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    Mass Flow Controllers & Meters

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    MQ–High Pressure Gas Mass Flow Meters

    High-pressure, multivariate flow measurement in real time

    The versatile MQ flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Measure mass flow, volumetric flow, line pressure and line temperature simultaneously, all in real time.

    • Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
    • Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
    • Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with EtherNet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
    • Portable. MBQ series portable flow meters are designed to be carried and can withstand drops if they should occur.
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    Performance

    • Available ranges: max 0-5000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
    • Flow measurement range: 0.01% – 100% of full scale.
    • Standard accuracy calibration, NIST-traceable: +/- (0.6% of reading on most instruments.)
    • Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of reading on most instruments.)
    • Repeatability: 0.1% of reading + 0.02% of full scale.
    • Typical measurement response time constant: 5-10 ms.
    • No warm-up time required.

    Operating Conditions

    • Compatible gases: 98 (MQ) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
    • Operating temperature: -10°C to +60°C
    • Max internal pressure (static): 305 psig (320 psia)
    • Max differential pressure (inlet to outlet): 100 psid
    • Proof pressure: 400 psig (415 psia)
    • STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

    In the box

    Accessories (sold separately)

    Find accessories

    Model Variations 

    • Portable with rechargeable battery (MBQ)

    Also available:

    • Standard configuration, up to 160 psia (M)
    • Low pressure drop, max 60 psia (MW)

    Build Options

    • Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
    • Displays (monochrome or color, integrated or panel-mount)
    • Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
    • Elastomers (Viton, FFKM, EPDM, Silicone)

    Performance Options

    See all options

    Alicat’s MQ series is suitable for use with non-corrosive gases.

    MQ-10SCCM-D
    MQ-20SCCM-D
    MQ-50SCCM-D
    MQ-100SCCM-D
    MQ-200SCCM-D
    MQ-500SCCM-D
    MQ-1SLPM-D
    MQ-2SLPM-D
    MQ-5SLPM-D
    MQ-10SLPM-D
    MQ-20SLPM-D
    MQ-50SLPM-D
    MQ-100SLPM-D
    MQ-250SLPM-D
    MQ-500SLPM-D
    MQ-1000SLPM-D
    MQ-2000SLPM-D
    MQ-3000SLPM-D
    MQ-5000SLPM-D

    ALICAT mass flow meter, available with a standard monochrome display
    Learn More
    BrochureManualMQ Mid Flow SpecsMQ High Flow Specs
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