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SFF-Series: Fast vacuum coating MFCs that ship even faster

Drop-in replacement for vacuum coating systems—FastTrack means we ship to you, customized, in just 5 days.

These flow controllers ship in 5 business days. Get your coater back up and running, sooner rather than later. Fill out the form below.

Mass flow controllers from Alicat, that match the form and function of MFCs like Aalborg, Bronkhorst, Brooks, Hastings, Horiba, and MKS.

  • Fast control: As fast as 30 milliseconds response time for rock-steady flow
  • Accurate:
    • ±0.8% of reading and ±0.2% of full scale
  • High accuracy option:
    • ±0.4% of reading and ±0.2% of full scale
  • No warm-up wait: <1 second to full operation
  • Multigas calibration: Simply switch to any of 98 gases, pre-calibrated
  • Temperature and Pressure compensation: no change in accurate flow in even if your conditions change.
  • Stays precise through a large range: up to 10,000:1 turndown ratio

Customize the instrument with options best suited to your process:

  • Communication protocols: RS-232 Serial and Modbus RTU (default), RS-485 Serial and Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFINET, and PROFIBUS
  • Electrical connectors: 6-pin locking, 8-pin mini-DIN, 8-pin M12, 9-pin DB-9, 15-pin DB-15. Matching pinouts are available for all major competitors: Aalborg, Bronkhorst, Brooks, Hastings, MKS, Sierra.

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