Products » Gas Flow » Mass Flow Meter » Mass Flow Meters Using Laminar Differential Pressure
M Series Mass Flow Meters
Mass Flow Meters with Laminar Differential Pressure Technology
Our most versatile mass flow meters because of the highly responsive, multivariate technology of Laminar DP. Great for versatility in research environments, with the precision and dependability for industrial applications.
- Laminar DP (differential pressure) mass flow measurement technology that Alicat pioneered
- 98 standard (up to 130) pre‑calibrated gas choices — switch without losing accuracy
- Measures mass flow, volumetric flow, temperature, and pressure
- As high as 0.01 – 100% measurement range (10,000:1 turndown)
- Limited Lifetime Warranty
0.5 SCCM – 12,000 SLPM
11.5 – 320 PSIA
M Series Meter
For most gas measurement
- 0.5 SCCM – 12,000 SLPM options
- 11.5 – 160 PSIA operating
- Accuracy as good as ± 0.5% of reading
- ± (0.1% of reading + 0.02% of full scale) repeatability
MQ Series Meter
Measure flow rates at higher pressures
- 10 SCCM – 12,000 SLPM options
- 11.5 – 320 PSIA operating
- Accuracy as good as ± 0.6% of reading or ±0.1% of full scale, whichever is greater
- ± 0.1% of full scale repeatability
MS Series Meter
For a wider range of gases
Corrosion-Resistant Wetted materials
- 130 gases, including corrosives
- 0.5 SCCM – 12,000 SLPM
- 11.5 – 160 PSIA
- ± 0.4% of reading and ± 0.2% of full scale accuracy
BIO Series Meter
Measure gases into and out of bioreactors + fermenters
-
Also uses laminar differential pressure mass flow meter technology
- Long-term stability
- Robust, compliant materials including USP Class VI or USPVI elastomers
- Designed for scalability (10,000:1 operating range)
Available Variants
MW Series Meter
Low pressure drop laminar DP mass flow meters
IS-Max Series Meter
Intrinsically safe MFM for explosive atmospheres
Build Options for Laminar Differential Pressure Mass Flow Meters
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
IO-Link
For explosive environments, see IS-Max Series
FastTrack Flow & Pressure Devices
FLOW METER RANGES
2 SCCM – 1,000 SLPM
FLOW CONTROLLER RANGES
Do FastTrack instruments meet your requirements?
Ready for the final details?
Each product is made-to-order. Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.
Downloads
Manuals
Brochures
Software & utilities
Top Level Part Numbers
Hidden Item So All Items Are Closed on Page Load
M Meters
M-0.5SCCM
M-1SCCM
M-2SCCM
M-5SCCM
M-10SCCM
M-20SCCM
M-50SCCM
M-100SCCM
M-200SCCM
M-500SCCM
M-1SLPM
M-2SLPM
M-5SLPM
M-7.5SLPM
M-10SLPM
M-20SLPM
M-30SLPM
M-50SLPM
M-100SLPM
M-250SLPM
M-500SLPM
M-1000SLPM
M-1500SLPM
M-2000SLPM
M-3000SLPM
M-4000SLPM
M-5000SLPM
M-10000SLPM
M-133SCFH
M-320SCIM
MQ Meters
MQ-5SCCM
MQ-10SCCM
MQ-20SCCM
MQ-50SCCM
MQ-100SCCM
MQ-200SCCM
MQ-500SCCM
MQ-1SLPM
MQ-2SLPM
MQ-5SLPM
MQ-10SLPM
MQ-20SLPM
MQ-50SLPM
MQ-100SLPM
MQ-250SLPM
MQ-500SLPM
MQ-1000SLPM
MQ-1500SLPM
MQ-2000SLPM
MQ-3000SLPM
MQ-5000SLPM
MQ-10000SLPM
MQBS-20SLPM
MQBS-50SLPM
MQS-50SCCM
MQS-5SLPM
MQS-50SLPM
MQS-100SLPM
MQS-500SLPM
MQS-1000SLPM
MQS-2000SLPM
MQS-5000SLPM
MS Meters
MS-0.5SCCM
MS-1SCCM
MS-2SCCM
MS-5SCCM
MS-10SCCM
MS-20SCCM
MS-50SCCM
MS-100SCCM
MS-200SCCM
MS-500SCCM
MS-1SLPM
MS-2SLPM
MS-5SLPM
MS-10SLPM
MS-20SLPM
MS-50SLPM
MS-100SLPM
MS-250SLPM
MS-500SLPM
MS-1000SLPM
MS-1500SLPM
MS-2000SLPM
MS-3000SLPM
MS-4000SLPM
MS-5000SLPM
MS-10000SLPM
Ask an engineer
Our Applications Engineers can answer your questions and help you find the best option.