BASIS™ MEMS Thermal Mass Flow Meters & Controllers

Small flow mass flow instruments with the performance of a premier product.

Alicat Scientific’s smallest mass flow controller uses MEMS thermal technology to measure mass flow. Cost-effective, small enough to fit in the palm of your hand and yet packed with impressive performance. Work with our engineering team for custom manifolds and gas mixing arrays.

  • Accurate flow control in a compact, durable, metal flow body.
  • Run sophisticated flow-control scripts using a fast, robust Alicat ASCII command set.
  • Dispense dosing and batches with a built-in totalizer.

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Compact manifolds

Ideal for benchtop bioreactors, glass manufacturing, and OEM builds with space constraints. Contact us with your specifications.

Easily connect to PC or PLC
Available with a wide range of fittings
Built to your process


Quick Specs

Full-scale flow ranges 100 SCCM to 100 SLPM
Fluids Air, N2, O2, CH4, He, H2, Ar, CO2, N2O
Accuracy As good as ±1.5% reading or ±0.2% full scale, gas dependent
Measurement & control ranges 0.1% – 100% of full scale (1,000:1 turndown)
Flow repeatability (2σ) ±0.25% of reading or ±0.05% of full scale
Sensor response time < 6 ms
Control response time As fast as 100 ms
Operating temperature 0 – 50°C 
Operating pressure 0 – 145 PSIG
Humidity 0 – 95% non-condensing

Build Options

Communication protocols Alicat ASCII and Modbus-RTU over RS–232 or RS–485
Analog Communication 4-20 mA or 0-5 Vdc
Process connections NPT or SAE
Ingress Protection IP40
Dimensions As small as 0.88″ (22.23 mm) x 2.7″ (68.6 mm) x 1.55″ (39.4 mm) (WxDxH)

Above specifications apply to most ranges.


Purchase Now*

BASIS meters and controllers are available in our online shop.

Buy select devices online


*Available in CA, US, MX. If your country is not displayed, or you’re looking for faster shipping, contact us for more options: +1-520-290-6060 or via email at

Need downports or machined fittings?

Our fast prototyping will help you get to a production build quickly.

BASIS improves industry efficiency

Nozzle columns are installed in a gas chromatograph.

Verify flow and optimize carrier gas control in gas chromatography
Enable full system stability. Fluctuations in flow rate disrupt the detection of chemical compounds. Tightly regulate carrier gas flow rate to ensure accurate compound detection, using a BASIS electronic mass flow controller.

A bioreactor being adjusted through its control panel.

Lowering cost and increasing speed of biologics production
Ensure your process is repeatable and scalable.  BASIS provide accurate and responsive gas flow with a large turndown ratio and integrated gas selection.  The number of spares required is reduced without sacrificing performance.

Architectural glass plate emerging from an oven. Burner control using electronic MFCs can reduce variability in high precision glass manufacturing.

Ensure consistent batches in glass production
BASIS mass flow devices are used in burner control applications to control gases that heat the glass and facilitate drawing. Scripting and electronic control make your process repeatable and precise. Great for production of lab-quality and other high-volume, low-variability glass.

When pressure and flow volume alone are used to mix gases, the results are inconsistent.

Gas mixing in molar ratios
Use BASIS mass flow controller’s intuitive serial commands to make gas mixtures in molecular proportions, and stop paying premiums for custom mixes.


Contact an applications engineer

Questions about this product?

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