Mass Flow Controllers
Use mass flow controllers to measure and control gas flow from 0.5 SCCM to 5,000 SLPM, with accuracy to ±0.5% of reading or ±0.05% of full scale and a control range of 0.01-100% (10,000:1 turndown).
Standard Mass Flow Controllers
MC–Series Mass Flow Controllers rapidly reach setpoints to maintain stable control of mass flow, volumetric flow, or pressure for 98+ gases from 0.01% to 100% of full scale.
CODA Coriolis Mass Flow Controllers control gas or liquid flows even when the fluid composition is changing or unknown, for pressures up to 4,000 PSIA (275 barA).
MCS–Series Anti-Corrosive Mass Flow Controllers control flow of 128+ gases, including 32 corrosive gases.
MCQ–Series High Pressure Mass Flow Controllers control flow at operating pressures up to 320 PSIA (22 barA).
Basis Mass Flow Controllers control flows in a compact, economical package for large-volume applications flowing air, Ar, CO2, N2, O2, N2O, He, or H2.
Whisper™ MCW–Series Low Pressure Drop Mass Flow Controllers control flow when there is little available system pressure, with pressure drops as low as 0.07 PSID (4.8 mbar).
Bio-Series Mass Flow Controllers are preconfigured for ASME-BPE 2016 compliance in upstream bioprocessing.
Use bidirectional mass flow controllers to measure and control gas flow in both directions from 0.5 SCCM to 5,000 SPM, with accuracy to ±0.5% of reading or ±0.1% of full scale and a control range of 0.01-100% (10,000:1 turndown).
Bidirectional Mass Flow Controllers
MCD-Series Bidirectional Mass Flow Controllers control mass flow, volumetric flow, and pressure in both directions.
MCDS-Series Anti-Corrosive Bidirectional Mass Flow Controllers control mass flow, volumetric flow, and pressure in both directions for 128+ gases, including 32 corrosive gases.
Whisper™ MCDW-Series Low Pressure Drop Bidirectional Mass Flow Controllers control mass flow, volumetric flow, and pressure in both directions when there is little available system pressure, with pressure drops as low as 0.07 PSID (4.8 mbarD).
Vacuum mass flow controllers are preconfigured to easily fit into vacuum processes. These instruments measure and control gas flow from 0.5 SCCM to 5,000 SPM, with accuracy to ±0.5% of reading or ±0.1% of full scale and a control range of 0.01-100% (10,000:1 turndown).
Vacuum Mass Flow Controllers
MCE-Series Vacuum Mass Flow Controllers are designed to match SEMI standards, equipped with welded 1/4″ VCR fittings.
MCES-Series Anti-Corrosive Vacuum Mass Flow Controllers are designed to match SEMI standards and flow 128+ gases, including 32 corrosive gases.
MCV-Series Vacuum Mass Flow Controllers are equipped with a pneumatic shut-off valve for hard vacuum applications.
MCVS-Series Anti-Corrosive Vacuum Mass Flow Controllers are equipped with a pneumatic shut-off valve for hard vacuum applications and flow 128+ gases, including corrosive gases.