Mass Flow Controllers & Meters

model

M–Gas Mass Flow Meters

High-accuracy, multivariate flow measurement in real time

Measure mass flow, volumetric flow, line pressure and line temperature simultaneously, all in real time. A very wide usable flow range and on-board calibrations for multiple gases will make this flow meter the star of your lab.

  • Accurate. Measure flows with NIST-traceable accuracy for a variety of gases down to 1/200th of full scale, or define your own gas composition with COMPOSER™.
  • Easy to Use. As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.
  • Connected. Alicat flow meters feature dual digital and analog communications by default and can be ordered with Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.

Performance

  • Available ranges: max 0-5000 slpm, min 0-0.5 sccm/0-500 sμlm (see Part Numbers tab for stock ranges)
  • Turndown ratio: 200:1 (M) or 100:1 (MS)
  • Standard accuracy calibration, NIST-traceable: +/- (0.8% of the reading + 0.2% of the full-scale range)
  • Optional high-accuracy calibration, NIST-traceable: +/- (0.4% of the reading + 0.2% of the full-scale range)
  • Repeatability: 0.2% of the full-scale range
  • Typical measurement response time constant: 5-10 ms
  • No warm-up time required

Operating Conditions

  • Compatible gases: 98 (MB) or 130 (MBS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
  • Operating temperature: -10°C to +60°C
  • Max internal pressure (static): 145 psig (160 psia)
  • Max differential pressure (inlet to outlet): 75 psid
  • Proof pressure: 175 psig (190 psia)
  • STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

In the box

Model Variations 

  • Low pressure drop, max 60 psia (MW)
  • High pressure, 160-320 psia (MQ)
  • Aggressive gases (MS, see below)
  • Portable with rechargeable battery (MB)

Corrosive Gases (MS series)

Instruments in the standard M series are also available with an optional “S” configuration (MS) for use with corrosive gases. In this configuration, we upgrade the flow body and sensor to 316L stainless steel and the elastomers to FFKM.

Build Options

  • Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
  • Displays (monochrome or color, integrated or panel-mount)
  • Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
  • Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Alicat’s M series is suitable for use with non-corrosive gases.

M-0.5SCCM-D
M-1SCCM-D
M-2SCCM-D
M-5SCCM-D
M-10SCCM-D
M-20SCCM-D
M-50SCCM-D
M-100SCCM-D
M-200SCCM-D
M-500SCCM-D
M-1SLPM-D
M-2SLPM-D
M-5SLPM-D
M-10SLPM-D
M-20SLPM-D
M-50SLPM-D
M-100SLPM-D
M-250SLPM-D
M-500SLPM-D
M-1000SLPM-D
M-1500SLPM-D
M-2000SLPM-D
M-3000SLPM-D
M-5000SLPM-D

Alicat’s MS series is suitable for use with corrosive gases.

MS-0.5SCCM-D
MS-1SCCM-D
MS-2SCCM-D
MS-5SCCM-D
MS-10SCCM-D
MS-20SCCM-D
MS-50SCCM-D
MS-100SCCM-D
MS-200SCCM-D
MS-500SCCM-D
MS-1SLPM-D
MS-2SLPM-D
MS-5SLPM-D
MS-10SLPM-D
MS-20SLPM-D
MS-50SLPM-D
MS-100SLPM-D
MS-250SLPM-D
MS-500SLPM-D
MS-1000SLPM-D
MS-1500SLPM-D
MS-2000SLPM-D
MS-3000SLPM-D
MS-5000SLPM-D

Filter Characterization

Characterize a filter’s flow versus pressure drop curve by fixing the differential pressure across the filter using the pressure controller. The mass flow meter displays the resulting flow rate required to attain the pressure drop.

 

Faster Leak Testing

Establish stable pressure for the leak check by measuring pressure precisely at the device under test with Alicat’s PC3-series pressure controller with remote sense port. This method negates the pressure drop induced by the mass flow meter that is measuring the leak rate with 5-ms speed of response.

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