M–Series: Mass Flow Meters
M–Series Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases from 0.01% to 100% of full scale.
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FastTrack 5 day shipping options
FastTrack products ship within 5 business days. Eligible products include:
- Ranges: 2 SCCM to 500 SLPM
- Calibration: Standard or high accuracy
- Display: Monochrome, color, or none
- Communication protocol: Analog, RS-232, RS-485, or Modbus RTU
- Electrical connector: 8-pin mini DIN, DB9, DB15, or locking industrial
- Fittings: NPT
Select configurations available to purchase online
- Ranges: 0.5 SCCM to 5,000 SLPM
- Display: Monochrome
- Communication protocol: Analog, RS-232, RS-485, or Modbus RTU
- Electrical connector: 8-pin mini DIN, DB9, DB15, or M12
- Fittings: NPT
Specs, features, and customization options
Specs
Standard specs
- Full scale ranges: 0.5 SCCM to 5,000 SLPM (Devices are custom ranged)
- Measurement range: 0.01% – 100% of full scale
- Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: 0.1% of reading and 0.02% of full scale
- Response time: <10 ms
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA (11 barA)
Spec sheets
Device features and accessories
Build and performance options
- Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus, PROFINET
- Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
- Displays: Backlit monochrome or color; integrated or panel–mount; none
- Elastomers: FKM, FFKM, EPDM, Silicone
- Calibration: Standard or high-accuracy; custom calibration points
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