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Mass Flow Controllers & Meters

  • Mass Flow Controllers & Meters

Overview

Fast mass flow controllers and meters make process control and calibration processes more efficient. Alicat offers many ways to customize your gas flow meter or controller for use in low pressure drop, high pressure or corrosive applications. Standard features include real-time readings, fast valve response and multi-gas calibration. Most models can be customized for flow rates as high as 5000 slpm or as low as 2.5 sµlm/0.0025 sccm.

Mass Flow Controllers

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Gas mass flow controllers must be fast and accurate to establish stable flow. Our mass flow controllers reach their setpoints faster than any others, which enables them to suppress fluctuations in line pressure before they affect your process downstream. Customized valve options and factory PID tuning ensure that your MFC will perform well in your specific application.

Pressure based mass flow instrumentation for top performance.

  • 0.6% of reading accuracy on most flow instruments
  • 4 ms response time
  • No warm up
  • Four process variables
  • Built in display
  • Industrial protocols
  • Pressure compensation
  • Temperature compensation
  • Wide dynamic flow ranges
  • *see product brochures for full specifications

The MC series is our standard mass flow controller, with models that can measure flow rates as high as 5000 slpm or as low as 0.0025 sccm. Choose an MCQ when your line pressures are high (145-305 psig). The MCW series is best for low pressure drop applications, leak testing and for reducing pneumatic response time at flow rates of 50 scccm or less.

If you need a drop-in replacement for an existing thermal mass flow controller, the MCE series tucks the valve inside to conform its process connections to the SEMI standard length. For vacuum applications, the MCV adds a pneumatically-actuated shut-off valve to the MCE form factor.

BASIS is Alicat’s line of compact mass flow controllers designed for OEM applications and large-quantity orders.

 

Gas sparging for pH control (MC)

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements.

Even Faster Leak Testing (MCW)

A “Whisper” mass flow controller that is set to control for pressure serves the functions of both a pressure controller and a mass flow meter in one device.

Gas Flow Control for Reactive Sputtering (MCV)

Precisely control the partial pressures of reactive gases in the vacuum chamber, and maintain tight shut-off under no-flow conditions with the pneumatic valve.

Flow Control for OEM Gas Analyzers (BASIS)

Small size, instant control readiness and dual communications make BASIS easy to build into end user products.

Alicat MC-series mass flow controller
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Mass Flow Meters

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Alicat’s line of mass flow meters are high performance instruments offering both range and flexibility. With flow rates from  0.0025 sccm to 5000 slpm, over 100 gasses selectable through the built in display and 4 ms response times you’ll never have to worry about getting the right gas flow measurement.

With one compact gas flow meter you can measure mass flow, volumetric flow, pressure and temperature.

Our industry leading gas flow meters include:

  • 0.6% of reading accuracy on most flow instruments
  • 4 ms response time
  • No warm up
  • Four process variables
  • Built in display
  • Industrial protocols
  • Pressure compensation
  • Temperature compensation
  • Wide dynamic flow ranges

*see product brochures for full specifications*

Mass Flow Meter Series
M-Series Standard Gas Flow Meters
MQ-Series High Pressure Gas Flow Meters
MW-Series Low Pressure Drop Meters		MB-Series Battery Powered Mass Flow Meters
MBQ-Series High Pressure Battery Powered Meters
MWB-Series Low Pressure Drop Battery Meters

Filter Characterization (M)

Characterize a filter’s flow versus pressure drop curve using a flow meter and pressure controller.

Monitoring and Recording Bioreactor Output (MW)

Quantify the mass output of bioreactors without inducing backpressure.

Faster Leak Testing (M)

Measure leak rates during leak testing with 5 ms speed of response.

In-House Flow Verification of a Gas Chromatograph (MB)

Check primary and by-pass flows to maintain optimal GC performance.

Calibration of an Air Sampling Canister (MWB)

Low pressure drop enables non-intrusive volumetric flow calibration.

ALICAT mass flow meter, available with a standard monochrome display
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Portable gas flow standards

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Pressure based mass flow instrumentation for top performance. Portable flow meters make system checks, calibrations and audits fast and easy. All portable flow instruments offer laboratory-grade accuracy and multivariate readings that update 1000 times a second.

  • 0.6% of reading accuracy on most flow instruments
  • 4 ms response time
  • No warm up
  • Four process variables
  • Built in display
  • Industrial protocols
  • Pressure compensation
  • Temperature compensation
  • Wide dynamic flow ranges

FP-25 is weatherproof, designed for outdoor calibration of particulate matter (PM) ambient air samplers.

The MB series is suitable for most flow measurement applications, with models that can measure flow rates as high as 5000 slpm or as low as 0.0025 sccm. Choose an MBQ when your line pressures are high (145-305 psig). The MWB series is best for low pressure drop applications and for reducing pneumatic response time at flow rates of 50 scccm or less.

Alicat’s PCU is a portable transfer standard that combines up to three individual flow meters for a very wide usable range. Choose a PCU when the range of a single flow meter isn’t enough for your calibration needs.

See product brochures for full specifications

 

 

Flow Verification for a Gas Chromatograph (MB)

Check primary and by-pass flows to maintain optimal GC performance.

Calibration of an Air Sampling Canister (MWB)

Low pressure drop enables non-intrusive volumetric flow calibration.

Calibration of multiple flow instruments (PCU)

Three overlapping ranges makes the PCU extremely versatile.

Audit of an air sampler (FP-25)

Perform flow audits in any weather with highest accuracy.

ALICAT "Whisper" Series Portable Flow Calibrator, optionally available with color display and backlight
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Multi-directional gas flow controllers

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Sometimes a process is too complex for a standard mass flow controller. Alicat’s multi-directional mass flow controllers consolidate into one instrument what would otherwise require two or three separate devices.

When you need to control flow in two directions, choose the world’s first bidirectional mass flow controller, Alicat’s MCD series. This versatile instrument can control flow into a closed volume and then control flow in the other direction to exhaust the volume. Or, you can use vacuum to control your process flow in one direction and then apply positive pressure to purge the line in the other direction. The MCDW applies our Whisper technology with low pressure drop to bidirectional applications like breathing simulations.

Choose the MCT series if you want to control flow in only one direction, but you need to switch the sources of flow or its destinations downstream. Dual valves located upstream, downstream or in both locations help you manage your flowing processes more efficiently.

Automated Leak Testing with Bidirectional Flow Control (MCD)

Pressurize the device under test while monitoring flow rates, and then release the pressure at the end of the test.

Testing and Characterization of a Pressure Relief Valve (MCD)

Run a constant flow rate to increase pressure against the relief valve, and then reverse flow to reset the test.

Bidirectional Flow vs Pressure Characterization for Respiratory Devices (MCDW)

Mimic human respiration with bidirectional flow control into and out of a respiratory device at flow rates consistent with the range of breathing.

Bidirectional Flow Control for Remote Air Sampling and Calibration (MCDW)

Sample ambient air with a vacuum pump in one direction, and then periodically calibrate your gas analyzer with positive pressure in the other direction.

Alicat MCD bidirectional mass flow controller, shown with IPC option
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Liquid flow controllers and meters

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Alicat’s liquid flow controllers and meters offer accurate flow measurement and stable control for water or other liquids, including methanol, iso-propanol, ethanol, ammonia, dimethylether, iso-pentane, thiophene, iso-octane or heptane. All liquid flow instruments include bleed screws for easy removal of air pockets.

The LC series of liquid flow controllers features fast-acting proportional valves for control or dispensing applications.

For liquid flow measurement without a control valve, choose our L series of fast liquid flow meters, which measure flow, pressure and temperature in real time. Our LB series adds a rechargeable battery for easy audits of liquid flows outside of your lab.

Direct Flow Control for Microfluidics (LC)

Control flow rates as low as 0.01 ccm (10 µlm) directly without the need for pressure control over the fluid headspace.

Liquid Product Dispensing (LC)

Dispense liquid products over a wide range of flow rates with precise control over the dose amount.

Liquid Flow Characterization (L)

Characterize the flow of water through a pump, or of saline fluid through medical tubing.

Leak Check of Cooling System (LB)

Quantify flow rates during leak testing for cooling systems.

Alicat LC liquid flow controller with Precision Dispensing Package
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