Semiconductor Mass Flow and Pressure Solutions

Fast, precise gas and liquid control for fab tool build, test, gas delivery, and advanced packaging

$Macro view of a patterned silicon wafer, its grid of microchip die refracting light into bands of colour$

As the semiconductor buildout accelerates, gas panel builders, tool OEMs, and fab teams need instruments that ship in days, not months, and hold accuracy across every process gas. Alicat^® Scientific delivers both, from R&D benches to production gas delivery and back-end packaging lines. You can find our instruments across the fab, including:

Deposition and etch tool build and process R&D
Gas-panel and component verification benches
Purified nitrogen purification and distribution
Advanced-packaging bonding and vapor control
Field and lab MFC calibration and verification
FastTrack tool-rebuild replacements

Product guides

Semiconductor Product Selection Guide
Gas Select™ and COMPOSER™ gas library

$Macro view of a patterned silicon wafer, its grid of microchip die refracting light into bands of colour$

Product guides

Semiconductor Product Selection Guide
Gas Select™ and COMPOSER™ gas library

Gloved hands in a cleanroom gown wiping down a stainless steel work surface

MC-Series

MCV-Series

Deposition and etch tool build, improved.

Gas delivery designed into the PVD, sputtering, evaporation, CVD, ALD, and PECVD tools that equipment makers build, and into the R&D and characterization benches behind them. From low-SCCM precursors to high-SLPM carriers, one platform keeps tool builds and experiments moving, with no clean-materials requirement to design around.

Built for fast-moving tool builds and process R&D:

FastTrack lead times: 3 to 5 business days, every instrument made to order
True multi-gas accuracy across 130+ gases and mixtures, reselectable in the field
Fast control: under 10 ms signal response, 100 ms settling to setpoint
The protocols you already run: EtherCAT, EtherNet/IP, PROFINET, Modbus, DeviceNet
NIST-traceable, multi-point calibration on every unit

Exploring deposition and etch gas delivery? $

Applications in semiconductor

Gas-panel and component verification benches

The reference-grade meter and back-pressure controller on the bench that verifies gas sticks, gas boxes, and pressure switches before a tool ships. Fast, repeatable, and accurate across gases, with EtherCAT and VCR configurations that drop straight into test automation. The trusted test standard, not the production recipe controller.

Exploring gas panel test instruments? $

A row of automated assembly stations along a production line in a manufacturing bay

M-Series

PCD-Series

Purified nitrogen: fab gas purification and distribution

Measurement and control of high-flow purified nitrogen across the purification and distribution systems that feed a fab. Built helium-leak-checked and oxygen-cleaned for UHP service, so you can standardize on one instrument across every system you build.

Looking at UHP gas delivery? $

A row of automated production-line machines in a manufacturing bay, bundled cabling looping overhead

MCR-Series

M-Series

Advanced-packaging bonding: formic-acid vapor control

Measurement and control of nitrogen carrying a few percent formic-acid vapor into thermocompression and hybrid bonders, where the reducing atmosphere strips oxide so the bond takes. A corrosive, condensable stream that standard controllers handle poorly. Alicat’s corrosion-resistant S models (MS, MCS) hold accuracy across it, a growing back-end need in the CHIPS era.

Exploring packaging vapor control? $

Cleanroom operator inspecting a patterned semiconductor substrate panel held up to the light

MCS-Series

MS-Series

Field and lab MFC calibration and verification

NIST-traceable reference and portable standards for verifying the thousands of installed mass flow controllers in a running fab, in the metrology lab or in the field. Recurring demand that compounds as each new fab fills with tools.

Need calibration and metrology tools? $

A cleanroom operator in a bunny suit inspecting a wafer at a microscope-based semiconductor inspection tool

M-Series

MW-Series

Fast drop-in replacement for tool rebuilds and refurbs

Spec- and footprint-matched replacements for discontinued or long-lead-time controllers, shipped in days on FastTrack instead of the weeks quoted elsewhere. In a tool rebuild or refurbishment, lead time and matching the outgoing part are the whole battle. Send us the spec and we will match it.

Need a fast drop-in replacement? $