Flow Controllers & Meters

Mass Flow Controllers

Use mass flow controllers with differential pressure or Coriolis technology to control and measure flows from 0.5 SCCM to 5,000 SPM at high accuracy, with a control range of 0.01-100% (10,000:1 turndown).

Custom build options include anti-corrosive, high pressure, and low pressure drop.

Standard Mass Flow Controllers

Alicat MC-Series mass flow controller

 

MC–Series Mass Flow Controllers rapidly reach setpoints to maintain stable control of mass flow, volumetric flow, or pressure for 98+ gases from 0.01% to 100% of full scale.

 

 

 

 

 

Alicat anticorrosive mass flow controller

 

MCS–Series Anti-Corrosive Mass Flow Controllers control flow of 128+ gases, including 32 corrosive gases.

 

 

 

 

 

 

Alicat MCQ-Series mass flow controller

 

MCQ–Series High Pressure Mass Flow Controllers control flow at operating pressures up to 320 PSIA (22 barA).

 

 

 

 

 

 

Alicat Basis BC-Series OEM gas mass flow controller

 

Basis BC-Series Mass Flow Controllers control flows in a compact, economical package for large-volume applications flowing air, Ar, CO2, N2, O2, N2O, He, or H2.

 

 

Low Pressure Drop Mass Flow Controllers

Alicat MCW-Series low pressure drop mass flow controller

 

Whisper™ MCW–Series Low Pressure Drop Mass Flow Controllers control flow when there is little available system pressure, with pressure drops as low as 0.07 PSID (4.8 mbar).

 

 

 

 

 

 

Coriolis Mass Flow Controllers

CODA Coriolis mass flow controller

CODA KC-Series Coriolis Mass Flow Controllers control gas or liquid flows even with the fluid composition is changing or unknown, for pressures up to 4,000 PSIA (275 barA).

 

 

 

 

 

 

 

Bioprocessing Mass Flow Controllers

Alicat bio-series mass flow controller

 

Bio-Series Mass Flow Controllers are preconfigured for ASME-BPE 2016 compliance in upstream bioprocessing.

 

 

 

 

 

 

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Bidirectional Mass Flow Controllers

Alicat MCD-Series bidirectional mass flow controller with integrated potentiometer

 

MCD-Series Bidirectional Mass Flow Controllers control forward and back mass flow, volumetric flow, and pressure.

 

 

 

 

 

 

Alicat MCDS-Series anti-corrosive bidirectional mass flow controller

 

MCDS-Series Anti-Corrosive Bidirectional Mass Flow Controllers control forward and back flow for 128+ gases, including 32 corrosive gases.

 

 

 

 

 

Low Pressure Drop Bidirectional Mass Flow Controllers

Alicat MCRDW high-flow bidirectional mass flow controller with low pressure drop

 

Whisper™ MCDW-Series Low Pressure Drop Bidirectional Mass Flow Controllers control forward and back flow when there is little available system pressure, with pressure drops as low as 0.07 PSID (4.8 mbarD).

 

 

 

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Vacuum Mass Flow Controllers

Alicat MCE-Series SEMI standard mass flow controller

 

MCE-Series Vacuum Mass Flow Controllers are designed to match SEMI standards, including welded 1/4″ VCR fitting.

 

 

 

 

 

 

MCV-Series vacuum mass flow controller

 

MCV-Series Vacuum Mass Flow Controllers are equipped with a pneumatic shut-off valve for hard vacuum applications.

 

 

 

 

Alicat MCES-Series SEMI standard mass flow controller

MCES-Series Anti-Corrosive Vacuum Mass Flow Controllers are designed to match SEMI standards to flow 128+ gases, including 32 corrosive gases.

 

 

 

 

 

 

 

MCV-Series vacuum mass flow controller

 

MCVS-Series Anti-Corrosive Vacuum Mass Flow Controllers are equipped with a pneumatic shut-off valve for hard vacuum applications flowing 128+ gases, including corrosive gases.

 

 

 

 

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Use Alicat mass flow controllers for high accuracy control and measurement of your process gas. Mass flow controllers are accurate to ±0.6% of reading or ±0.1% of full scale (whichever is greater) and have a control range of 0.01-100% (10,000:1 turndown). Configurations include standard, bidirectional, and vacuum.

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