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Mass Flow Controllers & Meters

Overview

Fast mass flow controllers and mass flow meters make process control and calibration processes more efficient. Alicat offers many ways to customize your gas flow meter or controller for use in low pressure drop, high pressure or corrosive applications. Standard features include real-time readings, fast valve response and multi-gas calibration. Most models can be customized for flow rates as high as 5000 slpm or as low as 2.5 sµlm/0.0025 sccm.

CODA Coriolis Mass Flow Meters and Controllers

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Alicat’s new series of Coriolis instruments offers direct mass flow measurements for exceptional accuracy in a broad array of precision ultra-low flow and high pressure applications. CODA mass flow meters and controllers are compact and pair fast response times with exceptional zero stability to create an industry leading precision instrument. Designed to be highly insensitive to external vibrations, our Coriolis units provide unwavering accuracy throughout the 0.2 g/h to 10 kg/h measurement range.

  • Versatile. Even when you don’t know the chemical composition of your fluid, CODA enables you to obtain accurate readings of mass flow rate for both liquids and gases. This makes CODA ideal for applications with changing or unknown fluid compositions.
  • Accurate. Measure flows with NIST-traceable accuracy for liquids and gases down to 0.05% of the full scale flow rate. Our Coriolis instruments are also highly insensitivity to external bumps and vibrations, ensuring accurate measurements despite environmental interference.
  • Robust. CODA covers more applications for you with resistance to corrosive fluids, an IP67 rating, and operating pressures up to 4000 PSIA. All-metal seals are additionally available with our CODA meters.

High precision liquid and gas measurements independent of fluid composition.

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Performance

  • Flow Rate: 0.2 – 10,000 g/h
  • Flow Accuracy (Liquid): ± 0.2% of reading or ± 0.05% of full scale, whichever is greater
  • Flow Accuracy (Gas): ± 0.5% of reading or ± 0.05% of full scale, whichever is greater
  • Repeatability: ± 0.05% or ± 0.025% of full scale, whichever is greater
  • Minimum Measurable Flow: 0.2% of full scale
  • Density Accuracy: ± 5 kg/m3
  • Zero Stability: ± 0.05% of full scale
  • Control Response Time: < 500 ms (T98)

Operating Conditions

  • Fluid Temperature: -30° to 105° C
  • Maximum Operating Pressure: up to 4000 PSIA
  • Nominal Pressure Drop: 15 PSI
  • Viscosity Range: 0 – 200 cP
  • Wetted Materials: FKM, 316L (Other wetted materials such as Hastelloy or all-metal seals available)

Please see the Spec Sheet for a complete list of specifications.

Catalysis

Catalyst research – precise measurement independent of fluid properties

Bio-pharm

Precision dosing for bio reactor systems – efficient addition of process additives

Fuel cell

Precision fluid measurement in fuel cell research

Food production

Accurate dosing of consumer product additives

Coating

CVD coating processes – fast control for repeatable results

Mass Flow Controllers

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Gas mass flow controllers must be fast and accurate to establish stable flow. Our mass flow controllers reach their setpoints faster than any others, which enables them to suppress fluctuations in line pressure before they affect your process downstream. Customized valve options and factory PID tuning ensure that your MFC will perform well in your specific application.

Pressure based mass flow instrumentation for top performance.

  • 0.6% of reading accuracy on most flow instruments
  • 4 ms response time
  • No warm up
  • Four process variables
  • Built in display
  • Industrial protocols
  • Pressure compensation
  • Temperature compensation
  • Wide dynamic flow ranges

Standard configurations of MC Series are available to buy online.

    Mass Flow Controller Series

    MC Series Standard Gas Flow Controllers
    MCQ Series High Pressure Gas Flow Controllers
    MCW Series Low Pressure Drop Controllers
    BIO Series Bioreactor Gas Flow Controllers
    MCE Series Drop-in Replacements for Thermal MFCs
    MCV Series Vacuum Controllers
    BASIS Series Compact Controllers for OEM applications

    Gas sparging for pH control (MC)

    Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements.

    Even Faster Leak Testing (MCW)

    A “Whisper” mass flow controller that is set to control for pressure serves the functions of both a pressure controller and a mass flow meter in one device.

    Gas Flow Control for Reactive Sputtering (MCV)

    Precisely control the partial pressures of reactive gases in the vacuum chamber, and maintain tight shut-off under no-flow conditions with the pneumatic valve.

    Flow Control for OEM Gas Analyzers (BASIS)

    Small size, instant control readiness and dual communications make BASIS easy to build into end user products.

    Mass Flow Meters

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    Alicat’s line of mass flow meters are high performance instruments offering both range and flexibility. With flow rates from  0.00005 sccm to 5000 slpm, over 100 gases selectable through the built in display and 4 ms response times you’ll never have to worry about getting the right gas flow measurement.

    With one compact gas flow meter you can measure mass flow, volumetric flow, pressure and temperature.

    Our industry leading gas flow meters include:

    • 0.6% of reading accuracy on most flow instruments
    • 4 ms response time
    • No warm up
    • Four process variables
    • Built in display
    • Industrial protocols
    • Pressure compensation
    • Temperature compensation
    • Wide dynamic flow ranges
    Standard configurations of M Series and MB Series are available to buy online.

      Mass Flow Meter Series

      M Series Standard Gas Flow Meters
      MQ Series High Pressure Gas Flow Meters
      MW Series Low Pressure Drop Meters
      BIO Series Bioreactor Gas Flow Meters
      MB Series Battery Powered Mass Flow Meters
      MBQ Series High Pressure Battery Powered Meters
      MWB Series Low Pressure Drop Battery Meters

      Filter Characterization (M)

      Characterize a filter’s flow versus pressure drop curve using a flow meter and pressure controller.

      Monitoring and Recording Bioreactor Output (MW)

      Quantify the mass output of bioreactors without inducing backpressure.

      Faster Leak Testing (M)

      Measure leak rates during leak testing with 5 ms speed of response.

      In-House Flow Verification of a Gas Chromatograph (MB)

      Check primary and by-pass flows to maintain optimal GC performance.

      Calibration of an Air Sampling Canister (MWB)

      Low pressure drop enables non-intrusive volumetric flow calibration.

      Portable Gas Flow Standards

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      Pressure based mass flow instrumentation for top performance. Portable flow meters make system checks, calibrations and audits fast and easy. All portable flow instruments offer laboratory-grade accuracy and multivariate readings that update 1000 times a second.

      • 0.6% of reading accuracy on most flow instruments
      • 4 ms response time
      • No warm up
      • Four process variables
      • Built in display
      • Industrial protocols
      • Pressure compensation
      • Temperature compensation
      • Wide dynamic flow ranges
      Standard configurations of MB Series and FP-25 Calibrator Kit are available to buy online.

        Portable Gas Flow Standards

        MB Series Standard Gas Flow Standards
        MBQ Series High Pressure Gas Flow Standards
        MWB Series Low Pressure Drop Standards
        FP-25 Series Outdoor Calibrator Kit for Air Quality Monitoring
        PCU Series Gas Flow Portable Calibration Unit

        Flow Verification for a Gas Chromatograph (MB)

        Check primary and by-pass flows to maintain optimal GC performance.

        Calibration of an Air Sampling Canister (MWB)

        Low pressure drop enables non-intrusive volumetric flow calibration.

        Calibration of multiple flow instruments (PCU)

        Three overlapping ranges makes the PCU extremely versatile.

        Audit of an air sampler (FP-25)

        Perform flow audits in any weather with highest accuracy.

        Multi-directional Gas Flow Controllers

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        Sometimes a process is too complex for a standard mass flow controller. Alicat’s multi-directional mass flow controllers consolidate into one instrument what would otherwise require two or three separate devices.

        When you need to control flow in two directions, choose the world’s first bidirectional mass flow controller, Alicat’s MCD series. This versatile instrument can control flow into a closed volume and then control flow in the other direction to exhaust the volume. Or, you can use vacuum to control your process flow in one direction and then apply positive pressure to purge the line in the other direction.

        The MCDW applies our Whisper technology with low pressure drop to bidirectional applications like breathing simulations.

        Choose the MCT series if you want to control flow in only one direction, but you need to switch the sources of flow or its destinations downstream. Dual valves located upstream, downstream or in both locations help you manage your flowing processes more efficiently.

        Multi-directional Gas Flow Controller Series

        MCD Series Bidirectional Gas Mass Flow Controllers
        MCDW Series Low Pressure Drop Bidirectional Gas Mass Flow Controllers
        MCT Series Stream Switching Gas Mass Flow Controllers

        Automated Leak Testing with Bidirectional Flow Control (MCD)

        Pressurize the device under test while monitoring flow rates, and then release the pressure at the end of the test.

        Testing and Characterization of a Pressure Relief Valve (MCD)

        Run a constant flow rate to increase pressure against the relief valve, and then reverse flow to reset the test.

        Bidirectional Flow vs Pressure Characterization for Respiratory Devices (MCDW)

        Mimic human respiration with bidirectional flow control into and out of a respiratory device at flow rates consistent with the range of breathing.

        Bidirectional Flow Control for Remote Air Sampling and Calibration (MCDW)

        Sample ambient air with a vacuum pump in one direction, and then periodically calibrate your gas analyzer with positive pressure in the other direction.

        Liquid Flow Controllers and Meters

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        Alicat’s liquid flow controllers and meters offer accurate flow measurement and stable control for water or other liquids, including methanol, iso-propanol, ethanol, ammonia, dimethylether, iso-pentane, thiophene, iso-octane or heptane. All liquid flow instruments include bleed screws for easy removal of air pockets.

         

        Liquid Flow Controller and Meter Series

        L Series Standard Liquid Flow Meters
        LC Series Standard Liquid Flow Controllers
        LB Series Battery Powered Portable Liquid Flow Meters

        Direct Flow Control for Microfluidics (LC)

        Control flow rates as low as 0.01 ccm (10 µlm) directly without the need for pressure control over the fluid headspace.

        Liquid Product Dispensing (LC)

        Dispense liquid products over a wide range of flow rates with precise control over the dose amount.

        Liquid Flow Characterization (L)

        Characterize the flow of water through a pump, or of saline fluid through medical tubing.

        Leak Check of Cooling System (LB)

        Quantify flow rates during leak testing for cooling systems.

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