Mass Flow Controllers & Meters

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MCE/MCV–Series: Vacuum Gas Mass Flow Controllers

Use MCE/MCV-Series Vacuum Gas Mass Flow Controllers to update your vacuum deposition fixtures. The MCE–Series includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs, and the MCV–Series is additionally equipped with a pneumatic shut-off valve for hard vacuum applications.
  • Drop-in compatibility. Form factor includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs.
  • Versatile & accurate. Real-time control with NIST-traceable accuracy to ±0.5% of reading or ±0.1% of full scale for 98+ gases and 20 custom-defined mixtures.
  • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

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Accessories included with purchase

Device specs and customization options

Quick Specs
MCE/MCV-Series performance (most products)
  • Available ranges: max 0–20 SLPM; min 0–0.5 SCCM
  • Steady state control range: 0.01% – 100% of full scale
  • Standard accuracy calibration, NIST–traceable: ±0.6% of reading or ±0.1% of full scale
  • Optional high-accuracy calibration, NIST–traceable: ±0.5% of reading or ±0.1% of full scale
  • Repeatability: ±(0.1% of reading + 0.02% of full scale)
  • Typical control response time: as fast as 30 ms
  • Pneumatic valve leak integrity (MCV only): 1 x 10-9 atm-cc/sec helium max
  • Warm-up time: <1 s
MCE/MCV-Series operating conditions
  • Compatible gases: 98 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 175 PSIA
  • Reference conditions: user-selectable; defaults: 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Device Ranges & Full Specs

Devices are custom ranged from 0.5 SCCM full scale to 20 SLPM full scale with controllable ranges of 0.01% to 100% of full scale.

Device Customization & Accessories

Device customization | Build and performance options

  • Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: monochrome or color; integrated or panel–mount
  • Process connections: Compression, VCR, or VCO fittings
  • Elastomers: Viton, FFKM, EPDM, Silicone
  • Calibration: High-accuracy or custom
  • Performance: Flow totalizer; integrated potentiometer control

Valve sizing and PID tuning | Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MCE: small proportional control valve mounted internally
  • MCV: small proportional control valve mounted internally, plus an externally-mounted pneumatic shut-off valve located downstream

Accessories | Sold separately

  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

Not exactly what you’re looking for?

  • Explore other gas mass flow controller options, including anti-corrosive vacuum devices.
  • Check out our other flow or pressure control and measurement solutions.
  • Our expert team of applications engineers is available to provide additional information, discuss your application, or answer answer any questions you may have.

Contact an applications engineer

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