Mass Flow Controllers

Alicat mass flow controller with optional backlit color display

Alicat mass flow controller with COMPOSER™ gas composition software and color display
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Responsive and stable control in 50 ms

Flow stability and accuracy depend on fast control response. Alicat’s mass flow controllers achieve new setpoints in 50 milliseconds (most models), yielding less waste and greater operational savings. Fast. Repeatable. Stable.

Hit the mark every time! Control flows with rock-solid stability and responsiveness. Our mass flow controllers are the fastest way to control flow rates in the world. They employ our patented differential pressure-based flow measurement technology, which is coupled with high-speed proportional control valves that achieve setpoints much faster than you can blink.

Making You Faster

  • 50-100 ms speed of response stills upstream fluctuations.
  • Accessible PID valve tuning for best speed and stability.
  • Custom valve orifice sizing yields full-range stability.
  • Control mass flow, volumetric flow or absolute pressure with one device.
  • No warm-up: ready to control process flows in one second.
Download the Mass Flow Controller Brochure

 

MC Standard Series

Control responsively and stably with the fastest flow controller in the world.

MCR High-Flow Series

Maintain speed and accuracy at high flows (50-3000 slpm). Alicat is the world’s only manufacturer of near-frictionless rolamite valves for precise control of high-rate gas flows. Proprietary orifice patterns enable us to customize a rolamite to satisfy your application and performance requirements.

MCW/MCRW Low Pressure Drop Series

Minimize system impact with pressure drops as low as 4 mbar (0.06 psid) at full-scale flows. Alicat “Whisper” Series controllers enable flow control at near-atmospheric pressures, perfect for aerospace and environmental gas analysis applications. Max range: 0-500 slpm. Click here for more information about the Whisper Series.

MCS/MCRS Anti-Corrosive Series

Withstand corrosion caused by aggressive gases with durable 316L stainless steel. All ranges available. Click here for more information about our Anti-Corrosive Series.

MCE/MCV SEMI-Footprint Series

Upgrade aging or underperforming thermal flow controllers with an easy drop-in replacement for the same form, fit and function. We can match any competing pinout configuration to ensure compatibility with your control system. Enclosed valve design conforms to SEMI footprint standards. The MCV Series further adds a downstream pneumatic shut-off valve for vacuum applications. MCE and MCV are both available with 316L stainless steel construction (MCES/MCVS). Max range: 0-20 slpm. Click here for more information about our SEMI-Footprint Series.

MCD/MCRD Bidirectional Series

Control flow in both directions with the world’s first bidirectional mass flow controller. May be customized as “Whisper” (MCDW) or anti-corrosive (MCDS) controller. All ranges available. Click here for more information about our Bidirectional Series.

Common Instrument Options

View other available instrument options here.

LC/LCR Liquid Flow Series

Control liquid flows with the fastest control response time available in a liquid flow controller (100 ms). Available in ranges to 0-5 lpm. Click here for more information about our Liquid Flow Series.

Download MC/MCR Specs MCP MCW MCS MCE MCV MCD

  • Available ranges: any full-scale range from 0-0.5 sccm to 0-3000 slpm
  • Linear range: 0.5-100% of full scale, 200:1 turndown (most series) or 1-100% of full scale, 100:1 turndown (MCS, MCES and MCVS)
  • Accuracy (NIST-traceable): +/- (0.8% of the reading + 0.2% of the full-scale range)
    • Optional high-accuracy calibration of +/- (0.4% of the reading + 0.2% of the full-scale range)
  • Pressure drop: 1-29 psi at full scale (most series) or 0.06-0.69 psi at full scale (MCW/MCRW only), depending upon flow range
  • Multi-gas calibration: up to 130 Gas Select™ gases preloaded, includes COMPOSER™ custom gas composition software.
  • Display: 2.1″ monochrome LCD digital display with touch pad interface
    • Optional 2.1″ backlit color TFT digital display with touch pad interface
  • Maximum inlet pressure: 145 psig (most series) or 50 psig (MCW/MCRW)
  • Lifetime warranty: unaffected by bumps, humidity or changes in orientation

Gas Select™ 5.0 Gas List for Alicat Mass Flow Meters and Controllers

All Alicat Scientific mass flow meters and mass flow controllers come standard with NIST Ref Prop 9 gas properties data for up to 130 preloaded gas calibrations. Users may switch between selected gases on the fly without any need for recalibration of the mass flow meter or controller. All Gas Select™ calibrations retain the instrument's specified NIST-traceable calibration accuracy. (See individual specifications sheets for details.)
Pure GasesBioreactor Gas MixesPure Corrosives
Acetylene
• Air
• Argon
• i-Butane
• n-Butane
• Carbon dioxide
• Carbon monoxide
• Deuterium
• Ethane
• Ethylene (Ethene)
• Helium
• Hydrogen
• Krypton
• Methane
• Neon
• Nitrogen
• Nitrous Oxide
• Oxygen
• Propane
• Sulfur Hexafluoride
• Xenon
• 5% CH4 95% CO2
• 10% CH4 90% CO2
• 15% CH4 85% CO2
• 20% CH4 80% CO2
• 25% CH4 75% CO2
• 30% CH4 70% CO2
• 35% CH4 65% CO2
• 40% CH4 60% CO2
• 45% CH4 55% CO2
• 50% CH4 50% CO2
• 55% CH4 45% CO2
• 60% CH4 40% CO2
• 65% CH4 35% CO2
• 70% CH4 30% CO2
• 75% CH4 25% CO2
• 80% CH4 20% CO2
• 85% CH4 15% CO2
• 90% CH4 10% CO2
• 95% CH4 5% CO2
*These gases require MS/MCS-Series instruments.
• Ammonia
• Butylene (1-Butene)
• Cis-Butene
• Iso-Butene
• Trans-Butene
• Carbonyl Sulfide
• Chlorine
• Dimethylether
• Hydrogen Sulfide
• Nitrogen Trifluoride
• Nitric Oxide
• Propylene
• Silane
• Sulfur Dioxide
Breathing GasesFuel Gas MixesRefrigerants
• EAN-32
• EAN-36
• EAN-40
• EA-40
• EA-60
• EA-80
• Heliox-20
• Heliox-21
• Heliox-30
• Heliox-40
• Heliox-50
• Heliox-60
• Heliox-80
• Heliox-99
• Metabolic Exhalant
Coal Gas 50% H2+35% CH4+10% CO+5% C2H4
Endothermic Gas 75% H2+25% N2
HHO 66.67% H2+33.33% O2
LPG HD-5 96.1% C3H8+1.5% C2H6+0.4% C3H6+1.9% n-C4H10
LPG HD-10 85% C3H8+10% C3H6+ 5% n-C4H10
Nat Gas 93% CH4+3% C2H6+1% C3H8+2% N2+1% CO2
Nat Gas 95% CH4+3% C2H6+1% N2+ 1% CO2
Nat Gas 95.2% CH4+2.5% C2H6+0.2% C3H8+0.1% C4H10+1.3% N2+0.7% CO2
Syn Gas 40% H2+29% CO+20% CO2+11% CH4
Syn Gas 64% H2+28% CO+1% CO2+7% CH4
Syn Gas 70% H2+4% CO+25% CO2+1% CH4
Syn Gas 83% H2+14% CO+3% CH4
*These gases require MS/MCS-Series instruments.
• R-11
• R-14
• R-22
• R-23
• R-32
• R-115
• R-116
• R-124
• R-125
• R-134A
• R-142B
• R-143A
• R-152A
• RC-318
• R-404A
• R-407C
• R-410A
• R-507A
Chromatography GasesOxygen Concentrator Gas Mixes
• P-5
• P-10
• 89% O2+7% N2+4% Ar
• 93% O2+3% N2+4% Ar
• 95% O2+1% N2+4% Ar
Welding GasesStack/Flue Gas MixesLaser Gas Mixes
• C-2
• C-8
• C-10
• C-15
• C-20
• C-25
• C-50
• C-75
• He-25
• He-50
• He-75
• He-90
• A1025
• Stargon CS
• 2.5% O2+10.8% CO2+85.7% N2+1% Ar
• 2.9% O2+14% CO2+82.1% N2+1% Ar
• 3.7% O2+15% CO2+80.3% N2+1% Ar
• 7% O2+12% CO2+80% N2+1% Ar
• 10% O2+9.5% CO2+79.5% N2+1% Ar
• 13% O2+7% CO2+79% N2+1% Ar
• 4.5% CO2+13.5% N2+82% He
• 6% CO2+14% N2+80% He
• 7% CO2+14% N2+79% He
• 9% CO2+15% N2+76% He
• 9.4% CO2+19.25% N2+71.35% He
• 9% Ne+91% He
  • Mass flow controller (power supply sold separately)
  • NIST-traceable calibration certificate
  • Alicat operating manual

Compatible Accessories:

The following tables list base part numbers and US base prices for Alicat mass flow controllers. Actual part numbers may vary based on selected options, some of which may also increase the price of the unit. Please call 888-290-6060 or email us to speak with an Alicat sales engineer about available customizations.

Jump to MCW “Whisper” Series pricing.
Jump to MCS Anti-Corrosive Series pricing.

Alicat MC-Series Mass Flow Controllers

Full-scale Ranges
Monochrome Display
Color Display
0.5 sccm to 1.0 sccm$1,850.00$2,000.00
2 sccm to 5 sccm$1,650.00$1,800.00
10 sccm to 50 sccm$1,400.00$1,550.00
100 sccm to 10 slpm$1,200.00$1,350.00
20 slpm$1,400.00$1,550.00
50 slpm$1,700.00$1,850.00
100 slpm$1,900.00$2,050.00
250 slpm$2,050.00$2,200.00
500 slpm$2,150.00$2,300.00
1000 slpm$2,450.00$2,600.00
1500 slpm$2,950.00$3,100.00
2000 slpm$3,400.00$3,550.00
3000 slpm$3,850.00$4,000.00

Alicat MCW-Series Mass Flow Controllers

Full-scale Ranges
Monochrome Display
Color Display
0.5 sccm to 1.0 sccm$2,150.00$2,300.00
2 sccm to 5 sccm$1,950.00$2,100.00
10 sccm to 50 sccm$1,700.00$1,850.00
100 sccm to 2 slpm$1,500.00$1,650.00
5 slpm to 10 slpm$1,900.00$2,050.00
20 slpm$2,100.00$2,250.00
40 slpm$2,250.00$2,400.00
50 slpm$2,400.00$2,550.00
100 slpm$2,600.00$2,750.00
250 slpm$2,750.00$2,900.00
500 slpm$3,700.00$3,850.00

Alicat MCS-Series Mass Flow Controllers

Full-scale Ranges
Monochrome Display
Color Display
0.5 sccm to 1 sccm$2,200.00$2,350.00
2 sccm to 5 sccm$2,050.00$2,200.00
10 sccm to 50 sccm$1,850.00$2,000.00
100 sccm to 10 slpm$1,650.00$1,800.00
20 slpm$1,850.00$2,000.00
50 slpm$2,150.00$2,300.00
100 slpm$2,300.00$2,450.00
250 slpm$2,600.00$2,750.00
500 slpm$2,700.00$2,850.00
1000 slpm$2,950.00$3,100.00
1500 slpm$3,400.003,550.00
2000 slpm$3,750.00$3,900.00
3000 slpm$4,200.00$4,350.00

Gas Sparging for pH Control

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements. Digital feedback from PLC or PC allows real-time changes to the flow rate setpoint to maintain optimal process conditions.

See the full app note here.

Gas sparging of CO2 for pH control using an Alicat mass flow controller

Gas sparging of CO2 for pH control using an Alicat mass flow controller

Alicat MC-series mass flow controller, shown with optional backlit color display

Alicat MC-series mass flow controller, shown with optional backlit color display

Alicat MCR-series high-flow mass flow controller

Alicat MCR-series high-flow mass flow controller

Alicat MCRW high-flow "Whisper" series mass flow controller, shown with downstream valve

Alicat MCRW high-flow “Whisper” series mass flow controller, shown with downstream valve

Alicat MCS-series mass flow controller for aggressive gases, shown with 15-pin D-sub connector

Alicat MCS-series mass flow controller for aggressive gases, shown with 15-pin D-sub connector

Alicat MCE-series mass flow controller with SEMI footprint, shown with 9-pin D-sub connector

Alicat MCE-series mass flow controller with SEMI footprint, shown with 9-pin D-sub connector

Alicat MCV-Series mass flow controller for vacuum, with pneumatic shut-off valve

Alicat MCV-Series mass flow controller for vacuum, with pneumatic shut-off valve

MCD-Series bidirectional mass flow controller, shown with IPC option

MCD-Series bidirectional mass flow controller, shown with IPC option

Ask Alicat: How fast is an Alicat mass flow controller?

Flow stability and accuracy depend on fast control response, and Alicat is the fastest. This video demonstrates 0 to 100% setpoint changes with settling times of less than 30 ms and control T/C of only 7.4 ms.

Alicat Turndown Ratio for Mass Flow

Alicat demonstrates an incredible 5000:1 turndown ratio, commanding a 5 slpm (5000 sccm) mass flow controller to control down to 1 sccm!

Ask Alicat: How do you dispense fluids in batches?

Alicat’s Precision Dispensing Package combines our optional integrated flow totalizer with fast valve control for batch processing on our flow controllers for gases and liquids. This video shows how easy it is to use, right from the touch panel display.

Ask Alicat: What Is Pressure Drop?

Pressure drop is the amount of line pressure that is permanently lost as gas passes through an instrument in a gas line. Alicat Scientific demonstrates the importance of pressure drop for gas flow processes and shows how you can greatly reduce pressure drop by using its Whisper Series of mass flow instruments.

Ask Alicat: How tough is an Alicat flow meter? (Drop Test)

We drop an Alicat portable mass flow meter onto unforgiving concrete from increasing heights to test the toughness of this product. After each drop, we compare its measurement to the pre-test baseline.

Ask Alicat: How do you control flow in TWO directions?

Alicat Scientific introduces the world’s first bidirectional flow and pressure controller: the dual-valve MCD. Control mass flow, volumetric flow and pressure in both directions with stand-alone control and 30 on-board gas calibrations over a 200:1 turndown range. Or control pressure or flow into a closed process, and vent the volume with no need for additional bleed valves or continuous outgassing. The MCD is the single most versatile flow controller in the world.

Changing valve position on Alicat small valve mass flow and pressure controllers