{"id":41600,"date":"2023-09-24T18:56:00","date_gmt":"2023-09-24T18:56:00","guid":{"rendered":"https:\/\/www.alicat.com\/?p=41600"},"modified":"2026-01-06T23:05:18","modified_gmt":"2026-01-06T23:05:18","slug":"dunnschichtabscheidungstechniken","status":"publish","type":"post","link":"https:\/\/www.alicat.com\/de\/articles\/thin-film-deposition-techniques\/","title":{"rendered":"Techniken der D\u00fcnnschichtabscheidung"},"content":{"rendered":"<p>[et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;4.24.2&#8243; _module_preset=&#8221;default&#8221; custom_padding=&#8221;|3vw||3vw|false|true&#8221; custom_css_free_form=&#8221;@media (max-width: 375px) {||  .et-db #et-boc .et-l .et_pb_post_content_0_tb_body {||  width:100% !important;||  }}&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_row _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_padding=&#8221;2em||0px||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_heading title=&#8221;Thin Film Deposition Techniques&#8221; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_css_free_form=&#8221;selector h1 {||  text-wrap: pretty;||}&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_heading][et_pb_image src=&#8221;https:\/\/www.alicat.com\/wp-content\/uploads\/2023\/09\/articles-thinfilmdeposition-sputtering.webp&#8221; align=&#8221;center&#8221; force_fullwidth=&#8221;on&#8221; _builder_version=&#8221;4.27.5&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;1.5rem||||false|false&#8221; hover_enabled=&#8221;0&#8243; custom_css_free_form=&#8221;selector img {||  object-fit: cover;||}&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221; sticky_enabled=&#8221;0&#8243; module_id=&#8221;article-hero-image&#8221;][\/et_pb_image][et_pb_divider color=&#8221;#2A3B47&#8243; divider_weight=&#8221;2.5px&#8221; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; height=&#8221;0px&#8221; custom_margin=&#8221;3rem||3rem||true|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_divider][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_padding=&#8221;0px||0px||true|false&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;||2rem||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]The thin film deposition industry has rapidly evolved, bringing <a href=\"https:\/\/www.alicat.com\/industries\/thin-film-deposition\/\">faster, more scalable, and highly efficient deposition setups<\/a>. In this article, we explore two widely used deposition categories, chemical vapor deposition (CVD) and physical vapor deposition (PVD), and highlight their techniques and applications.[\/et_pb_text][et_pb_heading title=&#8221;What is thin film deposition?&#8221; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; title_level=&#8221;h2&#8243; title_font_size=&#8221;21px&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_heading][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<p>Thin film deposition involves applying extremely thin material layers to a substrate. These coatings play an essential role in semiconductors, solar cells, optics, and various other applications that specifically demand precision in thickness and uniformity.<\/p>\n<p>Thin film deposition techniques enhance the surface properties of engineering components by applying thin (&lt; 1 micron) material coatings. As a result, these modifications can improve conductivity, corrosion resistance, wear, fatigue strength, hardness, and more, depending on the material and application.<\/p>\n<p>[\/et_pb_text][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;3px||2rem||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<p>Common thin film applications include:<\/p>\n<ul>\n<li>Electronic components and displays<\/li>\n<li>Optical coatings<\/li>\n<li>Biomedical devices<\/li>\n<li>Solid surface coatings<\/li>\n<li>Data storage systems<\/li>\n<\/ul>\n<p>[\/et_pb_text][et_pb_heading title=&#8221;Thin film deposition techniques&#8221; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; title_level=&#8221;h2&#8243; title_font_size=&#8221;21px&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_heading][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;||2rem||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<p>While many deposition techniques exist, this article focuses on those shown in Figure 1, namely PVD and CVD.<\/p>\n<p>[\/et_pb_text][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; module_alignment=&#8221;center&#8221; custom_margin=&#8221;||0px||false|false&#8221; custom_padding=&#8221;||2rem||false|false&#8221; custom_padding_last_edited=&#8221;off|desktop&#8221; custom_css_free_form=&#8221;selector figure {||  display: table;||  margin-left: auto;||  margin-right: auto;||  text-align: center;||}||||selector figcaption {||  caption-side: bottom;||  display: table-caption;||}||||selector img {||  margin-bottom: 1rem;||}&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; custom_css_main_element_tablet=&#8221;float: right;&#8221; custom_css_main_element_phone=&#8221;float: none;&#8221; custom_css_main_element_last_edited=&#8221;on|desktop&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<figure><img decoding=\"async\" src=\"https:\/\/www.alicat.com\/wp-content\/uploads\/2025\/03\/CVD-figure-1.png\" alt=\"Flowchart with types of thin film deposition\" \/><\/p><figcaption>Figure 1. Thin film deposition techniques<\/figcaption><\/figure>\n<p>[\/et_pb_text][et_pb_heading title=&#8221;Physical vapor deposition (PVD)&#8221; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; title_level=&#8221;h3&#8243; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_heading][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;||2rem||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<p>As the name suggests, physical vapor deposition relies on a physical process to deposit thin films. The target material is first vaporized from a solid form into plasma or ions. Subsequently, it moves to the substrate surface, where it condenses and grows into a film.<\/p>\n<p>[\/et_pb_text][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; module_alignment=&#8221;center&#8221; custom_margin=&#8221;||0px||false|false&#8221; custom_padding=&#8221;||2rem||false|false&#8221; custom_padding_last_edited=&#8221;off|desktop&#8221; custom_css_free_form=&#8221;selector figure {||  display: table;||  margin-left: auto;||  margin-right: auto;||  text-align: center;||}||||selector figcaption {||  caption-side: bottom;||  display: table-caption;||}||||selector img {||  margin-bottom: 1rem;||}&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; custom_css_main_element_tablet=&#8221;float: right;&#8221; custom_css_main_element_phone=&#8221;float: none;&#8221; custom_css_main_element_last_edited=&#8221;on|desktop&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<figure><img decoding=\"async\" src=\"https:\/\/www.alicat.com\/wp-content\/uploads\/2025\/03\/CVD-figure-2.png\" alt=\"Flowchart with types of physical vapor deposition\" \/><\/p><figcaption>Figure 2. Physical vapor deposition techniques<\/figcaption><\/figure>\n<p>[\/et_pb_text][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;||2rem||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<h4>Thermal evaporation<\/h4>\n<p>Thermal evaporation uses thermal energy from a tungsten heating element or an electron beam to vaporize the target material. After vaporization, the material passes through a high-pressure vacuum\u00a0(1 x 10<sup>\u20116<\/sup> to 1 x 10<sup>\u20119<\/sup> Torr) and deposits onto the substrate, where it condenses into a solid film.<\/p>\n<p>This method typically deposits pure metals, oxides, nitrides, and non-metals. Notably, it is used to deposit electrically conductive metallic layers on solar cells, OLED displays, and thin\u2011film transistors.<\/p>\n<h4>Sputtering deposition<\/h4>\n<p>Sputtering deposition transfers ions from a target material onto a substrate material using plasma, often argon, in a vacuum chamber (0 \u2013 0.03 Torr).<\/p>\n<p>While sputtering deposition techniques vary, the core setup remains consistent. The target material connects to a negatively charged cathode, and the substrate connects to a positively charged anode. Free electrons accelerate toward the anode and collide with argon atoms, creating positively charged ions. These ions then accelerate toward the cathode and knock atoms loose from the target, which then settle on the substrate surface.<\/p>\n<p>Sputtering deposition was first applied in computer hard disk production. Today, it is used extensively in integrated circuit processing, anti\u2011reflective and high-emissivity film coatings, cutting tools, and CD\/DVD coating.<\/p>\n<p>[\/et_pb_text][et_pb_heading title=&#8221;Chemical vapor deposition (CVD)&#8221; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; title_level=&#8221;h3&#8243; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_heading][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;||2rem||false|false&#8221; custom_padding=&#8221;||0px|||&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<p>Chemical vapor deposition forms a thin film through a chemical reaction, usually involving a gaseous target material that reacts near the substrate. CVD processes use mass flow controllers to introduce precise amounts of gas reactants to a process chamber. These reactants travel to the substrate surface, where the desired chemical reaction takes place. Afterward, by-products are removed.<\/p>\n<p>[\/et_pb_text][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; module_alignment=&#8221;center&#8221; custom_margin=&#8221;||0px||false|false&#8221; custom_padding=&#8221;||2rem||false|false&#8221; custom_padding_last_edited=&#8221;off|desktop&#8221; custom_css_free_form=&#8221;selector figure {||  display: table;||  margin-left: auto;||  margin-right: auto;||  text-align: center;||}||||selector figcaption {||  caption-side: bottom;||  display: table-caption;||}||||selector img {||  margin-bottom: 1rem;||}&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; custom_css_main_element_tablet=&#8221;float: right;&#8221; custom_css_main_element_phone=&#8221;float: none;&#8221; custom_css_main_element_last_edited=&#8221;on|desktop&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<figure><img decoding=\"async\" src=\"https:\/\/www.alicat.com\/wp-content\/uploads\/2025\/03\/CVD-figure-3.png\" alt=\"Flowchart with types of chemical vapor deposition\" \/><\/p><figcaption>Figure 3. Chemical vapor deposition techniques<\/figcaption><\/figure>\n<p>[\/et_pb_text][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;||2rem||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<h4>Low pressure chemical vapor deposition (LPCVD)<\/h4>\n<p>Low pressure chemical vapor deposition (LPCVD) operates at 0.1\u201310 Torr and 200\u2013800\u202f\u00b0C. Reactants enter the chamber via a showerhead system, while the chamber walls remain cool and the substrate is heated. This setup encourages heterogeneous surface reactions. Once the reaction completes, the by\u2011products exit using vacuum pumps.<\/p>\n<p>LPCVD is often used to produce resistors, capacitor dielectrics, MEMS, and anti\u2011reflective coatings.<\/p>\n<h4>Plasma enhanced chemical vapor deposition (PECVD)<\/h4>\n<p>Plasma enhanced chemical vapor deposition uses plasma to provide the energy required to facilitate the chemical reaction that drives the deposition. Electrical energy creates this neutral gas plasma. PECVD is performed at 2 \u2013 10 Torr and relatively low temperatures from 200 \u2013 400\u00b0C.<\/p>\n<p>PECVD is widely used in the production of solar cells and microelectronics. Importantly, because PECVD works at lower temperatures, it is suitable for substrates that can\u2019t withstand the high heat of other techniques.<\/p>\n<h4>Atomic layer deposition (ALD)<\/h4>\n<p>Atomic layer deposition generally employs two precursors that react with the substrate surface sequentially. The thin film is deposited by alternating the precursors fed into the chamber. Consequently, this allows the user to deposit the desired thin film layer by layer and offers superior control over film thickness.<\/p>\n<p>ALD is commonly used in microelectronics fabrication. For example, applications include magnetic recording heads, MOSFET gate stacks, DRAM capacitors, and nonvolatile ferroelectric memories. It is also used to enhance the surface properties of implantable biomedical devices.<\/p>\n<p>[\/et_pb_text][et_pb_heading title=&#8221;Conclusion&#8221; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; title_level=&#8221;h3&#8243; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_heading][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;||2rem||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<p>Choosing the right thin film deposition method ultimately depends on your process requirements. Therefore, understanding these techniques helps you select the best option to maximize coating quality and throughput.<\/p>\n<p>With a 10 ms response time, accuracy as good as 0.5% of reading, and the ability to integrate easily into your pre\u2011existing setup, <a href=\"https:\/\/www.alicat.com\/products\/gas-flow\/mass-flow-controller\/vacuum-controllers-sff-mcv-series\/\">Alicat\u2019s MCE or MCV\u2011Series mass flow controllers<\/a> enable the production of high quality, repeatable coatings across a variety of deposition setups.<\/p>\n<p>[\/et_pb_text][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; text_font=&#8221;|700|||||||&#8221; custom_margin=&#8221;||2rem||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<a href=\"https:\/\/www.alicat.com\/support\/upstream-pressure-control-increases-stability-and-speed-in-vacuum-deposition-applications\/\">Keep reading: High-precision pressure control leads to more repeatable vacuum coatings <span class=\"et-pb-icon link-right-arrow\">$<\/span><\/a>[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The thin film deposition industry has rapidly evolved, bringing faster, more scalable, and highly efficient deposition setups. In this article, we explore two widely used deposition categories, chemical vapor deposition (CVD) and physical vapor deposition (PVD), and highlight their techniques and applications.Thin film deposition involves applying extremely thin material layers to a substrate. These coatings [&hellip;]<\/p>\n","protected":false},"author":7,"featured_media":44419,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"1400","content-type":"","_searchwp_excluded":"","footnotes":""},"categories":[115,126],"tags":[],"class_list":["post-41600","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-mass-flow","category-thin-film-deposition"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v27.3 (Yoast SEO v27.3) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>Thin Film Deposition Techniques: CVD, PVD &amp; More - Alicat Scientific<\/title>\n<meta name=\"description\" content=\"What is thin film deposition? 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Learn about key techniques like CVD, PVD, and ALD, and the role of flow control in modern material science.\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/www.alicat.com\\\/articles\\\/thin-film-deposition-techniques\\\/#breadcrumb\"},\"inLanguage\":\"de\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/www.alicat.com\\\/articles\\\/thin-film-deposition-techniques\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"de\",\"@id\":\"https:\\\/\\\/www.alicat.com\\\/articles\\\/thin-film-deposition-techniques\\\/#primaryimage\",\"url\":\"https:\\\/\\\/www.alicat.com\\\/wp-content\\\/uploads\\\/2023\\\/09\\\/articles-thinfilmdeposition-sputtering.webp\",\"contentUrl\":\"https:\\\/\\\/www.alicat.com\\\/wp-content\\\/uploads\\\/2023\\\/09\\\/articles-thinfilmdeposition-sputtering.webp\",\"width\":1200,\"height\":1101},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/www.alicat.com\\\/articles\\\/thin-film-deposition-techniques\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/www.alicat.com\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Thin Film Deposition Techniques\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/www.alicat.com\\\/#website\",\"url\":\"https:\\\/\\\/www.alicat.com\\\/\",\"name\":\"Alicat Scientific\",\"description\":\"Alicat Scientific | Fastest Flow Measurement Possible\",\"publisher\":{\"@id\":\"https:\\\/\\\/www.alicat.com\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/www.alicat.com\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"de\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/www.alicat.com\\\/#organization\",\"name\":\"Alicat Scientific\",\"alternateName\":\"Alicat\",\"url\":\"https:\\\/\\\/www.alicat.com\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"de\",\"@id\":\"https:\\\/\\\/www.alicat.com\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"\",\"contentUrl\":\"\",\"caption\":\"Alicat Scientific\"},\"image\":{\"@id\":\"https:\\\/\\\/www.alicat.com\\\/#\\\/schema\\\/logo\\\/image\\\/\"},\"sameAs\":[\"https:\\\/\\\/www.facebook.com\\\/alicatscientific\\\/\",\"https:\\\/\\\/linkedin.com\\\/company\\\/alicat-scientific-inc\",\"https:\\\/\\\/www.youtube.com\\\/channel\\\/UCPPX4sBOO2eEu65Zn-EfwCw\"],\"email\":\"info@alicat.com\",\"telephone\":\"+18882906060\",\"legalName\":\"Alicat Scientific, Inc.\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"Techniken der D\u00fcnnschichtabscheidung: CVD, PVD und mehr - Alicat Scientific","description":"Was ist D\u00fcnnschichtabscheidung? Erfahren Sie mehr \u00fcber Schl\u00fcsseltechniken wie CVD, PVD und ALD und die Rolle der Flusskontrolle in der modernen Materialwissenschaft.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.alicat.com\/de\/artikel\/dunnschichtabscheidungstechniken\/","og_locale":"de_DE","og_type":"article","og_title":"Thin Film Deposition Techniques","og_description":"What is thin film deposition? Learn about key techniques like CVD, PVD, and ALD, and the role of flow control in modern material science.","og_url":"https:\/\/www.alicat.com\/de\/artikel\/dunnschichtabscheidungstechniken\/","og_site_name":"Alicat Scientific","article_publisher":"https:\/\/www.facebook.com\/alicatscientific\/","article_published_time":"2023-09-24T18:56:00+00:00","article_modified_time":"2026-01-06T23:05:18+00:00","og_image":[{"width":1200,"height":1101,"url":"https:\/\/www.alicat.com\/wp-content\/uploads\/2023\/09\/articles-thinfilmdeposition-sputtering.webp","type":"image\/webp"}],"author":"Alicat Scientific","twitter_card":"summary_large_image","twitter_misc":{"Written by":"Alicat Scientific","Est. reading time":"5\u00a0Minuten"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.alicat.com\/articles\/thin-film-deposition-techniques\/","url":"https:\/\/www.alicat.com\/articles\/thin-film-deposition-techniques\/","name":"Techniken der D\u00fcnnschichtabscheidung: CVD, PVD und mehr - Alicat Scientific","isPartOf":{"@id":"https:\/\/www.alicat.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.alicat.com\/articles\/thin-film-deposition-techniques\/#primaryimage"},"image":{"@id":"https:\/\/www.alicat.com\/articles\/thin-film-deposition-techniques\/#primaryimage"},"thumbnailUrl":"https:\/\/www.alicat.com\/wp-content\/uploads\/2023\/09\/articles-thinfilmdeposition-sputtering.webp","datePublished":"2023-09-24T18:56:00+00:00","dateModified":"2026-01-06T23:05:18+00:00","description":"Was ist D\u00fcnnschichtabscheidung? Erfahren Sie mehr \u00fcber Schl\u00fcsseltechniken wie CVD, PVD und ALD und die Rolle der Flusskontrolle in der modernen Materialwissenschaft.","breadcrumb":{"@id":"https:\/\/www.alicat.com\/articles\/thin-film-deposition-techniques\/#breadcrumb"},"inLanguage":"de","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.alicat.com\/articles\/thin-film-deposition-techniques\/"]}]},{"@type":"ImageObject","inLanguage":"de","@id":"https:\/\/www.alicat.com\/articles\/thin-film-deposition-techniques\/#primaryimage","url":"https:\/\/www.alicat.com\/wp-content\/uploads\/2023\/09\/articles-thinfilmdeposition-sputtering.webp","contentUrl":"https:\/\/www.alicat.com\/wp-content\/uploads\/2023\/09\/articles-thinfilmdeposition-sputtering.webp","width":1200,"height":1101},{"@type":"BreadcrumbList","@id":"https:\/\/www.alicat.com\/articles\/thin-film-deposition-techniques\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.alicat.com\/"},{"@type":"ListItem","position":2,"name":"Thin Film Deposition Techniques"}]},{"@type":"WebSite","@id":"https:\/\/www.alicat.com\/#website","url":"https:\/\/www.alicat.com\/","name":"Alicat Scientific","description":"Alicat Scientific | Schnellstm\u00f6gliche Durchflussmessung","publisher":{"@id":"https:\/\/www.alicat.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.alicat.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"de"},{"@type":"Organization","@id":"https:\/\/www.alicat.com\/#organization","name":"Alicat Scientific","alternateName":"Alicat","url":"https:\/\/www.alicat.com\/","logo":{"@type":"ImageObject","inLanguage":"de","@id":"https:\/\/www.alicat.com\/#\/schema\/logo\/image\/","url":"","contentUrl":"","caption":"Alicat Scientific"},"image":{"@id":"https:\/\/www.alicat.com\/#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/alicatscientific\/","https:\/\/linkedin.com\/company\/alicat-scientific-inc","https:\/\/www.youtube.com\/channel\/UCPPX4sBOO2eEu65Zn-EfwCw"],"email":"info@alicat.com","telephone":"+18882906060","legalName":"Alicat Scientific, Inc."}]}},"_links":{"self":[{"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/posts\/41600","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/comments?post=41600"}],"version-history":[{"count":0,"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/posts\/41600\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/media\/44419"}],"wp:attachment":[{"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/media?parent=41600"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/categories?post=41600"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alicat.com\/de\/wp-json\/wp\/v2\/tags?post=41600"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}