Flow Controllers & Meters

Flow Controllers & Meters
M–Series: Mass Flow Meters

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M–Series: Mass Flow Meters

M–Series Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases from 0.01% to 100% of full scale.

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Specs, features, and customization options

Specs

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale.

Standard specs

Full scale ranges: 0.5 SCCM to 5,000 SLPM
Measurement range: 0.01% – 100% of full scale
Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
Repeatability: 0.1% of reading and 0.02% of full scale
Response time: <10 ms
Operating temperature: –10°C to +60°C
Full scale operating pressure: 160 PSIA (11 barA)

Mass flow meter operating manual

Device features and accesories

Features

Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
Field-adjustable engineering units and STP/NTP conditions.
Select process gas from 98+ preloaded NIST-traceable gas calibrations.
Define and store 20 custom gas mixtures of up to 5 constituent gases.
Read measurements from the backlit display and control configuration using the integrated touchpad.
Optional integrated dual flow totalizers and alarms.

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Accessories

FlowVision software (download)

Power supply, cables, and accessories sold separately

Build and performance options

Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus
Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
Displays: Backlit monochrome or color; integrated or panel–mount; none
Elastomers: FKM, FFKM, EPDM, Silicone
Calibration: Standard or high-accuracy; custom calibration points

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Manual Brochure M-Series low flow device specs M-Series mid flow device specs M-Series high flow device specs

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