Mass Flow Controllers & Meters

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MQ–Series: High Pressure Gas Mass Flow Meters

MQ–Series High Pressure Gas Mass Flow Meters simultaneously measure mass flow and volumetric flow rates for operating pressures up to 320 PSIA.
  • Versatile & accurate. Real-time measurements in environments up to 320 PSIA with NIST-traceable accuracy to ±0.6% of reading or ±0.1% of full scale for 98+ gases and custom-defined mixtures.
  • Fast, multivariate data. Millisecond-response times immediately upon powering up, to display flow, pressure, and temperature readings in real-time, in your choice of engineering units.
  • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

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Accessories included with purchase

Device specs and customization options

Quick Specs
MQ-Series performance (most products)
  • Available full scale ranges: 10 SCCM to 3,000 SLPM
  • Flow measurement range: 0.1% – 100% of full scale
  • Accuracy calibration, NIST-traceable: ±0.6% of reading or ±0.1% of full scale, whichever is greater
  • Repeatability: ±0.1% of full scale
  • Typical measurement response time: <10 ms
  • Warm-up time: <1s
MQ-Series operating conditions
  • Compatible gases: 98+ preloaded selectable gas calibrations, including custom gas mixes
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 320 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 400 PSIA
  • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Device Ranges & Full Specs

Devices are custom ranged from 10 SCCM full scale to 3,000 SLPM full scale with measurement ranges from 0.5% to 100% of full scale to 0.1% to 100% of full scale.

For a comprehensive device guide, read the mass flow meter operating manual.

Device Features and Customization Options
Features
  • Multi-variable process measurements: Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
  • User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
  • Gas selectability: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
  • Gas Select COMPOSER™: Define up to 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer firmware.
  • Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
  • User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
  • Optional integrated dual flow totalizers: Totalize mass or volumetric flow every 1 ms for precise tracking of total flow over time.
Build and performance options
  • Communications protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: Backlit monochrome or color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, compression, or VCR/VCO fittings
  • Elastomers: Viton, FFKM, EPDM, Silicone
  • Calibration: Custom calibration points
Optional Accessories
Accessories | Sold separately
  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

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