Mass Flow Controllers & Meters

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MC–Gas Mass Flow Controllers

Responsive gas flow control that suppresses pressure fluctuations

An excellent MFC needs to do only one thing well: keep the flow rate at your setpoint. Alicat’s MC series gas mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.

  • Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
  • Connected. Easy integration into your digital industrial network with Ethernet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
  • Durable. MC series flow controllers can temporarily flow liquids without getting destroyed. For environmental hardiness, we can build your MFC with IP66 ingress protection.
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Performance

  • Available ranges: max 0-5000 slpm, min 0-0.5 sccm/0-500 sμlm (see Part Numbers tab for stock ranges)
  • Turndown ratio: 200:1 (MC) or 100:1 (MCS)
  • Standard accuracy calibration, NIST-traceable: +/- (0.8% of the reading + 0.2% of the full-scale range)
  • Optional high-accuracy calibration, NIST-traceable: +/- (0.4% of the reading + 0.2% of the full-scale range)
  • Repeatability: 0.2% of the full-scale range
  • Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
  • No warm-up time required

Operating Conditions

  • Compatible gases: 98 (MC) or 130 (MCS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
  • Operating temperature: -10°C to +60°C
  • Max internal pressure (static): 145 psig (160 psia)
  • Proof pressure: 175 psig (190 psia)
  • STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

Accessories (sold separately)

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Model Variations

  • Low pressure drop, max 60 psia (MCW)
  • High pressure, 160-320 psia (MCQ)
  • Enclosed valve with SEMI port length (MCE)
  • Pneumatic shut-off valve for vacuum applications (MCV)
  • Aggressive gases (MCS, see below)

Valve Options 

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MC – small proportional control valve for flow ranges of 20 slpm and below
  • MC with PCA designation – high-performance proportional control valve used for some applications with higher pressures
  • MCP – small proportional control valve with the largest orifice (not available for corrosive configurations)
  • MCH – hammerhead configuration, which pairs two small valves working side-by-side as one valve
  • MCR – nearly frictionless large Rolamite proportional valve for flow rates of 50 slpm and above

Corrosive Gases (MCS series)

Instruments in the standard MC series are also available with an optional “S” configuration (MCS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM. Some corrosive gases require 316L stainless steel throughout the flow path, and in this case we can upgrade both the valve (type PCA) and flow body to 316L for full-scale flow ranges of 20 slpm or less.

Build Options

  • Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
  • Displays (monochrome or color, integrated or panel-mount)
  • Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
  • Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

See all options

Alicat’s MC series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.

MC-0.5SCCM-D
MC-1SCCM-D
MC-2SCCM-D
MC-5SCCM-D
MC-10SCCM-D
MC-20SCCM-D
MC-50SCCM-D
MC-100SCCM-D
MC-200SCCM-D
MC-500SCCM-D
MC-1SLPM-D
MC-2SLPM-D
MC-5SLPM-D
MC-10SLPM-D
MC-20SLPM-D

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Alicat’s MCP series offers the largest orifice in a small valve format and is suitable for use with non-corrosive gases.

MCP-10SLPM-D
MCP-20SLPM-D
MCP-50SLPM-D
MCP-100SLPM-D
MCP-250SLPM-D

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Alicat’s MCH series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.

MCH-10SLPM-D
MCH-20SLPM-D
MCH-50SLPM-D
MCH-100SLPM-D
MCH-250SLPM-D
MCH-500SLPM-D

MCPH-50SLPM-D
MCPH-100SLPM-D
MCPH-250SLPM-D

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Alicat’s MCR series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.

MCR-50SLPM-D
MCR-100SLPM-D
MCR-250SLPM-D
MCR-500SLPM-D
MCR-1000SLPM-D
MCR-1500SLPM-D
MCR-2000SLPM-D-PAR
MCR-3000SLPM-D-PAR
MCRH-5000SLPM-D-PAR

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Alicat’s MCS series uses small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.

MCS-0.5SCCM-D
MCS-1SCCM-D
MCS-2SCCM-D
MCS-5SCCM-D
MCS-10SCCM-D
MCS-20SCCM-D
MCS-50SCCM-D
MCS-100SCCM-D
MCS-200SCCM-D
MCS-500SCCM-D
MCS-1SLPM-D
MCS-2SLPM-D
MCS-5SLPM-D
MCS-10SLPM-D
MCS-20SLPM-D

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Alicat’s MCHS series is suitable for use with corrosive gases and pairs two valves working side-by-side as one to provide greater control at higher pressures.

MCHS-10SLPM-D
MCHS-20SLPM-D
MCHS-50SLPM-D
MCHS-100SLPM-D
MCHS-250SLPM-D
MCHS-500SLPM-D

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Alicat’s MCRS series is suitable for use with corrosive gases and uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates.

MCRS-50SLPM-D
MCRS-100SLPM-D
MCRS-250SLPM-D
MCRS-500SLPM-D
MCRS-1000SLPM-D
MCRS-1500SLPM-D
MCRS-2000SLPM-D-PAR
MCRS-3000SLPM-D-PAR
MCRHS-5000SLPM-D-PAR

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Gas sparging for pH control

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements. Digital feedback from PLC or PC allows real-time changes to the flow rate setpoint to maintain optimal process conditions.

See the full app note here.

 

Custom Gas Mixing System

Mass flow controllers from Alicat are well suited to the creation of custom gas mixing systems. Their inherent flexibility and adaptability may be utilized to great effect in this type of application.

See the full app note here.

 

High-Temperature Mass Flow Control

Alicat’s remote electronics option separates the electronics from the sensors and flow body. This allows for flowing gases at higher temperatures through the flow body without subjecting the controller electronics to temperatures beyond their design.

See the full app note here.

 

Alicat MC-series mass flow controller

Mass flow controllers from Alicat

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BrochureManualMC SpecsMCP SpecsMCS Specs
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