Accurate mass flow control improves vacuum coating results
October 28, 2016
Alicat mass flow controllers ensure optimal coating environments in vacuum chambers, maintaining product integrity in coating and sputtering processes. The MCE-Series and MCV-Series may be used to replace legacy and discontinued MKS instruments. Made to fit the same space as common industry mass flow controllers, both series are easy to integrate into existing systems. They offer fast, accurate flow control for process uniformity and quality.
These vacuum controllers accurately regulate gas flow rates as low as 0.5 SCCM full scale or as high as 20 SLPM full scale with control response times down to 30 ms. Fast response times can greatly improve vacuum coating end products and help eliminate target poisoning. The integrated pneumatic shut-off valve is normally closed, affording positive shut-off of 1 x 10-9 atm-sccm/sec helium max.
Fitting the MCE and MCV-Series into your setup
- The MCE can be used as a replacement of the legacy *Type MKS 1179A Mass-Flo®.
- The MCV replaces the discontinued *Type MKS 2179A Mass-Flo®.
These mass flow controllers operate on universal 12-30 VDC supply, and Alicat will match any pre-existing pin out on 9-pin or 15-pin D-sub connectors, for easy replacement. The units can be mounted in any orientation, even upside-down, without recalibration, further simplifying installations.
Pre-programmed with calibrations for 98 gases, the MCE and MCV measure mass flow, volumetric flow, absolute pressure and temperature, with full temperature and pressure compensation. Units may be programmed directly through the instrument keypad or remotely via RS-232 (RS-485 also available). Each devices also comes with a NIST-traceable calibration certificate.
* Type MKS 1179A Mass-Flo® and Type MKS 2179A Mass-Flo® are registered trademarks of MKS, Instruments, Inc. No affiliation, endorsement or sponsorship is stated or implied.