M/MC Series

Mass Flow Meters and Controllers

Our most versatile gas mass flow meters and controllers for most industrial processes and research applications.

  • 98 pre-loaded gas calibrations – switch without losing accuracy
  • Measures mass flow, volumetric flow, temperature, and pressure
  • Laminar differential pressure (DP) mass flow measurement technology
  • Ultra-fast response time as low as 30 ms
  • 0.01-100% measurement and control range (10,000:1 turndown)

FULL SCALE FLOW RANGES

0.5 SCCM – 10,000 SLPM

OPERATING PRESSURE RANGE

11.5 – 320 PSIA

Available variants

Mass flow meter 100 SCCM

Meters

Standard mass flow meter

M Series

For most gas measurement

most versatile

  • 0.5 SCCM- 10,000 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy
  • ±(0.1% of reading + 0.02% of full scale) repeatability

Spec Sheets

Standard mass flow meter

MQ Series

For higher-pressure applications

Highest pressure rating

  • 10 SCCM- 10,000 SLPM options
  • 11.5-320 PSIA operating
  • ±0.5% of reading accuracy
  • ±0.1% of full scale repeatability

Spec Sheets

BIO series meter for bioreactors and fermenters

BIO Series

For bioreactors + fermenters

ASME BPE compliant

  • Long-term stability
  • Robust, compliant materials
  • Designed for scalability (10,000:1 operating range)

Spec Sheets

Controllers

Standard mass flow gas meter

MC Series

For most gas control

Fast proportional control

  • 0.5 SCCM- 10,000 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy
  • 0.01–100% of full scale control
  • 30 ms control response

Spec Sheets

Anti-corrosive, high pressure mass flow controller

MCQ Series

For higher-pressure applications

Highest pressure rating

  • 10 SCCM- 10,000 SLPM options
  • 11.5-320 PSIA operating
  • ±0.6% of reading accuracy
  • 0.5% – 100% of full scale control
  • 100 ms control response

Spec Sheets

BIO series meter for bioreactors and fermenters

BIOC Series

For bioreactors + fermenters

ASME BPE compliant

  • Long-term stability
  • Robust, compliant materials
  • Designed for scalability (10,000:1 operating range)

Spec Sheets

Mass flow controller for bi-directional flow applications

MCD Series

For bi-directional flow applications

Control in both directions

  • 0.5 SCCM- 3,000 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy

Spec Sheets

Mass flow controller with bi-valve for selectable steam control

MCT Series

For selectable stream control

two gas sources, one device

  • 98 gases
  • 0.5 SCCM- 10,000 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy

Spec Sheets

Mass flow controller for vacuum applications

MCV Series

For vacuum applications

Pnuematic shutoff valve

  • Ensure process integrity
  • 0.5 SCCM- 20 SLPM options
  • ±(0.1% of reading + 0.02% of full scale) repeatability

Spec Sheets

Mass flow controller for SEMI vacuum applications

MCE Series

For SEMI vacuum applications

SEMI form factor -1/4″ VCR

  • 0.5 SCCM – 20 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy
  • Drop-in replacement
  • -SFF option: machined fittings

Spec Sheets

Build Options

Communication Protocols
RS-232 Serial (default)
RS-485 Serial
Analog
(4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
Displays
Backlit monochrome (default) or TFT color; integrated or panel-mount; none
Process Connections
10-32, NPT, SAE, BSPP, VCRM, VCO, Compression
Ingress Protection
IP40 default; IP66, IP67
Hazardous environment ratings
CSA Class 1 Div 2, ATEX Class 1 Zone 2
Humid gases
Relative humidity compensation

Downloads

Manuals

M/MC Series Operating ManualLatest – 10v firmware

M Series Operating ManualLegacy – 8v firmware (2020)

M Series Operating ManualLegacy – 9v firmware (2021)

MC Series Operating ManualLegacy – 8v firmware (2020)

MC Series Operating ManualLegacy – 9v firmware (2021)

Brochures

M/MC Series Brochure

Software/Utilities

FlowVision 2.0

LabVIEW Driver LibraryLatest – Compatible with LabVIEW 2014+
LabVIEW Driver LibraryLegacy – Compatible with LabVIEW 2010
LabVIEW Driver LibraryLegacy – Compatible with LabVIEW 8.0

Serial Terminal Utility

Serial Address Dump Utility

Serial Port Troubleshooter Utility

Python Library

CODA coriolis mass flow meter

Liquid Flow

Liquid flow controllers use either Coriolis or laminar flow technology to accurately control liquid flows across a wide range of applications.

Dual valve pressure controller 5 PSIG

Pressure

Alicat offers pressure controllers for use in flowing, dead-ended, or vacuum applications.

Custom Instrumentation

Order mass flow controllers and meters custom-build to your specific application needs.

Technical Reference

Find guides, tutorials, pinout diagrams, and industrial protocol resources for your Alicat instrument.

Applications

DALL-E geothermal energy extraction illustration

Gas chromatography processes

DALL-E geothermal energy extraction illustration

Mining, oil and gas, and hydrogen production

Bioprocessing mass flow controller

Bioreactors and fermentation

Diamond mass flow controllers

Lab-grown diamonds with chemical vapor deposition

FastTrack Ordering

M/MC mass flow meters and controllers that ship in just 3-5 business days.
CALIBRATION
Standard or High Accuracy
DISPLAY
Monochrome, Color, or None
PROTOCOL
Analog, RS-232, RS-485, or Modbus RTU
CONNECTOR
MD8, Locking Industrial, DB9M, DB15
FITTINGS
NPT

METER RANGES

2 SCCM - 500SLPM

CONTROLLER RANGES

2 SCCM - 100SLPM

Service and Support

Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade,
you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.

7641 N Business Park Dr. Tucson, AZ 85743

Geograaf 24
6921 EW
Duiven, The Netherlands