Flow Controllers & Meters

Flow Controllers & Meters
MQ–Series: High Pressure Mass Flow Meters

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MQ–Series: High Pressure Mass Flow Meters

MQ–Series High Pressure Mass Flow Meters measure mass and volumetric flow rates at operating pressures up to 320 PSIA (22 barA).

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Specs, features, and customization options

Specs

Devices are custom ranged from 10 SCCM full scale to 3,000 SLPM full scale.

Standard specs

Full scale ranges: 10 SCCM to 3,000 SLPM
Measurement range: 0.1% – 100% of full scale
Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
Repeatability: ±0.1% of full scale
Response time: <10 ms
Operating temperature: –10°C to +60°C
Full scale operating pressure: 320 PSIA (22 barA)

Mass flow meter operating manual

Device features and accessories

Features

Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
Field-adjustable engineering units and STP/NTP conditions.
Select process gas from 98+ preloaded NIST-traceable gas calibrations.
Define and store 20 custom gas mixtures of up to 5 constituent gases.
Read measurements from the backlit display and control configuration using the integrated touchpad.
Optional integrated dual flow totalizers and alarms.

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Accessories

FlowVision software (download)

Power supply, cables, and accessories sold separately

Build and performance options

Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus
Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
Displays: Backlit monochrome or color; integrated or panel–mount; none
Elastomers: FKM, FFKM, EPDM, Silicone
Calibration: Custom calibration points

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