Mass Flow Controllers &amp; Meters

Model Variations

Low pressure drop, max 60 psia (MW)
High pressure, 160-320 psia (MQ)
Aggressive gases (MS)
Portable with rechargeable battery (MB)

Corrosive Gases (MS series)

Instruments in the standard M series are also available with an optional “S” configuration (MS) for use with corrosive gases. In this configuration, we upgrade the flow body and sensor to 316L stainless steel and the elastomers to FFKM.

Build Options

Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
Displays (monochrome or color, integrated or panel-mount)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Flow totalizer
High-accuracy or custom calibration

Brochure Manual M Series Low Flow Specs M Series Mid Flow Specs M Series High Flow Spec MS Series Specs

M
MS

Alicat’s M series is suitable for use with non-corrosive gases.

M-0.5SCCM-D
M-1SCCM-D
M-2SCCM-D
M-5SCCM-D
M-10SCCM-D
M-20SCCM-D
M-50SCCM-D
M-100SCCM-D
M-200SCCM-D
M-500SCCM-D
M-1SLPM-D
M-2SLPM-D
M-5SLPM-D
M-10SLPM-D
M-20SLPM-D
M-50SLPM-D
M-100SLPM-D
M-250SLPM-D
M-500SLPM-D
M-1000SLPM-D
M-2000SLPM-D
M-3000SLPM-D
M-5000SLPM-D

Alicat’s MS series is suitable for use with corrosive gases.

MS-0.5SCCM-D
MS-1SCCM-D
MS-2SCCM-D
MS-5SCCM-D
MS-10SCCM-D
MS-20SCCM-D
MS-50SCCM-D
MS-100SCCM-D
MS-200SCCM-D
MS-500SCCM-D
MS-1SLPM-D
MS-2SLPM-D
MS-5SLPM-D
MS-10SLPM-D
MS-20SLPM-D
MS-50SLPM-D
MS-100SLPM-D
MS-250SLPM-D
MS-500SLPM-D
MS-1000SLPM-D
MS-2000SLPM-D
MS-3000SLPM-D
MS-5000SLPM-D

Filter Characterization

Characterize a filter’s flow versus pressure drop curve by fixing the differential pressure across the filter using the pressure controller. The mass flow meter displays the resulting flow rate required to attain the pressure drop.

Filter Characterization

Faster Leak Testing

Establish stable pressure for the leak check by measuring pressure precisely at the device under test with Alicat’s PC3-series pressure controller with remote sense port. This method negates the pressure drop induced by the mass flow meter that is measuring the leak rate with 5-ms speed of response.

Faster Leak Testing

ALICAT mass flow meter, available with a standard monochrome display

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Mass Flow Controllers & Meters
Mass Flow Meters
MW–Low Pressure Drop Gas Mass Flow Meters

Order Directly from Alicat

model

MW–Low Pressure Drop Gas Mass Flow Meters

High-accuracy, multivariate flow measurement with minimal system impact

“Whisper” series mass flow meters with low pressure drop are the perfect instruments for measuring mass and volumetric flow rates. Low pressure drop minimizes system impact, enabling flow measurement at near-atmospheric pressures or when there is little available system pressure. A very wide usable flow range and on-board calibrations for multiple gases will keep this flow meter in operation for a long time.

Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 0.01% of full scale, or define your own gas composition with COMPOSER™.
Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with EtherNet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
Portable. MWB series portable flow meters are designed to be carried and can withstand drops if they should occur.

Configure now

Performance

Available ranges: max 0-1000 slpm, min 0-0.5 sccm/0-500 sμlm
Flow measurement range: 0.01% – 100% of full scale.
Standard accuracy calibration, NIST-traceable: +/- (0.8% of the reading + 0.2% of the full-scale range)
Optional high-accuracy calibration, NIST-traceable: +/- (0.4% of the reading + 0.2% of the full-scale range)
Repeatability: 0.2% of the full-scale range
Typical measurement response time constant: 5-10 ms
No warm-up time required

Operating Conditions

Compatible gases: 98 pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 45 psig (60 psia)
Max differential pressure (inlet to outlet): 15 psid
Proof pressure: 175 psig (190 psia)
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

Accessories (sold separately)

Model Variations

Standard configuration, up to 160 psia (M)
High pressure, 160-320 psia (MQ)
Portable with rechargeable battery (MWB)

Build Options

Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
Displays (monochrome or color, integrated or panel-mount)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Flow totalizer
High-accuracy or custom calibration

Brochure Manual MW Low Flow Specs MW Mid Flow Specs MW High Flow Specs

MW

Alicat’s MW series is suitable for use with non-corrosive gases.

MW-0.5SCCM-D
MW-1SCCM-D
MW-2SCCM-D
MW-5SCCM-D
MW-10SCCM-D
MW-20SCCM-D
MW-50SCCM-D
MW-100SCCM-D
MW-200SCCM-D
MW-500SCCM-D
MW-1SLPM-D
MW-2SLPM-D
MW-5SLPM-D
MW-10SLPM-D
MW-20SLPM-D
MW-40SLPM-D
MW-50SLPM-D
MW-100SLPM-D
MW-250SLPM-D
MW-500SLPM-D
MW-1000SLPM-D

Monitoring and Recording Bioreactor Output

Applications like methane production or hydrogenation benefit from comparing the mass of gas added to the bioreactor with the mass that has been outgassed. When outgassing occurs at atmospheric pressures, the very low pressure drop of Alicat’s Whisper series will not induce backpressure while quantifying outgassed mass.

Bioreactor Output

ALICAT "Whisper" Series Flow Meter, optionally available with color display and backlight

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Mass Flow Controllers & Meters
Mass Flow Meters
Bio-Series Mass Flow Controllers for Bioreactors & Fermenters

More information on Bio-Series devices

model

Bio-Series Mass Flow Controllers for Bioreactors & Fermenters

Bio-Series meters and controllers are designed and constructed specifically for mass flow control in bioreactors and fermenters, upstream or downstream. They offer the highest reliability in the industry, with communication protocols to integrate with your existing system. Alicat’s experience in process stages from benchtop R&D through GMP production of biologics and biosimilars ensure robust solutions that will scale with your development.

Reliable, adaptable, and compatible flow control, built to your preferred industrial protocols for Bio-Series integration with Pharma 4.0 systems

Long-term measurement stability due to extremely low zero drift
Resistance to process water contamination with a lifetime warranty and available IP66 ingression
Minimized footprint and piping via gas select feature enabling exchange of CO2, Air, O2, N2 or over 100 other gases without re-calibration or loss of accuracy, and 10,000:1 controllable range
ASME-recommended materials available including 316L stainless steel and USP Class VI FDA-grade certified elastomers
Monitor process and control performance with a high-contrast color display

Request a quote

Bio-Series meters and controllers are designed for scalability, data compatibility, and ease of use. Upgrade your manual systems to higher-precision, controlled, and monitored mass flow. Alicat devices are available in a wide range of flow rates and are highly customizable for smooth integration into your existing setup or system.

All standard flow rates. Low flow devices range from 1-5 sccm. Mid flow devices range from 10 sccm-20 slpm. High flow devices range from 20-500 slpm.
Communication protocols. Designed for seamless compatibility, Alicat offers a full complement of available protocols: RS-232/analog, RS-485/analog, Modbus RS-232, Modbus RS-485, Modbus TCP/IP, Profibus RS-485, Ethernet/IP, DeviceNet RS-232, and EtherCAT.
Process connections. Standard SAE or NPT connectors.

Bioreactors and fermenters require very low outgassing from wetted materials to ensure products are free from unwanted contaminants. Alicat BIO-Series meters and controllers use USP Class VI elastomers with 316L Stainless Steel flow bodies. Devices with stainless steel valves are available on request.

Common Certifications for Elastomeric Components

Knowledge Base: Biocompatibility of Wetted Materials

Can’t find what you’re looking for? Learn more by reading the application notes below.

For bioprocessing applications that do not require ASME BPE-2016 compliant materials, the standard series mass flow meters and controllers are designed for a wide range of flows and unparalleled precision and accuracy.

Interested in gas mixing with mass flow controllers for bioreactors? Fusion Flow‘s modular gas mixing system is designed for seamless integration into existing systems.

Optimizing Bioreactor Production

Bioreactors are used in a growing number of applications, from producing bio-adaptive medicines or environmentally friendly fertilizers and pesticides, to brewing beer, refining ethanol and treating wastewater. The increase in biologics production and single use reactors has led to a need for even greater precision and flexibility in instrumentation.

Flow control for bioreactors

High Flow Control for Gasification

Alicat Scientific mass flow controllers can be used in multiple areas of the gasification process: combustion, clean-up reactors, safety, & quality control. Get more precise syngas production, redundancy between units and extremely fast control. Alicat’s MCR controllers use near-frictionless Rolamite proportional control valves to rapidly and precisely control flow rates up to 5000 slpm. With accuracy of +/- (0.8% of reading + 0.2% of full scale range) to high flow rates, precise composition can be ensured.

Streamlining gasification processes

Lowered Cost and Increased Speed for Biologics Production

With protocols for bioprocessing now firmly established, there is an increasing focus on reducing the cost of producing biologics, biosimilars, mABs and other modern medicines that require bioreactions and current trends toward single use bioreactors. You can reduce your cost per run and extend your processes with Alicat’s mass flow accuracy as low as 0.1% of full scale and unbeatable repeatability of +/- 0.02% of full scale readings.

Increasing efficiency of bioreactions

Aerobic vs. Anaerobic Wastewater Treatment: An Overview

Bioreactors are now a common part of wastewater treatment. Alicat’s revolutionary differential-pressure based mass flow controllers allow for extreme flexibility in mass flow control and the response times needed to make this process efficient and cost effective.

Bioreactors in wastewater treatment

Bio-Series mass flow controllers for bioreactor applications

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Brochure BIO Controller High Flow Specs BIO Controller Mid Flow Specs BIO Controller Low Flow Specs BIO Meter High Flow Specs BIO Meter Mid Flow Specs BIO Meter Low Flow Specs

Mass Flow Controllers & Meters
Mass Flow Meters
MQ–High Pressure Gas Mass Flow Meters

model

MQ–High Pressure Gas Mass Flow Meters

High-pressure, multivariate flow measurement in real time

The versatile MQ flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Measure mass flow, volumetric flow, line pressure and line temperature simultaneously, all in real time.

Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with EtherNet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
Portable. MBQ series portable flow meters are designed to be carried and can withstand drops if they should occur.

Configure now

Performance

Available ranges: max 0-3000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
Flow measurement range: 0.1% – 100% of full scale.
Standard accuracy calibration, NIST-traceable: +/- (0.6% of reading on most instruments.)
Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of reading on most instruments.)
Repeatability: 0.1% of full scale.
Typical measurement response time constant: 5-10 ms.
No warm-up time required.

Operating Conditions

Compatible gases: 98 pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 320 psia
Max differential pressure (inlet to outlet): 75 psid
Proof pressure: 400 psia
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

Accessories (sold separately)

Model Variations

Portable with rechargeable battery (MBQ)

Also available:

Standard configuration, up to 160 psia (M)
Low pressure drop, max 60 psia (MW)
Anti-corrosive, up to 160 psia (MS)

Build Options

Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
Displays (monochrome or color, integrated or panel-mount)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Flow totalizer
Custom calibration

Brochure Manual MQ Mid Flow Specs MQ High Flow Specs

MQ

Alicat’s MQ series is suitable for use with non-corrosive gases.

MQ-10SCCM-D
MQ-20SCCM-D
MQ-50SCCM-D
MQ-100SCCM-D
MQ-200SCCM-D
MQ-500SCCM-D
MQ-1SLPM-D
MQ-2SLPM-D
MQ-5SLPM-D
MQ-10SLPM-D
MQ-20SLPM-D
MQ-50SLPM-D
MQ-100SLPM-D
MQ-250SLPM-D
MQ-500SLPM-D
MQ-1000SLPM-D
MQ-2000SLPM-D
MQ-3000SLPM-D
MQ-5000SLPM-D

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Mass Flow Controllers & Meters
Mass Flow Meters
MWB–Low Pressure Drop Portable Gas Mass Flow Meters

model

MWB–Low Pressure Drop Portable Gas Mass Flow Meters

Measure flow with minimal system impact, anywhere you need it.

Shop Online

“Whisper” series portable flow meters with low pressure drop are the perfect calibration instruments for mass and volumetric flow rates. Low pressure drop minimizes system impact, enabling flow measurement at near-atmospheric pressures or when there is little available system pressure.

Accurate. Calibrate flows with NIST-traceable accuracy for a variety of gases down to 1/200th of full scale, or define your own gas composition with COMPOSER™.
Efficient. As soon as you power the MWB on, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
Tough. MWB series portable flow meters are designed to be carried and can withstand drops if they should occur.

Configurations Available to Buy Online

- 0.5 SCCM – 1000 SLPM flow ranges
- RS-232 serial communication
- Micro USB-B connector
- Back-lit monochrome display

For many more build options, get in touch.

Contact Us for a Quote

Performance

Available ranges: max 0-1000 slpm, min 0-0.5 sccm/0-500 sμlm (see Part Numbers tab for stock ranges)
Operating range (Turndown ratio): 200:1
Standard accuracy calibration, NIST-traceable: +/- (0.8% of the reading + 0.2% of the full-scale range)
Optional high-accuracy calibration, NIST-traceable: +/- (0.4% of the reading + 0.2% of the full-scale range)
Repeatability: 0.2% of the full-scale range
Typical measurement response time constant: 5-10 ms
No warm-up time required

Operating Conditions

Compatible gases: 98 pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 45 psig (60 psia)
Max differential pressure (inlet to outlet): 15 psid
Proof pressure: 175 psig (190 psia)
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

Accessories (sold separately)

Model Variations

Standard configuration, up to 160 psia (MB)
High pressure, 160-320 psia (MBQ)

Build Options

Communications protocols (RS-232, RS-485)
Displays (monochrome or color)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Flow totalizer
High-accuracy or custom calibration

Calibration of an Air Sampling Canister

MWB

Alicat’s MWB series is suitable for use with non-corrosive gases.

MWB-0.5SCCM-D
MWB-1SCCM-D
MWB-2SCCM-D
MWB-5SCCM-D
MWB-10SCCM-D
MWB-20SCCM-D
MWB-50SCCM-D
MWB-100SCCM-D
MWB-200SCCM-D
MWB-500SCCM-D
MWB-1SLPM-D
MWB-2SLPM-D
MWB-5SLPM-D
MWB-10SLPM-D
MWB-20SLPM-D
MWB-40SLPM-D
MWB-50SLPM-D
MWB-100SLPM-D
MWB-250SLPM-D
MWB-500SLPM-D
MWB-1000SLPM-D

Calibration of an Air Sampling Canister

Rapidly calibrate across multiple ranges and gases without carrying a computer. NIST-traceable high-accuracy calibration makes your portable a transfer standard. Whisper-series low pressure drop enables non-intrusive volumetric flow calibration.

ALICAT "Whisper" Series Portable Flow Calibrator, optionally available with color display and backlight

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Brochure Manual MWB Low Flow Specs MWB Mid Flow Specs MWB High Flow Specs

Mass Flow Controllers & Meters
Mass Flow Meters
MBQ–High Pressure Portable Gas Mass Flow Meters

Order Directly from Alicat

model

MBQ–High Pressure Portable Gas Mass Flow Meters

High-pressure flow verification, anywhere you need it

The versatile MBQ portable flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Instant-on and real-time readings for multiple gases reduce the downtime and disruption to your process.

Accurate. Calibrate flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
Efficient. As soon as you power the MBQ on, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
Tough. MBQ series portable flow meters are designed to be carried and can withstand drops if they should occur.

Configure now

Performance

Available ranges: max 0-5000 slpm, min 0-0.5 sccm/0-500 sμlm (see Part Numbers tab for stock ranges.)
Flow measurement range: 0.01% – 100% of full scale.
Standard accuracy calibration, NIST-traceable: +/- (0.6% of reading on most instruments.)
Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of reading on most instruments.)
Repeatability: 0.1% of reading + 0.02% of full scale.
Typical measurement response time constant: 5-10 ms.
No warm-up time required.

Operating Conditions

Compatible gases: 98 (MBQ) or 130 (MBQS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 305 psig (320 psia)
Max differential pressure (inlet to outlet): 100 psid
Proof pressure: 400 psig (415 psia)
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

Accessories (sold separately)

Model Variations

Aggressive gases (MBQS, see below)

Also available:

Standard configuration, up to 160 psia (MB)
Low pressure drop, max 60 psia (MWB)

Corrosive Gases (MBQS series)

Instruments in the high-pressure MBQ series are also available with an optional “S” configuration (MBQS) for use with corrosive gases. In this configuration, we upgrade the flow body and sensor to 316L stainless steel and the elastomers to FFKM.

Build Options

Communications protocols (RS-232, RS-485)
Displays (monochrome or color)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Flow totalizer
Custom calibration

Brochure Manual MQ Mid Flow Specs MQ High Flow Specs

MBQ
MBQS

Alicat’s MBQ series is suitable for use with non-corrosive gases.

MBQ-10SCCM-D
MBQ-20SCCM-D
MBQ-50SCCM-D
MBQ-100SCCM-D
MBQ-200SCCM-D
MBQ-500SCCM-D
MBQ-1SLPM-D
MBQ-2SLPM-D
MBQ-5SLPM-D
MBQ-10SLPM-D
MBQ-20SLPM-D
MBQ-50SLPM-D
MBQ-100SLPM-D
MBQ-250SLPM-D
MBQ-500SLPM-D
MBQ-1000SLPM-D
MBQ-2000SLPM-D
MBQ-3000SLPM-D
MBQ-5000SLPM-D

Alicat’s MBQS series is suitable for use with corrosive gases.

MBQS-10SCCM-D
MBQS-20SCCM-D
MBQS-50SCCM-D
MBQS-100SCCM-D
MBQS-200SCCM-D
MBQS-500SCCM-D
MBQS-1SLPM-D
MBQS-2SLPM-D
MBQS-5SLPM-D
MBQS-10SLPM-D
MBQS-20SLPM-D
MBQS-50SLPM-D
MBQS-100SLPM-D
MBQS-250SLPM-D
MBQS-500SLPM-D
MBQS-1000SLPM-D
MBQS-2000SLPM-D
MBQS-3000SLPM-D
MBQS-5000SLPM-D

ALICAT portable mass flow meter, available with a standard monochrome display

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