Mass Flow Controllers & Meters

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale with controllable ranges of 0.01% to 100% of full scale.

• For specs on devices ranging from 0.5 SCCM full scale to 5 SCCM full scale, see the MC-Series low flow device specs.
• For specs on devices ranging from 10 SCCM full scale to 20 SLPM full scale, see the MC-Series mid flow device specs.
• For specs on devices ranging from 50 SLPM full scale to 5,000 SLPM full scale, see the MC-Series high flow device specs.

For a comprehensive device guide, read the mass flow controller operating manual.

Included with each device

• Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature.
• User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
• Gas selectability: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
• Gas Select COMPOSER™: Define 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer™ firmware.
• Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
• User adjustable setpoint ramping & limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes.
• User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
• Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed.

Request at time of purchase | Free

• Optional integrated totalizers & batch control: Totalize mass flow every 1 ms for precise tracking of total flow over time and use batch control to dispense precise volumes.

Request at time of purchase | Additional cost

• Optional integrated potentiometer control: Use the integrated potentiometer to adjust setpoints with the simple turn of a knob.

Build and performance options

• Communications protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
• Displays: Backlit monochrome or color; integrated or panel–mount
• Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, or VCO fittings
• Elastomers: Viton, FFKM, EPDM, Silicone
• Calibration: High-accuracy; custom calibration points

Valve options & PID tuning

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MC: small proportional control valve for flow ranges of 20 SLPM and below
• MC with PCA designation: high-performance proportional control valve used for some applications with higher pressures
• MCP: small proportional control valve with the largest orifice (not available for corrosive configurations)
• MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
• MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Custom PID valve tuning ensures maximum performance for your specific process conditions.

Accessories | Sold separately

• Process port fittings and filters
• Power supplies
• Communications cables and conversion cables
• BB3 and BB9 multi-drop breakout boxes

FastTrack | Devices with 10 day shipping

All FastTrack products are built to order and shipped within 10 business days. Such Fast Track eligible products include our most popular mass flow meters and controllers:

Range: 200 SCCM to 100 SLPM

Display options: Standard, TFT, no display

Electrical connectors: Default – MD8, locking industrial, DB9M, DB15

Communication protocols: RS–232, RS–485, MODBUS, MODBUS-485