Alicat offers in-line sintered filters for use with our mass flow meters and mass flow controllers to prevent large particulates from entering the measurement head of the instrument. Maximum particulate sizes are as follows:

  • Max particulate size of 5 microns for units with full-scale flow ranges of 0-1 sccm or less.
  • Max particulate size of 20 microns for units with full-scale flow ranges between 0-2 sccm and 0-1 slpm.
  • Max particulate size of 50 microns for units with full-scale flow ranges of 0-1 slpm or more.

#10-32 UNF In-Line Filters

Part Numbers: 510053, 510054

Our #10-32 UNF in-line filters are designed to work with our micro-flow mass flow meters and controllers with full-scale ranges of 0-50 sccm or less (0-20 sccm or less for Whisper units). They screw directly into the mass flow meter or controller’s #10-32 UNF-threaded inlet process connection. The filter elements are not removable and are available in the following sizes:

  • Part 510053: 5 micron, recommended for our 0-0.5 sccm and 0-1 sccm mass flow meters and controllers
  • Part 510054: 20 micron, recommended for our 0-2 sccm through 0-50 sccm mass flow meters and controllers

*Note: If you are using our #10-32 UNF to 1/8″ NPT adapter with your micro-flow mass flow instrument, use a #10-32 UNF in-line filter between the flow body and the adapter instead of a 1/8″ NPT in-line filter before the adapter.

10-32 in-line filters

#10-32 UNF in-line filters
$10.00 (US)

 

ILF Series In-Line Filters

Part Numbers: ILF-1/8-20, ILF-1/4-40, ILF-1/2-40, ILF-3/4-40

Our ILF Series of in-line filters for mass flow meters and controllers feature user-accessible filter elements that may be purchased separately for replacement. They are available in NPT sizes from 1/8″ to 3/4″ to accommodate our mass flow instruments with full-scale ranges of 0-100 sccm or greater (0-50 sccm or greater for Whisper units). They screw directly into the mass flow meter or controller’s NPT-threaded inlet process connection.

The filters are available in the following sizes:

  • Part ILF-1/8-20: 1/8″ NPT, 20 micron, fits our 0-100 sccm through 0-20 slpm mass flow meters and controllers
  • Part ILF-1/4-40: 1/4″ NPT, 40 micron, fits our 0-50 slpm through 0-100 slpm mass flow meters and controllers
  • Part  ILF-1/2-40: 1/2″ NPT, 40 micron, fits our 0-250 slpm mass flow meters and controllers
  • Part ILF-3/4-40: 3/4″ NPT, 40 micron, fits our 0-500 slpm through 0-2000 slpm mass flow meters and controllers
ILF-1/4-20 1/4" NPT in-line filter

ILF-1/4-20 1/4″ NPT in-line filter
$40.00 (US)

ILF-1/8-20 1/8" NPT in-line filter

ILF-1/8-20 1/8″ NPT in-line filter
$40.00 (US)

ILF-3/4-40 3/4" NPT in-line filter

ILF-3/4-40 3/4″ NPT in-line filter
$60.00 (US)

ILF-1/2-40 1/2" NPT in-line filter

ILF-1/2-40 1/2″ NPT in-line filter
$60.00 (US)

 

ILF Series In-Line Filter Elements

Part Numbers: ILFE20, ILFE40, ILFE40L

Our ILF Series of in-line filter elements replace the sintered filter elements that come with the ILF Series filters. Each filter element replacement includes fresh O-rings as well as the filter element itself. Filter elements are available in the following sizes:

  • Part ILFE20: 20 micron, fits 1/8″ NPT 20-micron filters (Part ILF-1/8-20)
  • Part ILFE40: 40 micron, fits 1/4″ NPT 40-micron filters (Part ILF-1/4-40)
  • Part ILFE40L: 40 micron, fits 1/2″ and 3/4″ NPT 40-micron filters (Parts ILF-1/2-40 and ILF-3/4-40)
ILFE20 and ILFE40 in-line filter elements

ILFE40 in-line filter element
$8.00 (US)

ILFE20 and ILFE40 in-line filter elements

ILFE20 in-line filter element
$9.00 (US)

ILFE40L in-line filter element

ILFE40L in-line filter element
$14.00 (US)