Mass Flow Controllers & Meters

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MS–Series: Anti-Corrosive Gas Mass Flow Meters

MS-Series Anti-Corrosive Gas Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature of 130 gases, including 32 corrosives.
  • Aggressive gas compatibility. Wetted materials compatible with 32 pure corrosive gases and most refrigerant gases.
  • Versatile & accurate. Real-time measurements with NIST-traceable accuracy to ±(0.4% of reading + 0.2% of full scale) for 130 gases and 20 custom-defined mixtures.
  • Fast, multivariate data. Millisecond-response times immediately upon powering up, to display flow, pressure, and temperature readings in real-time, in your choice of engineering units.
  • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

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Accessories included with purchase

Device specs and customization options

Quick Specs
MS-Series performance
  • Available ranges: 0.5 SCCM to 5,000 SLPM
  • Flow measurement range: 1% – 100% of full scale
  • Standard accuracy calibration, NIST-traceable: ±(0.8% of reading + 0.2% of full scale)
  • Optional high-accuracy calibration, NIST-traceable: ±(0.4% of reading + 0.2% of full scale)
  • Repeatability: ±0.2% of full scale
  • Typical measurement response time: <10 ms
  • Warm-up time: <1 s
MS-Series operating conditions
  • Compatible gases: 130 preloaded selectable gas calibrations, including custom gas mixes
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 175 PSIA
  • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Device Ranges & Full Specs

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale with measurement ranges of 1% to 100% of full scale.

For a comprehensive device guide, read the mass flow meter operating manual.

Device Features and Customization Options
Features
  • Multi-variable process measurements: Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
  • User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
  • Gas selectability: Select your process gas from any of the 130 preloaded NIST-traceable gas calibrations in our gas list.
  • Gas Select COMPOSER™: Define up to 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer firmware.
  • Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
  • User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
  • Optional integrated dual flow totalizers: Totalize mass or volumetric flow every 1 ms for precise tracking of total flow over time.
Build and performance options
  • Communications protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: Backlit monochrome or color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, compression, or VCR/VCO fittings
  • Wetted materials: 316L stainless steel; FFKM standard, FKM, or EPDM as needed for some gases
  • Calibration: High-accuracy; custom calibration points
Optional Accessories
Accessories | Sold separately
  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

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