Mass Flow Controllers

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MC–Gas Mass Flow Controllers

Responsive gas flow control that suppresses pressure fluctuations.

An excellent mass flow controller needs to do only one thing well: keep the flow rate at your setpoint. Alicat’s MC series gas mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.

Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.

Configurations Available to Buy Online

100 SCCM – 100 SLPM flow ranges
0-5V, 1-5 V, 0-10 V and 4-20 mA analog input and outputs
RS-232 or RS-485 serial communication
DB9-M, DB15, mini-din and M12 connectors

For more flow ranges, industrial protocols, 20+ connector variants and many more build options, get in touch.

Contact Us for a Quote

Performance

Available ranges: max 0-5000 slpm, min 0-0.5 sccm/0-500 sμlm
Steady state control range: 0.01% – 100% of full scale.
Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)
Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)
Repeatability: +/- 0.1% of reading + 0.02% of full scale
Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
No warm-up time required

Operating Conditions

Compatible gases: 98 (MC) or 130 (MCS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 145 psig (160 psia)
Proof pressure: 175 psig (190 psia)
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

Accessories (sold separately)

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Model Variations

Low pressure drop, max 60 psia (MCW)
High pressure, 160-320 psia (MCQ)
Enclosed valve with SEMI port length (MCE)
Pneumatic shut-off valve for vacuum applications (MCV)
Aggressive gases (MCS)

Valve Options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

MC – small proportional control valve for flow ranges of 20 slpm and below
MC with PCA designation – high-performance proportional control valve used for some applications with higher pressures
MCP – small proportional control valve with the largest orifice (not available for corrosive configurations)
MCH – hammerhead configuration, which pairs two small valves working side-by-side as one valve
MCR – nearly frictionless large Rolamite proportional valve for flow rates of 50 slpm and above

Corrosive Gases (MCS series)

Instruments in the standard MC series are also available with an optional “S” configuration (MCS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM. Some corrosive gases require 316L stainless steel throughout the flow path, and in this case we can upgrade both the valve (type PCA) and flow body to 316L for full-scale flow ranges of 20 slpm or less.

Build Options

Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
Displays (monochrome or color, integrated or panel-mount)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

Flow totalizer
Integrated potentiometer control
High-accuracy or custom calibration

See all options

Alicat’s MC series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.

MC-0.5SCCM-D
MC-1SCCM-D
MC-2SCCM-D
MC-5SCCM-D
MC-10SCCM-D
MC-20SCCM-D
MC-50SCCM-D
MC-100SCCM-D
MC-200SCCM-D
MC-500SCCM-D
MC-1SLPM-D
MC-2SLPM-D
MC-5SLPM-D
MC-10SLPM-D
MC-20SLPM-D

Alicat’s MCP series offers the largest orifice in a small valve format and is suitable for use with non-corrosive gases.

MCP-10SLPM-D
MCP-20SLPM-D
MCP-50SLPM-D
MCP-100SLPM-D
MCP-250SLPM-D

Alicat’s MCH series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.

MCH-10SLPM-D
MCH-20SLPM-D
MCH-50SLPM-D
MCH-100SLPM-D
MCH-250SLPM-D
MCH-500SLPM-D

MCPH-50SLPM-D
MCPH-100SLPM-D
MCPH-250SLPM-D

Alicat’s MCR series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.

MCR-50SLPM-D
MCR-100SLPM-D
MCR-250SLPM-D
MCR-500SLPM-D
MCR-1000SLPM-D
MCR-2000SLPM-D-PAR
MCR-3000SLPM-D-PAR
MCRH-5000SLPM-D-PAR

Alicat’s MCS series uses small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.

MCS-0.5SCCM-D
MCS-1SCCM-D
MCS-2SCCM-D
MCS-5SCCM-D
MCS-10SCCM-D
MCS-20SCCM-D
MCS-50SCCM-D
MCS-100SCCM-D
MCS-200SCCM-D
MCS-500SCCM-D
MCS-1SLPM-D
MCS-2SLPM-D
MCS-5SLPM-D
MCS-10SLPM-D
MCS-20SLPM-D

Alicat’s MCHS series is suitable for use with corrosive gases and pairs two valves working side-by-side as one to provide greater control at higher pressures.

MCHS-10SLPM-D
MCHS-20SLPM-D
MCHS-50SLPM-D
MCHS-100SLPM-D
MCHS-250SLPM-D
MCHS-500SLPM-D

Alicat’s MCRS series is suitable for use with corrosive gases and uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates.

MCRS-50SLPM-D
MCRS-100SLPM-D
MCRS-250SLPM-D
MCRS-500SLPM-D
MCRS-1000SLPM-D
MCRS-2000SLPM-D-PAR
MCRS-3000SLPM-D-PAR
MCRHS-5000SLPM-D-PAR

Gas sparging for pH control

Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements. Digital feedback from PLC or PC allows real-time changes to the flow rate setpoint to maintain optimal process conditions.

Gas Sparging

Custom Gas Mixing System

Mass flow controllers from Alicat are well suited to the creation of custom gas mixing systems. Their inherent flexibility and adaptability may be utilized to great effect in this type of application.

Custom Gas Mixing

High-Temperature Mass Flow Control

Alicat’s remote electronics option separates the electronics from the sensors and flow body. This allows for flowing gases at higher temperatures through the flow body without subjecting the controller electronics to temperatures beyond their design.

High-Temperature Hydrocarbon Distillation

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Brochure Manual MC Low Flow Specs MC Mid Flow Specs MC High Flow Specs MCS Specs

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Mass Flow Controllers & Meters
Mass Flow Controllers
Bio-Series Mass Flow Controllers for Bioreactors & Fermenters

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Bio-Series Mass Flow Controllers for Bioreactors & Fermenters

Bio-Series meters and controllers are designed and constructed specifically for mass flow control in bioreactors and fermenters, upstream or downstream. They offer the highest reliability in the industry, with communication protocols to integrate with your existing system. Alicat’s experience in process stages from benchtop R&D through GMP production of biologics and biosimilars ensure robust solutions that will scale with your development.

Reliable, adaptable, and compatible flow control, built to your preferred industrial protocols for Bio-Series integration with Pharma 4.0 systems

Long-term measurement stability due to extremely low zero drift
Resistance to process water contamination with a lifetime warranty and available IP66 ingression
Minimized footprint and piping via gas select feature enabling exchange of CO2, Air, O2, N2 or over 100 other gases without re-calibration or loss of accuracy, and 10,000:1 controllable range
ASME-recommended materials available including 316L stainless steel and USP Class VI FDA-grade certified elastomers
Monitor process and control performance with a high-contrast color display

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Bio-Series meters and controllers are designed for scalability, data compatibility, and ease of use. Upgrade your manual systems to higher-precision, controlled, and monitored mass flow. Alicat devices are available in a wide range of flow rates and are highly customizable for smooth integration into your existing setup or system.

All standard flow rates. Low flow devices range from 1-5 sccm. Mid flow devices range from 10 sccm-20 slpm. High flow devices range from 20-500 slpm.
Communication protocols. Designed for seamless compatibility, Alicat offers a full complement of available protocols: RS-232/analog, RS-485/analog, Modbus RS-232, Modbus RS-485, Modbus TCP/IP, Profibus RS-485, Ethernet/IP, DeviceNet RS-232, and EtherCAT.
Process connections. Standard SAE or NPT connectors.

More information on Bio-Series devices

Bioreactors and fermenters require very low outgassing from wetted materials to ensure products are free from unwanted contaminants. Alicat BIO-Series meters and controllers use USP Class VI elastomers with 316L Stainless Steel flow bodies. Devices with stainless steel valves are available on request.

Common Certifications for Elastomeric Components

Knowledge Base: Biocompatibility of Wetted Materials

Can’t find what you’re looking for? Learn more by reading the application notes below.

For bioprocessing applications that do not require ASME BPE-2016 compliant materials, the standard series mass flow meters and controllers are designed for a wide range of flows and unparalleled precision and accuracy.

Interested in gas mixing with mass flow controllers for bioreactors? Fusion Flow‘s modular gas mixing system is designed for seamless integration into existing systems.

Optimizing Bioreactor Production

Bioreactors are used in a growing number of applications, from producing bio-adaptive medicines or environmentally friendly fertilizers and pesticides, to brewing beer, refining ethanol and treating wastewater. The increase in biologics production and single use reactors has led to a need for even greater precision and flexibility in instrumentation.

Flow control for bioreactors

High Flow Control for Gasification

Alicat Scientific mass flow controllers can be used in multiple areas of the gasification process: combustion, clean-up reactors, safety, & quality control. Get more precise syngas production, redundancy between units and extremely fast control. Alicat’s MCR controllers use near-frictionless Rolamite proportional control valves to rapidly and precisely control flow rates up to 5000 slpm. With accuracy of +/- (0.8% of reading + 0.2% of full scale range) to high flow rates, precise composition can be ensured.

Streamlining gasification processes

Lowered Cost and Increased Speed for Biologics Production

With protocols for bioprocessing now firmly established, there is an increasing focus on reducing the cost of producing biologics, biosimilars, mABs and other modern medicines that require bioreactions and current trends toward single use bioreactors. You can reduce your cost per run and extend your processes with Alicat’s mass flow accuracy as low as 0.1% of full scale and unbeatable repeatability of +/- 0.02% of full scale readings.

Increasing efficiency of bioreactions

Aerobic vs. Anaerobic Wastewater Treatment: An Overview

Bioreactors are now a common part of wastewater treatment. Alicat’s revolutionary differential-pressure based mass flow controllers allow for extreme flexibility in mass flow control and the response times needed to make this process efficient and cost effective.

Bioreactors in wastewater treatment

Bio-Series mass flow controllers for bioreactor applications

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Brochure BIO Controller High Flow Specs BIO Controller Mid Flow Specs BIO Controller Low Flow Specs BIO Meter High Flow Specs BIO Meter Mid Flow Specs BIO Meter Low Flow Specs

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Mass Flow Controllers & Meters
Mass Flow Controllers
MCQ–High Pressure Gas Mass Flow Controllers

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MCQ–High Pressure Gas Mass Flow Controllers

Responsive gas flow control for high-pressure applications

Order Directly from Alicat

The MCQ flow controller delivers the fast control response of our standard controller to applications that require higher line pressures (160-320 psia). This high-pressure mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.

Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.

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Performance

Available ranges: max 0-3000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
Steady state control range: 0.5% – 100% of full scale.
Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)
Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)
Repeatability: +/- 0.1% of full scale on most products
Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
No warm-up time required

Operating Conditions

Compatible gases: 98 pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
Operating temperature: -10°C to +60°C
Max internal pressure (static): 320 psia
Proof pressure: 400 psia
STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)

Accessories (sold separately)

Find accessories

Model Variations

Standard configuration, up to 160 psia (MC)
Low pressure drop, max 60 psia (MCW)
Anti-corrosive, max 160 psia (MCS)

Valve Options

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

MCQ – small proportional control valve for flow ranges of 20 slpm and below
MCQ with PCA designation – high-performance proportional control valve used for higher supply pressures
MCH – hammerhead configuration, which pairs two small valves working side-by-side as one valve
MCR – nearly frictionless large Rolamite proportional valve for flow rates of 50 slpm and above

Build Options

Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
Displays (monochrome or color, integrated or panel-mount)
Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
Elastomers (Viton, FFKM, EPDM, Silicone)

Performance Options

See all options

Alicat’s MCQ series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.

MCQ-10SCCM-D
MCQ-20SCCM-D
MCQ-50SCCM-D
MCQ-100SCCM-D
MCQ-200SCCM-D
MCQ-500SCCM-D
MCQ-1SLPM-D
MCQ-2SLPM-D
MCQ-5SLPM-D
MCQ-10SLPM-D
MCQ-20SLPM-D

Alicat’s MCHQ series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.

MCHQ-10SLPM-D
MCHQ-20SLPM-D
MCHQ-50SLPM-D
MCHQ-100SLPM-D
MCHQ-250SLPM-D

Alicat’s MCRQ series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.

MCRQ-50SLPM-D
MCRQ-100SLPM-D
MCRQ-250SLPM-D
MCRQ-500SLPM-D
MCRQ-1000SLPM-D
MCRQ-2000SLPM-D-PAR
MCRQ-3000SLPM-D-PAR

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Brochure Manual MCQ Specs - High MCQ Specs - Mid

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Mass Flow Controllers & Meters
Mass Flow Controllers
BASIS–OEM Gas Mass Flow Controllers

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BASIS–OEM Gas Mass Flow Controllers

Essential flow control for OEM applications.

Order Directly from Alicat

BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, economical package for high-quantity orders. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.

Reliable. BASIS controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
Responsive. Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS mass flow controllers get ahead of the unexpected.
Compatible. Do more with BASIS controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.

Performance

Available ranges: 0-100 sccm, 0-1000 sccm, and 0-20 slpm (see Part Numbers)
Operating range (Turndown ratio): 200:1 (1, 20 and 50 slpm) or 100:1 (100 sccm)
Calibration accuracy, NIST-traceable: +/- (1.5% of the reading + 0.5% of the full-scale range)
Repeatability: 0.5% of the full-scale range
Typical control response time constant: 100 ms (adjustable with PD tuning)
Warm-up time: 70 ms to full accuracy spec

Operating Conditions

Compatible gases: Air, Ar, CO2, N2, O2, N2O (selectable over serial connection); He or H2 calibration (for use with one gas only) also available at time of order
Operating temperature: 0°C to +50°C
Max internal pressure (static): 145 psig (160 psia) for 0-100 and 0-1000 sccm ranges; 60 psig (75 psia) for 0-20 slpm ranges
Proof pressure: 175 psig (190 psia)
STP: 25°C & 1 atm (14.696 psia)

Accessories (sold separately)

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Build Options

Communications protocols (0-5 Vdc analog, RS-232, RS-485, Modbus-RTU)
Process connections (NPT or SAE)
Multi-gas calibration (Air, Ar, CO2, N2, O2, N2O)
Single-gas calibrations (He, H2)

BC

BC-C0100 (1-100 sccm)
BC-C1000 (10-1000 sccm)
BC-L0020 (0.2-20 slpm)

Flow Control for OEM Gas Analyzers

Ensure measurement accuracy in OEM analyzer products. Fast valve response and high accuracy make for repeatable and stable gas flows to the analyzer sensors. Small size, instant control readiness and dual communications make BASIS easy to build into end user products.

Automated Gas Mixing

Fill your gas mixing cabinets with responsive BASIS mass flow controllers that are ready in an instant for flow measurement at full accuracy. Fast analog and digital feedback to a PLC or PC allows real-time changes to the flow rate setpoint to maintain desired gas mixture composition.

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Brochure Manual Specs

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Mass Flow Controllers & Meters

Pressure based mass flow instrumentation for top performance.