Products » Gas Flow » Mass Flow Controller » Vacuum Mass Flow Controllers
Vacuum Mass Flow Controllers
Mass Flow Controllers for Sub‑Atmospheric Flow Systems
Vacuum mass flow controllers are preconfigured to easily fit, and work, in vacuum processes—like CVD, ALD, PVD and coating. These instruments measure and control gas flow from 0.5 SCCM full scale to 20 SLPM full scale.
- Ultra-fast response time as low as 30 ms
- Up to 130 pre-loaded gas calibrations — fewer spares: switch without losing accuracy
- Use fewer units: As high as 0.01 – 100% measurement and control range (10,000:1 turndown)
- Accuracy as good as ± 0.4% of reading and ± 0.2% of full scale
- Laminar differential pressure (DP) mass flow measurement technology
- Measures mass flow, volumetric flow, temperature, and pressure
- Limited Lifetime Warranty
0.5 SCCM – 20 SLPM
11.5 – 160 PSIA
MCV Series Controller
Vacuum mass flow controllers
- 0.5 SCCM – 20 SLPM options
- 0.01% – 100% of full scale (10,000:1 turndown ratio)
- Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
- 98 preloaded selectable gas calibrations
- Integrated pneumatic valve
- Pneumatic valve leak integrity: 1 x 10-9 atm-cc/sec helium max
- Repeatability as good as ± (0.1% of reading + 0.02% of full scale)
SFF Series Controller
Control gas at vacuum pressures with SEMI form factor
SEMI standard footprint
- 0.5 SCCM to 20 SLPM full scale ranges
- 0.01% – 100% of full scale (10,000:1 turndown ratio)
- Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
- 98 preloaded selectable gas calibrations
- −10°C to +60°C operating temperature
- Machined fittings for fewer sealing surfaces
- Replaces MCE Series controllers
MCES Series Controller
SEMI form factor corrosion‑resistant control of gas at vacuum
Corrosion-resistant SEMI footprint
- 0.5 SCCM to 20 SLPM full scale ranges
- 0.01% – 100% of full scale (10,000:1 turndown ratio)
- Accuracy as good as ± (0.4% of reading + 0.2% of full scale)
- 128+ preloaded selectable gas calibrations
- Repeatability: ± 0.2% of full scale
- Operating temperature: −10°C to +60°C
MCVS Series Controller
Corrosion-resistant vacuum mass flow controllers
Corrosion-resistant with shut-off valve
- 0.5 SCCM to 20 SLPM full scale ranges
- 1% – 100% of full scale steady state control range
- Accuracy as good as ± 0.4% of reading and ± 0.2% of full scale
- Compatible gases: 128+ preloaded selectable gas calibrations
- Pneumatic valve leak integrity: 1 x 10-9 atm-cc/sec helium max
- ± 0.2% of full scale repeatability
Build Options
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
IO-Link
For explosive environments, see IS-Max Series
Ready for the final details?
Each product is made-to-order. Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.
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