Mass Flow Controllers
Gas mass flow controllers must be fast and accurate to establish stable flow. Our mass flow controllers reach their setpoints faster than any others, which enables them to suppress fluctuations in line pressure before they affect your process downstream. Customized valve options and factory PID tuning ensure that your MFC will perform well in your specific application.
Pressure based mass flow instrumentation for top performance.
- 0.6% of reading accuracy on most flow instruments
- 4 ms response time
- No warm up
- Four process variables
- Built in display
- Industrial protocols
- Pressure compensation
- Temperature compensation
- Wide dynamic flow ranges
- *see product brochures for full specifications
The MC series is our standard mass flow controller, with models that can measure flow rates as high as 5000 slpm or as low as 0.0025 sccm. Choose an MCQ when your line pressures are high (145-305 psig). The MCW series is best for low pressure drop applications, leak testing and for reducing pneumatic response time at flow rates of 50 scccm or less.
If you need a drop-in replacement for an existing thermal mass flow controller, the MCE series tucks the valve inside to conform its process connections to the SEMI standard length. For vacuum applications, the MCV adds a pneumatically-actuated shut-off valve to the MCE form factor.
BASIS is Alicat’s line of compact mass flow controllers designed for OEM applications and large-quantity orders.
model
MC–Gas Mass Flow Controllers
Responsive gas flow control that suppresses pressure fluctuations
An excellent MFC needs to do only one thing well: keep the flow rate at your setpoint. Alicat’s MC series gas mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with Ethernet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. MC series flow controllers can temporarily flow liquids without getting destroyed. For environmental hardiness, we can build your MFC with IP66 ingress protection.
Alicat’s MC series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MC-0.5SCCM-D
MC-1SCCM-D
MC-2SCCM-D
MC-5SCCM-D
MC-10SCCM-D
MC-20SCCM-D
MC-50SCCM-D
MC-100SCCM-D
MC-200SCCM-D
MC-500SCCM-D
MC-1SLPM-D
MC-2SLPM-D
MC-5SLPM-D
MC-10SLPM-D
MC-20SLPM-D
Alicat’s MCP series offers the largest orifice in a small valve format and is suitable for use with non-corrosive gases.
MCP-10SLPM-D
MCP-20SLPM-D
MCP-50SLPM-D
MCP-100SLPM-D
MCP-250SLPM-D
Alicat’s MCH series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.
MCH-10SLPM-D
MCH-20SLPM-D
MCH-50SLPM-D
MCH-100SLPM-D
MCH-250SLPM-D
MCH-500SLPM-D
MCPH-50SLPM-D
MCPH-100SLPM-D
MCPH-250SLPM-D
Alicat’s MCR series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.
MCR-50SLPM-D
MCR-100SLPM-D
MCR-250SLPM-D
MCR-500SLPM-D
MCR-1000SLPM-D
MCR-2000SLPM-D-PAR
MCR-3000SLPM-D-PAR
MCRH-5000SLPM-D-PAR
Alicat’s MCS series uses small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.
MCS-0.5SCCM-D
MCS-1SCCM-D
MCS-2SCCM-D
MCS-5SCCM-D
MCS-10SCCM-D
MCS-20SCCM-D
MCS-50SCCM-D
MCS-100SCCM-D
MCS-200SCCM-D
MCS-500SCCM-D
MCS-1SLPM-D
MCS-2SLPM-D
MCS-5SLPM-D
MCS-10SLPM-D
MCS-20SLPM-D
Alicat’s MCHS series is suitable for use with corrosive gases and pairs two valves working side-by-side as one to provide greater control at higher pressures.
MCHS-10SLPM-D
MCHS-20SLPM-D
MCHS-50SLPM-D
MCHS-100SLPM-D
MCHS-250SLPM-D
MCHS-500SLPM-D
Alicat’s MCRS series is suitable for use with corrosive gases and uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates.
MCRS-50SLPM-D
MCRS-100SLPM-D
MCRS-250SLPM-D
MCRS-500SLPM-D
MCRS-1000SLPM-D
MCRS-2000SLPM-D-PAR
MCRS-3000SLPM-D-PAR
MCRHS-5000SLPM-D-PAR
model
MCW – Whisper Series : Low Pressure Drop Gas Mass Flow Controller
Responsive gas flow control with minimal system impact
Alicat “Whisper” Series mass flow controllers with low pressure drop are ideal for controlling mass and volumetric flow rates when there is little available system pressure. Low pressure drop minimizes system impact, enabling flow control at near-atmospheric pressures and shortening system response times. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control while maintaining low pressure drop.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with Ethernet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. MCW series flow controllers can temporarily flow liquids without getting destroyed. For environmental hardiness, we can build your MFC with IP66 ingress protection.
Alicat’s MCW series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MCW-0.5SCCM-D
MCW-1SCCM-D
MCW-2SCCM-D
MCW-5SCCM-D
MCW-10SCCM-D
MCW-20SCCM-D
MCW-50SCCM-D
MCW-100SCCM-D
MCW-200SCCM-D
MCW-500SCCM-D
MCW-1SLPM-D
MCW-2SLPM-D
Alicat’s MCPW series offers the largest orifice in a small valve format and is suitable for use with non-corrosive gases.
MCPW-5SLPM-D
MCPW-10SLPM-D
Alicat’s MCHW series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.
MCHW-5SLPM-D
MCHW-10SLPM-D
Alicat’s MCRW series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at higher flow rates and is suitable for use with non-corrosive gases.
MCRW-5SLPM-D
MCRW-10SLPM-D
MCRW-20SLPM-D
MCRW-40SLPM-D
MCRW-50SLPM-D
MCRW-100SLPM-D
MCRW-250SLPM-D
MCRW-500SLPM-D
MCRWH-1000SLPM-D-PAR
model
MCQ–High Pressure Gas Mass Flow Controllers
Responsive gas flow control for high-pressure applications
The MCQ flow controller delivers the fast control response of our standard controller to applications that require higher line pressures (160-320 psia). This high-pressure mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with Ethernet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. MCQ series flow controllers can temporarily flow liquids without getting destroyed. For environmental hardiness, we can build your MFC with IP66 ingress protection.
Alicat’s MCQ series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MCQ-10SCCM-D
MCQ-20SCCM-D
MCQ-50SCCM-D
MCQ-100SCCM-D
MCQ-200SCCM-D
MCQ-500SCCM-D
MCQ-1SLPM-D
MCQ-2SLPM-D
MCQ-5SLPM-D
MCQ-10SLPM-D
MCQ-20SLPM-D
Alicat’s MCHQ series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.
MCHQ-10SLPM-D
MCHQ-20SLPM-D
MCHQ-50SLPM-D
MCHQ-100SLPM-D
MCHQ-250SLPM-D
Alicat’s MCRQ series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.
MCRQ-50SLPM-D
MCRQ-100SLPM-D
MCRQ-250SLPM-D
MCRQ-500SLPM-D
MCRQ-1000SLPM-D
MCRQ-2000SLPM-D-PAR
MCRQ-3000SLPM-D-PAR
MCRHQ-5000SLPM-D-PAR
Alicat’s MCQS series uses small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.
MCQS-10SCCM-D
MCQS-20SCCM-D
MCQS-50SCCM-D
MCQS-100SCCM-D
MCQS-200SCCM-D
MCQS-500SCCM-D
MCQS-1SLPM-D
MCQS-2SLPM-D
MCQS-5SLPM-D
MCQS-10SLPM-D
MCQS-20SLPM-D
Alicat’s MCHQS series is suitable for use with corrosive gases and pairs two valves working side-by-side as one to provide greater control at higher pressures.
MCHQS-10SLPM-D
MCHQS-20SLPM-D
MCHQS-50SLPM-D
MCHQS-100SLPM-D
MCHQS-250SLPM-D
Alicat’s MCRQS series is suitable for use with corrosive gases and uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates.
MCRQS-50SLPM-D
MCRQS-100SLPM-D
MCRQS-250SLPM-D
MCRQS-500SLPM-D
MCRQS-1000SLPM-D
MCRQS-2000SLPM-D-PAR
MCRQS-3000SLPM-D-PAR
MCRHQS-5000SLPM-D-PAR
model
MCE and MCV–Vacuum Gas Mass Flow Controllers
Easy upgrade for aging thermal flow controllers
Update your vacuum deposition fixtures with a state-of-the-art Alicat MCE or MCV. The MCE features the same rapid control response of our standard mass flow controller in a form factor that includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs.
The MCV marries the MCE to an integrated pneumatic shut-off valve for hard vacuum applications. Connect an air line to the shut-off valve to prevent contamination during zero setpoint conditions.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with Ethernet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. MCE and MCV series flow controllers can temporarily flow liquids without getting destroyed.
Alicat’s MCE series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MCE-0.5SCCM-D
MCE-1SCCM-D
MCE-2SCCM-D
MCE-5SCCM-D
MCE-10SCCM-D
MCE-20SCCM-D
MCE-50SCCM-D
MCE-100SCCM-D
MCE-200SCCM-D
MCE-500SCCM-D
MCE-1SLPM-D
MCE-2SLPM-D
MCE-5SLPM-D
MCE-10SLPM-D
MCE-20SLPM-D
Alicat’s MCES series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.
MCES-0.5SCCM-D
MCES-1SCCM-D
MCES-2SCCM-D
MCES-5SCCM-D
MCES-10SCCM-D
MCES-20SCCM-D
MCES-50SCCM-D
MCES-100SCCM-D
MCES-200SCCM-D
MCES-500SCCM-D
MCES-1SLPM-D
MCES-2SLPM-D
MCES-5SLPM-D
MCES-10SLPM-D
MCES-20SLPM-D
Alicat’s MCV series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases. The MCV also incorporates a pneumatic shut-off valve located downstream.
MCV-0.5SCCM-D
MCV-1SCCM-D
MCV-2SCCM-D
MCV-5SCCM-D
MCV-10SCCM-D
MCV-20SCCM-D
MCV-50SCCM-D
MCV-100SCCM-D
MCV-200SCCM-D
MCV-500SCCM-D
MCV-1SLPM-D
MCV-2SLPM-D
MCV-5SLPM-D
MCV-10SLPM-D
MCV-20SLPM-D
Alicat’s MCVS series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with corrosive gases. The MCVS also incorporates a pneumatic shut-off valve located downstream.
MCVS-0.5SCCM-D
MCVS-1SCCM-D
MCVS-2SCCM-D
MCVS-5SCCM-D
MCVS-10SCCM-D
MCVS-20SCCM-D
MCVS-50SCCM-D
MCVS-100SCCM-D
MCVS-200SCCM-D
MCVS-500SCCM-D
MCVS-1SLPM-D
MCVS-2SLPM-D
MCVS-5SLPM-D
MCVS-10SLPM-D
MCVS-20SLPM-D
model
BASIS–OEM Gas Mass Flow Controllers
Essential flow control for OEM applications
BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, economical package for high-quantity orders. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.
- Reliable. BASIS controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
- Responsive. Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS mass flow controllers get ahead of the unexpected.
- Compatible. Do more with BASIS controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.
BC-C0100 (1-100 sccm)
BC-C1000 (10-1000 sccm)
BC-L0020 (0.2-20 slpm)
