{"id":38346,"date":"2024-03-26T16:42:35","date_gmt":"2024-03-26T16:42:35","guid":{"rendered":"https:\/\/www.alicat.com\/?post_type=article&p=38346"},"modified":"2026-01-26T20:44:01","modified_gmt":"2026-01-26T20:44:01","slug":"duralar-innoviert-physikalische-aufdampf-verfahren-mit-massenstrom-steuerung","status":"publish","type":"support","link":"https:\/\/www.alicat.com\/de\/support\/duralar-innovates-physical-vapor-deposition-processes-using-mass-flow-control\/","title":{"rendered":"Duralar innoviert Verfahren zur physikalischen Gasphasenabscheidung mit Massendurchflussregelung"},"content":{"rendered":"\n[et_pb_section fb_built=”1″ _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_row _builder_version=”4.23.1″ _module_preset=”default” custom_padding=”||0px|||” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_column type=”4_4″ _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_text _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”]
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Duralar innovates physical vapor deposition processes using mass flow control<\/strong><\/h1>\n
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While anodizing and bluing prevent corrosion, it doesn\u2019t strengthen the surface much and can scratch off. Chrome plating has been an alternative, but chrome-6 is toxic, and can still wear, pit, and spall.<\/p>\n

Vacuum deposition system manufacturer, Duralar<\/a>, wanted to develop a fast, diamond-like coating process using physical vapor deposition that\u2019s harder and more durable than either. It would have applications in the prevention of corrosion, erosion, and wear on metal parts.<\/p>\n<\/div>[\/et_pb_text][et_pb_text _builder_version=”4.27.4″ _module_preset=”default” width=”80.9%” module_alignment=”center” min_height=”361.6px” custom_margin=”20px||20px||false|false” custom_padding=”10px|20px|10px|10px|false|false” hover_enabled=”0″ border_color_all=”#EAEAEA” global_colors_info=”{}” theme_builder_area=”post_content” sticky_enabled=”0″]\"Duralar's\n

After the diamond-hard PVD vacuum coating, plain steel shows as black.<\/p>[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”4.23.1″ _module_preset=”default” custom_padding=”7px|||||” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_column type=”4_4″ _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”][et_pb_text _builder_version=”4.23.1″ _module_preset=”default” global_colors_info=”{}” theme_builder_area=”post_content”]

Challenge 1<\/strong>: Practical innovation requires versatile flow control<\/h2>\n

R&D means testing, allowing for new formulations of barrier and reactive gases. This requires troubleshooting with different flow ratios and gas types. Duralar needed to find a way to maintain accurate, repeatable flow for changing flow ratios and gases while minimizing the need to recalibrate or purchase new controllers.<\/span><\/p>\n

They started with a generic vacuum deposition system, but none of the six built-in thermal controllers were calibrated for tetramethylsilane (TMS), a vaporized liquid. The controllers were also unable to accurately flow different gas types without recalibration.<\/span><\/p>\n

Solution: Anticorrosive mass flow controller with custom gas calibration<\/h2>\n

TMS isn\u2019t on Alicat\u2019s standard gas list<\/a>, however, our engineers were able to provide Duralar with a custom solution. The mass flow controller was built as a drop-in replacement, with corrosion resistance<\/a> and a custom TMS gas calibration.<\/p>\n

Because Alicat devices operate using laminar differential pressure technology<\/a>, they also provided Duralar with a few additional benefits over their old thermal controllers:<\/p>\n