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    Flow Controllers & Meters

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    MCV–Series: Vacuum Gas Mass Flow Controllers

    MCV-Series Vacuum Gas Mass Flow Controllers are equipped with a pneumatic shutoff valve, and can be used to control mass flow or pressure of 98+ gases in vacuum applications.
    • Pneumatic shutoff valve. Equipped with a pneumatically actuated, positive shutoff valve to ensure no leak through.
    • Versatile & accurate. Real-time control with NIST-traceable accuracy to ±0.5% of reading or ±0.1% of full scale for 98+ gases and 20 custom-defined gas mixtures.
    • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, PROFINET, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

    Request a quote

    Device specs and customization options

    Quick Specs
    MCV-Series performance (most products)
    • Available full scale ranges: 0.5 SCCM to 20 SLPM
    • Steady state control range: 0.01% – 100% of full scale
    • Standard accuracy calibration, NIST–traceable: ±0.6% of reading or ±0.1% of full scale, whichever is greater
    • Optional high-accuracy calibration, NIST–traceable: ±0.5% of reading or ±0.1% of full scale, whichever is greater
    • Repeatability: ±(0.1% of reading + 0.02% of full scale)
    • Typical control response time: as fast as 30 ms
    • Pneumatic valve leak integrity: 1 x 10-9 atm-cc/sec helium max
    • Warm-up time: <1 s
    MCE/MCV-Series operating conditions
    • Compatible gases: 98+ preloaded selectable gas calibrations
    • Operating temperature: –10°C to +60°C
    • Full scale operating pressure: 160 PSIA
    • Max differential pressure: 75 PSID
    • Proof pressure: 175 PSIA
    • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
    See the full gas list here
    Device Ranges & Full Specs

    Devices are custom ranged from 0.5 SCCM full scale to 20 SLPM full scale with controllable ranges of 0.01% to 100% of full scale.

    For a comprehensive device guide, read the mass flow controller operating manual.

    Device Features
    Included with each device
    • Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature.
    • User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
    • Gas selectability: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
    • Gas Select COMPOSER™: Define 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer™ firmware.
    • Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
    • User adjustable setpoint ramping & limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes.
    • User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
    • Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed.
    Request at time of purchase | Free
    • Optional integrated totalizers & batch control: Totalize mass flow every 1 ms for precise tracking of total flow over time and use batch control to dispense precise volumes.
    Request at time of purchase | Additional cost
    • Optional integrated potentiometer control: Use the integrated potentiometer to adjust setpoints with the simple turn of a knob.
    Device Customization Options
    Build and performance options
    • Communication protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS, PROFINET
    • Displays: Backlit monochrome or color; integrated or panel–mount
    • Process connections: Compression, VCR, or VCO fittings
    • Wetted materials: 302, 303, 304, 316L, and 430FR stainless steel; FKM, alumina ceramic, brass, glass, gold, heat-cured epoxy, heat-cured silicone rubber, polyamide, silicon
    • Calibration: High-accuracy; custom calibration points
    Visit the device customization page
    Valve options & PID tuning

    Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

    • MCV: small proportional control valve mounted internally, plus an externally-mounted pneumatic shut-off valve located downstream

    Custom PID valve tuning ensures maximum performance for your specific process conditions.

    Learn about valve sizing and PID tuning options
    Optional Accessories
    Accessories | Sold separately
    • Process port fittings and filters
    • Power supplies
    • Communications cables and conversion cables
    • BB3 and BB9 multi-drop breakout boxes
    Visit the accessories page

    Not exactly what you’re looking for?

    • Explore other gas mass flow controller options, including anti-corrosive vacuum devices.
    • Check out our other flow or pressure control and measurement solutions.
    • Our expert team of applications engineers is available to provide additional information, discuss your application, or answer any questions you may have.

    Contact an applications engineer

    Learn about diverse flow control applications in our knowledge base
    MCV-Series vacuum mass flow controller
    Learn More
    BrochureManualMCV-Series low flow device specsMCV-Series mid flow device specs
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