Mass Flow Controllers & Meters

Gas Mass Flow Controllers

Mass Flow Controllers

Alicat mass flow controllers use either differential pressure or Coriolis technology to precisely control and measure flow rates of over 98 gases, which can be switched without using correction factors or losing accuracy. Custom build options for differential pressure mass flow controllers include anticorrosive materials, devices for flows at high pressure or in environments requiring low pressure drop, and for bidirectional flows. Instruments specifically tailored for bioreactor, vacuum, and OEM applications are available.

Use the tabs above to find more product details & configuration and performance options.

Photo of Alicat mass flow controllers

Need support?

Below are resources to make finding the right solution for your application easier. If you need additional support, please reach out to our applications engineers.

Model comparison: Alicat device guide

Not sure which device will work best for your application? This guide describes our product lines to assist you in choosing the model that best fits your use case.

______

How laminar differential pressure technology works

Most Alicat mass flow controllers and meters are multivariate instruments that use laminar differential pressure flow measurement technology to obtain a mass flow rate. Want to learn more?

______

How Coriolis technology works

Coriolis devices measure mass flow directly with no dependence on fluid properties. Interested in learning more about how Coriolis technology works?

View additional resources  Contact an applications engineer

MC-Series Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 98+ gases across a very wide flow range – 0.01% to 100% of full scale.

Visit the model page

An Alicat mass flow controller, 50 SCCM full scale, with a digital screen and standard valve, model MC-50SCCM-D, photographed by Alicat

Whisper™ MCW–Series Low Pressure Drop Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure when there is little available system pressure, with pressure drops as low as 0.07 PSID.

Visit the model page

Photo of MCW-Series low pressure drop mass flow controller

MCS-Series Anti-Corrosive Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 130+ gases, including 32+ corrosives.

Visit the model page

Alicat anticorrosive mass flow controller

MCQ-Series High Pressure Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for operating pressures up to 320 PSIA.

Visit the model page

An Alicat mass flow controller, 50 SCCM full scale, with a digital screen and standard valve, model MC-50SCCM-D, photographed by Alicat

CODA KC-Series Coriolis Mass Flow Meters provide high-accuracy gas and liquid flow measurements, even when fluid composition is changing or unknown.

Visit the model page

CODA Coriolis mass flow controller

KMO–Series of Coriolis Mass Flow Controllers are tailored for a broad array of precision ultra-low flow and high-pressure applications including OEM and any applications requiring lower accuracy than the standard CODA series.

Visit the model page

CODA Coriolis mass flow controller

BASIS™ BC–Series OEM Gas Mass Flow Controllers deliver fast and accurate gas flow control in a compact, economical package for high-quantity orders.

Visit the model page

Photo of Alicat Basis BC-Series OEM gas mass flow controller

Bio-Series Controllers are designed and constructed specifically for mass flow control in bioreactors and fermenters, upstream or downstream. They offer the highest reliability in the industry, with communication protocols to integrate with your existing system.

Visit the model page

Photo of Alicat bio-series mass flow controller

MCD-Series Bidirectional Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions while simultaneously measuring flow, pressure, and temperature.

Visit the model page

Photo of MCD-Series bidirectional mass flow controller

Whisper™ MCDW–Series Low Pressure Drop Bidirectional Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions when there is very little available system pressure, with pressure drops as low as 0.07 PSID.

Visit the model page

Alicat MCRDW high-flow bidirectional mass flow controller

 

MCDS-Series Anti-Corrosive Bidirectional Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure in both directions while simultaneously measuring flow, gas pressure, and gas temperature for 130+ gases, including 32+ corrosives.

Visit the model page

Photo of MCRDS-Series bidirectional anti-corrosive mass flow controller with TFT display

MCT-Series Stream Switching Gas Mass Flow Controllers can control mass flow, volumetric flow, or gas pressure, and are equipped with two valves to allow for easy switching of your gas source or splitting of one source into two separate processes.

Visit the model page

Alicat MCT stream-switching mass flow controller

Use MCE/MCV-Series Vacuum Gas Mass Flow Controllers to update your vacuum deposition fixtures. The MCE–Series includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs, and the MCV–Series is additionally equipped with a pneumatic shut-off valve for hard vacuum applications.

Visit the model page

Photo with Alicat MCE/MCV-Series vacuum gas mass flow controllers

Use MCES/MCVS-Series Anti-Corrosive Vacuum Gas Mass Flow Controllers to update vacuum deposition fixtures in processes using corrosive gases. The MCES–Series includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs, and the MCVS–Series is additionally equipped with a pneumatic shut-off valve for hard vacuum applications.

Visit the model page

Questions about this product?