Mass Flow Controllers & Meters


MCS–Series: Anti-Corrosive Gas Mass Flow Controllers

Alicat MCS-Series anti-corrosive gas mass flow controllers rapidly reach and maintain setpoints for 130+ gases (including 32+ corrosives) – even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control of mass flow, volumetric flow, or pressure.

  • Compatibility with corrosives. Wetted materials are compatible with 32+ pure corrosive gases and most refrigerant gases.
  • High-accuracy. Get real-time measurements with NIST-traceable accuracy to ±(0.4% of reading + 0.2% of full scale) for 130+ gases, including custom mixtures defined using Alicat’s COMPOSER™ firmware.
  • Fast control, multivariate data. Immediately upon powering up, the controller is ready to control either mass flow, volumetric flow, or pressure and display instantaneous flow, pressure, and temperature readings in your choice of engineering units.
  • Easy integration. Custom process ports and electrical connectors in addition to your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications options enables easy integration into your industrial process.

Accessories included with purchase:

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Not exactly what you’re looking for?

  • We offer several additional gas mass flow controller options, including high-pressurelow pressure drop, non-corrosivebidirectional, and Coriolis devices (see “models” tab below).
  • If a gas mass flow controller is not what you need, check out our other flow or pressure control and measurement solutions.
  • Still don’t see what you need? Feel free to contact us and discuss custom build options with one of our applications engineers.
MCS-Series performance
  • Available ranges: max 0–5000 SLPM; min 0–0.5 SCCM
  • Steady state control range: 1% – 100% of full scale
  • Standard accuracy calibration, NIST-traceable: ±(0.8% of reading + 0.2% of full scale)
  • Optional high-accuracy calibration, NIST-traceable: ±(0.4% of reading + 0.2% of full scale)
  • Repeatability: ±0.2% of full scale
  • Typical control response time: as fast as 30 ms
  • Warm-up time: <1 s
MCS-Series operating conditions
  • Compatible gases: 130 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 175 PSIA
  • Reference conditions: user-selectable; defaults: 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Available device ranges for MCS-Series

Alicat offers anticorrosive controllers with custom flow ranges from 0.5 SCCM full scale to 5000 SLPM full scale, each with a control range of 1% to 100% of full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

It is important to note that some device specifications vary depending on the full scale flow rate.

If you have any questions or need additional information, reach out to our applications engineers.

Device customization | Build and performance options

  • Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: monochrome or color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
  • Wetted materials: 316L/303/430FR stainless steel; FFKM standard, FKM or EPDM as needed for some gases
  • Calibration: High-accuracy or custom
  • Performance: Flow totalizer; integrated potentiometer control

Valve sizing and PID tuning | Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MC: small proportional control valve for flow ranges of 20 SLPM and below
  • MC with PCA designation: high-performance proportional control valve used for some applications with higher pressures
  • MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
  • MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Note: Certain gases (including HCl, SO2, and Cl2) require MC with PCA designation.

Accessories | Sold separately

  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

Questions about this product?