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    M–Series: Mass Flow Meters

    M–Series Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases from 0.01% to 100% of full scale.

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    Specs, features, and customization options

    Specs
    Standard specs
    • Full scale ranges: 0.5 SCCM to 5,000 SLPM (Devices are custom ranged)
    • Measurement range: 0.01% – 100% of full scale
    • Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
    • Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
    • Repeatability: 0.1% of reading and 0.02% of full scale
    • Response time: <10 ms
    • Operating temperature: –10°C to +60°C
    • Full scale operating pressure: 160 PSIA (11 barA)
    Spec sheets
    Mass flow meter operating manual
    Device features and accessories

    Features

    Explore device features

    Accessories

    Power supply, cables, and accessories sold separately
    Build and performance options
    • Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus, PROFINET
    • Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
    • Displays: Backlit monochrome or color; integrated or panel–mount; none
    • Elastomers: FKM, FFKM, EPDM, Silicone
    • Calibration: Standard or high-accuracy; custom calibration points
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    Mass Flow Meter
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    ManualBrochureM-Series low flow device specsM-Series mid flow device specsM-Series high flow device specs
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