- Flow Controllers & Meters
- SFF–Series: SEMI Standard Gas Mass Flow Controllers
SFF–Series: SEMI Standard Gas Mass Flow Controllers
Drop-in replacement for vacuum coating systems—FastTrack means we ship to you, customized, in just 5 days.
SFF-Series SEMI Standard Gas Mass Flow Controllers are manufactured with 1/4″ VCR®-compatible male fittings machined right into the flowbody to eliminate leaks from welded fittings. The device matches end-to-end with SEMI standard MFCs, for easy drop-in upgrades to vacuum deposition fixtures. Control mass flow or pressure of 98 gases.
- Drop-in compatibility. Form factor includes machined in place 1/4″ VCR®-compatible male fittings and matches 124 mm end-to-end length of SEMI standard MFCs.
- Versatile & accurate. Real-time control with NIST-traceable accuracy up to ±(0.4% of reading + 0.2% of full scale) for on-board 98 gas calibrations and 20 custom-defined mixtures you can build yourself.
- Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, PROFINET, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.
Device specs and customization options
Not exactly what you’re looking for?
- Explore other gas mass flow controller options, including anti-corrosive SEMI controllers.
- Check out our other flow or pressure control and measurement solutions.
- Our expert team of applications engineers is available to provide additional information, discuss your application, or answer any questions you may have.