{"id":38473,"date":"2024-03-26T16:49:00","date_gmt":"2024-03-26T16:49:00","guid":{"rendered":"https:\/\/www.alicat.com\/?post_type=article&#038;p=38473"},"modified":"2026-01-26T16:12:48","modified_gmt":"2026-01-26T16:12:48","slug":"verbesserung-der-prozessgaskontrolle-optimiert-das-reaktive-sputtern","status":"publish","type":"support","link":"https:\/\/www.alicat.com\/de\/support\/improving-control-process-gases-optimizes-reactive-sputtering\/","title":{"rendered":"Aufr\u00fcstung reaktiver Sputtering-Systeme mit geschlossenem Regelkreis"},"content":{"rendered":"\n[et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;4.23.1&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_row _builder_version=&#8221;4.23.1&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;4.23.1&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_heading title=&#8221;Upgrading reactive sputtering systems with closed loop flow control&#8221; _builder_version=&#8221;4.23.1&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_heading][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]Reactive sputtering, a <a href=\"https:\/\/www.alicat.com\/articles\/pvd-coatings-thermal-evaporation-and-sputtering\/\">physical vapor deposition<\/a> (PVD) technique, is used to coat surfaces in a variety of manufacturing processes. Common examples include:\n<ul>\n\t<li><span>Flat-panel displays for televisions and cell phones<\/span><\/li>\n\t<li><span>Photovoltaic coatings on solar cells<\/span><\/li>\n\t<li><span>Optical coatings on sunglasses<\/span><\/li>\n\t<li><span>Decorative coatings on hardware and automotive components<\/span><\/li>\n\t<li><span>Insulating coatings on architectural glass<\/span><\/li>\n<\/ul>\nHere we discuss a few challenges encountered in reactive sputtering applications and suggest mass flow control solutions to upgrade your PVD system.\n<h2>Challenges: Regulating reactive gas flow and preventing target poisoning<\/h2>\nThe partial pressure of the reactive gas significantly affects thin film characteristics. As this pressure is directly proportional to the gas flow rate, it is critical to carefully control the amount and distribution of the reactive gas in the vacuum chamber.\n\nIt is also important to maintain the condition of the target during the sputtering process. While increasing reactive gas flow to the process speeds up the chemical reaction, it can also lead to full coverage of the target or \u201ctarget poisoning.\u201d This may decrease the deposition rate and lead to changes in vacuum and voltage levels that damage the target and substrate.\n<p style=\"text-align: center;\"><img decoding=\"async\" src=\"https:\/\/www.alicat.com\/wp-content\/uploads\/2024\/04\/reactive_sputtering_target.webp\" width=\"657\" height=\"395\" alt=\"\" class=\"wp-image-38711 alignnone size-full\" style=\"display: block; margin-left: auto; margin-right: auto;\" \/><\/p>[\/et_pb_text][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; hover_enabled=&#8221;0&#8243; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221; sticky_enabled=&#8221;0&#8243;]<h2><strong><\/strong><\/h2>\n<h2><strong>Solution:<\/strong> Versatile, drop-in compatible devices with closed-loop control<\/h2>\nAn open-loop control method <em>can<\/em> be used to modulate reactive gas flows, deposition rates, and thin film properties with some degree of precision. However, much tighter <strong>closed-loop control<\/strong> is possible when residual gas analyzers (RGAs) are used in combination with mass flow controllers (MFCs). RGAs can be used to monitor the partial pressures of gases and to command flow controller setpoints, improving control over the \u201ctransition\u201d state of the target and preventing target poisoning.\n\n&nbsp;\n<h4>Advantages of Alicat mass flow control:<\/h4>\n<ul>\n\t<li><span><strong>Fast response times |<\/strong>\u00a0Electrochemical reactions may occur only milliseconds after the target contacts the substrate. Alicat MFCs have an indication response time of 10 ms, and a typical control response time of 50-100 ms for vacuum applications. Controllers are additionally equipped with a field-adjustable\u00a0<a href=\"https:\/\/www.alicat.com\/support\/pid-tuning-pd-pdf-and-pd2i-tutorial\/\">PID algorithm<\/a>, providing increased control performance.<\/span><\/li>\n\t<li><span><b>Compatibility with common reactive gases across a wide flow range |\u00a0<\/b>Each MFC can easily switch between\u00a0<a href=\"https:\/\/www.alicat.com\/documentation\/gas-select-gas-list\/\">98+ preloaded gas calibrations<\/a>\u00a0including oxygen, nitrogen, acetylene, and methane with a 0.01% to 100%\u00a0<a href=\"https:\/\/www.alicat.com\/support\/faq-device-ranges-measurement-and-control\/\">controllable range<\/a>\u00a0(10,000:1). This reduces the number of devices required in the sputtering setup.<\/span><\/li>\n\t<li><span><strong>Easy integration into existing setups |\u00a0<\/strong>Devices are compatible with mechanical and electrical connections used on existing sputtering setups. Many\u00a0<a href=\"https:\/\/www.alicat.com\/support\/communication-options-for-alicat-instruments\/\">digital and analog interfaces<\/a>\u00a0are additionally available, including RS-232 and RS-485 in combination with DeviceNet, EtherNet\/IP, or EtherCAT<sup>&reg;<\/sup>.<\/span><\/li>\n<\/ul>\n<h5>Alicat offers several device configurations, so you can choose the one that will best fit into your existing setup with minimal need for redesign:<\/h5>\n<ul>\n\t<li><span><a href=\"https:\/\/www.alicat.com\/products\/gas-flow\/mass-flow-controller\/vacuum-controllers-sff-mcv-series\/\">MCE-Series<\/a>\u00a0SEMI standard MFCs have 1\/4\u2033 VCR fittings that match end-to-end with SEMI standard MFCs<\/span><\/li>\n\t<li><span><a href=\"https:\/\/www.alicat.com\/products\/gas-flow\/mass-flow-controller\/vacuum-controllers-sff-mcv-series\/\">MCV-Series<\/a>\u00a0MFCs also have 1\/4\u2033 VCR fittings and a pneumatic shutoff valve<\/span><\/li>\n\t<li><span><a href=\"https:\/\/www.alicat.com\/products\/gas-flow\/mass-flow-controller\/laminar-dp-mass-flow-controllers\/\">MC-Series<\/a>\u00a0standard MFCs are configurable with a variety of\u00a0<a href=\"https:\/\/www.alicat.com\/support\/choosing-an-instrument-process-connections\/\">fitting options<\/a><\/span><\/li>\n<\/ul>[\/et_pb_text][et_pb_video src=&#8221;https:\/\/www.youtube.com\/watch?v=83rp64pd1wg&rel=0#8221; _builder_version=&#8221;4.23.1&#8243; _module_preset=&#8221;default&#8221; width=&#8221;70%&#8221; module_alignment=&#8221;center&#8221; custom_margin=&#8221;20px||20px||false|false&#8221; custom_padding=&#8221;20px||20px||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_video][\/et_pb_column][\/et_pb_row][\/et_pb_section]\n","protected":false},"featured_media":46458,"parent":0,"template":"","meta":{"_acf_changed":false,"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"1920","content-type":"","_searchwp_excluded":""},"categories":[],"class_list":["post-38473","support","type-support","status-publish","has-post-thumbnail","hentry"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v27.3 (Yoast SEO v27.3) - 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