Mass Flow Controllers & Meters

model

MS–Series: Anti-Corrosive Gas Mass Flow Meters

Alicat MS-Series anti-corrosive gas mass flow meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature of 130+ gases, including 32+ corrosives.

  • Compatibility with corrosives. Wetted materials are compatible with 32+ pure corrosive gases and most refrigerant gases.
  • High-accuracy. Get real-time measurements with NIST-traceable accuracy to ±(0.4% of reading + 0.2% of full scale) for 130+ gases, including custom mixtures defined using Alicat’s COMPOSER™ firmware.
  • Fast, multivariate data. Immediately upon powering up, the meter is ready to display instantaneous flow, pressure, and temperature readings in your choice of engineering units.
  • Easy integration. Custom process ports and electrical connectors in addition to your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications options enables easy integration into your industrial process.

Accessories included with purchase:

Not exactly what you’re looking for?

  • We offer several additional gas mass flow meter options, including portable, high-pressurelow pressure drop, non-corrosive, and Coriolis devices (see “models” tab below).
  • If a gas mass flow meter is not what you need, check out our other flow or pressure measurement and control solutions.
  • Still don’t see what you need? Feel free to contact us and discuss custom build options with one of our applications engineers.

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MS-Series Performance
  • Available ranges: max 0–5000 SLPM; min 0–0.5 SCCM
  • Flow measurement range: 1% – 100% of full scale
  • Standard accuracy calibration, NIST-traceable: ±(0.8% of reading + 0.2% of full scale)
  • Optional high-accuracy calibration, NIST-traceable: ±(0.4% of reading + 0.2% of full scale)
  • Repeatability: ±0.2% of full scale
  • Typical measurement response time: <10 ms
  • Warm-up time: <1 s
MS-Series operating conditions
  • Compatible gases: 130 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 175 PSIA
  • Reference conditions: user-selectable; defaults: 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Available device ranges for MS-Series

Alicat offers anti-corrosive meters with custom flow ranges from 0.5 SCCM full scale to 5000 SLPM full scale, each with a measurement range of 1% to 100% of full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

It is important to note that some device specifications vary depending on the full scale flow rate.

If you have any questions or need additional information, reach out to our applications engineers.

Device customization | Build and performance options

  • Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: monochrome or color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
  • Wetted materials: 316L stainless steel; FFKM standard, FKM or EPDM as needed for some gases
  • Calibration: High-accuracy or custom
  • Performance: Flow totalizer

Accessories | Sold separately

  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

Questions about this product?