Mass Flow Controllers & Meters

Performance

• Available ranges: max 0-5000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
• Flow measurement range: 0.01% – 100% of full scale.
• Standard accuracy calibration, NIST-traceable: +/- (0.6% of reading on most instruments.)
• Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of reading on most instruments.)
• Repeatability: 0.1% of reading + 0.02% of full scale.
• Typical measurement response time constant: 5-10 ms.
• No warm-up time required.

Operating Conditions

• Compatible gases: 98 (MQ) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
• Operating temperature: -10°C to +60°C
• Max internal pressure (static): 305 psig (320 psia)
• Max differential pressure (inlet to outlet): 100 psid
• Proof pressure: 400 psig (415 psia)
• STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

• High-pressure mass flow meter (power supply sold separately)
• NIST-traceable calibration certificate
• Alicat operating manual

Accessories (sold separately)

• Process port fittings and filters
• Power supplies
• Communications cables and conversion cables
• BB3 and BB9 multi-drop breakout boxes
• Flow Vision software