Mass Flow Controller for Vacuum

Vacuum Mass Flow Controller

A mass flow controller designed for specifically for vacuum applications

Alicat Scientific MCE-Series digital mass flow controllers for hard vacuum applications precisely control the mass flow rate, volumetric flow rate and pressure of process gases. Downstream, high-speed proportional control valves are enclosed within the flow bodies to conform to the SEMI international standard footprint. An integrated pneumatic positive shut-off valve provides a leak-tight shutoff of 1×10-9 atm-scc/s (He) to prevent contamination during zero setpoint conditions. The MCV series of mass flow controllers runs on a patented, internally compensated, laminar differential pressure measurement technology that yields linear results over a very wide flow range. This produces volumetric and mass flow data that is fully compensated for changes in pressure and temperature and corrected for the user’s STP. All Alicat mass flow instruments come with NIST-traceable calibration sheets.
Download MCV-Series Data Sheet

The MCV series mass flow controller from Alicat was specifically designed to deliver maximum performance in vacuum applications. Although any of Alicat’s mass flow controllers are well suited to work in vacuum applications the MCV series controllers incorporates a positive pressure shut-off valve to prevent any downstream process gas from entering the vacuum chamber when gas flow is halted by the system or the user.
The Alicat mass flow controllers are engineered to meet the following design criteria:


The MCV series vacuum mass flow controller is very easy to use. With the local display, users can make changes to the configuration of the unit without the need for computers, complicated software or scripts.


Alicat MCV series vacuum mass flow controllers can be configured with an accuracy spec of up to +/-(0.4% of reading + 0.2% of full scale) with a high-accuracy calibration. Standard calibrations are rated at +/-(0.8% of reading + 0.2% of full scale)


Alicat’s patented technology allow its mass flow controllers to have very few moving parts. All of the MFC’s internal components are fixed in place resulting in very little physical change inside the MFC. Little physical change in the flow cavity means higher rates of consistency and repeatability. Alicat MCV series vacuum mass flow controllers have a repeatability of +/-0.2% of FS

Reduced Cost of Ownership

With the wide flow range offered by the 200:1 turndown ratio the MCV series controller can take the place of 2 or even 3 flow controllers in a system. Alicat MCV series vacuum mass flow controllers require very little power, less than 1/3 of an amp, to run thereby reducing operating costs.

Control Speed

The Alicat MCV series vacuum mass flow controller has a response time of less than 10ms and a control time of 50ms making it one of the fastest naturally responding mass flow controllers on the market today.


The MCV series vacuum mass flow controller measures pressure, temperature and volumetric flow in addition to mass flow which means fewer instruments you will have to buy and install.
MCV controllers are available in any flow range from 0.5SCCM through 20SLPM. The vacuum controllers are equipped with multiple analog outputs and inputs. Adding a totalizer allows you to see how much media has flowed through the MFC, making it a great way to monitor usage and identify waste.


Alicat mass flow controllers around the world are being used in processes like pharmaceutical and semiconductor manufacturing, fuel cell research, auto paint application, and emissions compliance equipment.

Alicat Scientific MCV vacuum mass flow controller calibrations are NIST traceable.

Standard Features

  • Fully functional digital display
  • Multiple parameter measurement: Mass flow, volumetric flow, temperature, and pressure
  • Integrated positive pressure shut-off valve
  • Low pressure drop operation
  • No warm up time
  • 8 pin mini din electronic connector
  • Standard barrel type power connector
  • RS-232 Multi-drop digital output
  • RS-232 Multi-drop digital input
  • Choice of 0-5Vdc, 0-10Vdc, or 1-5Vdc analog output
  • Choice of 0-5Vdc, 0-10Vdc, 1-5Vdc, or 4-20mA analog input
  • User tunable PID valve tuning
  • 30 user selectable on-board gas calibrations
  • 200:1 turndown ratio
  • NPT process connections
  • Can be ordered in any flow range between 0.5SCCM and 3000SLPM
  • Lifetime warranty

Optional features and equipment

  • High accuracy calibration
  • Flow totalizer
  • Locking 6 pin, DB9 or DB15 connector
  • ProfiBUS digital communication
  • Modbus digital communication
  • RS-485 digital communication
  • 4-20mA analog output
  • Secondary analog output
  • Color backlit TFT display
  • Remote panel mount display
  • Remote panel mount color backlit TFT display
  • Acrylic Mil-spec dielectric conformal coating
  • EPDM seals
  • NeSSI flow body
  • Oxygen cleaned
  • Remote electronic package for high temp environments
  • SAE process connections
  • VCR, VCO style welded fittings
  • 5VDC, 12VDC, 24VDC, or open drain flow alarms (high or low)
  • Bi-directional flow
  • Additional calibration points
  • Custom gas blends with up to 4 gases
  • Custom mass based flow range
  • Stainless steel valves
  • High flow, low drop valve
  • Internal potentiometer control
  • Air
  • Argon
  • Methane
  • Carbon Dioxide
  • Carbon Monoxide
  • Ethane
  • Hydrogen
  • Helium
  • Nitrogen
  • Nitrous Oxide
  • Neon
  • Oxygen
  • Propane
  • n-Butane
  • Acetylene
  • Ethylene
  • iso-Butane
  • Krypton
  • Xenon
  • Sulfur Hexaflouride
  • C-25
  • C-8
  • C-2
  • C-75
  • A-75
  • A-25
  • A-1025
  • Star29
  • P-5

Custom gas mixes with up to 4 of the listed gases can be created. Please contact Alicat to inquire about gas custom gas mixtures.

Operating manual

MCV vacuum mass flow controller operation manual:

MCV vacuum mass flow controller product specifications:

To build your quote right now, register for our online quoting system. Or call Alicat at 888-290-6060 to speak to an applications specialist. A real person will answer your call within 3 rings.

Alicat MCV-Series Mass Flow Controllers

MCV-Series Base
Part Number
Full-scale Range (200:1 turndown)
Mono. Display (-D)
MCV-10SCCM0.05-10.0 sccm1/4" VCR(M)$1,850.00
MCV-20SCCM0.10-20.0 sccm1/4" VCR(M)$1,850.00
MCV-50SCCM0.25-50.0 sccm1/4" VCR(M)$1,850.00
MCV-100SCCM0.5-100.0 sccm1/4" VCR(M)$1,600.00
MCV-200SCCM1.0-200.0 sccm1/4" VCR(M)$1,600.00
MCV-500SCCM2.5-500.0 sccm1/4" VCR(M)$1,600.00
MCV-1SLPM0.005-1.0 slpm1/4" VCR(M)$1,600.00
MCV-2SLPM0.010-2.0 slpm1/4" VCR(M)$1,600.00
MCV-5SLPM0.025-5.0 slpm1/4" VCR(M)$1,600.00
MCV-10SLPM0.05-10.0 slpm1/4" VCR(M)$1,600.00
MCV-20SLPM0.10-20.0 slpm1/4" VCR(M)$1,850.00