MCE and MCV–Vacuum Gas Mass Flow Controllers
Easy upgrade for aging thermal flow controllers.
Order Directly from Alicat
Update your vacuum deposition fixtures with a state-of-the-art Alicat MCE or MCV. The MCE features the same rapid control response of our standard mass flow controller in a form factor that includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs.
The MCV marries the MCE to an integrated pneumatic shut-off valve for hard vacuum applications. Connect an air line to the shut-off valve to prevent contamination during zero setpoint conditions.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
Alicat’s MCE series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MCE-0.5SCCM-D
MCE-1SCCM-D
MCE-2SCCM-D
MCE-5SCCM-D
MCE-10SCCM-D
MCE-20SCCM-D
MCE-50SCCM-D
MCE-100SCCM-D
MCE-200SCCM-D
MCE-500SCCM-D
MCE-1SLPM-D
MCE-2SLPM-D
MCE-5SLPM-D
MCE-10SLPM-D
MCE-20SLPM-D
Alicat’s MCES series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.
MCES-0.5SCCM-D
MCES-1SCCM-D
MCES-2SCCM-D
MCES-5SCCM-D
MCES-10SCCM-D
MCES-20SCCM-D
MCES-50SCCM-D
MCES-100SCCM-D
MCES-200SCCM-D
MCES-500SCCM-D
MCES-1SLPM-D
MCES-2SLPM-D
MCES-5SLPM-D
MCES-10SLPM-D
MCES-20SLPM-D
Alicat’s MCV series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases. The MCV also incorporates a pneumatic shut-off valve located downstream.
MCV-0.5SCCM-D
MCV-1SCCM-D
MCV-2SCCM-D
MCV-5SCCM-D
MCV-10SCCM-D
MCV-20SCCM-D
MCV-50SCCM-D
MCV-100SCCM-D
MCV-200SCCM-D
MCV-500SCCM-D
MCV-1SLPM-D
MCV-2SLPM-D
MCV-5SLPM-D
MCV-10SLPM-D
MCV-20SLPM-D
Alicat’s MCVS series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with corrosive gases. The MCVS also incorporates a pneumatic shut-off valve located downstream.
MCVS-0.5SCCM-D
MCVS-1SCCM-D
MCVS-2SCCM-D
MCVS-5SCCM-D
MCVS-10SCCM-D
MCVS-20SCCM-D
MCVS-50SCCM-D
MCVS-100SCCM-D
MCVS-200SCCM-D
MCVS-500SCCM-D
MCVS-1SLPM-D
MCVS-2SLPM-D
MCVS-5SLPM-D
MCVS-10SLPM-D
MCVS-20SLPM-D
