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MCV–Series: Vacuum Gas Mass Flow Controllers

MCV-Series Vacuum Gas Mass Flow Controllers are equipped with a pneumatic shutoff valve, and can be used to control mass flow or pressure of 98+ gases in vacuum applications.
  • Pneumatic shutoff valve. Equipped with a pneumatically actuated, positive shutoff valve to ensure no leak through.
  • Versatile & accurate. Real-time control with NIST-traceable accuracy to ±0.5% of reading or ±0.1% of full scale for 98+ gases and 20 custom-defined gas mixtures.
  • Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, PROFIBUS, PROFINET, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

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Device specs and customization options

Quick Specs
MCV-Series performance (most products)
  • Available full scale ranges: 0.5 SCCM to 20 SLPM
  • Steady state control range: 0.01% – 100% of full scale
  • Standard accuracy calibration, NIST–traceable: ±0.6% of reading or ±0.1% of full scale, whichever is greater
  • Optional high-accuracy calibration, NIST–traceable: ±0.5% of reading or ±0.1% of full scale, whichever is greater
  • Repeatability: ±(0.1% of reading + 0.02% of full scale)
  • Typical control response time: as fast as 30 ms
  • Pneumatic valve leak integrity: 1 x 10-9 atm-cc/sec helium max
  • Warm-up time: <1 s
MCE/MCV-Series operating conditions
  • Compatible gases: 98+ preloaded selectable gas calibrations
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 175 PSIA
  • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
Device Ranges & Full Specs

Devices are custom ranged from 0.5 SCCM full scale to 20 SLPM full scale with controllable ranges of 0.01% to 100% of full scale.

For a comprehensive device guide, read the mass flow controller operating manual.

Device Features
Included with each device
  • Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature.
  • User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units.
  • Gas selectability: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list.
  • Gas Select COMPOSER™: Define 20 custom gas mixtures of up to 5 constituent gases using our Gas Select Composer firmware.
  • Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad.
  • User adjustable setpoint ramping & limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes.
  • User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration.
  • Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed.
Request at time of purchase | Free
  • Optional integrated totalizers & batch control: Totalize mass flow every 1 ms for precise tracking of total flow over time and use batch control to dispense precise volumes.
Request at time of purchase | Additional cost
  • Optional integrated potentiometer control: Use the integrated potentiometer to adjust setpoints with the simple turn of a knob.
Device Customization Options
Build and performance options
  • Communication protocols: Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, Modbus RTU or TCP/IP, PROFIBUS, PROFINET
  • Displays: Backlit monochrome or color; integrated or panel–mount
  • Process connections: Compression, VCR, or VCO fittings
  • Wetted materials: 302, 303, 304, 316L, and 430FR stainless steel; FKM, alumina ceramic, brass, glass, gold, heat-cured epoxy, heat-cured silicone rubber, polyamide, silicon
  • Calibration: High-accuracy; custom calibration points
Valve options & PID tuning

Your mass flow controller may be customized with one of the following valving options to ensure optimal performance under your expected process conditions.

  • MCV: small proportional control valve mounted internally, plus an externally-mounted pneumatic shut-off valve located downstream

Custom PID valve tuning ensures maximum performance for your specific process conditions.

Optional Accessories
Accessories | Sold separately
  • Process port fittings and filters
  • Power supplies
  • Communications cables and conversion cables
  • BB3 and BB9 multi-drop breakout boxes

Not exactly what you’re looking for?

  • Explore other gas mass flow controller options, including anti-corrosive vacuum devices.
  • Check out our other flow or pressure control and measurement solutions.
  • Our expert team of applications engineers is available to provide additional information, discuss your application, or answer any questions you may have.

Contact an applications engineer

Questions about this product?

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