Standard serial data frame
The following is an example of a typical data frame for a 500 SCCM mass flow controller with optional totalizer:
A +087.6 +025.0 +164.7 +981.6 +985.0 +022741.4 Air HLD MOV TMF
- A = device ID (A-Z)
- +087.6 = absolute pressure
- +025.0 = temperature
- +164.7 = volumetric flow rate
- +981.6 = mass flow rate
- +985.0 = setpoint
- +022741.4 = totalized flow since last reset
- Air = selected gas
- HLD = status code (valve hold)
- MOV= status code (mass flow rate overflow)
- TMF = status code (flow totalizer missed out of range flow)
Status codes
The following status codes appear both in the serial data frame and on the instrument display:
- ADC = analog-digital converter error
- EXH = valve exhaust is active (dual-valve controllers only)
- HLD = valve hold is active
- LCK = front display is locked
- MOV= mass flow rate is over the measurable range of the device
- OPL = overpressure limit has been exceeded (option)
- OVR= flow totalizer rolled over to zero (option)
- POV= pressure is over the measurable range of the device
- TMF = flow totalizer missed out of range flow (option)
- TOV= temperature is over the measurable range of the device
- VOV= volumetric flow rate is over the measurable range of the device