Mass flow controllers for sub‑atmospheric flow systems
Alicat® has a range of custom solutions specifically designed to upgrade existing vacuum setups.
- No warm-up time. Deposition cycles can begin immediately after turning on flow devices.
- Millisecond response time. Flow and pressure controllers immediately respond to process condition changes, maximizing uniformity and minimizing waste.
- Multi-gas compatibility. A single device can flow any of the gases needed in the deposition process, with high accuracy.
Applications and use cases
Thin film deposition for you
Alicat Scientific’s co-operative development approach and robust manufacturing capabilities assure you of high-quality OEM outcomes. We have decades of custom solution engineering.
- Bespoke manifolds and specialized interface plates; a near-exhaustive list of communication options make our instruments compatible with most installed automation processes
- Ongoing support from our cross functional team of engineers for every step from prototyping to manufacturing
- Post-sale resources, repairs, and accessories to help you maintain and refine your product
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Ask an engineer
Your flow rate, pressure, and choice of gas can all affect which Alicat instruments work for your application.
Our Applications Engineers can answer your questions and help you find the best option.


