SFF–Series: SEMI Standard Gas Mass Flow Controllers
Drop-in replacement for vacuum coating systems—FastTrack means we ship to you, customized, in just 5 days.
SFF-Series SEMI Standard Gas Mass Flow Controllers are manufactured with 1/4″ VCR®-compatible male fittings machined right into the flowbody to eliminate leaks from welded fittings. The device matches end-to-end with SEMI standard MFCs, for easy drop-in upgrades to vacuum deposition fixtures. Control mass flow or pressure of 98 gases.
- Drop-in compatibility. Form factor includes machined in place 1/4″ VCR®-compatible male fittings and matches 124 mm end-to-end length of SEMI standard MFCs.
- Versatile & accurate. Real-time control with NIST-traceable accuracy up to ±(0.4% of reading + 0.2% of full scale) for on-board 98 gas calibrations and 20 custom-defined mixtures you can build yourself.
- Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, PROFINET, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.
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Accessories included with purchase
Device specs and customization options
Quick Specs
SFF-Series performance (most products)
- Available full scale ranges: 0.5 SCCM to 20 SLPM
- Steady state control range: 0.01% – 100% of full scale (10,000:1 turndown ratio)
- Standard accuracy calibration, NIST–traceable: ±(0.8% of reading + 0.2% of full scale)
- High-accuracy option, calibration, NIST–traceable: ±(0.4% of reading + 0.2% of full scale)
- Repeatability: ±(0.2% of reading + 0.02% of full scale)
- Typical control response time: as fast as 30 ms
- Warm-up time: <1 s
SFF-Series operating conditions
- Compatible gases: 98 preloaded selectable gas calibrations
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA
- Max differential pressure: 75 PSID
- User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Device Ranges & Full Specs
Devices are custom ranged from 0.5 SCCM full scale to 20 SLPM full scale with controllable ranges of 0.01% to 100% of full scale.
For a comprehensive device guide, read the mass flow controller operating manual.
Device Features
Included with each device
- Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature.
- User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
- Gas selectability: Select your process gas from any of the 98 preloaded NIST-traceable gas calibrations in our gas list.
- Gas Select COMPOSER™: Define 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer™ firmware.
- Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
- User adjustable setpoint ramping & limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes.
- User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
- Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed.
Request at time of purchase | Free
- Optional integrated totalizers & batch control: Totalize mass flow every 1 ms for precise tracking of total flow over time and use batch control to dispense precise volumes.
Request at time of purchase | Additional cost
- Optional integrated potentiometer control: Use the integrated potentiometer to adjust setpoints with the simple turn of a knob.
Device Customization Options
Build and performance options
- Communication protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS, PROFINET
- Displays: Backlit monochrome or color; integrated or panel–mount
- Process connections: welded 1/4″ VCR®-compatible male
- Wetted materials: 302, 303, 304, 316L, and 430FR stainless steel; FKM, alumina ceramic, brass, glass, gold, heat-cured epoxy, heat-cured silicone rubber, polyamide, silicon
- Calibration: High-accuracy; custom calibration points
Custom PID valve tuning ensures maximum performance for your specific process conditions.
Optional Accessories
Accessories | Sold separately
- Process port fittings and filters
- Power supplies
- Communications cables and conversion cables
- BB3 and BB9 multi-drop breakout boxes
Not exactly what you’re looking for?
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