Mass Flow Controllers & Meters

Model Variations

• Low pressure drop, max 60 psia (MCW)
• High pressure, 160-320 psia (MCQ)
• Enclosed valve with SEMI port length (MCE)
• Pneumatic shut-off valve for vacuum applications (MCV)
• Aggressive gases (MCS, see below)

Valve Options 

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MC – small proportional control valve for flow ranges of 20 slpm and below
• MC with PCA designation – high-performance proportional control valve used for some applications with higher pressures
• MCP – small proportional control valve with the largest orifice (not available for corrosive configurations)
• MCH – hammerhead configuration, which pairs two small valves working side-by-side as one valve
• MCR – nearly frictionless large Rolamite proportional valve for flow rates of 50 slpm and above

Corrosive Gases (MCS series)

Instruments in the standard MC series are also available with an optional “S” configuration (MCS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM. Some corrosive gases require 316L stainless steel throughout the flow path, and in this case we can upgrade both the valve (type PCA) and flow body to 316L for full-scale flow ranges of 20 slpm or less.

Build Options

• Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
• Displays (monochrome or color, integrated or panel-mount)
• Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
• Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

• Flow totalizer
• Integrated potentiometer control
• High-accuracy or custom calibration

Gas sparging for pH control

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements. Digital feedback from PLC or PC allows real-time changes to the flow rate setpoint to maintain optimal process conditions.

Custom Gas Mixing System

Mass flow controllers from Alicat are well suited to the creation of custom gas mixing systems. Their inherent flexibility and adaptability may be utilized to great effect in this type of application.

High-Temperature Mass Flow Control

Alicat’s remote electronics option separates the electronics from the sensors and flow body. This allows for flowing gases at higher temperatures through the flow body without subjecting the controller electronics to temperatures beyond their design.