Mass Flow Controllers & Meters

Mass Flow Controllers & Meters

Overview

Fast mass flow controllers and meters make process control and calibration processes more efficient. Alicat offers many ways to customize your gas flow meter or controller for use in low pressure drop, high pressure or corrosive applications. Standard features include real-time readings, fast valve response and multi-gas calibration. Most models can be customized for flow rates as high as 5000 slpm or as low as 2.5 sµlm/0.0025 sccm.

Gas mass flow controllers

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Gas mass flow controllers must be fast and accurate to establish stable flow. Our mass flow controllers reach their setpoints faster than any others, which enables them to suppress fluctuations in line pressure before they affect your process downstream. Customized valve options and factory PID tuning ensure that your MFC will perform well in your specific application.

The MC series is our standard mass flow controller, with models that can measure flow rates as high as 5000 slpm or as low as 0.0025 sccm. Choose an MCQ when your line pressures are high (145-305 psig). The MCW series is best for low pressure drop applications, leak testing and for reducing pneumatic response time at flow rates of 50 scccm or less.

If you need a drop-in replacement for an existing thermal mass flow controller, the MCE series tucks the valve inside to conform its process connections to the SEMI standard length. For vacuum applications, the MCV adds a pneumatically-actuated shut-off valve to the MCE form factor.

BASIS is Alicat’s line of compact mass flow controllers designed for OEM applications and large-quantity orders.

Gas sparging for pH control (MC)

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements.

Even Faster Leak Testing (MCW)

A “Whisper” mass flow controller that is set to control for pressure serves the functions of both a pressure controller and a mass flow meter in one device.

Gas Flow Control for Reactive Sputtering (MCV)

Precisely control the partial pressures of reactive gases in the vacuum chamber, and maintain tight shut-off under no-flow conditions with the pneumatic valve.

Flow Control for OEM Gas Analyzers (BASIS)

Small size, instant control readiness and dual communications make BASIS easy to build into end user products.

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Gas mass flow meters

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Gas mass flow meters from Alicat are highly flexible instruments that can be used with many gases across a very wide range. Measure mass flow, volumetric flow, pressure and temperature in a compact device that will be the star of your lab.

The M series is suitable for most flow measurement applications, with models that can measure flow rates as high as 5000 slpm or as low as 0.0025 sccm. Choose an MQ when your line pressures are high (145-305 psig). The MW series is best for low pressure drop applications and for reducing pneumatic response time at flow rates of 50 scccm or less.

Each of the flow meter families above in a battery-powered portable configuration: MB series for typical applications. MBQ for high line pressures (145-305 psig) and MWB for low pressure drop applications.

Filter Characterization (M)

Characterize a filter’s flow versus pressure drop curve using a flow meter and pressure controller.

Monitoring and Recording Bioreactor Output (MW)

Quantify the mass output of bioreactors without inducing backpressure.

Faster Leak Testing (M)

Measure leak rates during leak testing with 5 ms speed of response.

In-House Flow Verification of a Gas Chromatograph (MB)

Check primary and by-pass flows to maintain optimal GC performance.

Calibration of an Air Sampling Canister (MWB)

Low pressure drop enables non-intrusive volumetric flow calibration.

ALICAT mass flow meter, available with a standard monochrome display

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Portable gas flow standards

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Portable flow meters make system checks, calibrations and audits fast and easy. All portable flow instruments offer laboratory-grade accuracy and multivariate readings that update 1000 times a second.

The AFS is a transfer standard that features our highest accuracy calibration, humidity compensation, averaged readings and onboard data logging. Our FP-25 is a weatherproof version of the AFS that is designed for outdoor calibration of particulate matter (PM) ambient air samplers.

The MB series is suitable for most flow measurement applications, with models that can measure flow rates as high as 5000 slpm or as low as 0.0025 sccm. Choose an MBQ when your line pressures are high (145-305 psig). The MWB series is best for low pressure drop applications and for reducing pneumatic response time at flow rates of 50 scccm or less.

Alicat’s PCU is a portable transfer standard that combines up to three individual flow meters for a very wide usable range. Choose a PCU when the range of a single flow meter isn’t enough for your calibration needs.

Flow Verification for a Gas Chromatograph (MB)

Check primary and by-pass flows to maintain optimal GC performance.

Calibration of an Air Sampling Canister (MWB)

Low pressure drop enables non-intrusive volumetric flow calibration.

Calibration of multiple flow instruments (PCU)

Three overlapping ranges makes the PCU extremely versatile.

Audit of an air sampler (FP-25)

Perform flow audits in any weather with highest accuracy.

ALICAT "Whisper" Series Portable Flow Calibrator, optionally available with color display and backlight

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Multi-directional gas flow controllers

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Sometimes a process is too complex for a standard mass flow controller. Alicat’s multi-directional mass flow controllers consolidate into one instrument what would otherwise require two or three separate devices.

When you need to control flow in two directions, choose the world’s first bidirectional mass flow controller, Alicat’s MCD series. This versatile instrument can control flow into a closed volume and then control flow in the other direction to exhaust the volume. Or, you can use vacuum to control your process flow in one direction and then apply positive pressure to purge the line in the other direction. The MCDW applies our Whisper technology with low pressure drop to bidirectional applications like breathing simulations.

Choose the MCT series if you want to control flow in only one direction, but you need to switch the sources of flow or its destinations downstream. Dual valves located upstream, downstream or in both locations help you manage your flowing processes more efficiently.

Automated Leak Testing with Bidirectional Flow Control (MCD)

Pressurize the device under test while monitoring flow rates, and then release the pressure at the end of the test.

Testing and Characterization of a Pressure Relief Valve (MCD)

Run a constant flow rate to increase pressure against the relief valve, and then reverse flow to reset the test.

Bidirectional Flow vs Pressure Characterization for Respiratory Devices (MCDW)

Mimic human respiration with bidirectional flow control into and out of a respiratory device at flow rates consistent with the range of breathing.

Bidirectional Flow Control for Remote Air Sampling and Calibration (MCDW)

Sample ambient air with a vacuum pump in one direction, and then periodically calibrate your gas analyzer with positive pressure in the other direction.

Alicat MCD bidirectional mass flow controller, shown with IPC option

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Liquid flow controllers and meters

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Alicat’s liquid flow controllers and meters offer accurate flow measurement and stable control for water or other liquids, including methanol, iso-propanol, ethanol, ammonia, dimethylether, iso-pentane, thiophene, iso-octane or heptane. All liquid flow instruments include bleed screws for easy removal of air pockets.

The LC series of liquid flow controllers features fast-acting proportional valves for control or dispensing applications.

For liquid flow measurement without a control valve, choose our L series of fast liquid flow meters, which measure flow, pressure and temperature in real time. Our LB series adds a rechargeable battery for easy audits of liquid flows outside of your lab.

Direct Flow Control for Microfluidics (LC)

Control flow rates as low as 0.01 ccm (10 µlm) directly without the need for pressure control over the fluid headspace.

Liquid Product Dispensing (LC)

Dispense liquid products over a wide range of flow rates with precise control over the dose amount.

Liquid Flow Characterization (L)

Characterize the flow of water through a pump, or of saline fluid through medical tubing.

Leak Check of Cooling System (LB)

Quantify flow rates during leak testing for cooling systems.

Alicat LC liquid flow controller with Precision Dispensing Package

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Mass Flow Controllers & Meters
Gas mass flow controllers
BASIS–OEM Gas Mass Flow Controllers

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BASIS–OEM Gas Mass Flow Controllers

Essential flow control for OEM applications

BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, economical package for high-quantity orders. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.

Reliable. BASIS controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
Responsive. Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS mass flow controllers get ahead of the unexpected.
Compatible. Do more with BASIS controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.

Performance

Available ranges: 0-100 sccm, 0-1000 sccm, and 0-20 slpm (see Part Numbers)
Turndown ratio: 200:1 (1, 20 and 50 slpm) or 100:1 (100 sccm)
Calibration accuracy, NIST-traceable: +/- (1.5% of the reading + 0.5% of the full-scale range)
Repeatability: 0.5% of the full-scale range
Typical control response time constant: 100 ms (adjustable with PD tuning)
Warm-up time: 70 ms to full accuracy spec

Operating Conditions

Compatible gases: Air, Ar, CO2, N2, O2, N2O (selectable over serial connection); He or H2 calibration (for use with one gas only) also available at time of order
Operating temperature: 0°C to +50°C
Max internal pressure (static): 145 psig (160 psia) for 0-100 and 0-1000 sccm ranges; 60 psig (75 psia) for 0-20 slpm ranges
Proof pressure: 175 psig (190 psia)
STP: 25°C & 1 atm (14.696 psia)

In the Box

BASIS mass flow controller (power supply sold separately)
NIST-traceable calibration certificate
Alicat operating manual

Accessories (sold separately)

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Build Options

Communications protocols (0-5 Vdc analog, RS-232, RS-485, Modbus-RTU)
Process connections (NPT or SAE)
Multi-gas calibration (Air, Ar, CO2, N2, O2, N2O)
Single-gas calibrations (He, H2)

BC-C0100 (1-100 sccm)
BC-C1000 (10-1000 sccm)

BC-L0020 (0.2-20 slpm)

Flow Control for OEM Gas Analyzers

Ensure measurement accuracy in OEM analyzer products. Fast valve response and high accuracy make for repeatable and stable gas flows to the analyzer sensors. Small size, instant control readiness and dual communications make BASIS easy to build into end user products.

Automated Gas Mixing

Fill your gas mixing cabinets with responsive BASIS mass flow controllers that are ready in an instant for flow measurement at full accuracy. Fast analog and digital feedback to a PLC or PC allows real-time changes to the flow rate setpoint to maintain desired gas mixture composition.

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Brochure Manual Specs

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AFS–Portable Gas Flow Calibrators

A portable gas flow standard that is ready for anything

When your calibration process requires the utmost accuracy, the AFS flow standard delivers. It features Alicat’s most advanced calibration for optimal performance across changing temperatures, plus an on-board relative humidity sensor to maintain its accuracy all the way up to 100% RH (non-condensing). These advancements make possible a 1% of reading accuracy spec that requires no additional full-scale component.

Accurate. Calibrate flows with NIST-traceable 0.75% of reading accuracy for a variety of gases, or define your own gas composition with COMPOSER™. Low pressure drop allows calibration of volumetric flow rates with minimal impact.
Fast & Easy Operation. Averaged measurements and onboard data logging make it easy to gather multivariate flow data (volumetric and standardized flow rates, ambient and line pressures, and line temperature).
Durable. AFS flow standards are designed to be carried and can withstand drops if they should occur. Process connections have SAE threads for superior leak prevention.

Performance

Available ranges: max 0-50 slpm, min 0-5 sccm (see Part Numbers tab for all ranges)
Turndown ratio: 200:1 when flowing air; 20:1 when flowing other gases or gas mixes
Flow accuracy: +/- 0.75% of the reading (NIST-traceable)
Typical measurement response time constant: 5-10 ms
No warm-up time required

Operating Conditions

Compatible gases: 98 pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 45 psig (160 psia)
Max differential pressure (inlet to outlet): 15 psid
Proof pressure: 175 psig (190 psia)
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

AFS-series portable flow standard
Micro-USB to USB cable for charging and communications
USB wall adapter for charging
NIST-traceable calibration certificate
Alicat operating manual

Accessories (sold separately)

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AFS-5 (0-5 sccm)
AFS-500 (0-500 sccm)
AFS-5000 (0-5 slpm)
AFS-20L (0-20 slpm)
AFS-50L (0-50 slpm)

Calibration of mass flow controllers inside dynamic dilution calibrators

Perform a 20-point MFC flow calibration in minutes, not hours. Don’t waste another minute waiting for a positive displacement meter to finish a single low-flow measurement. The AFS saves you hours of calibration time, reading even the lowest flow rates instantly. Simultaneous display of actual volumetric flow and standardized mass flow rates makes it easy to get the information you need.

Preparation of the flow controller for an air sampling canister

Use the AFS with its low pressure drop to set up the volumetric flow controllers of VOC air sampling canisters. Ensuring the canister’s flow rate is on target for your sample set is easy, thanks to the live readings at very low flow rates. The AFS features a wide 200:1 turndown when used with air, for greatest flexibility with varying canister sizes and sampling periods.

Calibration of gas analyzers, pumps and air samplers for industrial hygiene applications

Instantly verify sample flow rates for a wide range of gas analyzers, pumps and air samplers used in industrial hygiene applications. Conduct flow calibrations in seconds with live readings of volumetric and standardized flow rates. The AFS averaging function records 1000 readings per second to get robust flow data from oscillating pumps. Extremely low pressure drop and push/pull capability makes the AFS adept at calibrating all types of air samplers and analyzers.