Specification sheets

Ranges refer to the full scale flow rate of controllers. Select the option that includes your highest flow rate.

• BC-Series (BASIS™): OEM mass flow controllers
  • 100 SCCM to 50 SLPM
• BIO-Series: Bio industry flow controllers
  • 1 SCCM to 5 SCCM
  • 10 SCCM to 20 SLPM
  • 50 SLPM to 500 SLPM
• CODA KC-Series: Coriolis controllers
  • 40 g/h to 300 kg/h
• CODA KF-Series: Pump controllers
  • 40 g/h to 300 kg/h
• CODA KG-Series: Mass flow pump systems
  • 1 kg/h to 100 kg/h
• MC/MCP/MCR-Series: Mass flow controllers
  • 0.5 SCCM to 5 SCCM
  • 10 SCCM to 20 SLPM
  • 50 SLPM to 5,000 SLPM
• MCD/MCRD-Series: Bidirectional mass flow controllers
  • 0.5 SCCM to 5 SCCM
  • 10 SCCM to 20 SLPM
  • 50 SLPM to 3,000 SLPM
• MCDW-Series: Low pressure drop bidirectional mass flow controllers
  • 0.5 SCCM to 500 SLPM
• MCE-Series: SEMI compatible mass flow controllers
  • 0.5 SCCM to 5 SCCM
  • 10 SCCM to 20 SLPM
• MCES-Series: Anti-corrosive SEMI compatible mass flow controllers
  • 0.5 SCCM to 20 SLPM
• MCQ-Series: High pressure mass flow controllers
  • 10 SCCM to 20 SLPM
  • 50 SLPM to 3,000 SLPM
• MCS/MCRS-Series: Anti-corrosive mass flow controllers
  • 0.5 SCCM to 5,000 SLPM
• MCV-Series: Vacuum mass flow controllers
  • 0.5 SCCM to 5 SCCM
  • 10 SCCM to 20 SLPM
• MCVS-Series Anti-corrosive vacuum mass flow controllers
  • 0.5 SCCM to 20 SLPM
• MCW-Series (Whisper™): Low pressure drop mass flow controllers
  • 0.5 SCCM to 5 SCCM
  • 10 SCCM to 100 SLPM
  • 250 SLPM to 1,000 SLPM
• Pascal-Series: Designed for diamond manufacturing
  • 0.5 SCCM to 5 SCCM
  • 10 SCCM to 20 SLPM
• SFF-Series: Vacuum coating mass flow controllers
  • 0.5 SCCM to 5 SCCM
  • 10 SCCM to 20 SLPM

Ranges refer to the full scale flow rate of devices. Select the option that includes your highest flow rate.

• CODA K-Series: Coriolis meters
  • 40 g/h to 300 kg/h
• CODA KC-Series: Coriolis controllers
  • 40 g/h to 300 kg/h
• CODA KF-Series: Pump controllers
  • 40 g/h to 300 kg/h
• CODA KG-Series: Mass flow pump systems
  • 1 kg/h to 100 kg/h
• L/LS/LB/LBS-Series: Liquid flow meters
  • 0.5 CCM to 10 LPM
• LC/LCS Liquid flow controllers
  • 0.5 CCM to 10 LPM

• EP-Series: OEM electronic pressure transducers
• EPC/EPCD-Series: OEM electronic pressure controllers
• IVC/IVCD-Series: Integrated vacuum controllers
• P/PS-Series: Pressure transducers
• PC/PCS-Series: Pressure controllers for flowing processes
• PCD/PCDS-Series: Dual-valve controllers for closed volumes
• PC Pascal-Series: Pressure controllers designed for diamond manufacturing

• RD cut-out: Remote display template for panel
• RDE cut-out: Remote display enclosure for panel