Mass Flow Controllers & Meters

model

MBQ–High Pressure Portable Gas Mass Flow Meters

High-pressure flow verification, anywhere you need it

The versatile MBQ portable flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Instant-on and real-time readings for multiple gases reduce the downtime and disruption to your process.

  • Accurate. Calibrate flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
  • Efficient. As soon as you power the MBQ on, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
  • Tough. MBQ series portable flow meters are designed to be carried and can withstand drops if they should occur.

Performance

  • Available ranges: max 0-5000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
  • Turndown ratio: 50:1
  • Calibration accuracy, NIST-traceable: +/- 2% of the full-scale range
  • Repeatability: 0.2% of the full-scale range
  • Typical measurement response time constant: 5-10 ms
  • No warm-up time required

Operating Conditions

  • Compatible gases: 98 (MBQ) or 130 (MBQS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
  • Operating temperature: -10°C to +60°C
  • Max internal pressure (static): 305 psig (320 psia)
  • Max differential pressure (inlet to outlet): 100 psid
  • Proof pressure: 400 psig (415 psia)
  • STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

Model Variations 

  • Aggressive gases (MBQS, see below)

Also available:

  • Standard configuration, up to 160 psia (MB)
  • Low pressure drop, max 60 psia (MWB)

Corrosive Gases (MBQS series)

Instruments in the high-pressure MBQ series are also available with an optional “S” configuration (MBQS) for use with corrosive gases. In this configuration, we upgrade the flow body and sensor to 316L stainless steel and the elastomers to FFKM.

Build Options

Performance Options

Alicat’s MBQ series is suitable for use with non-corrosive gases.

MBQ-10SCCM-D
MBQ-20SCCM-D
MBQ-50SCCM-D
MBQ-100SCCM-D
MBQ-200SCCM-D
MBQ-500SCCM-D
MBQ-1SLPM-D
MBQ-2SLPM-D
MBQ-5SLPM-D
MBQ-10SLPM-D
MBQ-20SLPM-D
MBQ-50SLPM-D
MBQ-100SLPM-D
MBQ-250SLPM-D
MBQ-500SLPM-D
MBQ-1000SLPM-D
MBQ-1500SLPM-D
MBQ-2000SLPM-D
MBQ-3000SLPM-D
MBQ-5000SLPM-D

Alicat’s MBQS series is suitable for use with corrosive gases.

MBQS-10SCCM-D
MBQS-20SCCM-D
MBQS-50SCCM-D
MBQS-100SCCM-D
MBQS-200SCCM-D
MBQS-500SCCM-D
MBQS-1SLPM-D
MBQS-2SLPM-D
MBQS-5SLPM-D
MBQS-10SLPM-D
MBQS-20SLPM-D
MBQS-50SLPM-D
MBQS-100SLPM-D
MBQS-250SLPM-D
MBQS-500SLPM-D
MBQS-1000SLPM-D
MBQS-1500SLPM-D
MBQS-2000SLPM-D
MBQS-3000SLPM-D
MBQS-5000SLPM-D

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