MS–Series: Anti-Corrosive Mass Flow Meters

MS-Series Anti-Corrosive Mass Flow Meters measure mass and volumetric flow rates for 130+ gases, including 32 corrosive gases.

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Specs, features, and customization options


Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale.

Standard specs
  • Full scale ranges: 0.5 SCCM to 5,000 SLPM
  • Measurement range: 1% – 100% of full scale
  • Accuracy: 0.8% of reading and 0.2% of full scale
  • Optional high-accuracy: 0.4% of reading and 0.2% of full scale
  • Repeatability: ±0.2% of full scale
  • Response time: <10 ms
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA (11 barA)
Device features and accessories
Build and performance options
  • Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus, PROFINET
  • Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
  • Displays: Backlit monochrome or color; integrated or panel–mount; none
  • Wetted materials: 316L stainless steel and FFKM; FKM or EPDM as needed
  • Calibration: Standard or high-accuracy; custom calibration points

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