MQ–Series: High Pressure Mass Flow Meters
MQ–Series High Pressure Mass Flow Meters measure mass and volumetric flow rates at operating pressures up to 320 PSIA (22 barA).
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Specs, features, and customization options
Specs
Devices are custom ranged from 10 SCCM full scale to 3,000 SLPM full scale.
Standard specs
- Full scale ranges: 10 SCCM to 3,000 SLPM
- Measurement range: 0.1% – 100% of full scale
- Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: ±0.1% of full scale
- Response time: <10 ms
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 320 PSIA (22 barA)
Device features and accessories
Build and performance options
- Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus, PROFINET
- Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
- Displays: Backlit monochrome or color; integrated or panel–mount; none
- Elastomers: FKM, FFKM, EPDM, Silicone
- Calibration: Custom calibration points
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