Mass Flow Meters

For measurement of gas flow

Mass flow meter products by Alicat Scientific provide incredible measurement accuracy. A wide range of flow rates and custom options ensure users have the best device for their process.

Explore mass flow meter product lines with features like…

As much as 10,000:1 turndown ratio
Up to 130+ user‑selectable gas calibrations onboard
Accuracy as good as: ± 0.5% of reading or ± 0.05% of full scale, whichever is greater
Available certifications for hazardous environments

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Looking for a mass flow controller instead?

A mass flow meter measures gas flow rate in standardized mass units — SCCM, SLM, g/min — independent of changes in line pressure or temperature. Alicat’s instruments use thermal, Coriolis, or laminar DP measurement technology to cover flow ranges from 0.5 SCCM to 12,000 SLPM across more than 130 gases, with response times as fast as 4 ms.

Compatible with 98 gases, 130 gases with corrosion resistant models
0.5 SCCM – 12,000 SLPM options
Live flow, pressure, and temp readings
High accuracy: as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
0.01 – 100% of full scale metering

Alicat Scientific Low Pressure Drop Mass Flow Meter

As little as 0.07 PSID pressure drop
Compatible with 98 gases, stainless steel also available
0.5 SCCM – 1,000 SLPM full scale
Live flow, pressure, and temp readings
For pressures 11.5 – 60 PSIA
High accuracy: as good as ± 0.6% of reading or ± 0.1% of full scale, whichever is greater
10,000:1 turndown

Alicat CODA Coriolis Low Flow Mass Flow Meter

Coriolis mass flow measurement technology
40 g/h – 300 kg/h full scale
4,000 PSIA max
Corrosive resistant properties
High accuracy for gas: as good as ± 0.5% of reading or ± 0.05% of full scale, whichever is greater

Alicat Scientific Intrinsically Safe Mass Flow Meter

Certified for C1D1, C1D2 (ATEX Class 1 Zones 0, 1 & 2) explosive atmospheres
98 pre-loaded gas calibrations, with more on stainless steel models
0.5 SCCM – 5,000 SLPM full scale
Instant flow, pressure and temp readings with graphic interface and data logging
11.5 – 160 PSIA operating
High accuracy: as good as ± 0.5% of reading and ± 0.1% of full scale
10,000:1 turndown

9 gases
100 SCCM – 100 SLPM full scale
0 – 145 PSIG max 
Available as manifold gassing array

98 gases
0.5 SCCM – 12,000 SLPM full scale
Live flow, pressure, and temp readings
320 PSIA max
High accuracy: as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater