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Products » Gas Flow » Mass Flow Controller

Mass Flow Controller Products

For control of gas flow rates

Alicat Mass Flow Controller Products
Mass flow controller products by Alicat deliver accurate measurement and ultra‑fast control. Our wide range of control types built to spec ensures users have the best possible device for their process.

Our options include…

  • Mass flow controller products from Alicat use Laminar differential pressure (DP), Coriolis, or MEMS Thermal mass flow sensing technology
  • Pre-loaded gas calibrations — switch without losing accuracy
  • Ultra-fast response time: flow control as fast as 30 ms
  • As much as 0.01 – 100% measurement and control range (10,000:1 turndown)
  • All come with digital and analog communications for control
  • Limited Lifetime Warranty
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Looking for a mass flow meter instead?
Alicat Mass Flow Controller Products
Mass Flow Controller MC-Series from Alicat

A fast, accurate mass flow controller for most applications

Standard MFC, MC Series

  • Laminar differential pressure mass flow controllers
  • Compatible with 98 gases, 130 gases with corrosion resistant models
  • 0.5 SCCM full scale – 12,000 SLPM full scale options
  • Live flow, pressure, and temp readings
  • High accuracy: as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
  • 0.01 – 100% of full scale control
  • 30 ms control response
Alicat Scientific Low Pressure Drop Mass Flow Controller

Ultra‑low pressure drop mass flow controllers

Whisper™, MCW Series

  • As little as 0.07 PSID pressure drop
  • Compatible with 98 gases
  • 0.5 SCCM full scale – 1,000 SLPM full scale
  • Live flow, pressure, and temp readings
  • For pressures 11.5 – 60 PSIA
  • High accuracy: as good as ± 0.6% of reading or ± 0.1% of full scale, whichever is greater
  • 10,000:1 turndown
Alicat Scientific CODA Coriolis Mass Flow Controller

Fluid-independent mass flow controllers

CODA™, KC Series

  • Coriolis measurement technology
  • 40 g/h full scale – 300 kg/h full scale
  • 4,000 PSIA max
  • Corrosive resistant properties
  • High accuracy for gas: as good as ± 0.5% of reading or ± 0.05% of full scale, whichever is greater
Alicat Intrinsically Safe Mass Flow Controller

Intrinsically safe mass flow controllers for continuously explosive gas atmospheres

IS-Max™, ISMC Series

  • Certified for CID1 and Class 1 Zone 0 hazardous locations
  • Compatible with 98 gases, stainless steel also available
  • 0.5 SCCM full scale – 250 SLPM full scale options
  • Live flow, pressure, and temp readings
  • 11.5 – 160 PSIA operating
  • High accuracy: as good as ± 0.5% of reading and ± 0.1% of full scale
  • 10,000:1 turndown
Alicat BASIS Controller

Ultra compact mass flow controllers for OEM applications

BASIS™ Series

  • MEMS thermal mass flow controller
  • 9 Gases
  • 100 SCCM full scale – 100 SLPM full scale
  • 0 – 145 PSIG max
  • Available as manifold or gassing array
Vacuum MCV Series Mass Flow Controller

No K-factors needed: 98 – 128 gas calibrations on board

SEMI/SEMI Vacuum, SFF/MCV Series

  • SFF and MCES have SEMI footprint for drop‑in replacement
  • 0.5 SCCM full scale – 20 SLPM full scale
  • Live flow, pressure, and temp readings
  • 160 PSIA max
  • Optional pneumatic shutoff valve on downstream side
  • External leak rate 1×10-9 atm-cc ⁄ sec

Applications

Gas Chromatology lab

Gas chromatography processes →

DALL-E geothermal energy extraction illustration

Mining, oil and gas, & hydrogen production →

Bioprocessing mass flow controller

Bioreactors and fermentation →

Diamond mass flow controllers

Lab-grown diamonds with chemical vapor deposition →

Not sure which mass flow controller is best for your application?

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Support

Thermal meter diagram

How do coriolis meters work?

Laminar DP Diagram showing laminar plates and two pressure sensors

How do laminar DP meters work?

pressure gauge

What is pressure drop?

Thermal meter diagram

How do thermal flow meters work?

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Ready for the final details?

Each product is made-to-order.  Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.

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