Mass Flow Meters

For measurement of gas flow

A mass flow meter measures gas flow rate in standardized mass units — SCCM, SLM, g/min — independent of changes in line pressure or temperature. Alicat’s instruments use thermal, Coriolis, or laminar DP measurement technology to cover flow ranges from 0.5 SCCM to 12,000 SLPM across more than 130 gases, with response times as fast as 4 ms.

Explore mass flow meter product lines with features like…

As much as 10,000:1 turndown ratio
Up to 130+ user‑selectable gas calibrations onboard
Accuracy as good as: ± 0.5% of reading or ± 0.05% of full scale, whichever is greater
Available certifications for hazardous environments

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Looking for a mass flow controller instead?

Compatible with 98 gases, 130 gases with corrosion resistant models
0.5 SCCM – 12,000 SLPM options
Live flow, pressure, and temp readings
High accuracy: as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
0.01 – 100% of full scale metering

Alicat Scientific Low Pressure Drop Mass Flow Meter

As little as 0.07 PSID pressure drop
Compatible with 98 gases, stainless steel also available
0.5 SCCM – 1,000 SLPM full scale
Live flow, pressure, and temp readings
For pressures 11.5 – 60 PSIA
High accuracy: as good as ± 0.6% of reading or ± 0.1% of full scale, whichever is greater
10,000:1 turndown

Alicat CODA Coriolis Low Flow Mass Flow Meter

Coriolis mass flow measurement technology
40 g/h – 300 kg/h full scale
4,000 PSIA max
Corrosive resistant properties
High accuracy for gas: as good as ± 0.5% of reading or ± 0.05% of full scale, whichever is greater

Alicat Scientific Intrinsically Safe Mass Flow Meter

Certified for C1D1, C1D2 (ATEX Class 1 Zones 0, 1 & 2) explosive atmospheres
98 pre-loaded gas calibrations, with more on stainless steel models
0.5 SCCM – 5,000 SLPM full scale
Instant flow, pressure and temp readings with graphic interface and data logging
11.5 – 160 PSIA operating
High accuracy: as good as ± 0.5% of reading and ± 0.1% of full scale
10,000:1 turndown

9 gases
100 SCCM – 100 SLPM full scale
0 – 145 PSIG max 
Available as manifold gassing array

98 gases
0.5 SCCM – 12,000 SLPM full scale
Live flow, pressure, and temp readings
320 PSIA max
High accuracy: as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater

Alicat FP-25 Calibrator Kit for Air Quality Monitoring

Portable
Bluetooth enabled
Live flow, pressure, and temp readings
IP67 rating
−30°C – 60°C operating temp
Accuracy to 1% of reading

How to choose an Alicat mass flow meter

Choosing a mass flow meter is best by this process:

Understand the critical parameters surrounding the different product line’s performance capabilities and limitations. You can get more detail on our Choosing a Mass Flow Meter page.
Match the mass flow meter product line in the table below to your process requirements.
Then visit the best-fit product pages to get a spec sheet and further configuration options.

To get help perfectly configuring a mass flow meter to your process, and a quote, Ask an Engineer.

Parameter

BASIS Mass flow meters

Alicat M‑Series mass flow meters

CODA mass flow meters

IS-Max mass flow meters

Gauge technology

MEMS thermal

Laminar differential pressure

Miniature Coriolis

Intrinsically safe laminar DP

Flow rates

100 sccm – 100 SLPM

0.5 sccm full scale – 12,000 SLPM full scale

40 g/h – 300 kg/h, full scale

0.5 sccm full scale – 5,000 SLPM Full Scale

Gas or gases used

9 common gases compatible

Up to 130 gases and blends user selectable

No need to know type

Up to 130 gases and blends user compatible

Operating temperature

−0 – 50 °C (ambient and gas)

−10 – 60 °C (ambient and gas)

−35 – 70 °C gas (0 – 60 °C ambient)

−20 – 70 °C (ambient and gases

Operating pressure

0 – 145 PSIG

11.5 – 160 PSIA std, up to 320 PSIA

1500 PSIA max std, up to 6000 PSIA

11.5 – 160 PSIA, up to 320 PSIA

Pressure drop

0.2 mbar to 30.0 mbar on full scale flow

0.07 PSID to 15.3 PSID depending on options

6 PSID to 110 PSID on full scale flow

0.07 PSID to 3.4 PSID depending on options

Price

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$#,### – $##,###

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Accuracy

As good as 1.5% reading or 0.5% full scale

As good as ± 0.4% of reading and ± 0.2% of full scale

As good as ± 0.5% of reading or ± 0.05% of full scale, whichever is greater

As good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater

Indication response time

< 6 ms, range dependent

< 10 millisecond, flow rate dependent

As good as < 40 millisecond

< 10 millisecond, flow rate dependent

Warm-up time

1 minute

< 1 second

15 minutes

< 1 second

Stable measurement range (turndown)

0.1% – 100% of full scale (1,000:1 turndown ratio)

0.01 – 100% of full scale (10,000:1 turndown ratio)

As much as 0.2 – 100% of full scale (500:1 turndown ratio)

0.01 – 100% of full scale (10,000:1 turndown ratio)

Safety certification available?

None

Can be configured to Class 1 Div 2, ATEX Zone 2

None

ATEX Zone 0 or 1, CSA Class 1 Div 1, IECEx Zone 0 or 1

Applications

Gas chromatography processes →

DALL-E geothermal energy extraction illustration

Mining, oil and gas, & hydrogen production →

Bioreactors and fermentation →

Closeup photo of a diamond held by tweezers

Lab-grown diamonds with chemical vapor deposition →

Not sure which mass flow meter is best for your application?

Ask an Engineer

Support

How do coriolis meters work?

Laminar DP Diagram showing laminar plates and two pressure sensors

How do laminar DP meters work?

What is pressure drop?

How do thermal flow meters work?

Related Products

Mass Flow Controllers

Mass flow controllers provide precision measurement and control of gas flow, from 0.5 sccm to 12K SLPM.

Pressure

Pressure transducers or pressure controllers measure or control pressure in flowing, dead-ended or vacuum processes. Dual valve controllers and remote sensing options.

Liquid Flow

Liquid flow meters and controllers use Coriolis or laminar flow sensors to accurately measure or control liquids for many applications. Low flow to higher volume.

Custom Instrumentation

Flow and pressure instruments crafted to your specifications. Engineered to perform to your unique needs. Customize our products or get wholly new systems—like gas mixers, manifolds, or control loops.

Ask an engineer

Your flow rate, pressure, and choice of gas can all affect which Alicat instruments work for your application.

Our Applications Engineers can answer your questions and help you find the best option.

Mass Flow Meters

For measurement of gas flow

Mass flow meter with latest laminar differential pressure tech

Standard M Series Mass Flow Meter

Mass flow meter for processes needing low pressure drop

Whisper™, MW Series

Mass flow meter with fluid-independent Coriolis technology

CODA™, K Series

Mass flow meter for always-explosive gas areas

IS-Max™, ISM Series Mass Flow Meter

Small mass flow meter for compact spaces

BASIS™ Series

Portable mass flow meter

Portable Mass Flow Meters, MB Series

Mass flow calibrator for particulate air samplers

FP-25