IVC-Series: Integrated Vacuum Controllers

IVC-Series Integrated Vacuum Controllers integrate a variety of capacitance diaphragm gauges for pressure measurement, and rapidly control the pressure of pumped vacuum processes. They are available with either inline or separately ported (isolated) vacuum sensors.
  • Fast & accurate. Custom valve sizing and PID tuning ensure controllers reach pressure setpoints in milliseconds and maintain control with NIST-traceable accuracy to ±0.125% of full scale.
  • Back pressure control. Optional downstream valve positioning allows your IVC device to control the flow between your process chamber and vacuum pump. This option works especially well when you cannot install the controller upstream and need the same precise absolute pressure control.
  • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, PROFIBUS, PROFINET, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

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Accessories included with purchase

Device specs and customization options

Quick Specs
IVC-Series performance
  • Absolute pressure ranges (referenced to hard vacuum): 10, 100, and 1000 TorrA
  • Steady state control range: 0.1% – 100% of full scale
  • Standard accuracy calibration, NIST-traceable: ±0.5% of full scale (Zero-offset field correctable by vacuum tare)
  • Typical control response time: as low as 50 ms
  • Warm-up time: 2 hours (usable for most purposes in ~15 mins)
IVC-Series operating conditions
  • Gas compatibility: Compatible with a wide variety of gases, including most aggressive gases.*
  • Wetted materials: 302, 303, 304, and 430FR stainless steel, brass, FKM and FFKM, alumina, 316L stainless body optional
  • Operating temperature: +10 to +50°C
  • Burst pressure: 6 kTorrG (116 PSIG)

*For aggressive gases, please see Alicat’s gas list to verify compatibility with wetted materials. Not for use with liquid water.

Device Ranges & Full Specs
  • 10, 100, and 1000 TorrA

For specs on all devices, see the IVC-Series device specs.

For a comprehensive device guide, read the pressure controller operating manual.

Device Customization Options
Build and performance options
  • Communication protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS, PROFINET
  • Displays: Backlit monochrome or color; integrated or panel–mount
  • Process connections: Compression, SAE, VCR, or VCO fittings
Valve options

Your standard Alicat IVC-Series vacuum controller is configured with our PCA-Series valves. These high-performance proportional control valves have exceptional leak integrity as well as superior corrosion resistance. These valves are available in a variety of orifice sizes suitable for flows from micro-liters per minute to tens of liters per minute.

Back pressure controllers are often supplied with Alicat’s exclusive Rolamite valves. These high-performance valves are capable of flowing up to 5,000 volumetric liters per minute.

Please get in touch with Alicat Scientific for application assistance and for alternate valve options.

Optional Accessories
Accessories | Sold separately
  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

Not exactly what you’re looking for?

  • Check out our other pressure or flow control and measurement solutions.
  • Our expert team of applications engineers is available to provide additional information, discuss your application, or answer any questions you may have.

Contact an applications engineer

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