Mass Flow Controllers & Meters

Mass Flow Controllers

Gas mass flow controllers must be fast and accurate to establish stable flow. Our mass flow controllers reach their setpoints faster than any others, which enables them to suppress fluctuations in line pressure before they affect your process downstream. Customized valve options and factory PID tuning ensure that your MFC will perform well in your specific application.

Pressure based mass flow instrumentation for top performance.

  • 0.6% of reading accuracy on most flow instruments
  • 4 ms response time
  • No warm up
  • Four process variables
  • Built in display
  • Industrial protocols
  • Pressure compensation
  • Temperature compensation
  • Wide dynamic flow ranges
  • *see product brochures for full specifications

The MC series is our standard mass flow controller, with models that can measure flow rates as high as 5000 slpm or as low as 0.00005 sccm.

Choose an MCQ when your line pressures are high (145-305 psig).

The MCW series is best for low pressure drop applications, leak testing and for reducing pneumatic response time at flow rates of 50 scccm or less.

The BIOC is designed to meet the materials and control requirements for bioreactors.

If you need a drop-in replacement for an existing thermal mass flow controller, the MCE series tucks the valve inside to conform its process connections to the SEMI standard length.

For vacuum applications, the MCV adds a pneumatically-actuated shut-off valve to the MCE form factor.

BASIS is Alicat’s line of compact mass flow controllers designed for OEM applications and large-quantity orders.


Gas sparging for pH control (MC)

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements.

Even Faster Leak Testing (MCW)

A “Whisper” mass flow controller that is set to control for pressure serves the functions of both a pressure controller and a mass flow meter in one device.

Gas Flow Control for Reactive Sputtering (MCV)

Precisely control the partial pressures of reactive gases in the vacuum chamber, and maintain tight shut-off under no-flow conditions with the pneumatic valve.

Flow Control for OEM Gas Analyzers (BASIS)

Small size, instant control readiness and dual communications make BASIS easy to build into end user products.

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