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Mass Flow Controllers & Meters

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MQ–High Pressure Gas Mass Flow Meters

High-pressure, multivariate flow measurement in real time

The versatile MQ flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Measure mass flow, volumetric flow, line pressure and line temperature simultaneously, all in real time.

  • Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
  • Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
  • Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
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Performance

  • Available ranges: max 0-5000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
  • Turndown ratio: 50:1
  • Calibration accuracy, NIST-traceable: +/- 2% of the full-scale range
  • Repeatability: 0.2% of the full-scale range
  • Typical measurement response time constant: 5-10 ms
  • No warm-up time required

Operating Conditions

  • Compatible gases: 98 (MQ) or 130 (MQS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
  • Operating temperature: -10°C to +60°C
  • Max internal pressure (static): 305 psig (320 psia)
  • Max differential pressure (inlet to outlet): 100 psid
  • Proof pressure: 400 psig (415 psia)
  • STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

Accessories (sold separately)

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Model Variations 

  • Aggressive gases (MQS, see below)
  • Portable with rechargeable battery (MBQ)

Also available:

  • Standard configuration, up to 160 psia (M)
  • Low pressure drop, max 60 psia (MW)

Corrosive Gases (MQS series)

Instruments in the high-pressure MQ series are also available with an optional “S” configuration (MQS) for use with corrosive gases. In this configuration, we upgrade the flow body and sensor to 316L stainless steel and the elastomers to FFKM.

Build Options

  • Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
  • Displays (monochrome or color, integrated or panel-mount)
  • Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
  • Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

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Alicat’s MQ series is suitable for use with non-corrosive gases.

MQ-10SCCM-D
MQ-20SCCM-D
MQ-50SCCM-D
MQ-100SCCM-D
MQ-200SCCM-D
MQ-500SCCM-D
MQ-1SLPM-D
MQ-2SLPM-D
MQ-5SLPM-D
MQ-10SLPM-D
MQ-20SLPM-D
MQ-50SLPM-D
MQ-100SLPM-D
MQ-250SLPM-D
MQ-500SLPM-D
MQ-1000SLPM-D
MQ-1500SLPM-D
MQ-2000SLPM-D
MQ-3000SLPM-D
MQ-5000SLPM-D

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Alicat’s MQS series is suitable for use with corrosive gases.

MQS-10SCCM-D
MQS-20SCCM-D
MQS-50SCCM-D
MQS-100SCCM-D
MQS-200SCCM-D
MQS-500SCCM-D
MQS-1SLPM-D
MQS-2SLPM-D
MQS-5SLPM-D
MQS-10SLPM-D
MQS-20SLPM-D
MQS-50SLPM-D
MQS-100SLPM-D
MQS-250SLPM-D
MQS-500SLPM-D
MQS-1000SLPM-D
MQS-1500SLPM-D
MQS-2000SLPM-D
MQS-3000SLPM-D
MQS-5000SLPM-D

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Mass flow meter for high pressure applications
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