Mass Flow Controllers & Meters

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M–Series: Gas Mass Flow Meters

M–Series Gas Mass flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases across a very wide flow range – 0.01% to 100% of full scale.
  • Versatile & accurate. Real-time measurements with NIST-traceable accuracy to ±0.5% of reading or ±0.1% of full scale for 98+ gases and 20 custom-defined mixtures.
  • Fast, multivariate data. Millisecond-response times immediately upon powering up, to display flow, pressure, and temperature readings in real-time, in your choice of engineering units.
  • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

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Accessories included with purchase

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Accessories included with purchase
Device options available at online store
  • Flow ranges: 0.5 SCCM to 5,000 SLPM
  • Analog outputs: 0-5 Vdc, 1-5 Vdc, 0-10 Vdc, and 4-20 mA
  • Serial communication: RS-232 or RS-485
  • Connectors: DB9, DB15, mini-din, and M12

Device specs and customization options

Quick Specs
M-Series performance (most products)
  • Available full scale ranges: 0.5 SCCM to 5,000 SLPM
  • Flow measurement range: 0.01% – 100% of full scale
  • Standard accuracy calibration, NIST-traceable: ±0.6% of reading or ±0.1% of full scale
  • Optional high-accuracy calibration, NIST-traceable: ±0.5% of reading or ±0.1% of full scale
  • Repeatability: ±(0.1% of reading + 0.02% of full scale)
  • Typical measurement response time: <10 ms
  • Warm-up time: <1 s
M-Series operating conditions
  • Compatible gases: 98+ preloaded selectable gas calibrations
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 175 PSIA
  • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Device Ranges & Full Specs

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale with measurement ranges of 0.01% to 100% of full scale.

For a comprehensive device guide, read the mass flow meter operating manual.

Device Features and Customization Options
Features
  • Multi-variable process measurements: Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
  • User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
  • Gas selectability: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
  • Gas Select COMPOSER™: Define up to 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer firmware.
  • Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
  • User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
  • Optional integrated dual flow totalizers: Totalize mass or volumetric flow every 1 ms for precise tracking of total flow over time.
Build and performance options
  • Communications protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: Backlit monochrome or color; integrated or panel–mount
  • Process connections: NPT, SAE, AN, BSPP/G, compression, or VCR/VCO fittings
  • Elastomers: FKM, FFKM, EPDM, Silicone
  • Calibration: High-accuracy or custom calibration points
Optional Accessories
Accessories | Sold separately
  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes
FastTrack 10 Day Shipping Options
FastTrack | Devices with 10 day shipping

All FastTrack products are built to order and shipped within 10 business days. Such Fast Track eligible products include our most popular mass flow meters and controllers:

Range: 200 SCCM to 100 SLPM

Display options: Integrated monochrome or color

Electrical connectors: 8-pin mini DIN, 6-pin locking industrial, 9-pin or 15-pin D-sub

Communication protocols: RS-232, RS-485, Modbus RTU

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