Mass Flow Meters
Alicat’s line of mass flow meters are high performance instruments offering both range and flexibility. With flow rates from 0.0025 sccm to 5000 slpm, over 100 gasses selectable through the built in display and 4 ms response times you’ll never have to worry about getting the right gas flow measurement.
With one compact gas flow meter you can measure mass flow, volumetric flow, pressure and temperature.
Our industry leading gas flow meters include:
- 0.6% of reading accuracy on most flow instruments
- 4 ms response time
- No warm up
- Four process variables
- Built in display
- Industrial protocols
- Pressure compensation
- Temperature compensation
- Wide dynamic flow ranges
*see product brochures for full specifications*
| Mass Flow Meter Series | |
| M-Series Standard Gas Flow Meters MQ-Series High Pressure Gas Flow Meters MW-Series Low Pressure Drop Meters | MB-Series Battery Powered Mass Flow Meters MBQ-Series High Pressure Battery Powered Meters MWB-Series Low Pressure Drop Battery Meters |
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M–Gas Mass Flow Meters
BrochureManualMS SpecsM Series Low Flow SpecsM Series Mid Flow SpecsM Series High Flow Spec -
MW–Low Pressure Drop Gas Mass Flow Meters
BrochureManualMW Low Flow SpecsMW Mid Flow SpecsMW High Flow Specs -
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MB–Portable Gas Mass Flow Meters
BrochureManualMBS SpecsMB Low Flow SpecsMB Mid Flow Specs MB High Flow Specs -
MWB–Low Pressure Drop Portable Gas Mass Flow Meters
BrochureManualMWB Low Flow SpecsMWB Mid Flow SpecsMWB High Flow Specs -
model
M–Gas Mass Flow Meters
High-accuracy, multivariate flow measurement in real time
Measure mass flow, volumetric flow, line pressure and line temperature simultaneously, all in real time. A very wide usable flow range and on-board calibrations for multiple gases will make this flow meter the star of your lab.
- Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 1/200th of full scale, or define your own gas composition with COMPOSER™.
- Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
- Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
Alicat’s M series is suitable for use with non-corrosive gases.
M-0.5SCCM-D
M-1SCCM-D
M-2SCCM-D
M-5SCCM-D
M-10SCCM-D
M-20SCCM-D
M-50SCCM-D
M-100SCCM-D
M-200SCCM-D
M-500SCCM-D
M-1SLPM-D
M-2SLPM-D
M-5SLPM-D
M-10SLPM-D
M-20SLPM-D
M-50SLPM-D
M-100SLPM-D
M-250SLPM-D
M-500SLPM-D
M-1000SLPM-D
M-2000SLPM-D
M-3000SLPM-D
M-5000SLPM-D
Alicat’s MS series is suitable for use with corrosive gases.
MS-0.5SCCM-D
MS-1SCCM-D
MS-2SCCM-D
MS-5SCCM-D
MS-10SCCM-D
MS-20SCCM-D
MS-50SCCM-D
MS-100SCCM-D
MS-200SCCM-D
MS-500SCCM-D
MS-1SLPM-D
MS-2SLPM-D
MS-5SLPM-D
MS-10SLPM-D
MS-20SLPM-D
MS-50SLPM-D
MS-100SLPM-D
MS-250SLPM-D
MS-500SLPM-D
MS-1000SLPM-D
MS-2000SLPM-D
MS-3000SLPM-D
MS-5000SLPM-D
model
MW–Low Pressure Drop Gas Mass Flow Meters
High-accuracy, multivariate flow measurement with minimal system impact
“Whisper” series mass flow meters with low pressure drop are the perfect instruments for measuring mass and volumetric flow rates. Low pressure drop minimizes system impact, enabling flow measurement at near-atmospheric pressures or when there is little available system pressure. A very wide usable flow range and on-board calibrations for multiple gases will keep this flow meter in operation for a long time.
- Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 0.01% of full scale, or define your own gas composition with COMPOSER™.
- Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
- Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
Alicat’s MW series is suitable for use with non-corrosive gases.
MW-0.5SCCM-D
MW-1SCCM-D
MW-2SCCM-D
MW-5SCCM-D
MW-10SCCM-D
MW-20SCCM-D
MW-50SCCM-D
MW-100SCCM-D
MW-200SCCM-D
MW-500SCCM-D
MW-1SLPM-D
MW-2SLPM-D
MW-5SLPM-D
MW-10SLPM-D
MW-20SLPM-D
MW-40SLPM-D
MW-50SLPM-D
MW-100SLPM-D
MW-250SLPM-D
MW-500SLPM-D
MW-1000SLPM-D
model
MQ–High Pressure Gas Mass Flow Meters
High-pressure, multivariate flow measurement in real time
The versatile MQ flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Measure mass flow, volumetric flow, line pressure and line temperature simultaneously, all in real time.
- Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
- Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
- Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
Alicat’s MQ series is suitable for use with non-corrosive gases.
MQ-10SCCM-D
MQ-20SCCM-D
MQ-50SCCM-D
MQ-100SCCM-D
MQ-200SCCM-D
MQ-500SCCM-D
MQ-1SLPM-D
MQ-2SLPM-D
MQ-5SLPM-D
MQ-10SLPM-D
MQ-20SLPM-D
MQ-50SLPM-D
MQ-100SLPM-D
MQ-250SLPM-D
MQ-500SLPM-D
MQ-1000SLPM-D
MQ-2000SLPM-D
MQ-3000SLPM-D
MQ-5000SLPM-D
Alicat’s MQS series is suitable for use with corrosive gases.
MQS-10SCCM-D
MQS-20SCCM-D
MQS-50SCCM-D
MQS-100SCCM-D
MQS-200SCCM-D
MQS-500SCCM-D
MQS-1SLPM-D
MQS-2SLPM-D
MQS-5SLPM-D
MQS-10SLPM-D
MQS-20SLPM-D
MQS-50SLPM-D
MQS-100SLPM-D
MQS-250SLPM-D
MQS-500SLPM-D
MQS-1000SLPM-D
MQS-2000SLPM-D
MQS-3000SLPM-D
MQS-5000SLPM-D
model
MB–Portable Gas Mass Flow Meters
Laboratory-grade flow verification, anywhere you need it
Stopping an operational process for validation or calibration is a necessary evil. Alicat’s portable flow calibrators make this procedure more palatable by reducing the downtime and disruption to your process. Instant-on and real-time readings for multiple gases across wide flow ranges let you get in and out quickly.
- Accurate. Calibrate flows with NIST-traceable accuracy for a variety of gases down to 1/200th of full scale, or define your own gas composition with COMPOSER™.
- Efficient. As soon as you power the MB on, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
- Tough. MB series portable flow meters are designed to be carried and can withstand drops if they should occur.
Alicat’s MB series is suitable for use with non-corrosive gases.
MB-0.5SCCM-D
MB-1SCCM-D
MB-2SCCM-D
MB-5SCCM-D
MB-10SCCM-D
MB-20SCCM-D
MB-50SCCM-D
MB-100SCCM-D
MB-200SCCM-D
MB-500SCCM-D
MB-1SLPM-D
MB-2SLPM-D
MB-5SLPM-D
MB-10SLPM-D
MB-20SLPM-D
MB-50SLPM-D
MB-100SLPM-D
MB-250SLPM-D
MB-500SLPM-D
MB-1000SLPM-D
MB-2000SLPM-D
MB-3000SLPM-D
MB-5000SLPM-D
Alicat’s MBS series is suitable for use with corrosive gases.
MBS-0.5SCCM-D
MBS-1SCCM-D
MBS-2SCCM-D
MBS-5SCCM-D
MBS-10SCCM-D
MBS-20SCCM-D
MBS-50SCCM-D
MBS-100SCCM-D
MBS-200SCCM-D
MBS-500SCCM-D
MBS-1SLPM-D
MBS-2SLPM-D
MBS-5SLPM-D
MBS-10SLPM-D
MBS-20SLPM-D
MBS-50SLPM-D
MBS-100SLPM-D
MBS-250SLPM-D
MBS-500SLPM-D
MBS-1000SLPM-D
MBS-2000SLPM-D
MBS-3000SLPM-D
MBS-5000SLPM-D
model
MWB–Low Pressure Drop Portable Gas Mass Flow Meters
Measure flow with minimal system impact, anywhere you need it
“Whisper” series portable flow meters with low pressure drop are the perfect calibration instruments for mass and volumetric flow rates. Low pressure drop minimizes system impact, enabling flow measurement at near-atmospheric pressures or when there is little available system pressure.
- Accurate. Calibrate flows with NIST-traceable accuracy for a variety of gases down to 1/200th of full scale, or define your own gas composition with COMPOSER™.
- Efficient. As soon as you power the MWB on, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
- Tough. MWB series portable flow meters are designed to be carried and can withstand drops if they should occur.
Alicat’s MWB series is suitable for use with non-corrosive gases.
MWB-0.5SCCM-D
MWB-1SCCM-D
MWB-2SCCM-D
MWB-5SCCM-D
MWB-10SCCM-D
MWB-20SCCM-D
MWB-50SCCM-D
MWB-100SCCM-D
MWB-200SCCM-D
MWB-500SCCM-D
MWB-1SLPM-D
MWB-2SLPM-D
MWB-5SLPM-D
MWB-10SLPM-D
MWB-20SLPM-D
MWB-40SLPM-D
MWB-50SLPM-D
MWB-100SLPM-D
MWB-250SLPM-D
MWB-500SLPM-D
MWB-1000SLPM-D
model
MBQ–High Pressure Portable Gas Mass Flow Meters
High-pressure flow verification, anywhere you need it
The versatile MBQ portable flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Instant-on and real-time readings for multiple gases reduce the downtime and disruption to your process.
- Accurate. Calibrate flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
- Efficient. As soon as you power the MBQ on, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
- Tough. MBQ series portable flow meters are designed to be carried and can withstand drops if they should occur.
Alicat’s MBQ series is suitable for use with non-corrosive gases.
MBQ-10SCCM-D
MBQ-20SCCM-D
MBQ-50SCCM-D
MBQ-100SCCM-D
MBQ-200SCCM-D
MBQ-500SCCM-D
MBQ-1SLPM-D
MBQ-2SLPM-D
MBQ-5SLPM-D
MBQ-10SLPM-D
MBQ-20SLPM-D
MBQ-50SLPM-D
MBQ-100SLPM-D
MBQ-250SLPM-D
MBQ-500SLPM-D
MBQ-1000SLPM-D
MBQ-2000SLPM-D
MBQ-3000SLPM-D
MBQ-5000SLPM-D
Alicat’s MBQS series is suitable for use with corrosive gases.
MBQS-10SCCM-D
MBQS-20SCCM-D
MBQS-50SCCM-D
MBQS-100SCCM-D
MBQS-200SCCM-D
MBQS-500SCCM-D
MBQS-1SLPM-D
MBQS-2SLPM-D
MBQS-5SLPM-D
MBQS-10SLPM-D
MBQS-20SLPM-D
MBQS-50SLPM-D
MBQS-100SLPM-D
MBQS-250SLPM-D
MBQS-500SLPM-D
MBQS-1000SLPM-D
MBQS-2000SLPM-D
MBQS-3000SLPM-D
MBQS-5000SLPM-D