- Alicat announces new integrated vacuum pressure controllers
Alicat announces new integrated vacuum pressure controllers
May 27, 2020
Alicat is announcing the launch of its new IVC-Series line of integrated vacuum controllers. These innovative pressure controllers offer greater stability and precision while maintaining Alicat’s signature speed in measurement and control.
Each controller is designed with customer needs in mind. Instruments control pressure from the upstream side of vacuum processes, saving money on downstream throttle valves. Complex system control can now be executed with one device; no more need for a control module or external vacuum gauge.
The MFCs we use are made by Alicat Scientific, and have been chosen due their excellent balance of performance and cost. – Parker Gould
IVC-Series controllers are highly responsive with steady state control ranges (turndowns) of 1,000:1. This results in the ability to use one instrument for a wide range of vacuum levels with high accuracy. Every instrument comes with an integrated vacuum sensor compatible with all non-corrosive gases resulting which means precise pressure control for any system. Alicat’s precise PID control results in excellent stability and repeatability. Each device is leak tested to an integrity of 10-9 atm-cc/sec of He.
These instruments are highly customizable. The pressure controller range options available are 10, 100, and 1000 torr. A variety of serial or analog communication protocols are available including EtherCAT, EtherNet/IP, RS232, RS485, Modbus, Modbus TCP/IP, or PROFIBUS. The line also includes an optional pneumatically isolated sensor configuration. This option decreases conductance losses that occur with other controllers, allowing for improved accuracy and control stability.
These integrated vacuum controllers are designed for a variety of applications including:
- Sputtering – Thin film deposition of coatings for photovoltaics, optical, durability, etc.
- Chemical Vapor Deposition – Production of synthetic diamonds
- Semiconductor processes – Wafer cooling using Helium, disk drive filling
- Extraction – Production of cannabis extracts
The IVC series of controllers was designed to bring the advantages of a fully integrated device to any of our customers working on vacuum applications. – Michael Diaz, Vacuum Market Manager