Flow Controllers & Meters

model

M–Series: Mass Flow Meters

M–Series Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases from 0.01% to 100% of full scale.

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Specs, features, and customization options

Specs

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale.

Standard specs
  • Full scale ranges: 0.5 SCCM to 5,000 SLPM
  • Measurement range: 0.01% – 100% of full scale
  • Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
  • Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
  • Repeatability: 0.1% of reading and 0.02% of full scale
  • Response time: <10 ms
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA (11 barA)
Device features and accesories

Features

Accessories

Build and performance options
  • Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus
  • Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
  • Displays: Backlit monochrome or color; integrated or panel–mount; none
  • Elastomers: FKM, FFKM, EPDM, Silicone
  • Calibration: Standard or high-accuracy; custom calibration points

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