Products » Gas Flow » Mass Flow Meter » BASIS Series Compact Mass Flow Meters
BASIS™ Series Compact Mass Flow Meters
Small Mass Flow Meters Using MEMS Thermal Technology
- Compact, durable, metal flow body
- Accurate flow control
- Run sophisticated data capturing scripts using a fast, robust Alicat ASCII command set
- Switch between 9 gases: Air, N2, O2, CH4, He, H2, Ar, CO2, N2O
- 0.1 – 100% of full scale measurement range (1,000:1 turndown)
- 3.75” max width
- ± 1.5% reading accuracy (gas‑dependent)
- ± 0.25% reading repeatability
- 0 – 50°C operating temperature
- 1 minute warm‑up
Full Scale Flow Ranges
100 SCCM – 100 SLPM
OPERATING PRESSURE RANGE
0 – 145 PSIG
Build Options for Compact BASIS Mass Flow Meters
Ready for the final details?
Each product is made-to-order. Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.
Top Level Part Numbers
Hidden Item So All Items Are Closed on Page Load
B Meters
B-100C
B-200C
B-500C
B-001L
B-002L
B-005L
B-010L
B-020L
B-050L
B-100L
BM-10SCCM
BM-20SCCM
BM-50SCCM
BM-100SCCM
BM-200SCCM
BM-500SCCM
BM-1SLPM
BM-2SLPM
BM-5SLPM
BM-10SLPM
BM-20SLPM
Ask an engineer
Our Applications Engineers can answer your questions and help you find the best option.
Service and Support
Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade, you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.