- Hydrogen
- Hydrogen Mass Flow Meters & Controllers
model
Hydrogen Mass Flow Meters & Controllers
Easy monitoring. Fast & steady control. Fill out the form below to request a quote.
- Integrated totalizers and flow averaging remove doubt from processes, even as conditions change.
- Custom valve sizing maximizes performance for H2.
- Anti-corrosive builds and RH compensation maintain device integrity, even with humid gas.
- Large measurement & control ranges provide flexibility and reduces the need for multiple devices.
Quick Specs
Fluid | H2 gas |
Full-scale flow ranges | 0.5 SCCM – 10,000 SLPM |
Full-scale operating pressure | 160 PSIA (11 barA) or 320 PSIA (22 barA) |
Humidity | 0-100% RH, noncondensing |
Operating temperature | –10°C to +60°C |
Warm-up time | <1 s |
Accuracy | ±0.6% of reading or ±0.1% of full scale, whichever is greater |
Sensor response time | <10 ms |
Control response time | As fast as 30 ms |
Measurement & control ranges | 0.01% – 100% of full scale (10,000:1 turndown) |
Totalizer & flow averaging | Every 1 ms |
Above specifications apply to most ranges.
10,000 SLPM controller for hydrogen.
Downloads
Meter SpecificationsController SpecificationsManual
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