Mass Flow Controllers & Meters

Mass Flow Controllers & Meters
MCE and MCV–Vacuum Gas Mass Flow Controllers

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MCE and MCV–Vacuum Gas Mass Flow Controllers

Easy upgrade for aging thermal flow controllers

Update your vacuum deposition fixtures with a state-of-the-art Alicat MCE or MCV. The MCE features the same rapid control response of our standard mass flow controller in a form factor that includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs.

The MCV marries the MCE to an integrated pneumatic shut-off valve for hard vacuum applications. Connect an air line to the shut-off valve to prevent contamination during zero setpoint conditions.

Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
Connected. Easy integration into your digital industrial network with Ethernet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
Durable. MCE and MCV series flow controllers can temporarily flow liquids without getting destroyed.

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Performance

Available ranges: max 0-20 slpm, min 0-0.5 sccm/0-500 sμlm (see Part Numbers tab for stock ranges)
Steady state control range: 0.01% – 100% of full scale.
Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)
Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)
Repeatability: +/- 0.1% of reading + 0.02% of full scale
Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
Pneumatic valve leak integrity (MCV only): 1 x 10^-9 atm scc/sec Helium max
No warm-up time required

Operating Conditions

Compatible gases: 98 (MCE/MCV) or 130 (MCES/MCVS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 145 psig (160 psia)
Proof pressure: 175 psig (190 psia)
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

Included with your MCE or MCV:

MCE or MCV-series mass flow controller (power supply sold separately)
NIST-traceable calibration certificate
Alicat operating manual

Accessories (sold separately)

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Model Variations

Enclosed valve with SEMI port length (MCE)
Enclosed valve with additional pneumatic shut-off valve for vacuum applications (MCV)
Aggressive gases (MCS, see below)

Also available:

Standard configuration with externally mounted valve (MC)

Valve Options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

MCE – small proportional control valve mounted internally
MCV – small proportional control valve mounted internally, plus an externally-mounted pneumatic shut-off valve located downstream

Corrosive Gases (MCES and MCVS series)

Instruments in the standard MCE and MCV series are also available with an optional “S” configuration (MCES and MCVS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM.

Build Options

Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
Displays (monochrome or color, integrated or panel-mount)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Flow totalizer
Integrated potentiometer control
High-accuracy or custom calibration

See all options

Alicat’s MCE series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.

MCE-0.5SCCM-D
MCE-1SCCM-D
MCE-2SCCM-D
MCE-5SCCM-D
MCE-10SCCM-D
MCE-20SCCM-D
MCE-50SCCM-D
MCE-100SCCM-D
MCE-200SCCM-D
MCE-500SCCM-D
MCE-1SLPM-D
MCE-2SLPM-D
MCE-5SLPM-D
MCE-10SLPM-D
MCE-20SLPM-D

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Alicat’s MCES series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.

MCES-0.5SCCM-D
MCES-1SCCM-D
MCES-2SCCM-D
MCES-5SCCM-D
MCES-10SCCM-D
MCES-20SCCM-D
MCES-50SCCM-D
MCES-100SCCM-D
MCES-200SCCM-D
MCES-500SCCM-D
MCES-1SLPM-D
MCES-2SLPM-D
MCES-5SLPM-D
MCES-10SLPM-D
MCES-20SLPM-D

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Alicat’s MCV series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases. The MCV also incorporates a pneumatic shut-off valve located downstream.

MCV-0.5SCCM-D
MCV-1SCCM-D
MCV-2SCCM-D
MCV-5SCCM-D
MCV-10SCCM-D
MCV-20SCCM-D
MCV-50SCCM-D
MCV-100SCCM-D
MCV-200SCCM-D
MCV-500SCCM-D
MCV-1SLPM-D
MCV-2SLPM-D
MCV-5SLPM-D
MCV-10SLPM-D
MCV-20SLPM-D

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Alicat’s MCVS series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with corrosive gases. The MCVS also incorporates a pneumatic shut-off valve located downstream.

MCVS-0.5SCCM-D
MCVS-1SCCM-D
MCVS-2SCCM-D
MCVS-5SCCM-D
MCVS-10SCCM-D
MCVS-20SCCM-D
MCVS-50SCCM-D
MCVS-100SCCM-D
MCVS-200SCCM-D
MCVS-500SCCM-D
MCVS-1SLPM-D
MCVS-2SLPM-D
MCVS-5SLPM-D
MCVS-10SLPM-D
MCVS-20SLPM-D

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Gas Flow Control for Reactive Sputtering

Precisely control the partial pressures of reactive gases in the vacuum chamber with rapid 50-ms control response to prevent target poisoning. Fine resolution ensures the proper release of atoms. Maintain tight shut-off under no-flow conditions with the pneumatic valve.

See the full app note here.

Upgrading your old thermal mass flow controllers is just one way that Alicat makes vacuum coating easier.

Visit our vacuum coating page to learn more.