Mass Flow Controllers & Meters

model

MQ–Series: High-Pressure Gas Mass Flow Meters

Alicat MQ-Series High-Pressure Gas Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature in real time for operating pressures up to 320 PSIA.

  • High-accuracy. Get real-time measurements of flows up to 320 PSIA with NIST-traceable accuracy to ±0.6% of reading or ±0.1% of full scale for 98+ gases, including custom mixtures defined using Alicat’s COMPOSER™ firmware.
  • Fast, multivariate data. Immediately upon powering up, the meter is ready to display instantaneous flow, pressure, and temperature readings in your choice of engineering units.
  • Easy integration. Custom process ports and electrical connectors in addition to your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications options enables easy integration into your industrial process.

Accessories included with purchase:

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Not exactly what you’re looking for?

  • We offer several additional gas mass flow meter options, including portablestandard pressure, anti-corrosivelow pressure drop, and Coriolis devices (see “models” tab below).
  • If a gas mass flow meter is not what you need, check out our other flow or pressure measurement and control solutions.
  • Still don’t see what you need? Feel free to contact us and discuss custom build options with one of our applications engineers.
MQ-Series performance (most products)
  • Available ranges: max 0–3000 SLPM; min 0–10 SCCM
  • Flow measurement range: 0.1% – 100% of full scale
  • Accuracy calibration, NIST-traceable: ±0.6% of reading or ±0.1% of full scale
  • Repeatability: ±0.1% of full scale
  • Typical measurement response time: <10 ms
  • Warm-up time: <1s
MQ-Series operating conditions
  • Compatible gases: 98 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 320 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 400 PSIA
  • Reference conditions: user-selectable; defaults: 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Available device ranges for MQ-Series

Alicat offers high pressure meters with custom flow ranges from 10 SCCM full scale to 3000 SLPM full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

It is important to note that some device specifications vary depending on the full scale flow rate.

If you have any questions or need additional information, reach out to our applications engineers.

Device customization | Build and performance options

  • Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: monochrome or color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
  • Elastomers: Viton, FFKM, EPDM, Silicone
  • Calibration: Custom
  • Performance: Flow totalizer

Accessories | Sold separately

  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

Questions about this product?