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Hydrogen Mass Flow Meters & Controllers

Easy monitoring. Fast & steady control. Fill out the form below to request a quote.

  • Integrated totalizers and flow averaging remove doubt from processes, even as conditions change.
  • Custom valve sizing maximizes performance for H2.
  • Anti-corrosive builds and RH compensation maintain device integrity, even with humid gas.
  • Large measurement & control ranges provide flexibility and reduces the need for multiple devices.

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Quick Specs

Fluid H2 gas
Full-scale flow ranges 0.5 SCCM – 10,000 SLPM
Full-scale operating pressure 160 PSIA (11 barA) or 320 PSIA (22 barA)
Humidity 0-100% RH, noncondensing
Operating temperature –10°C to +60°C
Warm-up time <1 s
Accuracy ±0.6% of reading or ±0.1% of full scale, whichever is greater
Sensor response time <10 ms
Control response time As fast as 30 ms
Measurement & control ranges 0.01% – 100% of full scale (10,000:1 turndown)
Totalizer & flow averaging Every 1 ms
+ Build Options
Communication protocols Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc), RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS, PROFINET
Displays Backlit monochrome or TFT color; integrated or panel–mount
Process connections NPT, SAE, AN, BSPP/G, compression, VCR, or VCO fittings
Ingress Protection IP40 (standard); IP66, IP67
Hazardous environment ratings CSA Class 1 Div 2, ATEX Class 1 Zone 2
Humid gases Relative humidity compensation; anti-corrosive flow body and sensors

Above specifications apply to most ranges.

10,000 SLPM Alicat mass flow controller for hydrogen sits on a blank background.

10,000 SLPM controller for hydrogen.

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Fast Shipping Options

+ 5 day lead time

FastTrack products ship in 3-5 business days. Eligible hydrogen mass flow instruments include:

  • Meter ranges: 2 SCCM to 500 SLPM (standard and portable)
  • Controller ranges: 2 SCCM to 100 SLPM
  • Calibration: Standard or high accuracy
  • Display: Monochrome, color, or none
  • Communication protocol: Analog, RS-232, RS-485, or Modbus RTU
  • Electrical connector: MD8, locking industrial, DB9M, DB15
  • Fittings: NPT

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Discuss your process with an applications engineer

Questions about this product?

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