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    Flow Controllers & Meters

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    MC–Series: Gas Mass Flow Controllers

    MC-Series Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 98+ gases across a very wide flow range – 0.01% to 100% of full scale. Highly customizable for easy integration.

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    FastTrack 5 day shipping options

    FastTrack products are built to order and shipped within 5 business days. Eligible products include:

    • Range: 2 SCCM to 100 SLPM
    • Calibration: Standard or high accuracy
    • Display options: Backlit monochrome or color; no display
    • Communication protocols: Analog, RS–232, RS–485, Modbus RTU
    • Electrical connectors: MD8, locking industrial, DB9M, DB15
    • Fittings: NPT
    Request a FastTrack device

    Specs, features, and customization options

    Specs

    Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale.

    Quick specs (most products)
    • Steady state control range: 0.01% – 100% of full scale
    • NIST-traceable calibration
      • Standard accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
      • High-accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
    • Repeatability: ±(0.1% of reading + 0.02% of full scale)
    • Typical control response time: as fast as 30 ms
    • Warm-up time: <1 s
    Operating conditions
    • Compatible gases: 98+ preloaded selectable gas calibrations and 20 custom gas mixes
    • Operating temperature: –10°C to +60°C
    • Full scale operating pressure: 160 PSIA
    • Max differential pressure: 75 PSID
    • Proof pressure: 175 PSIA
    • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
    Alternative model options
    • MCQ-Series | High operating pressures (320 PSIA)
    • MCW-Series | Low pressure drops (0.07 PSID)
    • MCS-Series | Corrosive gases (128+ gases, including 32 corrosives)
    Mass flow controller operating manual
    Build & communication options
    • Communication protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
    • Display: Backlit monochrome or color; integrated or panel–mount
    • Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, or VCO fittings
    • Elastomers: Viton, FFKM, EPDM, Silicone
    Visit the device customization page
    Valve options & PID tuning

    Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions. Additionally, custom PID valve tuning ensures maximum performance for your specific process conditions.

    • MC: small proportional control valve for flow ranges of 20 SLPM and below
    • MC with PCA designation: high-performance proportional control valve used for some applications with higher pressures
    • MCP: small proportional control valve with the largest orifice (not available for corrosive configurations)
    • MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
    • MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above
    MCRH-5000slpm

    MCRH: two rolamite valves in the hammerhead configuration

    • MCT: easily switch flow control between two different flow paths
    Photo of Alicat MCT-Series stream switching gas mass flow controller

    MCT: easily switch flow control between two different flow paths

    Features
    Included with each device
    • Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature.
    • User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
    • Gas Select: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
    • Composer™: Define 20 custom gas mixtures of up to 5 constituent gases using our Composer™ firmware.
    • Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
    • User adjustable setpoint ramping & limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes.
    • User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
    • Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed.
    Request at time of purchase | Free
    • Integrated totalizers & batch control: Totalize mass flow every 1 ms for precise tracking of total flow over time and use batch control to dispense precise volumes.
    Request at time of purchase | Additional cost
    • Integrated potentiometer control: Use the integrated potentiometer to adjust setpoints with the simple turn of a knob.
    Accessories
    Included with purchase
    Sold separately
    • Process port fittings and filters
    • Power supplies
    • Communications cables and conversion cables
    • BB3 and BB9 multi-drop breakout boxes
    Visit the accessories page

    Need support?

    Our expert team of applications engineers is available to provide additional information, discuss your application, or answer any questions you may have.

    Contact an applications engineer

    Mass Flow Controller
    Learn More
    BrochureManualMC-Series 0.5 SCCM to 5 SCCM specsMC-Series 10 SCCM to 20 SLPM specsMC-Series 50 SLPM to 5000 SLPM specs
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