Mass Flow Controllers
Gas mass flow controllers must be fast and accurate to establish stable flow. Our mass flow controllers reach their setpoints faster than any others, which enables them to suppress fluctuations in line pressure before they affect your process downstream. Customized valve options and factory PID tuning ensure that your MFC will perform well in your specific application.
Pressure based mass flow instrumentation for top performance.
- 0.6% of reading accuracy on most flow instruments
- 4 ms response time
- No warm up
- Four process variables
- Built in display
- Industrial protocols
- Pressure compensation
- Temperature compensation
- Wide dynamic flow ranges
Standard configurations of MC Series are available to buy online.
Mass Flow Controller Series | |
MC Series Standard Gas Flow Controllers MCQ Series High Pressure Gas Flow Controllers MCW Series Low Pressure Drop Controllers BIO Series Bioreactor Gas Flow Controllers | MCE Series Drop-in Replacements for Thermal MFCs MCV Series Vacuum Controllers BASIS Series Compact Controllers for OEM applications |
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MC–Gas Mass Flow Controllers
BrochureManualMC Low Flow SpecsMC Mid Flow SpecsMC High Flow SpecsMCS Specs -
MCW – Whisper Series : Low Pressure Drop Gas Mass Flow Controller
BrochureManualMCW LOW FLOW SPECSMCW MID FLOW SPECSMCW HIGH FLOW SPECS -
Mass Flow Meters & Controllers for Bioprocessing
BrochureBIO Controller High Flow SpecsBIO Controller Mid Flow SpecsBIO Controller Low Flow SpecsBIO Meter High Flow SpecsBIO Meter Mid Flow SpecsBIO Meter Low Flow Specs -
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MCE and MCV–Vacuum Gas Mass Flow Controllers
BrochureManualMCE low flow SpecsMCE mid flow SpecsMCES SpecsMCV low flow SpecsMCV mid flow SpecsMCVS Specs -
Gas sparging for pH control (MC)
Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements.
Even Faster Leak Testing (MCW)
A “Whisper” mass flow controller that is set to control for pressure serves the functions of both a pressure controller and a mass flow meter in one device.
Gas Flow Control for Reactive Sputtering (MCV)
Precisely control the partial pressures of reactive gases in the vacuum chamber, and maintain tight shut-off under no-flow conditions with the pneumatic valve.
Flow Control for OEM Gas Analyzers (BASIS)
Small size, instant control readiness and dual communications make BASIS easy to build into end user products.
- Mass Flow Controllers & Meters
- Mass Flow Controllers
- MC–Gas Mass Flow Controllers
MC–Gas Mass Flow Controllers
Responsive gas flow control that suppresses pressure fluctuations.
Shop Online
An excellent mass flow controller needs to do only one thing well: keep the flow rate at your setpoint. Alicat’s MC series gas mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
Configurations Available to Buy Online
- 100 SCCM – 100 SLPM flow ranges
- 0-5V, 1-5 V, 0-10 V and 4-20 mA analog input and outputs
- RS-232 or RS-485 serial communication
- DB9-M, DB15, mini-din and M12 connectors
For more flow ranges, industrial protocols, 20+ connector variants and many more build options, get in touch.
Performance
- Available ranges: max 0-5000 slpm, min 0-0.5 sccm/0-500 sμlm
- Steady state control range: 0.01% – 100% of full scale.
- Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)
- Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)
- Repeatability: +/- 0.1% of reading + 0.02% of full scale
- Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
- No warm-up time required
Operating Conditions
- Compatible gases: 98 (MC) or 130 (MCS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
- Operating temperature: -10°C to +60°C
- Max internal pressure (static): 145 psig (160 psia)
- Proof pressure: 175 psig (190 psia)
- STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)
In the box
- Mass flow controller (power supply sold separately)
- NIST-traceable calibration certificate
- Alicat operating manual
Model Variations
- Low pressure drop, max 60 psia (MCW)
- High pressure, 160-320 psia (MCQ)
- Enclosed valve with SEMI port length (MCE)
- Pneumatic shut-off valve for vacuum applications (MCV)
- Aggressive gases (MCS)
Valve Options
Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.
- MC – small proportional control valve for flow ranges of 20 slpm and below
- MC with PCA designation – high-performance proportional control valve used for some applications with higher pressures
- MCP – small proportional control valve with the largest orifice (not available for corrosive configurations)
- MCH – hammerhead configuration, which pairs two small valves working side-by-side as one valve
- MCR – nearly frictionless large Rolamite proportional valve for flow rates of 50 slpm and above
Corrosive Gases (MCS series)
Instruments in the standard MC series are also available with an optional “S” configuration (MCS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM. Some corrosive gases require 316L stainless steel throughout the flow path, and in this case we can upgrade both the valve (type PCA) and flow body to 316L for full-scale flow ranges of 20 slpm or less.
Build Options
- Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
- Displays (monochrome or color, integrated or panel-mount)
- Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
- Elastomers (Viton, FFKM, EPDM, Silicone)
Performance Options
- Flow totalizer
- Integrated potentiometer control
- High-accuracy or custom calibration
Alicat’s MC series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MC-0.5SCCM-D
MC-1SCCM-D
MC-2SCCM-D
MC-5SCCM-D
MC-10SCCM-D
MC-20SCCM-D
MC-50SCCM-D
MC-100SCCM-D
MC-200SCCM-D
MC-500SCCM-D
MC-1SLPM-D
MC-2SLPM-D
MC-5SLPM-D
MC-10SLPM-D
MC-20SLPM-D
Alicat’s MCP series offers the largest orifice in a small valve format and is suitable for use with non-corrosive gases.
MCP-10SLPM-D
MCP-20SLPM-D
MCP-50SLPM-D
MCP-100SLPM-D
MCP-250SLPM-D
Alicat’s MCH series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.
MCH-10SLPM-D
MCH-20SLPM-D
MCH-50SLPM-D
MCH-100SLPM-D
MCH-250SLPM-D
MCH-500SLPM-D
MCPH-50SLPM-D
MCPH-100SLPM-D
MCPH-250SLPM-D
Alicat’s MCR series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.
MCR-50SLPM-D
MCR-100SLPM-D
MCR-250SLPM-D
MCR-500SLPM-D
MCR-1000SLPM-D
MCR-2000SLPM-D-PAR
MCR-3000SLPM-D-PAR
MCRH-5000SLPM-D-PAR
Alicat’s MCS series uses small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.
MCS-0.5SCCM-D
MCS-1SCCM-D
MCS-2SCCM-D
MCS-5SCCM-D
MCS-10SCCM-D
MCS-20SCCM-D
MCS-50SCCM-D
MCS-100SCCM-D
MCS-200SCCM-D
MCS-500SCCM-D
MCS-1SLPM-D
MCS-2SLPM-D
MCS-5SLPM-D
MCS-10SLPM-D
MCS-20SLPM-D
Alicat’s MCHS series is suitable for use with corrosive gases and pairs two valves working side-by-side as one to provide greater control at higher pressures.
MCHS-10SLPM-D
MCHS-20SLPM-D
MCHS-50SLPM-D
MCHS-100SLPM-D
MCHS-250SLPM-D
MCHS-500SLPM-D
Alicat’s MCRS series is suitable for use with corrosive gases and uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates.
MCRS-50SLPM-D
MCRS-100SLPM-D
MCRS-250SLPM-D
MCRS-500SLPM-D
MCRS-1000SLPM-D
MCRS-2000SLPM-D-PAR
MCRS-3000SLPM-D-PAR
MCRHS-5000SLPM-D-PAR
Gas sparging for pH control
Control mass flow rates over a wide flow range with rapid adjustments to accommodate changing flow requirements. Digital feedback from PLC or PC allows real-time changes to the flow rate setpoint to maintain optimal process conditions.
Custom Gas Mixing System
Mass flow controllers from Alicat are well suited to the creation of custom gas mixing systems. Their inherent flexibility and adaptability may be utilized to great effect in this type of application.
High-Temperature Mass Flow Control
Alicat’s remote electronics option separates the electronics from the sensors and flow body. This allows for flowing gases at higher temperatures through the flow body without subjecting the controller electronics to temperatures beyond their design.
- Mass Flow Controllers & Meters
- Mass Flow Controllers
- MCW – Whisper Series : Low Pressure Drop Gas Mass Flow Controller
MCW – Whisper Series : Low Pressure Drop Gas Mass Flow Controller
Responsive gas flow control with minimal system impact
Order Directly from Alicat
Alicat “Whisper” Series mass flow controllers with low pressure drop are ideal for controlling mass and volumetric flow rates when there is little available system pressure. Low pressure drop minimizes system impact, enabling flow control at near-atmospheric pressures and shortening system response times. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control while maintaining low pressure drop.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
Performance
- Available ranges: max 0-1000 slpm, min 0-0.5 sccm/0-500 sμlm
- Steady state control range: 0.01% – 100% of full scale.
- Standard accuracy calibration, NIST-traceable: +/- (0.8% of the reading + 0.2% of the full-scale range)
- Optional high-accuracy calibration, NIST-traceable: +/- (0.4% of the reading + 0.2% of the full-scale range)
- Repeatability: 0.2% of the full-scale range
- Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
- No warm-up time required
Operating Conditions
- Compatible gases: 98 pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
- Operating temperature: -10°C to +60°C
- Max internal pressure (static): 45 psig (60 psia)
- Proof pressure: 175 psig (190 psia)
- STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)
In the box
- Whisper-series mass flow controller (power supply sold separately)
- NIST-traceable calibration certificate
- Alicat operating manual
Model Variations
- Standard configuration, max 160 psia (MC)
- High pressure, 160-320 psia (MCQ)
Valve Options
Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.
- MCW – small proportional control valve for flow ranges of 2 slpm and below
- MCPW – small proportional control valve with the largest orifice (not available for corrosive configurations)
- MCHW – hammerhead configuration, which pairs two small valves working side-by-side as one valve
- MCRW – nearly frictionless large Rolamite proportional valve for flow rates of 5 slpm and above
Build Options
- Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
- Displays (monochrome or color, integrated or panel-mount)
- Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
- Elastomers (Viton, FFKM, EPDM, Silicone)
Performance Options
- Flow totalizer
- Integrated potentiometer control
- High-accuracy or custom calibration
Alicat’s MCW series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MCW-0.5SCCM-D
MCW-1SCCM-D
MCW-2SCCM-D
MCW-5SCCM-D
MCW-10SCCM-D
MCW-20SCCM-D
MCW-50SCCM-D
MCW-100SCCM-D
MCW-200SCCM-D
MCW-500SCCM-D
MCW-1SLPM-D
MCW-2SLPM-D
Alicat’s MCPW series offers the largest orifice in a small valve format and is suitable for use with non-corrosive gases.
MCPW-5SLPM-D
MCPW-10SLPM-D
Alicat’s MCHW series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.
MCHW-5SLPM-D
MCHW-10SLPM-D
Alicat’s MCRW series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at higher flow rates and is suitable for use with non-corrosive gases.
MCRW-5SLPM-D
MCRW-10SLPM-D
MCRW-20SLPM-D
MCRW-40SLPM-D
MCRW-50SLPM-D
MCRW-100SLPM-D
MCRW-250SLPM-D
MCRW-500SLPM-D
MCRWH-1000SLPM-D-PAR
Even Faster Leak Testing
For leak checking smaller test volumes, such as valves or sensors, a single MCW “Whisper” mass flow controller that is set to control for pressure will maintain a constant pressure at the device under test while providing accurate mass and volumetric flow readings in real time. Configured this way, the Whisper serves the functions of both a pressure controller and a mass flow meter in one device.
- Mass Flow Controllers & Meters
- Mass Flow Controllers
- Mass Flow Meters & Controllers for Bioprocessing
Mass Flow Meters & Controllers for Bioprocessing
Bio-Series meters and controllers are designed and constructed specifically for use in bioreactors and fermenters, upstream or downstream. They offer the highest reliability in the industry, with communication protocols to integrate with your existing system. Alicat’s experience in process stages from benchtop R&D through GMP production of biologics and biosimilars ensure robust solutions that will scale with your development.
Reliable, adaptable, and compatible flow control, built to your preferred industrial protocols for Bio-Series integration with Pharma 4.0 systems
- Long-term measurement stability due to extremely low zero drift
- Resistance to process water contamination with a lifetime warranty and available IP66 ingression
- Minimized footprint and piping via gas select feature enabling exchange of CO2, Air, O2, N2 or over 100 other gases without re-calibration or loss of accuracy, and 10,000:1 controllable range
- ASME-recommended materials available including 316L stainless steel and USP Class VI FDA-grade certified elastomers
- Monitor process and control performance with a high-contrast color display
Bio-Series meters and controllers are designed for scalability, data compatibility, and ease of use. Upgrade your manual systems to higher-precision, controlled, and monitored mass flow. Alicat devices are available in a wide range of flow rates and are highly customizable for smooth integration into your existing setup or system.
- All standard flow rates. Low flow devices range from 1-5 sccm. Mid flow devices range from 10 sccm-20 slpm. High flow devices range from 20-500 slpm.
- Communication protocols. Designed for seamless compatibility, Alicat offers a full complement of available protocols: RS-232/analog, RS-485/analog, Modbus RS-232, Modbus RS-485, Modbus TCP/IP, Profibus RS-485, Ethernet/IP, DeviceNet RS-232, and EtherCAT.
- Process connections. Standard SAE or NPT connectors.
Bioreactors and fermenters require very low outgassing from wetted materials to ensure products are free from unwanted contaminants. Alicat BIO-Series meters and controllers use USP Class VI elastomers with 316L Stainless Steel flow bodies. Devices with stainless steel valves are available on request.
Can’t find what you’re looking for? Learn more by reading the application notes below.
For bioprocessing applications that do not require ASME BPE-2016 compliant materials, the standard series mass flow meters and controllers are designed for a wide range of flows and unparalleled precision and accuracy.
Interested in gas mixing for bioreactors? Fusion Flow‘s modular gas mixing system is designed for seamless integration into existing systems.
Optimizing Bioreactor Production
Bioreactors are used in a growing number of applications, from producing bio-adaptive medicines or environmentally friendly fertilizers and pesticides, to brewing beer, refining ethanol and treating wastewater. The increase in biologics production and single use reactors has led to a need for even greater precision and flexibility in instrumentation.
High Flow Control for Gasification
Alicat Scientific mass flow controllers can be used in multiple areas of the gasification process: combustion, clean-up reactors, safety, & quality control. Get more precise syngas production, redundancy between units and extremely fast control. Alicat’s MCR controllers use near-frictionless Rolamite proportional control valves to rapidly and precisely control flow rates up to 5000 slpm. With accuracy of +/- (0.8% of reading + 0.2% of full scale range) to high flow rates, precise composition can be ensured.
Lowered Cost and Increased Speed for Biologics Production
With protocols for bioprocessing now firmly established, there is an increasing focus on reducing the cost of producing biologics, biosimilars, mABs and other modern medicines that require bioreactions and current trends toward single use bioreactors. You can reduce your cost per run and extend your processes with Alicat’s mass flow accuracy as low as 0.1% of full scale and unbeatable repeatability of +/- 0.02% of full scale readings.
Aerobic vs. Anaerobic Wastewater Treatment: An Overview
Bioreactors are now a common part of wastewater treatment. Alicat’s revolutionary differential-pressure based mass flow controllers allow for extreme flexibility in mass flow control and the response times needed to make this process efficient and cost effective.
- Mass Flow Controllers & Meters
- Mass Flow Controllers
- MCQ–High Pressure Gas Mass Flow Controllers
MCQ–High Pressure Gas Mass Flow Controllers
Responsive gas flow control for high-pressure applications
Order Directly from Alicat
The MCQ flow controller delivers the fast control response of our standard controller to applications that require higher line pressures (160-320 psia). This high-pressure mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
Performance
- Available ranges: max 0-5000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)
- Steady state control range: 0.01% – 100% of full scale.
- Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)
- Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)
- Repeatability: +/- 0.1% of reading + 0.02% of full scale
- Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
- No warm-up time required
Operating Conditions
- Compatible gases: 98 (MC) or 130 (MCS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
- Operating temperature: -10°C to +60°C
- Max internal pressure (static): 305 psig (320 psia)
- Proof pressure: 400 psig (415 psia)
- STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)
In the box
- Mass flow controller for high pressure systems (power supply sold separately)
- NIST-traceable calibration certificate
- Alicat operating manual
Model Variations
- Standard configuration, up to 160 psia (MC)
- Low pressure drop, max 60 psia (MCW)
Valve Options
Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.
- MCQ – small proportional control valve for flow ranges of 20 slpm and below
- MCQ with PCA designation – high-performance proportional control valve used for higher pressures
- MCH – hammerhead configuration, which pairs two small valves working side-by-side as one valve
- MCR – nearly frictionless large Rolamite proportional valve for flow rates of 50 slpm and above
Build Options
- Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, Ethernet/IP, Modbus RTU or TCP/IP, PROFIBUS)
- Displays (monochrome or color, integrated or panel-mount)
- Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
- Elastomers (Viton, FFKM, EPDM, Silicone)
Alicat’s MCQ series uses small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MCQ-10SCCM-D
MCQ-20SCCM-D
MCQ-50SCCM-D
MCQ-100SCCM-D
MCQ-200SCCM-D
MCQ-500SCCM-D
MCQ-1SLPM-D
MCQ-2SLPM-D
MCQ-5SLPM-D
MCQ-10SLPM-D
MCQ-20SLPM-D
Alicat’s MCHQ series pairs two small valves working side-by-side as one and is suitable for use with non-corrosive gases.
MCHQ-10SLPM-D
MCHQ-20SLPM-D
MCHQ-50SLPM-D
MCHQ-100SLPM-D
MCHQ-250SLPM-D
Alicat’s MCRQ series uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates and is suitable for use with non-corrosive gases.
MCRQ-50SLPM-D
MCRQ-100SLPM-D
MCRQ-250SLPM-D
MCRQ-500SLPM-D
MCRQ-1000SLPM-D
MCRQ-2000SLPM-D-PAR
MCRQ-3000SLPM-D-PAR
MCRHQ-5000SLPM-D-PAR
Alicat’s MCHQS series is suitable for use with corrosive gases and pairs two valves working side-by-side as one to provide greater control at higher pressures.
MCHQS-10SLPM-D
MCHQS-20SLPM-D
MCHQS-50SLPM-D
MCHQS-100SLPM-D
MCHQS-250SLPM-D
Alicat’s MCRQS series is suitable for use with corrosive gases and uses nearly frictionless Rolamite valves and a variety of orifice patterns for control at high flow rates.
MCRQS-50SLPM-D
MCRQS-100SLPM-D
MCRQS-250SLPM-D
MCRQS-500SLPM-D
MCRQS-1000SLPM-D
MCRQS-2000SLPM-D-PAR
MCRQS-3000SLPM-D-PAR
MCRHQS-5000SLPM-D-PAR
- Mass Flow Controllers & Meters
- Mass Flow Controllers
- MCE and MCV–Vacuum Gas Mass Flow Controllers
MCE and MCV–Vacuum Gas Mass Flow Controllers
Easy upgrade for aging thermal flow controllers.
Order Directly from Alicat
Update your vacuum deposition fixtures with a state-of-the-art Alicat MCE or MCV. The MCE features the same rapid control response of our standard mass flow controller in a form factor that includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs.
The MCV marries the MCE to an integrated pneumatic shut-off valve for hard vacuum applications. Connect an air line to the shut-off valve to prevent contamination during zero setpoint conditions.
- Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
- Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
- Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
Performance
- Available ranges: max 0-20 slpm, min 0-0.5 sccm/0-500 sμlm (see Part Numbers tab for stock ranges)
- Steady state control range: 0.01% – 100% of full scale.
- Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)
- Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)
- Repeatability: +/- 0.1% of reading + 0.02% of full scale
- Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
- Pneumatic valve leak integrity (MCV only): 1 x 10-9 atm scc/sec Helium max
- No warm-up time required
Operating Conditions
- Compatible gases: 98 (MCE/MCV) or 130 (MCES/MCVS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER
- Operating temperature: -10°C to +60°C
- Max internal pressure (static): 145 psig (160 psia)
- Proof pressure: 175 psig (190 psia)
- STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)
Included with your MCE or MCV:
- MCE or MCV-series mass flow controller (power supply sold separately)
- NIST-traceable calibration certificate
- Alicat operating manual
Model Variations
- Enclosed valve with SEMI port length (MCE)
- Enclosed valve with additional pneumatic shut-off valve for vacuum applications (MCV)
- Aggressive gases (MCS, see below)
Also available:
- Standard configuration with externally mounted valve (MC)
Valve Options
Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.
- MCE – small proportional control valve mounted internally
- MCV – small proportional control valve mounted internally, plus an externally-mounted pneumatic shut-off valve located downstream
Corrosive Gases (MCES and MCVS series)
Instruments in the standard MCE and MCV series are also available with an optional “S” configuration (MCES and MCVS) for use with corrosive gases. In this configuration, we upgrade the valve to 303 stainless steel, the sensor to 316L stainless steel and the elastomers to FFKM.
Build Options
- Communications protocols (analog, RS-232, RS-485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS)
- Displays (monochrome or color, integrated or panel-mount)
- Process connections (NPT, SAE, AN, BSPP/G, welded compression or VCR/VCO fittings)
- Elastomers (Viton, FFKM, EPDM, Silicone)
Performance Options
- Flow totalizer
- Integrated potentiometer control
- High-accuracy or custom calibration
Alicat’s MCE series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases.
MCE-0.5SCCM-D
MCE-1SCCM-D
MCE-2SCCM-D
MCE-5SCCM-D
MCE-10SCCM-D
MCE-20SCCM-D
MCE-50SCCM-D
MCE-100SCCM-D
MCE-200SCCM-D
MCE-500SCCM-D
MCE-1SLPM-D
MCE-2SLPM-D
MCE-5SLPM-D
MCE-10SLPM-D
MCE-20SLPM-D
Alicat’s MCES series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with corrosive gases.
MCES-0.5SCCM-D
MCES-1SCCM-D
MCES-2SCCM-D
MCES-5SCCM-D
MCES-10SCCM-D
MCES-20SCCM-D
MCES-50SCCM-D
MCES-100SCCM-D
MCES-200SCCM-D
MCES-500SCCM-D
MCES-1SLPM-D
MCES-2SLPM-D
MCES-5SLPM-D
MCES-10SLPM-D
MCES-20SLPM-D
Alicat’s MCV series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with non-corrosive gases. The MCV also incorporates a pneumatic shut-off valve located downstream.
MCV-0.5SCCM-D
MCV-1SCCM-D
MCV-2SCCM-D
MCV-5SCCM-D
MCV-10SCCM-D
MCV-20SCCM-D
MCV-50SCCM-D
MCV-100SCCM-D
MCV-200SCCM-D
MCV-500SCCM-D
MCV-1SLPM-D
MCV-2SLPM-D
MCV-5SLPM-D
MCV-10SLPM-D
MCV-20SLPM-D
Alicat’s MCVS series uses internally-mounted small proportional valves for control at lower flow rates and is suitable for use with corrosive gases. The MCVS also incorporates a pneumatic shut-off valve located downstream.
MCVS-0.5SCCM-D
MCVS-1SCCM-D
MCVS-2SCCM-D
MCVS-5SCCM-D
MCVS-10SCCM-D
MCVS-20SCCM-D
MCVS-50SCCM-D
MCVS-100SCCM-D
MCVS-200SCCM-D
MCVS-500SCCM-D
MCVS-1SLPM-D
MCVS-2SLPM-D
MCVS-5SLPM-D
MCVS-10SLPM-D
MCVS-20SLPM-D
Gas Flow Control for Reactive Sputtering
Precisely control the partial pressures of reactive gases in the vacuum chamber with rapid 50-ms control response to prevent target poisoning. Fine resolution ensures the proper release of atoms. Maintain tight shut-off under no-flow conditions with the pneumatic valve.
Drop-In Replacements for Aging Mass Flow Controllers
Upgrading to an Alicat mass flow controller is easy. Our MCE series meets the SEMI specification for connection length, so it is drop-in compatible with many older MFCs from other manufacturers. Alicat’s MCV is a drop-in replacement for older MFCs equipped with integrated pneumatic shut-off valves.
- Mass Flow Controllers & Meters
- Mass Flow Controllers
- BASIS–OEM Gas Mass Flow Controllers
BASIS–OEM Gas Mass Flow Controllers
Essential flow control for OEM applications.
Order Directly from Alicat
BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, economical package for high-quantity orders. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.
- Reliable. BASIS controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
- Responsive. Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS mass flow controllers get ahead of the unexpected.
- Compatible. Do more with BASIS controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.
Performance
- Available ranges: 0-100 sccm, 0-1000 sccm, and 0-20 slpm (see Part Numbers)
- Operating range (Turndown ratio): 200:1 (1, 20 and 50 slpm) or 100:1 (100 sccm)
- Calibration accuracy, NIST-traceable: +/- (1.5% of the reading + 0.5% of the full-scale range)
- Repeatability: 0.5% of the full-scale range
- Typical control response time constant: 100 ms (adjustable with PD tuning)
- Warm-up time: 70 ms to full accuracy spec
Operating Conditions
- Compatible gases: Air, Ar, CO2, N2, O2, N2O (selectable over serial connection); He or H2 calibration (for use with one gas only) also available at time of order
- Operating temperature: 0°C to +50°C
- Max internal pressure (static): 145 psig (160 psia) for 0-100 and 0-1000 sccm ranges; 60 psig (75 psia) for 0-20 slpm ranges
- Proof pressure: 175 psig (190 psia)
- STP: 25°C & 1 atm (14.696 psia)
In the Box
- BASIS mass flow controller (power supply sold separately)
- NIST-traceable calibration certificate
- Alicat operating manual
Build Options
- Communications protocols (0-5 Vdc analog, RS-232, RS-485, Modbus-RTU)
- Process connections (NPT or SAE)
- Multi-gas calibration (Air, Ar, CO2, N2, O2, N2O)
- Single-gas calibrations (He, H2)
BC-C0100 (1-100 sccm)
BC-C1000 (10-1000 sccm)
BC-L0020 (0.2-20 slpm)
Flow Control for OEM Gas Analyzers
Ensure measurement accuracy in OEM analyzer products. Fast valve response and high accuracy make for repeatable and stable gas flows to the analyzer sensors. Small size, instant control readiness and dual communications make BASIS easy to build into end user products.
Automated Gas Mixing
Fill your gas mixing cabinets with responsive BASIS mass flow controllers that are ready in an instant for flow measurement at full accuracy. Fast analog and digital feedback to a PLC or PC allows real-time changes to the flow rate setpoint to maintain desired gas mixture composition.