pressure Gas Flow Standards MWB Series Low Pressure Drop Standards	FP-25 Series Outdoor Calibrator Kit for Air Quality Monitoring PCU Series Gas Flow Portable Calibration Unit

Flow Verification for a Gas Chromatograph (MB)

Check primary and by-pass flows to maintain optimal GC performance.

Calibration of an Air Sampling Canister (MWB)

Low pressure drop enables non-intrusive volumetric flow calibration.

Calibration of multiple flow instruments (PCU)

Three overlapping ranges makes the PCU extremely versatile.

Audit of an air sampler (FP-25)

Perform flow audits in any weather with highest accuracy.

ALICAT "Whisper" Series Portable Flow Calibrator, optionally available with color display and backlight

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Multi-directional Gas Flow Controllers

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Sometimes a process is too complex for a standard mass flow controller. Alicat’s multi-directional mass flow controllers consolidate into one instrument what would otherwise require two or three separate devices.

When you need to control flow in two directions, choose the world’s first bidirectional mass flow controller, Alicat’s MCD series. This versatile instrument can control flow into a closed volume and then control flow in the other direction to exhaust the volume. Or, you can use vacuum to control your process flow in one direction and then apply positive pressure to purge the line in the other direction.

The MCDW applies our Whisper technology with low pressure drop to bidirectional applications like breathing simulations.

Choose the MCT series if you want to control flow in only one direction, but you need to switch the sources of flow or its destinations downstream. Dual valves located upstream, downstream or in both locations help you manage your flowing processes more efficiently.

Multi-directional Gas Flow Controller Series
MCD Series Bidirectional Gas Mass Flow Controllers MCDW Series Low Pressure Drop Bidirectional Gas Mass Flow Controllers	MCT Series Stream Switching Gas Mass Flow Controllers

Automated Leak Testing with Bidirectional Flow Control (MCD)

Pressurize the device under test while monitoring flow rates, and then release the pressure at the end of the test.

Testing and Characterization of a Pressure Relief Valve (MCD)

Run a constant flow rate to increase pressure against the relief valve, and then reverse flow to reset the test.

Bidirectional Flow vs Pressure Characterization for Respiratory Devices (MCDW)

Mimic human respiration with bidirectional flow control into and out of a respiratory device at flow rates consistent with the range of breathing.

Bidirectional Flow Control for Remote Air Sampling and Calibration (MCDW)

Sample ambient air with a vacuum pump in one direction, and then periodically calibrate your gas analyzer with positive pressure in the other direction.

Alicat MCD bidirectional mass flow controller, shown with IPC option

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Liquid Flow Controllers and Meters

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Alicat’s liquid flow controllers and meters offer accurate flow measurement and stable control for water or other liquids, including methanol, iso-propanol, ethanol, ammonia, dimethylether, iso-pentane, thiophene, iso-octane or heptane. All liquid flow instruments include bleed screws for easy removal of air pockets.

Liquid Flow Controller and Meter Series
L Series Standard Liquid Flow Meters LC Series Standard Liquid Flow Controllers	LB Series Battery Powered Portable Liquid Flow Meters

Direct Flow Control for Microfluidics (LC)

Control flow rates as low as 0.01 ccm (10 µlm) directly without the need for pressure control over the fluid headspace.

Liquid Product Dispensing (LC)

Dispense liquid products over a wide range of flow rates with precise control over the dose amount.

Liquid Flow Characterization (L)

Characterize the flow of water through a pump, or of saline fluid through medical tubing.

Leak Check of Cooling System (LB)

Quantify flow rates during leak testing for cooling systems.

Alicat LC liquid flow controller with Precision Dispensing Package

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Mass Flow Controllers & Meters
Mass Flow Controllers
Bio-Series Mass Flow Controllers for Bioreactors & Fermenters

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Bio-Series Mass Flow Controllers for Bioreactors & Fermenters

Bio-Series meters and controllers are designed and constructed specifically for mass flow control in bioreactors and fermenters, upstream or downstream. They offer the highest reliability in the industry, with communication protocols to integrate with your existing system. Alicat’s experience in process stages from benchtop R&D through GMP production of biologics and biosimilars ensure robust solutions that will scale with your development.

Reliable, adaptable, and compatible flow control, built to your preferred industrial protocols for Bio-Series integration with Pharma 4.0 systems

Long-term measurement stability due to extremely low zero drift
Resistance to process water contamination with a lifetime warranty and available IP66 ingression
Minimized footprint and piping via gas select feature enabling exchange of CO2, Air, O2, N2 or over 100 other gases without re-calibration or loss of accuracy, and 10,000:1 controllable range
ASME-recommended materials available including 316L stainless steel and USP Class VI FDA-grade certified elastomers
Monitor process and control performance with a high-contrast color display

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Bio-Series meters and controllers are designed for scalability, data compatibility, and ease of use. Upgrade your manual systems to higher-precision, controlled, and monitored mass flow. Alicat devices are available in a wide range of flow rates and are highly customizable for smooth integration into your existing setup or system.

All standard flow rates. Low flow devices range from 1-5 sccm. Mid flow devices range from 10 sccm-20 slpm. High flow devices range from 20-500 slpm.
Communication protocols. Designed for seamless compatibility, Alicat offers a full complement of available protocols: RS-232/analog, RS-485/analog, Modbus RS-232, Modbus RS-485, Modbus TCP/IP, Profibus RS-485, Ethernet/IP, DeviceNet RS-232, and EtherCAT.
Process connections. Standard SAE or NPT connectors.

More information on Bio-Series devices

Bioreactors and fermenters require very low outgassing from wetted materials to ensure products are free from unwanted contaminants. Alicat BIO-Series meters and controllers use USP Class VI elastomers with 316L Stainless Steel flow bodies. Devices with stainless steel valves are available on request.

Common Certifications for Elastomeric Components

Knowledge Base: Biocompatibility of Wetted Materials

Can’t find what you’re looking for? Learn more by reading the application notes below.

For bioprocessing applications that do not require ASME BPE-2016 compliant materials, the standard series mass flow meters and controllers are designed for a wide range of flows and unparalleled precision and accuracy.

Interested in gas mixing with mass flow controllers for bioreactors? Fusion Flow‘s modular gas mixing system is designed for seamless integration into existing systems.

Optimizing Bioreactor Production

Bioreactors are used in a growing number of applications, from producing bio-adaptive medicines or environmentally friendly fertilizers and pesticides, to brewing beer, refining ethanol and treating wastewater. The increase in biologics production and single use reactors has led to a need for even greater precision and flexibility in instrumentation.

Flow control for bioreactors

High Flow Control for Gasification

Alicat Scientific mass flow controllers can be used in multiple areas of the gasification process: combustion, clean-up reactors, safety, & quality control. Get more precise syngas production, redundancy between units and extremely fast control. Alicat’s MCR controllers use near-frictionless Rolamite proportional control valves to rapidly and precisely control flow rates up to 5000 slpm. With accuracy of +/- (0.8% of reading + 0.2% of full scale range) to high flow rates, precise composition can be ensured.

Streamlining gasification processes

Lowered Cost and Increased Speed for Biologics Production

With protocols for bioprocessing now firmly established, there is an increasing focus on reducing the cost of producing biologics, biosimilars, mABs and other modern medicines that require bioreactions and current trends toward single use bioreactors. You can reduce your cost per run and extend your processes with Alicat’s mass flow accuracy as low as 0.1% of full scale and unbeatable repeatability of +/- 0.02% of full scale readings.

Increasing efficiency of bioreactions

Aerobic vs. Anaerobic Wastewater Treatment: An Overview

Bioreactors are now a common part of wastewater treatment. Alicat’s revolutionary differential-pressure based mass flow controllers allow for extreme flexibility in mass flow control and the response times needed to make this process efficient and cost effective.

Bioreactors in wastewater treatment

Bio-Series mass flow controllers for bioreactor applications

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Brochure BIO Controller High Flow Specs BIO Controller Mid Flow Specs BIO Controller Low Flow Specs BIO Meter High Flow Specs BIO Meter Mid Flow Specs BIO Meter Low Flow Specs

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Mass Flow Controllers & Meters
Mass Flow Controllers
BASIS–OEM Gas Mass Flow Controllers

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BASIS–OEM Gas Mass Flow Controllers

Essential flow control for OEM applications.

Order Directly from Alicat

BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, economical package for high-quantity orders. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.

Reliable. BASIS controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
Responsive. Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS mass flow controllers get ahead of the unexpected.
Compatible. Do more with BASIS controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.

Performance

Available ranges: 0-100 sccm, 0-1000 sccm, and 0-20 slpm (see Part Numbers)
Operating range (Turndown ratio): 200:1 (1, 20 and 50 slpm) or 100:1 (100 sccm)
Calibration accuracy, NIST-traceable: +/- (1.5% of the reading + 0.5% of the full-scale range)
Repeatability: 0.5% of the full-scale range
Typical control response time constant: 100 ms (adjustable with PD tuning)
Warm-up time: 70 ms to full accuracy spec

Operating Conditions

Compatible gases: Air, Ar, CO2, N2, O2, N2O (selectable over serial connection); He or H2 calibration (for use with one gas only) also available at time of order
Operating temperature: 0°C to +50°C
Max internal pressure (static): 145 psig (160 psia) for 0-100 and 0-1000 sccm ranges; 60 psig (75 psia) for 0-20 slpm ranges
Proof pressure: 175 psig (190 psia)
STP: 25°C & 1 atm (14.696 psia)

In the Box

BASIS mass flow controller (power supply sold separately)
NIST-traceable calibration certificate
Alicat operating manual

Accessories (sold separately)

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Build Options

Communications protocols (0-5 Vdc analog, RS-232, RS-485, Modbus-RTU)
Process connections (NPT or SAE)
Multi-gas calibration (Air, Ar, CO2, N2, O2, N2O)
Single-gas calibrations (He, H2)

BC-C0100 (1-100 sccm)
BC-C1000 (10-1000 sccm)
BC-L0020 (0.2-20 slpm)

Flow Control for OEM Gas Analyzers

Ensure measurement accuracy in OEM analyzer products. Fast valve response and high accuracy make for repeatable and stable gas flows to the analyzer sensors. Small size, instant control readiness and dual communications make BASIS easy to build into end user products.

Automated Gas Mixing

Fill your gas mixing cabinets with responsive BASIS mass flow controllers that are ready in an instant for flow measurement at full accuracy. Fast analog and digital feedback to a PLC or PC allows real-time changes to the flow rate setpoint to maintain desired gas mixture composition.

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Brochure Manual Specs

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Mass Flow Controllers & Meters
Mass Flow Meters
Bio-Series Mass Flow Controllers for Bioreactors & Fermenters

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model

Bio-Series Mass Flow Controllers for Bioreactors & Fermenters

Reliable, adaptable, and compatible flow control, built to your preferred industrial protocols for Bio-Series integration with Pharma 4.0 systems

Long-term measurement stability due to extremely low zero drift
Resistance to process water contamination with a lifetime warranty and available IP66 ingression
Minimized footprint and piping via gas select feature enabling exchange of CO2, Air, O2, N2 or over 100 other gases without re-calibration or loss of accuracy, and 10,000:1 controllable range
ASME-recommended materials available including 316L stainless steel and USP Class VI FDA-grade certified elastomers
Monitor process and control performance with a high-contrast color display

Request a quote

All standard flow rates. Low flow devices range from 1-5 sccm. Mid flow devices range from 10 sccm-20 slpm. High flow devices range from 20-500 slpm.
Communication protocols. Designed for seamless compatibility, Alicat offers a full complement of available protocols: RS-232/analog, RS-485/analog, Modbus RS-232, Modbus RS-485, Modbus TCP/IP, Profibus RS-485, Ethernet/IP, DeviceNet RS-232, and EtherCAT.
Process connections. Standard SAE or NPT connectors.

More information on Bio-Series devices

Common Certifications for Elastomeric Components

Knowledge Base: Biocompatibility of Wetted Materials

Can’t find what you’re looking for? Learn more by reading the application notes below.

Interested in gas mixing with mass flow controllers for bioreactors? Fusion Flow‘s modular gas mixing system is designed for seamless integration into existing systems.

Optimizing Bioreactor Production

Flow control for bioreactors

High Flow Control for Gasification

Streamlining gasification processes

Lowered Cost and Increased Speed for Biologics Production

Increasing efficiency of bioreactions

Aerobic vs. Anaerobic Wastewater Treatment: An Overview

Bioreactors in wastewater treatment

Learn More

Brochure BIO Controller High Flow Specs BIO Controller Mid Flow Specs BIO Controller Low Flow Specs BIO Meter High Flow Specs BIO Meter Mid Flow Specs BIO Meter Low Flow Specs

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Mass Flow Controllers & Meters
Mass Flow Meters
MQ–High Pressure Gas Mass Flow Meters

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MQ–High Pressure Gas Mass Flow Meters

High-pressure, multivariate flow measurement in real time

The versatile MQ flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Measure mass flow, volumetric flow, line pressure and line temperature simultaneously, all in real time.

Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with EtherNet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
Portable. MBQ series portable flow meters are designed to be carried and can withstand drops if they should occur.

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Performance

Available ranges: max 0-5000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
Flow measurement range: 0.01% – 100% of full scale.
Standard accuracy calibration, NIST-traceable: +/- (0.6% of reading on most instruments.)
Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of reading on most instruments.)
Repeatability: 0.1% of reading + 0.02% of full scale.
Typical measurement response time constant: 5-10 ms.
No warm-up time required.

Operating Conditions

Compatible gases: 98 (MQ) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 305 psig (320 psia)
Max differential pressure (inlet to outlet): 100 psid
Proof pressure: 400 psig (415 psia)
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

High-pressure mass flow meter (power supply sold separately)
NIST-traceable calibration certificate
Alicat operating manual

Accessories (sold separately)

Find accessories

Model Variations

Portable with rechargeable battery (MBQ)

Also available:

Standard configuration, up to 160 psia (M)
Low pressure drop, max 60 psia (MW)

Build Options

Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
Displays (monochrome or color, integrated or panel-mount)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Flow totalizer
Custom calibration

See all options

Alicat’s MQ series is suitable for use with non-corrosive gases.

MQ-10SCCM-D
MQ-20SCCM-D
MQ-50SCCM-D
MQ-100SCCM-D
MQ-200SCCM-D
MQ-500SCCM-D
MQ-1SLPM-D
MQ-2SLPM-D
MQ-5SLPM-D
MQ-10SLPM-D
MQ-20SLPM-D
MQ-50SLPM-D
MQ-100SLPM-D
MQ-250SLPM-D
MQ-500SLPM-D
MQ-1000SLPM-D
MQ-2000SLPM-D
MQ-3000SLPM-D
MQ-5000SLPM-D