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Mass Flow Controller Products

For control of gas flow rates

Mass flow controller products by Alicat deliver accurate measurement and ultra‑fast control. Our wide range of control types built to spec ensures users have the best possible device for their process.

Our options include…

Mass flow controller products from Alicat use Laminar differential pressure (DP), Coriolis, or MEMS Thermal mass flow sensing technology
Pre-loaded gas calibrations — switch without losing accuracy
Ultra-fast response time: flow control as fast as 30 ms
As much as 0.01 – 100% measurement and control range (10,000:1 turndown)
All come with digital and analog communications for control
Limited Lifetime Warranty

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Looking for a mass flow meter instead?

Mass Flow Controller MC-Series from Alicat

Laminar differential pressure mass flow controllers
Compatible with 98 gases, 130 gases with corrosion resistant models
0.5 SCCM full scale – 12,000 SLPM full scale options
Live flow, pressure, and temp readings
High accuracy: as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
0.01 – 100% of full scale control
30 ms control response

Alicat Scientific Low Pressure Drop Mass Flow Controller

As little as 0.07 PSID pressure drop
Compatible with 98 gases
0.5 SCCM full scale – 1,000 SLPM full scale
Live flow, pressure, and temp readings
For pressures 11.5 – 60 PSIA
High accuracy: as good as ± 0.6% of reading or ± 0.1% of full scale, whichever is greater
10,000:1 turndown

Alicat CODA Coriolis Low Flow Mass Flow Controller

Coriolis measurement technology
40 g/h full scale – 300 kg/h full scale
4,000 PSIA max
Corrosive resistant properties
High accuracy for gas: as good as ± 0.5% of reading or ± 0.05% of full scale, whichever is greater

Alicat Intrinsically Safe Mass Flow Controller

Certified for CID1 and Class 1 Zone 0 hazardous locations
Compatible with 98 gases, stainless steel also available
0.5 SCCM full scale – 250 SLPM full scale options
Live flow, pressure, and temp readings
11.5 – 160 PSIA operating
High accuracy: as good as ± 0.5% of reading and ± 0.1% of full scale
10,000:1 turndown

MEMS thermal mass flow controller
9 Gases
100 SCCM full scale – 100 SLPM full scale
0 – 145 PSIG max
Available as manifold or gassing array

Mix and blend 2, 3, 4, or 6 gases—or ask!
OEM manifold designed and built to your process
MODBUS RTU and analog communications
± 0.25% flow reading repeatability
9 common gases
Control response as fast as 100 ms

SFF and MCES have SEMI footprint for drop‑in replacement
0.5 SCCM full scale – 20 SLPM full scale
Live flow, pressure, and temp readings
160 PSIA max
Optional pneumatic shutoff valve on downstream side
External leak rate 1×10^-9 atm-cc ⁄ sec

Applications

Gas chromatography processes →

DALL-E geothermal energy extraction illustration

Mining, oil and gas, & hydrogen production →

Bioreactors and fermentation →

Closeup photo of a diamond held by tweezers

Lab-grown diamonds with chemical vapor deposition →

Not sure which mass flow controller is best for your application?

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Support

How do coriolis meters work?

Laminar DP Diagram showing laminar plates and two pressure sensors

How do laminar DP meters work?

What is pressure drop?

How do thermal flow meters work?

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Custom Instrumentation

Flow and pressure instruments crafted to your specifications. Engineered to perform to your unique needs. Customize our products or get wholly new systems—like gas mixers, manifolds, or control loops.

Ask an engineer

Your flow rate, pressure, and choice of gas can all affect which Alicat instruments work for your application.

Our Applications Engineers can answer your questions and help you find the best option.

Mass Flow Controller Products

For control of gas flow rates

A fast, accurate mass flow controller for most applications

Standard MFC, MC Series

Ultra‑low pressure drop mass flow controllers

Whisper™, MCW Series

Fluid-independent mass flow controllers

CODA™, KC Series

Intrinsically safe mass flow controllers for continuously explosive gas atmospheres

IS-Max™, ISMC Series

Ultra compact mass flow controllers for OEM applications

BASIS™ Series

Space-saving OEM gas mixing control manifold

BASIS™ Compact Gassing Module

No K-factors needed: 98 – 128 gas calibrations on board

SEMI/SEMI Vacuum, SFF/MCV Series