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Mass Flow Controllers & Meters

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M–Series: Gas Mass Flow Meters

High-accuracy, multivariate flow measurement in real time.

 

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Simultaneously measure mass flow, volumetric flow, line pressure, and line temperature in real time. A very wide usable flow range and on-board calibrations for multiple gases makes this flow meter extremely versatile.

  • Fast Track. Many of our popular devices qualify for guaranteed 5 day shipping as part of our Fast Track program. See below for details.
  • High-accuracy. Measure flows with NIST-traceable accuracy for 98+ gases down to 0.01% of full scale, or define your own gas composition with COMPOSER™.
  • Easy to use. As soon as you turn on the flow meter, it is ready to display live flow, pressure, and temperature readings in your choice of engineering units.
  • Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with EtherNet/IP, EtherCAT, DeviceNet, Profibus, or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.
  • Portable option. MB-Series portable flow meters are designed to be carried and can withstand drops if they should occur.
Configurations available to buy online
  • Flow ranges: 0.5 SCCM to 5000 SLPM
  • Analog outputs: 0-5 Vdc, 1-5 Vdc, 0-10 Vdc, and 4-20 mA
  • Serial communication: RS-232 or RS-485
  • Connectors: DB9, DB15, mini-din, and M12

For industrial protocols, 20+ connector variants, and many more build options, get in touch.

Contact us for a quote
Performance
  • Available ranges: max 0-5000 SLPM; min 0-0.5 SCCM (0-500 SμL/m)
  • Flow measurement range: 0.01% – 100% of full scale
  • Standard accuracy calibration, NIST-traceable: ± 0.6% of reading or ± 0.1% of full scale, whichever is greater (most products)
  • Optional high-accuracy calibration, NIST-traceable: ± 0.5% of reading or ± 0.1% of full scale, whichever is greater (most products)
  • Repeatability: ± (0.1% of reading + 0.02% of full scale) (most products)
  • Typical measurement response time constant: <10 ms
  • Warm-up time: <1 s
Operating conditions
  • Compatible gases: 98 (M) or 130 (MS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
  • Operating temperature: -10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure (inlet to outlet): 75 PSID
  • Proof pressure: 200 PSIA
  • STP/NTP: user-selectable; defaults: 25°C & 1 ATM (STP)and  0°C & 1 ATM (NTP)
Range
  • 200 SCCM to 100 SLPM
Display options
  • Standard
  • TFT
  • No Display
Electrical connectors
  • Default – MD8
  • Locking Industrial
  • DB9M
  • DB15
Communication protocols
  • 485
  • MODBUS
  • MODBUS-485
Model variations 
  • Low pressure drop (MW)
  • High pressure (MQ)
  • Aggressive gases (MS)
  • Portable with rechargeable battery (MB)
Corrosive gases (MS-Series)

Instruments in the standard M-Series are also available with an optional “S” configuration (MS) for use with corrosive gases. In this configuration, we upgrade the flow body and sensor to 316L stainless steel and the elastomers to FFKM.

Build options
  • Communications protocols: analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU, TCP/IP, PROFIBUS
  • Displays: monochrome or color; integrated or panel-mount
  • Process connections: NPT, SAE, AN, BSPP/G, welded compression, or VCR/VCO fittings
  • Elastomers: Viton, FFKM, EPDM, Silicone
Performance Options

Alicat’s M-Series is suitable for use with non-corrosive gases.

M-0.5SCCM-D
M-1SCCM-D
M-2SCCM-D
M-5SCCM-D
M-10SCCM-D
M-20SCCM-D
M-50SCCM-D
M-100SCCM-D
M-200SCCM-D
M-500SCCM-D
M-1SLPM-D
M-2SLPM-D
M-5SLPM-D
M-10SLPM-D
M-20SLPM-D
M-50SLPM-D
M-100SLPM-D
M-250SLPM-D
M-500SLPM-D
M-1000SLPM-D
M-2000SLPM-D
M-3000SLPM-D
M-5000SLPM-D

Alicat’s MS-Series is suitable for use with corrosive gases.

MS-0.5SCCM-D
MS-1SCCM-D
MS-2SCCM-D
MS-5SCCM-D
MS-10SCCM-D
MS-20SCCM-D
MS-50SCCM-D
MS-100SCCM-D
MS-200SCCM-D
MS-500SCCM-D
MS-1SLPM-D
MS-2SLPM-D
MS-5SLPM-D
MS-10SLPM-D
MS-20SLPM-D
MS-50SLPM-D
MS-100SLPM-D
MS-250SLPM-D
MS-500SLPM-D
MS-1000SLPM-D
MS-2000SLPM-D
MS-3000SLPM-D
MS-5000SLPM-D

Filter characterization

Characterize a filter’s flow versus pressure drop curve by fixing the differential pressure across the filter using the pressure controller. The mass flow meter displays the resulting flow rate required to attain the pressure drop.

Faster leak testing

Establish stable pressure for the leak check by measuring pressure precisely at the device under test with Alicat’s PC3-Series pressure controller with remote sense port. This method negates the pressure drop induced by the mass flow meter that is measuring the leak rate with 5-ms speed of response.

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