MCS–Series: Anti-Corrosive Gas Mass Flow Controllers

MCS-Series Anti-Corrosive Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 128+ gases, including 32 corrosives.

Aggressive gas compatibility. Wetted materials compatible with 32 pure corrosive gases and most refrigerant gases.
Versatile & accurate. Real-time control with NIST-traceable accuracy to ±(0.4% of reading + 0.2% of full scale) for 128+ gases and 20 custom-defined mixtures.
Fast control, multivariate data. Millisecond-response times immediately upon powering up, to control either mass flow, volumetric flow, or pressure and display instantaneous flow, pressure, and temperature readings, in your choice of engineering units.
Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, PROFINET, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

Request a quote

Accessories included with purchase

FlowVision software (free download)

Device specs and customization options

Quick Specs

MCS-Series performance

Available full scale ranges: 0.5 SCCM to 5,000 SLPM for all gases (10,000 SLPM for H2)
Steady state control range: 1% – 100% of full scale
Standard accuracy calibration, NIST-traceable: ±(0.8% of reading + 0.2% of full scale)
Optional high-accuracy calibration, NIST-traceable: ±(0.4% of reading + 0.2% of full scale)
Repeatability: ±0.2% of full scale
Typical control response time: as fast as 30 ms
Warm-up time: <1 s

MCS-Series operating conditions

Compatible gases: up to 130 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
Operating temperature: –10°C to +60°C
Full scale operating pressure: 160 PSIA
Max differential pressure: 75 PSID
Proof pressure: 175 PSIA
User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)

See the full gas list here

Device Ranges & Full Specs

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale for all gases (10,000 SLPM for H2)with controllable ranges of 1% to 100% of full scale.

For specs on all device ranges, see the MCS-Series device specs.

For a comprehensive device guide, read the mass flow controller operating manual.

Device Features

Included with each device

Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature.
User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
Gas selectability: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
Gas Select COMPOSER™: Define 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer™ firmware.
Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
User adjustable setpoint ramping & limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes.
User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed.

Request at time of purchase | Free

Optional integrated totalizers & batch control: Totalize mass flow every 1 ms for precise tracking of total flow over time and use batch control to dispense precise volumes.

Request at time of purchase | Additional cost

Optional integrated potentiometer control: Use the integrated potentiometer to adjust setpoints with the simple turn of a knob.

Device Customization Options

Build and performance options

Communication protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS, PROFINET
Displays: Backlit monochrome or color; integrated or panel–mount
Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, or VCO fittings
Wetted materials: 316L/303/430FR stainless steel; FFKM standard, FKM, or EPDM as needed for some gases
Calibration: High-accuracy; custom calibration points

Visit the device customization page

Valve options & PID tuning

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

MC: small proportional control valve for flow ranges of 20 SLPM and below
MC with PCA designation: high-performance proportional control valve used for extremely corrosive gases and applications with higher pressures
MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Note: Certain gases (including SO₂, and Cl₂) require MC with PCA designation.

Custom PID valve tuning ensures maximum performance for your specific process conditions.

Learn about valve sizing and PID tuning options

Optional Accessories

Accessories | Sold separately

Process port fittings and filters
Power supplies
Communications cables and conversion cables
BB3 and BB9 multi-drop breakout boxes

Visit the accessories page

Not exactly what you’re looking for?

Explore other gas mass flow controller options, including standard non-corrosive, high pressure, and low pressure drop devices.
Check out our other flow or pressure control and measurement solutions.
Our expert team of applications engineers is available to provide additional information, discuss your application, or answer any questions you may have.

Contact an applications engineer

Learn about diverse flow control applications in our knowledge base

Mass Flow Controllers from Alicat

Learn More

MCS-Series device specs Manual

Ask a question