Mass Flow Controllers & Meters

Mass Flow Controllers & Meters
M–Series: Gas Mass Flow Meters

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M–Series: Gas Mass Flow Meters

M–Series Gas Mass flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases across a very wide flow range – 0.01% to 100% of full scale.

Versatile & accurate. Real-time measurements with NIST-traceable accuracy to ±0.5% of reading or ±0.1% of full scale for 98+ gases and 20 custom-defined mixtures.
Fast, multivariate data. Millisecond-response times immediately upon powering up, to display flow, pressure, and temperature readings in real-time, in your choice of engineering units.
Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

Device specs and customization options

Quick Specs

M-Series performance (most products)

Available full scale ranges: 0.5 SCCM to 5,000 SLPM
Flow measurement range: 0.01% – 100% of full scale
Standard accuracy calibration, NIST-traceable: ±0.6% of reading or ±0.1% of full scale
Optional high-accuracy calibration, NIST-traceable: ±0.5% of reading or ±0.1% of full scale
Repeatability: ±(0.1% of reading + 0.02% of full scale)
Typical measurement response time: <10 ms
Warm-up time: <1 s

M-Series operating conditions

Compatible gases: 98+ preloaded selectable gas calibrations
Operating temperature: –10°C to +60°C
Full scale operating pressure: 160 PSIA
Max differential pressure: 75 PSID
Proof pressure: 175 PSIA
User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)

See the full gas list here

Device Ranges & Full Specs

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale with measurement ranges of 0.01% to 100% of full scale.

For specs on devices ranging from 0.5 SCCM full scale to 5 SCCM full scale, see the M-Series low flow device specs.
For specs on devices ranging from 10 SCCM full scale to 20 SLPM full scale, see the M-Series mid flow device specs.
For specs on devices ranging from 50 SLPM full scale to 5000 SLPM full scale, the see M-Series high flow device specs.

For a comprehensive device guide, read the mass flow meter operating manual.

Device Features and Customization Options

Features

Multi-variable process measurements: Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
Gas selectability: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
Gas Select COMPOSER™: Define up to 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer™ firmware.
Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
Optional integrated dual flow totalizers: Totalize mass or volumetric flow every 1 ms for precise tracking of total flow over time.

Build and performance options

Communications protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
Displays: Backlit monochrome or color; integrated or panel–mount
Process connections: NPT, SAE, AN, BSPP/G, compression, or VCR/VCO fittings
Elastomers: FKM, FFKM, EPDM, Silicone
Calibration: High-accuracy or custom calibration points

Visit the device customization page

Optional Accessories

Accessories | Sold separately

Process port fittings and filters
Power supplies
Communications cables and conversion cables
BB3 and BB9 multi-drop breakout boxes

Visit the accessories page

FastTrack 10 Day Shipping Options

FastTrack | Devices with 10 day shipping

All FastTrack products are built to order and shipped within 10 business days. Such Fast Track eligible products include our most popular mass flow meters and controllers:

Range: 200 SCCM to 100 SLPM

Display options: Integrated monochrome or color

Electrical connectors: 8-pin mini DIN, 6-pin locking industrial, 9-pin or 15-pin D-sub

Communication protocols: RS-232, RS-485, Modbus RTU

Learn more about FastTrack

Not exactly what you’re looking for?

Explore other gas mass flow meter options, including high pressure, low pressure drop, anti-corrosive, and portable devices.
Check out our other flow or pressure measurement and control solutions.
Our expert team of applications engineers is available to provide additional information, discuss your application, or answer answer any questions you may have.

Contact an applications engineer

Learn about diverse flow measurement applications in our knowledge base