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M–Series: Mass Flow Meters

M–Series Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases from 0.01% to 100% of full scale.

FastTrack 5 day shipping options

FastTrack products ship within 5 business days. Eligible products include:

Ranges: 2 SCCM to 500 SLPM
Calibration: Standard or high accuracy
Display: Monochrome, color, or none
Communication protocol: Analog, RS-232, RS-485, or Modbus RTU
Electrical connector: 8-pin mini DIN, DB9, DB15, or locking industrial
Fittings: NPT

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Select configurations available to purchase online*

Ranges: 0.5 SCCM to 5,000 SLPM
Display: Monochrome
Communication protocol: Analog, RS-232, RS-485, or Modbus RTU
Electrical connector: 8-pin mini DIN, DB9, DB15, or M12
Fittings: NPT

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*Available in CA, US, MX. If your country is not displayed, or you’re looking for faster shipping, contact us for more options: +1-520-290-6060 or via email at info@alicat.com.

Specs, features, and customization options

Specs

Standard specs

Full scale ranges: 0.5 SCCM to 5,000 SLPM for all gases (10,000 SLPM for H2)
Measurement range: 0.01% – 100% of full scale
Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
Repeatability: 0.1% of reading and 0.02% of full scale
Response time: <10 ms
Operating temperature: –10°C to +60°C
Full scale operating pressure: 160 PSIA (11 barA)

Spec sheets

Mass flow meter operating manual

Device features and accessories

Features

Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
Field-adjustable engineering units and STP/NTP conditions.
Select process gas from 98+ preloaded NIST-traceable gas calibrations.
Define and store 20 custom gas mixtures of up to 5 constituent gases.
Read measurements from the backlit display and control configuration using the integrated touchpad.
Optional integrated dual flow totalizers and alarms.

Explore device features

Accessories

FlowVision software (download)

Power supply, cables, and accessories sold separately

Build and performance options

Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFIBUS, PROFINET
Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
Displays: Backlit monochrome or color; integrated or panel–mount; none
Elastomers: FKM, FFKM, EPDM, Silicone
Calibration: Standard or high-accuracy; custom calibration points

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Manual Brochure M-Series low flow device specs M-Series mid flow device specs M-Series high flow device specs

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