Mass Flow Controllers & Meters

Model variations

• Standard configuration (MCD–Series)

Valve options 

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MCDW: small proportional control valve for flow ranges of 20 SLPM and below
• MCRDW: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Build options

• Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
• Displays: monochrome or color; integrated or panel-mount
• Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
• Elastomers: Viton, FFKM, EPDM, Silicone

Performance options

• Flow totalizer
• Integrated potentiometer control
• High-accuracy or custom calibration

Bidirectional flow vs pressure characterization for respiratory devices

Mimic human respiration with bidirectional flow control into and out of a respiratory device at flow rates consistent with the range of breathing. A low pressure drop Whisper™ configuration (MCRDW) also allows the flow controller to “breathe” slowly with minimal pressure applied.

Bidirectional flow control for remote air sampling and calibration

Sample ambient air with a vacuum pump in one direction, and then periodically calibrate your gas analyzer with positive pressure in the other direction, all without disconnecting any part of the system. A low pressure drop Whisper™ configuration permits volumetric flow sampling at the 16.7 SLPM flow rate. This makes possible the operation and calibration of remote air monitoring stations without human intervention.

Available device ranges for MC-Series

Alicat offers controllers with custom flow ranges from 0.5 SCCM full scale to 5,000 SLPM full scale, each with a control range of 0.01% to 100% of full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

It is important to note that some device specifications vary depending on the full scale flow rate.

• For specs on devices ranging from 0.5 SCCM full scale to 5 SCCM full scale, see the MC-Series low flow device specs.
• For specs on devices ranging from 10 SCCM full scale to 20 SLPM full scale, see the MC-Series mid flow device specs.
• For specs on devices ranging from 50 SLPM full scale to 5000 SLPM full scale, the see MC-Series high flow device specs.

If you have any questions or need additional information, reach out to our applications engineers.

Device customization | Build and performance options

• Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
• Displays: monochrome or color; integrated or panel–mount
• Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
• Elastomers: Viton, FFKM, EPDM, Silicone
• Calibration: High-accuracy or custom
• Performance: Flow totalizer; integrated potentiometer control

Valve sizing and PID tuning | Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MC: small proportional control valve for flow ranges of 20 SLPM and below
• MC with PCA designation: high-performance proportional control valve used for some applications with higher pressures
• MCP: small proportional control valve with the largest orifice (not available for corrosive configurations)
• MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
• MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Accessories | Sold separately

• Process port fittings and filters
• Power supplies
• Communications cables and conversion cables
• BB3 and BB9 multi-drop breakout boxes

Gas sparging for pH control

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements. Digital feedback from PLC or PC allows real-time changes to the flow rate setpoint to maintain optimal process conditions.

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Custom gas mixing system

Mass flow controllers from Alicat are well suited to the creation of custom gas mixing systems. Their inherent flexibility and adaptability may be utilized to great effect in this type of application.

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High-temperature mass flow control

Alicat’s remote electronics option separates the electronics from the sensors and flow body. This allows for flowing gases at higher temperatures through the flow body without subjecting the controller electronics to temperatures beyond their design.

FastTrack | Devices with 5 day shipping

All FastTrack products are built to order and shipped within 5 business days. Such Fast Track eligible products include our most popular mass flow meters and controllers:

Range: 200 SCCM to 100 SLPM

Display options: Standard, TFT, no display

Electrical connectors: Default – MD8, locking industrial, DB9M, DB15

Communication protocols: 485, MODBUS, MODBUS-485

Available device ranges for MCQ-Series

Alicat offers high pressure controllers with custom flow ranges from 10 SCCM full scale to 3000 SLPM full scale, each with a control range of 0.5% to 100% of full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

It is important to note that some device specifications vary depending on the full scale flow rate.

• For specs on devices ranging from 10 SCCM full scale to 20 SLPM full scale, see the MCQ-Series mid flow device specs.
• For specs on devices ranging from 50 SLPM full scale to 3000 SLPM full scale, the see MCQ-Series high flow device specs.

If you have any questions or need additional information, reach out to our applications engineers.

Device customization | Build and performance options

• Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
• Displays: monochrome or color; integrated or panel–mount
• Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
• Elastomers: Viton, FFKM, EPDM, Silicone
• Calibration: Custom
• Performance: Flow totalizer; integrated potentiometer control

Valve sizing and PID tuning | Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MCQ: small proportional control valve for flow ranges of 20 SLPM and below
• MCQ with PCA designation: high-performance proportional control valve used for higher supply pressures
• MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
• MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Accessories | Sold separately

• Process port fittings and filters
• Power supplies
• Communications cables and conversion cables
• BB3 and BB9 multi-drop breakout boxes

Available device ranges for MCS-Series

Alicat offers anticorrosive controllers with custom flow ranges from 0.5 SCCM full scale to 5000 SLPM full scale, each with a control range of 1% to 100% of full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

It is important to note that some device specifications vary depending on the full scale flow rate.

• For specs on all device ranges, see the MCS-Series device specs.

If you have any questions or need additional information, reach out to our applications engineers.

Device customization | Build and performance options

• Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
• Displays: monochrome or color; integrated or panel–mount
• Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
• Wetted materials: 316L/303/430FR stainless steel; FFKM standard, FKM or EPDM as needed for some gases
• Calibration: High-accuracy or custom
• Performance: Flow totalizer; integrated potentiometer control

Valve sizing and PID tuning | Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MC: small proportional control valve for flow ranges of 20 SLPM and below
• MC with PCA designation: high-performance proportional control valve used for some applications with higher pressures
• MCH: hammerhead configuration, which pairs two small valves working side-by-side as one valve
• MCR: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Note: Certain gases (including HCl, SO₂, and Cl₂) require MC with PCA designation.

Accessories | Sold separately

• Process port fittings and filters
• Power supplies
• Communications cables and conversion cables
• BB3 and BB9 multi-drop breakout boxes

Model variations

• Switching valves located upstream (MCT–Series)
• Switching valves located downstream (MCT-Series with DS in the adder codes)
• Switching valves located upstream and downstream (MCT4-Series)
• Aggressive gases (MCTS–Series)

Model variation: Corrosive gases (MCTS-Series)

Instruments in the standard MCT series are also available with an optional “S” configuration (MCTS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM. Some corrosive gases require 316L stainless steel throughout the flow path, and in this case we can upgrade both the valve (type PCA) and flow body to 316L for full scale flow ranges of 20 SLPM or less.

Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MCT: small proportional control valve for flow ranges of 20 SLPM and below
• MCT with PCA designation: high-performance proportional control valve used for some applications with higher pressures
• MCPT: small proportional control valve with the largest orifice (not available for corrosive configurations)
• MCRT: nearly frictionless large Rolamite proportional valve for flow rates of 50 SLPM and above

Build options

• Communications protocols: analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS
• Displays: monochrome or color; integrated or panel-mount
• Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
• Elastomers: Viton, FFKM, EPDM, Silicone

Performance options

• Flow totalizer
• High-accuracy or custom calibration

Continuous operation of a bottle-fed process

In the upstream configuration, you can use an MCT to continuously operate a bottle-fed process. When the bottle pressure drops below your threshold, simply switch your input to the other stream and its full bottle. As that bottle feeds your process, you can exchange the emptied bottle on the first stream for a fresh one.

Multi-source calibration of an analyzer

Calibrate a gas analyzer that measures concentrations of pollutants in ambient air with stream-switching at the inlet. Three separate calibrated bottles of air and greenhouse gas mixtures lead to the three inlet valves of an MCT. An additional proportional valve on the outlet side controls the flow rate of each stream when it is needed by the analyzer.

Feeding multiple analytical processes from a single source

In the downstream configuration, an MCT can be used to feed two wholly separate analytical processes from a single source of gas. You could sample ambient air and send it to two separate analyzers on an alternating schedule. Or you could supply two separate processes from the same bottle of nitrogen, each with fully proportional flow control.

Available device ranges for MW-Series

Alicat offers Whisper controllers with custom flow ranges from 0.5 SCCM full scale to 1000 SLPM full scale, each with a control range of 0.5% to 100% of full scale. Custom devices are ranged to best meet your specific application needs for full scale flow rate and operating range.

It is important to note that some device specifications vary depending on the full scale flow rate.

• For specs on devices ranging from 0.5 SCCM full scale to 5 SCCM full scale, see the MCW-Series low flow device specs.
• For specs on devices ranging from 10 SCCM full scale to 100 SLPM full scale, see the MCW-Series mid flow device specs.
• For specs on devices ranging from 250 SLPM full scale to 1000 SLPM full scale, the see MCW-Series high flow device specs.

If you have any questions or need additional information, reach out to our applications engineers.

Device customization | Build and performance options

• Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
• Displays: monochrome or color; integrated or panel–mount
• Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
• Elastomers: Viton, FFKM, EPDM, Silicone
• Calibration: High-accuracy or custom
• Performance: Flow totalizer; integrated potentiometer control

Valve sizing and PID tuning | Valve options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MCW: small proportional control valve for flow ranges of 2 SLPM and below
• MCPW: small proportional control valve with the largest orifice (not available for corrosive configurations)
• MCHW: hammerhead configuration, which pairs two small valves working side-by-side as one valve
• MCRW: nearly frictionless large Rolamite proportional valve for flow rates of 5 SLPM and above

Accessories | Sold separately

• Process port fittings and filters
• Power supplies
• Communications cables and conversion cables
• BB3 and BB9 multi-drop breakout boxes

Even faster leak testing

For leak checking smaller test volumes, such as valves or sensors, a single MCW-Series Whisper™ mass flow controller that is set to control for pressure will maintain a constant pressure at the device under test while providing accurate mass and volumetric flow readings in real time. Configured this way, the Whisper serves the functions of both a pressure controller and a mass flow meter in one device.

Model variations

• Enclosed valve with SEMI port length (MCE–Series)
• Enclosed valve with additional pneumatic shut-off valve for vacuum applications (MCV–Series)
• Aggressive gases (MCES/MCVS–Series)

Also available:

• Standard configuration with externally mounted valve (MC–Series)

Model variation: Corrosive gases (MCES and MCVS–Series)

Instruments in the standard MCE and MCV–Series are also available with an optional “S” configuration (MCES and MCVS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM.

Valve options 

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

• MCE: small proportional control valve mounted internally
• MCV: small proportional control valve mounted internally, plus an externally-mounted pneumatic shut-off valve located downstream

Build options

• Communications protocols: analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
• Displays: monochrome or color; integrated or panel-mount
• Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
• Elastomers: Viton, FFKM, EPDM, Silicone

Performance options

• Flow totalizer
• Integrated potentiometer control
• High-accuracy or custom calibration

Gas flow control for reactive sputtering

Precisely control the partial pressures of reactive gases in the vacuum chamber with rapid 50-ms control response to prevent target poisoning. Fine resolution ensures the proper release of atoms. Maintain tight shut-off under no-flow conditions with the pneumatic valve.

Drop-in replacements for aging mass flow controllers

Upgrading to an Alicat mass flow controller is easy. Our MCE-Series meets the SEMI specification for connection length, so it is drop-in compatible with many older MFCs from other manufacturers. Alicat’s MCV-Series is a drop-in replacement for older MFCs equipped with integrated pneumatic shut-off valves.

Device customization | Build and performance options

• Communications protocols: analog, RS-232, RS-485, Modbus RTU
• Wetted materials:
  • Standard: 316L stainless steel and FKM
  • Optional: FFKM, EPDM, PCTFE, 316L stainless steel metal seals; nickel alloy
• Ingress protection options: IP40/65/66/66/67

Accessories | Sold separately

• External display
• Electrical connection cables

Energy & Utilities | Fuel cell regulation & testing

Coriolis mass flow instruments are used in electrolyzer system testing and regulation, able to measure and control low flow rates at extreme temperatures.

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Process Control & Manufacturing | sCO₂ solid-liquid extraction

Coriolis mass flow controllers are used in sCO₂ solid-liquid extraction processes to optimize extraction rate and meet production needs.

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Food & Beverage | Flavor dosing

Coriolis mass flow technology is used for precise, accurate measurement and control of low-flow liquids used in flavor mixing and dosing systems.

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Vacuum coating | Semiconductor

Coriolis mass flow instruments are used in semiconductor processes including chemical vapor deposition (CVD) due to their ability to measure low-flow rates with high accuracy and precision.

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Process Industries | Fragrance dosing

Coriolis mass flow technology is used for precise, accurate measurement and control of low-flow liquids used in fragrance dosing applications.

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Fluid Handling | Non-Newtonian fluids

Finding the right instrument to measure or control non-Newtonian fluids can be a challenge, and Coriolis mass flow technology has proven to be the most successful solution.