Mass Flow Controllers & Meters


MC–Series: Gas Mass Flow Controllers

Alicat gas mass flow controllers are able to control either mass flow, pressure, or volumetric flow of 98+ gases, while simultaneously measuring mass flow, volumetric flow, gas pressure, and gas temperature. Controllers rapidly reach and maintain setpoints, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.

  • Flow 98+ gases. Compatible with 98+ pre-loaded gases, and equipped with COMPOSER™ firmware that allows you to define and store up to 20 custom gas mixtures.
  • Fast, accurate, multivariate data. Immediately upon powering up, the MC controller is ready to control either mass flow, volumetric flow, or pressure and display measurements in your choice of engineering units with NIST-traceable accuracy to ±0.1% of full scale.
  • Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.

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MC-Series performance (most products)
  • Available ranges: max 0–5000 SLPM; min 0–0.5 SCCM
  • Steady state control range: 0.01% – 100% of full scale
  • Standard accuracy calibration, NIST-traceable: ±0.6% of reading or ±0.1% of full scale
  • Optional high-accuracy calibration, NIST-traceable: ±0.5% of reading or ±0.1% of full scale
  • Repeatability: ±(0.1% of reading + 0.02% of full scale)
  • Typical control response time: as fast as 30 ms
  • Warm-up time: <1 s
MC-Series operating conditions
  • Compatible gases: 98 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 175 PSIA
  • Reference conditions: user-selectable; defaults: 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Available device ranges for MC-Series

Alicat offers controllers with custom flow ranges from 0.5 SCCM full scale to 5,000 SLPM full scale, each with a control range of 0.01% to 100% of full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

It is important to note that some device specifications vary depending on the full scale flow rate.

If you have any questions or need additional information, reach out to our applications engineers.

Device customization | Build and performance options

  • Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: monochrome or color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
  • Elastomers: Viton, FFKM, EPDM, Silicone
  • Calibration: High-accuracy or custom
  • Performance: Flow totalizer; integrated potentiometer control

Valve sizing and PID tuning | Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MC: small proportional control valve for flow ranges of 20 SLPM and below
  • MC with PCA designation: high-performance proportional control valve used for some applications with higher pressures
  • MCP: small proportional control valve with the largest orifice (not available for corrosive configurations)
  • MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
  • MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Accessories | Sold separately

  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes
  • FlowVision software
Gas sparging for pH control

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements. Digital feedback from PLC or PC allows real-time changes to the flow rate setpoint to maintain optimal process conditions.

Custom gas mixing system

Mass flow controllers from Alicat are well suited to the creation of custom gas mixing systems. Their inherent flexibility and adaptability may be utilized to great effect in this type of application.

High-temperature mass flow control

Alicat’s remote electronics option separates the electronics from the sensors and flow body. This allows for flowing gases at higher temperatures through the flow body without subjecting the controller electronics to temperatures beyond their design.

FastTrack | Devices with 5 day shipping

All FastTrack products are built to order and shipped within 5 business days. Such Fast Track eligible products include our most popular mass flow meters and controllers:

Range: 200 SCCM to 100 SLPM

Display options: Standard, TFT, no display

Electrical connectors: Default – MD8, locking industrial, DB9M, DB15

Communication protocols: 485, MODBUS, MODBUS-485

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