Flow Controllers & Meters

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MCES-Series: Anti-Corrosive SEMI Standard Gas Mass Flow Controllers

MCES-Series Anti-Corrosive SEMI Standard Gas Mass Flow Controllers are equipped with 1/4″ VCR fittings and match end-to-end with SEMI standard MFCs, for easy drop-in upgrades to vacuum deposition fixtures. Control mass flow or pressure of 128+ gases, including 30+ corrosives.
  • Drop-in compatibility. Form factor includes welded 1/4″ VCR fittings and matches 124 mm end-to-end length of SEMI standard MFCs.
  • Aggressive gas compatibility. Wetted materials compatible with 30+ pure corrosive gases and most refrigerant gases.
  • Versatile and accurate. Real-time control with NIST-traceable accuracy to ±0.5% of reading or ±0.1% of full scale for 128+ gases and 20 custom-defined gas mixtures.
  • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

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Accessories included with purchase

Device specs and customization options

Quick Specs
MCES-Series performance (most products)
  • Available full scale ranges: 0.5 SCCM to 20 SLPM
  • Steady state control range: 1% – 100% of full scale
  • Standard accuracy calibration, NIST–traceable: ±0.8% of reading and ±0.2% of full scale
  • Optional high-accuracy calibration, NIST–traceable: ±0.4% of reading or ±0.2% of full scale
  • Repeatability: ±0.2% of full scale
  • Typical control response time: as fast as 30 ms
  • Warm-up time: <1 s
MCES/MCVS-Series operating conditions
  • Compatible gases: 128+ preloaded selectable gas calibrations
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 200 PSIA
  • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Device Ranges and Full Specs

Devices are custom ranged from 0.5 SCCM full scale to 20 SLPM full scale with controllable ranges of 1% to 100% of full scale.

For a comprehensive device guide, read the mass flow controller operating manual.

Device Features
Included with each device
  • Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature.
  • User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
  • Gas selectability: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
  • Gas Select COMPOSER™: Define 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer firmware.
  • Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
  • User adjustable setpoint ramping and limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes.
  • User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
  • Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed.
Request at time of purchase | Free
  • Optional integrated totalizers and batch control: Totalize mass flow every 1 ms for precise tracking of total flow over time and use batch control to dispense precise volumes.
Request at time of purchase | Additional cost
  • Optional integrated potentiometer control: Use the integrated potentiometer to adjust setpoints with the simple turn of a knob.
Device Customization Options
Build and performance options
  • Communication protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS
  • Displays: Backlit monochrome or color; integrated or panel–mount
  • Process connections: Compression, VCR, or VCO fittings
  • Wetted materials: 303, 316L, and 430FR stainless steel; FFKM
  • Calibration: High-accuracy; custom calibration points
Valve options and PID tuning

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MCE: small proportional control valve mounted internally

Custom PID valve tuning ensures maximum performance for your specific process conditions.

Optional Accessories
Accessories | Sold separately
  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

Not exactly what you’re looking for?

  • Explore other gas mass flow controller options, including non-corrosive devices.
  • Check out our other flow or pressure control and measurement solutions.
  • Our expert team of applications engineers is available to provide additional information, discuss your application, or answer any questions you may have.

Contact an applications engineer

Questions about this product?