MQ–Series: High Pressure Mass Flow Meters

MQ–Series High Pressure Mass Flow Meters measure mass and volumetric flow rates at operating pressures up to 320 PSIA (22 barA).

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Specs, features, and customization options


Devices are custom ranged from 10 SCCM full scale to 10,000 SLPM full scale.

Standard specs
  • Full scale ranges: 10 SCCM to 5,000 SLPM for all gases (10,000 SLPM for H2)
  • Measurement range: 0.1% – 100% of full scale
  • Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
  • Repeatability: ±0.1% of full scale
  • Response time: <10 ms
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 320 PSIA (22 barA)
Device features and accessories



Build and performance options
  • Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus, PROFINET
  • Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
  • Displays: Backlit monochrome or color; integrated or panel–mount; none
  • Elastomers: FKM, FFKM, EPDM, Silicone
  • Calibration: Custom calibration points

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