IVC-Series Integrated Vacuum Controllers integrate a variety of capacitance diaphragm gauges for pressure measurement, and rapidly control the pressure of pumped vacuum processes. They are available with either inline or separately ported (isolated) vacuum sensors.
Fast & accurate. Custom valve sizing and PID tuning ensure controllers reach pressure setpoints in milliseconds and maintain control with NIST-traceable accuracy to ±0.125% of full scale.
Back-pressure control. Optional downstream valve positioning allows your IVC device to control the flow between your process chamber and vacuum pump. This option works especially well when you cannot install the controller upstream and need the same precise absolute pressure control.
Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.
Your standard Alicat IVC-Series vacuum controller is configured with our PCA-Series valves. These high-performance proportional control valves have exceptional leak integrity as well as superior corrosion resistance. These valves are available in a variety of orifice sizes suitable for flows from micro-liters per minute to tens of liters per minute.
Back pressure controllers are often supplied with Alicat’s exclusive Rolamite valves. These high-performance valves are capable of flowing up to 5,000 volumetric liters per minute.
Please get in touch with Alicat Scientific for application assistance and for alternate valve options.
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