Stainless Series

Anti-Corrosive Mass Flow Meters and Controllers

Mass flow meters and controllers for over 130 non-corrosive and corrosive gases. These extremely versatile instruments are used across research and industrial processes.

  • Measures mass flow, volumetric flow, temperature, and pressure
  • 1-100% Measurement range (10,000:1 turndown)
FLOW RANGES

0.5 SCCM – 10,000 SLPM

PRESSURE RANGE

11.5 – 160 PSIA

Available variants

Mass flow meter 100 SCCM

Meters

Standard mass flow meter

MS Series Meter

For most applications

most versatile

  • 130 gases, including corrosives
  • 0.5 SCCM- 10,000 SLPM
  • 11.5-160 PSIA
  • ± 0.4% of reading and ± 0.2% of full scale accuracy

Spec Sheets

Controllers

Anti-corrosive Gas Mass Flow controller

MCS Series Controller

For most applications

integrated pneumatic valve

    • 0.5 SCCM- 10,000 SLPM options
    • 1 – 100% of full scale control range
    • 30 ms control response

    Spec Sheets

    Mass flow controller for SEMI vacuum applications

    MCES Series Controller

    For SEMI vacuum applications

    SEMI form factor -1/4″ VCR

    • 0.5 SCCM – 20 SLPM options
    • 11.5-160 PSIA operating
    • 1 – 100% of full scale control range
    • 30 ms control response
    • Drop-in replacement

    Spec Sheets

      Mass flow controller for vacuum applications

      MCVS Series Controller

      For vacuum applications

      Pnuematic shutoff valve

      • Ensure process integrity
      • 0.5 SCCM- 20 SLPM options
      • ±0.2% of full scale repeatability

      Spec Sheets

      Mass flow controller for bi-directional flow applications

      MCDS Series Controller

      For bi-directional flow applications

      Control in both directions

      • 0.5 SCCM- 3,000 SLPM options
      • 11.5-160 PSIA operating
      • ±0.5% of reading accuracy

      Spec Sheets

      Mass flow controller with bi-valve for selectable steam control

      MCTS Series Controller

      For selectable steam control

      two gas sources, one device

      • 0.5 SCCM- 10,000 SLPM options
      • 11.5-160 PSIA operating
      • ±0.5% of reading accuracy

      Spec Sheets

      Build Options

      Communication Protocols
      RS-232 Serial (default)
      RS-485 Serial
      Analog
      (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
      Modbus RTU (over RS-232 or RS-485)
      Modbus TCP/IP
      DeviceNet
      EtherCAT
      EtherNet/IP
      PROFIBUS
      PROFINET
      Displays
      Backlit monochrome or TFT color; integrated or panel-mount
      Process Connections
      10-32, NPT, SAE, BSPP, VCRM, VCO, Compression
      Ingress Protection
      IP40 default; IP66, IP67
      Hazardous environment ratings
      CSA Class 1 Div 2, ATEX Class 1 Zone 2
      Humid gases
      Relative humidity compensation

      Downloads

      Manuals

      MS/MCS Series Operating ManualLatest – 10v firmware

      MS Series Operating ManualLegacy – 8v firmware (2020)

      MS Series Operating ManualLegacy – 9v firmware (2021)

      MCS Series Operating ManualLegacy – 8v firmware (2020)

      MCS Series Operating ManualLegacy – 9v firmware (2021)

      Brochures

      MS/MCS Series Brochure

      Software/Utilities

      FlowVision 2.0

      LabVIEW Driver LibraryLatest – Compatible with LabVIEW 2014+
      LabVIEW Driver LibraryLegacy – Compatible with LabVIEW 2010
      LabVIEW Driver LibraryLegacy – Compatible with LabVIEW 8.0

      Serial Terminal Utility

      Serial Address Dump Utility

      Serial Port Troubleshooter Utility

      Python Library

      CODA coriolis mass flow meter

      Liquid Flow

      Liquid flow controllers use either Coriolis or laminar flow technology to accurately control liquid flows across a wide range of applications.

      Dual valve pressure controller 5 PSIG

      Pressure Instrumentation

      Alicat offers pressure controllers for use in flowing, dead-ended, or vacuum applications.

      Custom Instrumentation

      Order mass flow controllers and meters custom-build to your specific application needs.

      Technical Reference

      Find guides, tutorials, pinout diagrams, and industrial protocol resources for your Alicat instrument.

      Applications

      DALL-E geothermal energy extraction illustration

      Gas chromatography processes

      DALL-E geothermal energy extraction illustration

      Mining, oil and gas, and hydrogen production

      Bioprocessing mass flow controller

      Bioreactors and fermentation

      Diamond mass flow controllers

      Lab-grown diamonds with chemical vapor deposition

      FastTrack Ordering

      M/MC mass flow meters and controllers that ship in just 3-5 business days.
      CALIBRATION
      Standard or High Accuracy
      DISPLAY
      Monochrome, Color, or None
      PROTOCOL
      Analog, RS-232, RS-485, or Modbus RTU
      CONNECTOR
      MD8, Locking Industrial, DB9M, DB15
      FITTINGS
      NPT

      METER RANGES

      2 SCCM - 500SLPM

      CONTROLLER RANGES

      2 SCCM - 100SLPM

      Service and Support

      Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade,
      you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.

      7641 N Business Park Dr. Tucson, AZ 85743

      Geograaf 24
      6921 EW
      Duiven, The Netherlands