Mass Flow Controllers & Meters


BASIS–Series: OEM Gas Mass Flow Controllers

Essential flow control for OEM applications.


Order Directly from Alicat


BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, economical package for high-quantity orders. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS™ features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.

  • Reliable. BASIS™ controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
  • Responsive. Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS™ mass flow controllers get ahead of the unexpected.
  • Compatible. Do more with BASIS™ controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.


  • Available ranges: 0-100 sccm, 0-1000 sccm, and 0-20 slpm (see Part Numbers)
  • Operating range (Turndown ratio): 200:1 (1, 20 and 50 slpm) or 100:1 (100 sccm)
  • Calibration accuracy, NIST-traceable: +/- (1.5% of the reading + 0.5% of the full-scale range)
  • Repeatability: 0.5% of the full-scale range
  • Typical control response time constant: 100 ms (adjustable with PD tuning)
  • Warm-up time: 70 ms to full accuracy spec

Operating Conditions

  • Compatible gases: Air, Ar, CO2, N2, O2, N2O (selectable over serial connection); He or H2 calibration (for use with one gas only) also available at time of order
  • Operating temperature: 0°C to +50°C
  • Max internal pressure (static): 145 psig (160 psia) for 0-100 and 0-1000 sccm ranges; 60 psig (75 psia) for 0-20 slpm ranges
  • Proof pressure: 175 psig (190 psia)
  • STP: 25°C & 1 atm (14.696 psia)

Build Options

  • Communications protocols (0-5 Vdc analog, RS-232, RS-485, Modbus-RTU)
  • Process connections (NPT or SAE)
  • Multi-gas calibration (Air, Ar, CO2, N2, O2, N2O)
  • Single-gas calibrations (He, H2)

BC-C0100 (1-100 sccm)
BC-C1000 (10-1000 sccm)
BC-L0020 (0.2-20 slpm)

Flow Control for OEM Gas Analyzers

Ensure measurement accuracy in OEM analyzer products. Fast valve response and high accuracy make for repeatable and stable gas flows to the analyzer sensors. Small size, instant control readiness and dual communications make BASIS™ easy to build into end user products.


Automated Gas Mixing

Fill your gas mixing cabinets with responsive BASIS™ mass flow controllers that are ready in an instant for flow measurement at full accuracy. Fast analog and digital feedback to a PLC or PC allows real-time changes to the flow rate setpoint to maintain desired gas mixture composition.

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