{"id":38377,"date":"2024-03-26T16:48:59","date_gmt":"2024-03-26T16:48:59","guid":{"rendered":"https:\/\/www.alicat.com\/?post_type=article&p=38377"},"modified":"2026-01-26T16:14:20","modified_gmt":"2026-01-26T16:14:20","slug":"dunnschicht-abscheidung-forschung","status":"publish","type":"support","link":"https:\/\/www.alicat.com\/de\/support\/thin-film-deposition-research\/","title":{"rendered":"Forschung zur D\u00fcnnschichtabscheidung"},"content":{"rendered":"\n[et_pb_section fb_built=”1″ _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_row _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_column type=”4_4″ _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_heading title=”Thin film deposition research” _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][\/et_pb_heading][et_pb_text _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”]

Alicat has been cited in over 1,000 peer-reviewed research papers. The following papers focus on thin film deposition and emerging technologies in that field.\u00a0<\/span>Contact us<\/a>\u00a0if you\u2019d like your research to be highlighted.<\/span><\/p>[\/et_pb_text][et_pb_accordion _builder_version=”4.24.2″ _module_preset=”default” toggle_font=”|700|||||||” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_accordion_item title=”An influence of oxygen flow rate on structural, optical and tribological properties of molybdenum oxide thin films” open=”on” _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”]

Abstract<\/h3>\n

The influence of oxygen flow rate is examined on structural, optical and tribological properties of molybdenum oxide films deposited by reactive magnetron sputtering. The films were characterized by X-ray diffraction, scanning electron microscope (SEM), and contact angle measurement system. The optical properties of the films were measured by UV-Vis-NIR spectrophotometer and transmittance of \u223c73% in the visible region of the spectrum was achieved. The band gap increases with increases in oxygen gas flow rate. AFM figure illustrates that the roughness of surface increases as oxygen flow rate increases. As oxygen increases wear rate and COF decreases while at the 18 sccm the lowest wear rate found.<\/p>\n

Reference<\/h3>\n

Dave, D. P., Patel, A. M., Chauhan, K. V., & Rawal, S. K. (2021). An influence of oxygen flow rate on structural, optical and tribological properties of molybdenum oxide thin films. Advanced Engineering Forum<\/em>, 39, 43\u201353. https:\/\/doi.org\/10.4028\/www.scientific.net\/aef.39.43<\/p>[\/et_pb_accordion_item][\/et_pb_accordion][et_pb_text _builder_version=”4.27.4″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”]PVD coatings: Thermal evaporation and sputtering deposition<\/a><\/strong>[\/et_pb_text][et_pb_accordion _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_accordion_item title=”Highly sensitive room temperature hydrogen sensor based on undoped SnO2 thin films” open=”on” _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” toggle_font=”|700|||||||” theme_builder_area=”post_content”]

Abstract<\/h3>\n

The physicochemical property of semiconductors play a vital role in enhancing the gas sensing performance of the\u00a0metal oxides\u00a0that can operate in real time atmosphere. Here in, hydrogen (H2) sensing behaviour of SnO2<\/sub> thin films\u00a0prepared using DC reactive\u00a0magnetron sputtering\u00a0technique by varying the cathode power are reported. From X-ray diffraction (XRD) analysis, polycrystalline nature of SnO2<\/sub> thin films were observed and it exhibited rutile tetragonal structure and the crystallite size was found to be increased from 17.6 to 38.8\u202f nm. From the morphological study taken from field emission-scanning electron microscopy (FE-SEM), the nano granular like morphology was observed. As a result of increase in cathode power, the optical bandgap reduced from 3.5 to 3.3\u202f eV. The influence of cathode power on the sensitivity, response and recovery time have been studied. This report elucidates the H2<\/sub> sensing response towards undoped SnO2<\/sub> thin films of about 4.7\u202f at room temperature towards 100\u202f ppm concentration.<\/p>\n

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Reference<\/h3>\n

Abinaya, M., Pal, R., & Sridharan, M. (2019). Highly sensitive room temperature hydrogen sensor based on undoped SnO2<\/sub> thin films. Solid State Sciences<\/em>, 95. https:\/\/doi.org\/10.1016\/j.solidstatesciences.2019.105928<\/p>[\/et_pb_accordion_item][et_pb_accordion_item title=”The impact of O2\/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films” _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” toggle_font=”|700|||||||” theme_builder_area=”post_content” open=”off”]

Abstract<\/h3>\n

Morphology is a critical parameter for various thin film applications, influencing properties like wetting, catalytic performance and sensing efficiency. In this work, we report on the impact of oxygen partial flow on the morphology of ceramic thin films deposited by pulsed DC reactive magnetron sputtering. The influence of O2<\/sub>\/Ar ratio was studied on three different model systems, namely Al2<\/sub>O3<\/sub>, CuO and TiO2<\/sub>. The availability of oxygen during reactive sputtering is a key parameter for a versatile tailoring of thin film morphology over a broad range of nanostructures.<\/p>\n

TiO2<\/sub> thin films with high photocatalytic performance (up to 95% conversion in 7 h) were prepared, exhibiting a network of nanoscopic cracks between columnar anatase structures. In contrast, amorphous thin films without such crack networks and with high resiliency to crystallization even up to 950 \u00b0C were obtained for Al2<\/sub>O3<\/sub>. Finally, we report on CuO thin films with well aligned crystalline nanocolumns and outstanding gas sensing performance for volatile organic compounds as well as hydrogen gas, showing gas responses up to 35% and fast response in the range of a few seconds.<\/p>\n

Reference<\/h3>\n

Vahl, A., Dittmann, J., Jetter, J., Veziroglu, S., Shree, S., Ababii, N., Lupan, O., Aktas, O. C., Strunskus, T., Quandt, E., Adelung, R., Sharma, S. K., & Faupel, F. (2019). The impact of O2<\/sub>\/ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films. Nanotechnology<\/em>, 30(23), 235603. https:\/\/doi.org\/10.1088\/1361-6528\/ab0837<\/p>[\/et_pb_accordion_item][\/et_pb_accordion][et_pb_text _builder_version=”4.27.0″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”]Upgrading reactive sputtering systems with closed loop flow control<\/a><\/strong>[\/et_pb_text][et_pb_accordion _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_accordion_item title=”The fabrication of ultrathin films and their gas separation performance from polymers of intrinsic microporosity with two-dimensional (2D) and three-dimensional (3D) chain conformations” open=”on” _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” toggle_font=”|700|||||||” theme_builder_area=”post_content”]

Abstract<\/h3>\n

The expansion of the use of\u00a0polymeric membranes\u00a0in gas separation requires the development of membranes based on new polymers with improved properties and their assessment under real operating conditions. In particular, the fabrication of\u00a0ultrathin films\u00a0of\u00a0high performance polymers\u00a0that can be used as the selective layer in\u00a0composite membranes\u00a0will allow large reductions in the amount of the expensive polymer used and, hence, the cost of membrane fabrication.<\/p>\n

In this contribution, two polymers of intrinsic\u00a0microporosity\u00a0(PIMs) with very different chain configurations (two-dimensional, 2D, chains or conventional contorted three-dimensional, 3D, conformation) have been compared in their ability to form ultrathin films, showing the relevance of polymer design to obtain compact and defect-free films.<\/p>\n

Monolayers of the 2D polymer PIM-TMN-Trip can be efficiently deposited onto poly[1-(trimethylsilyl)-1-propyne] (PTMSP) to obtain composite membranes with a CO2<\/sub>\/N2<\/sub>\u00a0selectivity similar to that of the corresponding thick membranes of the same PIM using only a small fraction of the selective polymer (less than 0.1%).<\/p>\n

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Reference<\/h3>\n

Benito, J., Vidal, J., S\u00e1nchez-La\u00ednez, J., Zornoza, B., T\u00e9llez, C., Mart\u00edn, S., Msayib, K. J., Comesa\u00f1a-G\u00e1ndara, B., McKeown, N. B., Coronas, J., & Gasc\u00f3n, I. (2018). The fabrication of Ultrathin Films and their gas separation performance from polymers of intrinsic microporosity with two-dimensional (2D) and three-dimensional (3D) chain conformations. Journal of Colloid and Interface Science<\/em>, 536, 474\u2013482. https:\/\/doi.org\/10.1016\/j.jcis.2018.10.075<\/p>[\/et_pb_accordion_item][et_pb_accordion_item title=”Examination of various characteristics for sputtered tantalum oxide-nitride thin films deposited at various oxygen flowrates” _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” toggle_font=”|700|||||||” theme_builder_area=”post_content” open=”off”]

Abstract<\/h3>\n

Tantalum oxynitride thin films were prepared by reactive sputtering. The argon and nitrogen flow rate were kept stable whereas oxygen flow rate was incremented periodically. The effect of oxygen flow rate on various properties of tantalum oxynitride thin films is reported in this research paper. XRD patterns of tantalum oxynitride thin films displayed peaks commonly as for nano-crystalline materials. Surface topography observed to be smooth and exhibited smaller grain structure. Wettability test showed promising results for hydrophobicity. Wear test was done on uncoated and coated tantalum oxynitride thin films on 10\u00a0mm diameter cylindrical pins of brass and mild steel.<\/p>\n

Reference<\/h3>\n

Gandhi, A. A., Chauhan, K. V., Kapopara, J. M., Jariwala, N. N., & Rawal, S. K. (2017). Examination of various characteristics for sputtered tantalum oxide-nitride thin films deposited at various oxygen flowrates. Integrated Ferroelectrics<\/em>, 185(1), 41\u201346. https:\/\/doi.org\/10.1080\/10584587.2017.1370286<\/p>[\/et_pb_accordion_item][\/et_pb_accordion][\/et_pb_column][\/et_pb_row][\/et_pb_section]\n","protected":false},"featured_media":46458,"parent":0,"template":"","meta":{"_acf_changed":false,"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"1920","content-type":"","_searchwp_excluded":""},"categories":[],"class_list":["post-38377","support","type-support","status-publish","has-post-thumbnail","hentry"],"acf":[],"yoast_head":"\nThin Film Deposition Research - Alicat Scientific<\/title>\n<meta name=\"description\" content=\"Alicat has been cited in over 1,000 peer-reviewed research papers. 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