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Mass Flow Controllers & Meters

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MQ–High Pressure Gas Mass Flow Meters

High-pressure, multivariate flow measurement in real time

The versatile MQ flow meter reduces the time it takes to verify or validate flows that are operating at high pressures (160-320 psia). Measure mass flow, volumetric flow, line pressure and line temperature simultaneously, all in real time.

  • Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 1/50th of full scale, or define your own gas composition with COMPOSER™.
  • Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
  • Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
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Performance

  • Available ranges: max 0-5000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
  • Flow measurement range: 0.01% – 100% of full scale.
  • Standard accuracy calibration, NIST-traceable: +/- (0.6% of reading on most instruments.)
  • Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of reading on most instruments.)
  • Repeatability: 0.1% of reading + 0.02% of full scale.
  • Typical measurement response time constant: 5-10 ms.
  • No warm-up time required.

Operating Conditions

  • Compatible gases: 98 (MQ) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
  • Operating temperature: -10°C to +60°C
  • Max internal pressure (static): 305 psig (320 psia)
  • Max differential pressure (inlet to outlet): 100 psid
  • Proof pressure: 400 psig (415 psia)
  • STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

Accessories (sold separately)

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Model Variations 

  • Portable with rechargeable battery (MBQ)

Also available:

  • Standard configuration, up to 160 psia (M)
  • Low pressure drop, max 60 psia (MW)

Build Options

  • Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
  • Displays (monochrome or color, integrated or panel-mount)
  • Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
  • Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

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Alicat’s MQ series is suitable for use with non-corrosive gases.

MQ-10SCCM-D
MQ-20SCCM-D
MQ-50SCCM-D
MQ-100SCCM-D
MQ-200SCCM-D
MQ-500SCCM-D
MQ-1SLPM-D
MQ-2SLPM-D
MQ-5SLPM-D
MQ-10SLPM-D
MQ-20SLPM-D
MQ-50SLPM-D
MQ-100SLPM-D
MQ-250SLPM-D
MQ-500SLPM-D
MQ-1000SLPM-D
MQ-2000SLPM-D
MQ-3000SLPM-D
MQ-5000SLPM-D

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ALICAT mass flow meter, available with a standard monochrome display
Learn More
BrochureManualMQ Mid Flow SpecsMQ High Flow Specs
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